EP2729789A4 - Multi-analyzer angle spectroscopic ellipsometry - Google Patents

Multi-analyzer angle spectroscopic ellipsometry

Info

Publication number
EP2729789A4
EP2729789A4 EP12807285.7A EP12807285A EP2729789A4 EP 2729789 A4 EP2729789 A4 EP 2729789A4 EP 12807285 A EP12807285 A EP 12807285A EP 2729789 A4 EP2729789 A4 EP 2729789A4
Authority
EP
European Patent Office
Prior art keywords
spectroscopic ellipsometry
angle spectroscopic
analyzer angle
analyzer
ellipsometry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12807285.7A
Other languages
German (de)
French (fr)
Other versions
EP2729789A1 (en
Inventor
Hindong Kwak
Ward Dixon
Leonid Poslavsky
Torsten Kaack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Publication of EP2729789A1 publication Critical patent/EP2729789A1/en
Publication of EP2729789A4 publication Critical patent/EP2729789A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
EP12807285.7A 2011-07-07 2012-07-03 Multi-analyzer angle spectroscopic ellipsometry Withdrawn EP2729789A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161505403P 2011-07-07 2011-07-07
US201213536605A 2012-06-28 2012-06-28
PCT/US2012/045436 WO2013006637A1 (en) 2011-07-07 2012-07-03 Multi-analyzer angle spectroscopic ellipsometry

Publications (2)

Publication Number Publication Date
EP2729789A1 EP2729789A1 (en) 2014-05-14
EP2729789A4 true EP2729789A4 (en) 2015-03-18

Family

ID=48802452

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12807285.7A Withdrawn EP2729789A4 (en) 2011-07-07 2012-07-03 Multi-analyzer angle spectroscopic ellipsometry

Country Status (4)

Country Link
EP (1) EP2729789A4 (en)
JP (1) JP2014524028A (en)
TW (1) TWI558975B (en)
WO (1) WO2013006637A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI720166B (en) * 2017-03-27 2021-03-01 聯華電子股份有限公司 Process control method for use in a semiconductor manufacturing apparatus control system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5333052A (en) * 1990-11-27 1994-07-26 Orbotech Ltd. Method and apparatus for automatic optical inspection
US5581350A (en) * 1995-06-06 1996-12-03 Tencor Instruments Method and system for calibrating an ellipsometer
US7075650B1 (en) * 1995-09-20 2006-07-11 J.A. Woollam Co. Inc. Discrete polarization state spectroscopic ellipsometer system and method of use
WO2010049652A9 (en) * 2008-10-29 2010-08-19 Horiba Jobin Yvon Sas Device and method for taking spectroscopic polarimetric measurements in the visible and near-infrared ranges

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3880524A (en) * 1973-06-25 1975-04-29 Ibm Automatic ellipsometer
US4030836A (en) * 1975-10-28 1977-06-21 The United States Of America As Represented By The Secretary Of The Air Force Method for mapping surfaces with respect to ellipsometric parameters
US5706088A (en) * 1996-02-20 1998-01-06 National Science Council Polarizer-sample-analyzer intensity quotient ellipsometry
TWI230784B (en) * 2003-12-25 2005-04-11 Ind Tech Res Inst A metrology-type spectroscopic ellipsometer
US7277172B2 (en) * 2005-06-06 2007-10-02 Kla-Tencor Technologies, Corporation Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals
JP2009103598A (en) * 2007-10-24 2009-05-14 Dainippon Screen Mfg Co Ltd Spectroscopic ellipsometer and polarization analysis method
CN101666626B (en) * 2008-09-03 2012-02-29 睿励科学仪器（上海）有限公司 Method for ellipsometry and device thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5333052A (en) * 1990-11-27 1994-07-26 Orbotech Ltd. Method and apparatus for automatic optical inspection
US5581350A (en) * 1995-06-06 1996-12-03 Tencor Instruments Method and system for calibrating an ellipsometer
US7075650B1 (en) * 1995-09-20 2006-07-11 J.A. Woollam Co. Inc. Discrete polarization state spectroscopic ellipsometer system and method of use
WO2010049652A9 (en) * 2008-10-29 2010-08-19 Horiba Jobin Yvon Sas Device and method for taking spectroscopic polarimetric measurements in the visible and near-infrared ranges

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FERRIEU F: "INFRARED SPECTROSCOPIC ELLIPSOMETRY USING A FOURIER TRANSFORM INFRARED SPECTROMETER:SOME APPLICATIONS IN THIN-FILM CHARACTERIZATION", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 60, no. 10, 1 October 1989 (1989-10-01), pages 3212 - 3216, XP000071708, ISSN: 0034-6748, DOI: 10.1063/1.1140554 *
See also references of WO2013006637A1 *

Also Published As

Publication number Publication date
EP2729789A1 (en) 2014-05-14
TW201314173A (en) 2013-04-01
WO2013006637A1 (en) 2013-01-10
JP2014524028A (en) 2014-09-18
TWI558975B (en) 2016-11-21

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Legal Events

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