EP2758752A1 - Appareil de mesure - Google Patents

Appareil de mesure

Info

Publication number
EP2758752A1
EP2758752A1 EP12756140.5A EP12756140A EP2758752A1 EP 2758752 A1 EP2758752 A1 EP 2758752A1 EP 12756140 A EP12756140 A EP 12756140A EP 2758752 A1 EP2758752 A1 EP 2758752A1
Authority
EP
European Patent Office
Prior art keywords
coating
component
measuring device
sealing means
facing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12756140.5A
Other languages
German (de)
English (en)
Inventor
Sergej Lopatin
Ralf Leisinger
Ralf Reimelt
Peter KLÖFER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of EP2758752A1 publication Critical patent/EP2758752A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/245—Housings for sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/24—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of resistance of resistors due to contact with conductor fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/26—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of capacity or inductance of capacitors or inductors arising from the presence of liquid or fluent solid material in the electric or electromagnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/284—Electromagnetic waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24174—Structurally defined web or sheet [e.g., overall dimension, etc.] including sheet or component perpendicular to plane of web or sheet

Definitions

  • the present invention relates to a measuring device whose process-oriented
  • Measuring device is, for example, a pressure sensor, a capacitive or conductive level gauge, a microwave barrier for detecting a limit level or a radar level gauge.
  • a large variety of measuring instruments is available for determining different process variables. Often, gauges are subjected to harsh conditions during use, such as large temperature fluctuations or aggressive media. At the same time, high demands are frequently placed on the reliability of measured value determination, material resistance and hygiene.
  • Various measuring devices are made up of a large number of different components. Also, the portion of the measuring device, which may be in contact with the process medium, may be composed of several components. For example, a measuring device for capacitive level measurement has a probe which can be introduced into a container with a sensor
  • metallic housing at least one electrode, and at least one insulation for galvanic separation of electrode and housing.
  • insulation material various materials are used, such as plastic, glass or ceramic.
  • a disadvantage of plastic insulation is the plastic deformation of plastic at high temperatures and the large difference in thermal expansion coefficients of the metal and plastic. This can cause gaps between metal parts and plastic parts into which process medium can penetrate and lead to corrosion. In the case of a measuring device introduced into a container, this leakage can cause a leakage, since the process medium can escape through the measuring device into the environment outside the container. In addition, there is the possibility that bacteria settle in the gap, which is especially at
  • the object of the invention is to specify a corrosion-resistant connection between a part consisting of an electrically conductive material and one of an electrically insulating part of a measuring device.
  • the problem is solved by a measuring device with at least one
  • the coating comprises a transition metal, in particular tantalum, gold, platinum, zirconium, titanium, as well as compounds of the transition metals, in particular oxides, nitrides, fluorides.
  • the coating covers the critical points of the connection between conductive component and sealant, as well as insulating component and sealant.
  • the sealant itself is also coated so that the process fluid does not come into contact with the sealant. Due to the coating, the sealant itself is also coated so that the process fluid does not come into contact with the sealant. Due to the coating, the sealant is also coated so that the process fluid does not come into contact with the sealant. Due to the coating, the sealant is also coated so that the process fluid does not come into contact with the sealant. Due to the coating, the sealant is also coated so that the process fluid does not come into contact with the sealant. Due to the coating, the
  • Process medium does not penetrate into the joint between the conductive and insulating component. For example, an accumulation of moisture or an ingress of air is avoided.
  • Tantalum e.g. has a particularly high resistance to corrosion.
  • tantalum is well reducible on a hot surface and therefore suitable for coating.
  • the coating comprises an element of
  • Carbon group in particular carbon, silicon, diamond-like carbon (DLC), as well as compounds of the carbon group, in particular silicon carbide SiC.
  • An advantage of SiC is its polymorphism, in particular its tetrahedral structure. Furthermore, SiC is oxidation resistant by forming a passive layer of SiO 2 SiO 2 and exhibits relatively high hardness and good adhesion. Because SiC is structurally and crystallographically similar to diamond, it is well combinable with diamond and diamond-like carbon compounds for coating.
  • the coating may be polycrystalline, amorphous, semi-crystalline, or textured.
  • the electrically conductive component is made of a metal, a metal alloy or a conductive ceramic.
  • the electrically conductive component made of stainless steel, titanium, Invar or Kovar.
  • the electrically conductive component of the measuring device is, for example, an electrode or a housing.
  • the insulating component consists of a ceramic material.
  • the ceramic material is a
  • the component made of the insulating material is, for example, an insulation for the galvanic separation of two conductive components, e.g. two electrodes. However, it can also be a component with a measuring function, for example a diaphragm of a pressure sensor.
  • the sealant is a solder or a glass.
  • the invention is further achieved by a method for producing a corrosion-resistant process-facing surface of a measuring device, wherein at least one joint between a component consisting of an electrically conductive material and a component consisting of an electrically insulating material is sealed with a sealant, and wherein the process-facing surface is provided with a coating such that at least the sealant, a transition region between the conductive member and the sealant and a transition region between the insulating member and the sealant are covered by the coating.
  • the method according to the invention not only enables the production of a corrosion-resistant connection between two components separated by a sealed joint, but also the production of a vacuum-tight connection of the same.
  • the process-facing not only enables the production of a corrosion-resistant connection between two components separated by a sealed joint, but also the production of a vacuum-tight connection of the same.
  • the insulating component is therefore completely or partially not coated with the coating.
  • About the coating conductive interconnected and separated by the insulating component of an electrically conductive material components are separated by the partial removal of the coating galvanic.
  • the coating is removed in sections by removing material from the coated insulating component.
  • the insulating component is already produced with Kocherhöhungen, which are then removed after the coating, including the coating. For example, sacrificial heights are abraded or removed by another mechanical method.
  • the coating is removed in sections by etching. In this embodiment, no material is removed from the insulating component, but only the coating selectively removed.
  • only the process-facing surface of the sealant, the transition region between the conductive component and the sealant and the transition region between the insulating component and the sealant are selectively coated.
  • the selective coating is carried out by applying a mask to the process-facing surface and thus only coating the mask
  • the coating comprises a transition metal, in particular tantalum, gold, platinum, zirconium, titanium, as well as
  • the coating with tantalum is preferably carried out by depositing tantalum from a gas phase by a thermal decomposition of tantalum halides.
  • the coating comprises an element of
  • Carbon group in particular carbon, silicon, diamond-like carbon, DLC and compounds of the carbon group, in particular silicon carbide SiC.
  • SiC coatings increase chemical resistance and impact strength and are also hydrophobic, making them useful as a non-stick coating and having low surface energy.
  • SiC and DLC can be combined in a single layer, whereby the physical
  • An advantage of carbon and carbon compounds is the maximum hardness and the maximum wear resistance and the low coefficient of friction.
  • the coating is polycrystalline, amorphous, semi-crystalline, or textured.
  • the coating is produced by the CVD (chemical vapor deposition) and / or PVD (physical vapor deposition) method.
  • FIG. 1 shows a probe of a capacitive / conductive level measuring device.
  • FIG. 2 is a sectional view of the part of a probe close to the process of FIG. 1;
  • FIG. Fig. 3 shows the sectional view of the process-related part of the probe of FIG. 1 with
  • FIG. 4 shows a detail from the sectional view with the surface coated in sections
  • 6 shows a radar measuring device for filling level measurement
  • 7 shows a measuring device with a guided radar.
  • a longitudinal and a cross section through a probe 10 for capacitive or conductive level measurement are shown schematically.
  • a probe 10 is front flush on the level to be monitored in the wall of the container in which the filling is located, can be introduced.
  • the probe 10 has a coaxial structure consisting of probe electrode 6, insulation 9, guard electrode 7, further insulation 9 and housing 8.
  • the probe electrode 6 for capacitive measurement, the
  • Probe electrode 6 is supplied with an AC electrical signal and the capacitance between the probe electrode 6 and housing 8 or
  • the guard electrode 7 is supplied with the same signal as the probe electrode 6 and serves the more reliable measurement at formation of deposits. However, it is also probes 10 without guard electrode 7, and probes 10 of greater length, which protrude into the container known.
  • each joint 1 1 is a problem, since it depends on the design of the
  • Grouting or sealing can lead to deformation and / or corrosion.
  • the invention solves this problem with a coating 4.
  • Fig. 2 discloses schematically a section through the process-side portion of a probe 10 of FIG. 1 prior to the application of the coating 4 on the
  • the sealing means 3 is a glass seal or an electrically conductive solder.
  • the sealant 3 are the Components 1, 2 connected to each other such that a dense process-facing surface is formed.
  • the cavity formed in the housing 8 is closed by the dense process-facing surface in particular vacuum-tight with respect to the process.
  • the insulating members 2 are made with protrusions facing the process and serving as the sacrificial material 5, i. in a later one
  • FIG. 3 shows the process-facing surface after coating with tantalum. The coating 4 is applied so that they
  • the thickness of the coating 4 is for example between 5 and 100 micrometers, the achievable thickness depending on the method with which the tantalum coating 4 on the
  • process-facing surface is deposited.
  • a thickness of about 40 micrometers has proven to be advantageous.
  • FIG. 4 A section of the structure according to FIG. 3 after a further method step is shown in FIG. 4. After application of the coating 4, this becomes
  • the sacrificial material 5 of the insulating components 2 is removed; for example, by grinding.
  • the deposited on the sacrificial material 5 part of the coating 4 is removed together with the sacrificial material 5, so that the insulating member 2 only in its edge region
  • the edge region forms the transition region to the sealant 3.
  • the process-facing surface of the sealant 3 is further completely coated, so that the sealant 3 does not come into contact with the process medium.
  • the conductive component 1 can remain completely coated; However, the coating 4 can also be partially removed. In the latter case, the coating 4 remains at least in the edge regions, so that the transition region between electrically conductive component 1 and sealing means 3 of the
  • Tantalum coating 4 is covered.
  • a coating pattern as shown in Fig. 4 may be made in an alternative manner.
  • One possibility is to make a matching mask and on the process facing surface
  • the insulating components 2 with removable sacrificial material 5 is then unnecessary.
  • Another possibility, in which likewise no sacrificial material 5 is provided, consists in first fully coating the process-facing surface and then selectively removing the coating 4 in a further step, for example in an etching process.
  • the coating 4 according to the invention is not based on capacitive or conductive
  • Level gauges limited. It is applicable everywhere where a gap 1 1 between an electrically conductive component 1 and an insulating member 2 occurs, which must remain sealed, so that no medium can penetrate into the joint 1 1. Some application examples are shown in FIGS. 4-6.
  • a section of a pressure sensor 20 is sketched.
  • a ceramic capacitive pressure measuring cell 22 is arranged in the metallic housing 23 such that the process pressure can act on the membrane 21 and the pressure measuring cell 22 is vacuum-tightly connected to the housing 23.
  • the connection is made by the solder 24.
  • the coating 4 according to the invention is applied to the process-facing surface of the pressure sensor 20, so that a part of the housing 23 and the
  • Membrane 21 are completely coated and thus the junction between these two parts and the solder 24 are covered by a tantalum layer.
  • the membrane 21 may also be recessed from the coating 4 or the
  • Coating 4 can be removed again in the area of the membrane. However, at least a narrow transition region to the solder 24 is covered by the coating 4.
  • Fig. 6 shows a wheel arm ess réelle 30 for continuous level measurement with waveguide feedthrough. In the partially filled with a dielectric 34th
  • Waveguides 32 are irradiated via the feed element 33 microwaves.
  • the waves are radiated into the container 36, where they meet as incoming wave S on the medium 37, are reflected by this, and are detected as the outgoing wave R from the meter 30.
  • the fill level can be determined from the runtime.
  • a sealed joint for example with a glass seal as sealing means 3. According to the invention, this is coated with a tantalum layer 35.
  • FIG. 7 shows a guided radar measuring device 40 also used for continuous level measurement.
  • the waves are over here
  • Stab probe 41 radiated into the container 36.
  • a coaxial leadthrough 42 for the rod probe 41 In the area of the process connection there is a coaxial leadthrough 42 for the rod probe 41.
  • This has a metallic frame 43, which also serves as a ground potential, and a dielectric 44.
  • the joint between rod probe 41 and dielectric 44, as well as between socket 43 and dielectric 44, is sealed with a sealant 3 and coated according to the invention with tantalum.
  • the sealant around the rod probe 41 around, as well as the coating are not shown for clarity.
  • the coating is applied analogously to the exemplary embodiment illustrated in FIG. 4.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)

Abstract

L'invention concerne un appareil de mesure comportant au moins une face résistante à la corrosion orientée vers le processus, au moins un espace entre un composant (1) réalisé en matériau électroconducteur et un composant (2) réalisé en matériau isolant électrique étant fermé au moyen d'un élément joint (3). La face orientée vers le processus est pourvue d'un revêtement (4) de telle manière qu'au moins l'élément joint (3), une zone de transition entre le composant conducteur (1) et l'élément joint (3) et une zone de transition entre le composant isolant (2) et l'élément joint (3) sont recouverts par le revêtement (4).
EP12756140.5A 2011-09-23 2012-08-23 Appareil de mesure Withdrawn EP2758752A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011083333A DE102011083333A1 (de) 2011-09-23 2011-09-23 Messgerät
PCT/EP2012/066405 WO2013041321A1 (fr) 2011-09-23 2012-08-23 Appareil de mesure

Publications (1)

Publication Number Publication Date
EP2758752A1 true EP2758752A1 (fr) 2014-07-30

Family

ID=46801461

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12756140.5A Withdrawn EP2758752A1 (fr) 2011-09-23 2012-08-23 Appareil de mesure

Country Status (5)

Country Link
US (1) US20140242328A1 (fr)
EP (1) EP2758752A1 (fr)
CN (1) CN103857992A (fr)
DE (1) DE102011083333A1 (fr)
WO (1) WO2013041321A1 (fr)

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GB2537984B (en) * 2013-10-28 2019-02-27 Inficon Gmbh A method for preventing gases and fluids to penetrate a surface of an object
DE102013226775A1 (de) * 2013-12-19 2015-06-25 Vega Grieshaber Kg Messzelle
US9810568B2 (en) 2014-10-13 2017-11-07 Honeywell International Inc. Use of resilient seals for high temperature and/or high pressure sealing in a guided wave radar level measurement device
GB2544751B (en) * 2015-11-24 2017-11-22 Future Tech (Sensors) Ltd Multi-Layer Electrically Conductive Sensors
ES2763821T3 (es) * 2017-10-06 2020-06-01 Grieshaber Vega Kg Dispositivo de medición de nivel de llenado por radar con señal de sincronización en diferentes capas de una placa de circuito impreso
DE102018110189A1 (de) * 2018-04-27 2019-10-31 Endress+Hauser Conducta Gmbh+Co. Kg Sensor der Prozessautomatisierungstechnik und Herstellung desselben
DE102018132285A1 (de) * 2018-12-14 2020-06-18 Endress+Hauser SE+Co. KG Füllstandsmessgerät
DE102019133820A1 (de) * 2019-12-10 2021-06-10 Endress+Hauser SE+Co. KG Druckmesseinrichtung
DE102019133818A1 (de) * 2019-12-10 2021-06-10 Endress+Hauser SE+Co. KG Druckmesseinrichtung

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Also Published As

Publication number Publication date
US20140242328A1 (en) 2014-08-28
WO2013041321A1 (fr) 2013-03-28
DE102011083333A1 (de) 2013-03-28
CN103857992A (zh) 2014-06-11

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