1230784 玖、發明說明： 【發明所屬之技術領域】 本發明係關於一種計量型光譜式橢圓偏光儀裝置，尤 》曰一種整合單一波長與光谱式橢圓偏光儀，而具備自我才六 5正能力之計量型光譜式橢圓偏光儀裝置。 x 【先前技術】 工業界對於積體電路技術的需求，是期望以更低廉的 成本’透過更優異的儀器功能來提昇產品之穩定度與品 1〇 % 而此品求必須藉由增加積體電路中的電路密度來達 成，即不斷提高晶片中電晶體的密度。電晶體特徵尺寸快 速的縮小，迫使通道長度與閘極介電質的厚度也隨之快速 下降。目前互補式金氧半導體（complementary Metal-Oxide-Semiconductor，CMOS)之閘極介電質二氧化 15矽的厚度已可縮小到13 A，此時亟待適當的計量方法以描 繪這些薄膜的特性。由於單-波長或光譜式擴圓偏光量; 術（Spectroscopic EllipSometry，SE)藉由非破壞性和高靈 敏度的量測方法，可以很清楚地描繪薄膜的材料特性了而 成為半導體產業用以描繪二氧化矽與氮氧化矽薄膜特性的 20 基礎技術。 ' 然而’目前台灣半導體廠中雖然普遍使用光譜式橢圓 #光儀來量測此些薄膜特性，但其校正所用之標準參照物 件（Standard refercence material) ’ 例如晶圓控片（_tr〇i wafer)之特性卻是以單_波長式擴圓偏光儀咖以 1230784 wavelength ellipsometer，SWE)來決定，以 SWE 決定特性之 標準參照物件來確定SE之狀態是否正常或校正SE，其比 較基礎並不相同，因而使得其結果之不確定性增高，尤其 一般實作上，操作員常誤判橢圓偏光儀為異常，但又找不 出其本身架構上之問題所在。因此，亟需一台具備自我校 正月t*力的光谱式概圓偏光儀裝置。 【發明内容】 本發明之主要目的係在提供一種計量型光譜式橢圓 10偏光儀裝置，俾能在不改變光譜式橢圓偏光儀之架構下， 將單波長與光错式橢圓偏光儀整合為一，以提供可準確 切換單一波長光源與白光源之橢圓偏光儀裝置，使光譜式 擔□偏光儀具備自我才父正能力，並提高光譜式擴圓偏光儀 量測結果之可靠度。 為達成上述目的，本發明一種計量型光譜式1230784 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a metrological spectroscopic ellipsometry device, in particular, an integrated ellipsometry device with a single wavelength and a spectroscopic ellipse, and possesses self-respective ability. Metrological spectroscopic ellipsometry device. x [Previous technology] The industry's demand for integrated circuit technology is to lower the cost and improve product stability and product quality by 10% through better instrument functions. The circuit density in the circuit is achieved, that is, the density of the transistors in the wafer is continuously increased. The rapid reduction of the characteristic size of the transistor forces the channel length and the thickness of the gate dielectric to decrease rapidly. At present, the thickness of the gate dielectric 15 silicon dioxide of a complementary metal-oxide semiconductor (CMOS) can be reduced to 13 A. At this time, an appropriate measurement method is urgently needed to describe the characteristics of these films. Due to the single-wavelength or spectrally expanding circularly polarized light quantity, Spectroscopic EllipSometry (SE) can clearly describe the material properties of thin films through non-destructive and high-sensitivity measurement methods, and has become the semiconductor industry's 20 basic technologies for the characteristics of silicon oxide and silicon oxynitride films. 'However, although the spectral ellipse #optometer is commonly used in Taiwan semiconductor factories to measure these thin film characteristics, the standard reference materials used for calibration are' such as wafer control wafers (_tr〇i wafer) The characteristics are determined by a single-wavelength extended circular polarizer (1230784 wavelength ellipsometer, SWE). The standard reference object for determining the characteristics of SWE is used to determine whether the state of the SE is normal or to correct the SE. The comparison basis is not the same. As a result, the uncertainty of the result is increased. Especially in general implementation, the operator often mistakes the ellipsometer as an abnormality, but cannot find the problem of its own architecture. Therefore, a spectrum-type almost circular polarimeter device with self-correcting t * force is urgently needed. [Summary of the invention] The main purpose of the present invention is to provide a metrological spectroscopic elliptical polarizer device, which can integrate a single wavelength and an optically staggered elliptical polarizer into one without changing the structure of the spectroscopic elliptical polarizer. In order to provide an elliptical polarizer device that can accurately switch between a single-wavelength light source and a white light source, the spectroscopic polarizer has the ability of self-reliance, and improves the reliability of the measurement results of the spectroscopic circular polarizer. In order to achieve the above object, the present invention provides a metrological spectroscopic formula
isj TTG 儀震置，係配合一待測物，包括：一基座，用以承載該待 測物；一偏振元件，固設於該基座之一側，用以接收一光 束：並將該光束轉換成一偏振光束；一白光源，位於該偏 振7L件之一側，以提供一可行經該偏振元件，之後再投射 至該待測物表面之白光束；一單波長光源，位於該偏振元 件之—側，以提供一可行經該偏振元件，之後再投射至該 待測物表面之單波長光束；—光路徑切換單元，可選擇性 私入並固疋於s亥白光束至該偏振元件之行進路徑上，戋 移出該白光束至該偏振元件之行進路徑上，以切換進入二 20 1230784 偏振元件之光為該單波長光束或該白光束；以及一分析元 件’固設於該偏振光束經該待測物反射後之行進路徑上， 以接收並分析經該待測物反射後之該偏振光束。 5 10 15 本發明計量型光譜式橢圓偏光儀裝置之光路徑切換單 元可為任何可重覆且準確地固定位置之光路徑切換單元， 以切換兩種光源，較佳為由一底板、至少一固定於該底板 之滑軌、一滑設於該滑執之可移動臺座、一與該可移動臺 座相鄰之底桿、至少一連接該可移動臺座與該底桿之彈 簧、一位於該可移動臺座上之反射鏡片、以及一塞合塊所 構成；更佳地，該塞合塊之材質為不銹鋼，該滑軌為滾珠 滑軌（ball bearing slide);其中當該可移動臺座移離開該底 才干，並將該塞合塊塞入該可移動臺座與該底桿之間時，該 反射鏡片恰可固定於該白光束至該偏振元件之行進路徑 上，以阻斷該白光束進入該偏振元件，並使該單波長光束 進入該偏振元件。本發明計量型光譜式橢圓偏光儀裝置之 單波長光源種類無P艮制，車交佳為雷射光。L月計量型光 譜式橢圓偏光儀裝置較佳更包含一校準鏡片（c〇出 lenS)，位於該單波長光源射出該單波長光束之-側，以校 準該單波長光束之射出方向。本發明計量型光譜式擴圓偏 光儀裝置中，該分析元件較佳為具有—可計算出橢圓參^ 和』之分析軟體；更佳地’該分析軟體係使用迴歸.法 (regression method)進行運算。 【實施方式】 20 1230784 為能讓f審查委員能更瞭解本發明之技術内容，特 舉計量型光譜式橢圓偏光儀裝置較佳具體實施例說明如 下。 凊同時荼照圖1及圖2，圖丨為本發明計量型光譜式擴 5圓偏光儀裝置之概括示意圖，圖2為本發明計量型光譜式擴 圓偏光儀裝置之白光束光路示意圖。本發明之計量型光譜 式橢圓偏光儀裝置係用以量測待測物1〇，其包括承載待測 物10之基座20、彳父正光路之偏振臂（p〇ladzer arm)3〇、白光 源、單波長光源、位於白光源與待測物1〇間之光路上之偏 10振元件木5又於偏振臂（polarizer arm)30之光路徑切換單元 60以及为析元件。請芩見圖2，一般之光譜式橢圓偏光儀裝 置係使白光源發射出之白光束4〇行經偏振臂3〇，再經偏振 元件偏振之後，入射至待測物丨〇，並經待測物丨〇反射至分 析元件進行分析。而本發明之計量型光譜式橢圓偏光儀裝 15置為在不改變上述以白光源量測待測物之架構下，將具有 偏振臂30可負荷重量之光路徑切換單元60架設於偏振臂30 之上。光路徑切換單元6〇之細部立體圖請參見圖3，其包含 底板61、二固定於底板6丨之滾珠滑執62、滑設於滾珠滑軌 62之可移動臺座63、與可移動臺座63相鄰之底桿64、二連 20接可移動堂座63與底板61之彈簧68(請見圖4)、位於可移動 玄座63上之反射鏡片65、一不銹鋼塞合塊66(請見圖4)以及 可推動可移動臺座63之把手67。當可移動臺座63與底桿64 接觸時’如圖3所示，反射鏡片65位於白光束40至偏振元件 之行進路徑外，因此白光束40可順利通過偏振臂30,並行 1230784 進至待測物10，如圖2所示。當欲以單波長光束進行量測 日·^ ’只要藉由把手6 7將可移動臺座6 3往上推，使其與底桿 64刀開，並將基合塊66基入可移動臺座μ與底桿64之間， 如圖4所示，反射鏡片65便可恰好位於白光束4〇至偏振元件 5之行進路徑上，如圖5所示，而阻斷白光束40進入偏振元 件同日守使單波長光束50先經校準鏡片（c〇llimati〇n 1 校準，再經反射鏡片52改變光路徑而行至反射鏡片65，之 後經由反射鏡片65反射之後，單波長光束5〇便行經偏振元 件而到達待測物1〇，再經待測物1〇反射後，由分析元件接 10收其光束，並以迴歸法（regression method)運算之分析方法 計算出橢圓參量#和』，如此一來，便可成功地於原本光譜 式橢圓偏光儀之架構下，以單一波長光源進行自我校正量 測。 本發明之計量型光譜式橢圓偏光儀裝置可在不改變 15光譜式橢圓偏光儀之原有架構下，將單一波長與光譜式橢 圓偏光儀整合為一，其光路徑切換單元之設計使得反射鏡 片65可重覆地且精準地位於白光束之光路徑上，因而可準 確地切換光源，並於相同之硬體架構下使用單一波長光束 或白光束進行量測，並經由此二種不同光源之量測結果所 20作比較’而進一步確定光譜式橢圓偏光儀裝置之狀態是否 有異常’或是此二量測結果係存在一固定的誤差，此判斷 對於現今奈米級元件尺寸之量測結果影響尤其重大，可大 為提南光譜式橢圓偏光儀量測結果之可靠度。 1230784 上述實施例僅係為了方便說明而舉例而已，本發明所 主張之權利範圍自應以申請專利範圍所述為準，而^ 於上述實施例。 5【圖式簡單說明】 圖1係本發明-較佳實施例之計量型光譜式擴圓偏光儀裝 置概括示意圖。 圖2係本發明-較佳實施例之計量型光谱式擴圓偏光儀裝 置之白光束光路示意圖。 10圖3係纟發明一較佳實施例之光路徑切換單元細部立體圖。 圖4係本發明一較佳實施例之光路徑切換單元細部立體圖。 圖5係本發明-較佳實施例之計量型光譜式糖圓偏光儀裝 置之單一波長光束光路示意圖。 15 【圖號說明】 10 待測物 20 基座 30 偏振臂 40 白光束 50 單波長光束 51 校準鏡片 52 反射鏡片 60 光路徑切換單元 61 底板 62 滾珠滑軌 63 可移動臺座 64 底桿 65 68 反射鏡片 彈簣 66 塞合塊 67 把手The isj TTG instrument is equipped with a test object, including: a base for carrying the test object; a polarizing element fixed on one side of the base for receiving a light beam: and The light beam is converted into a polarized light beam; a white light source is located on one side of the polarized 7L member to provide a white light beam that can pass through the polarization element and then be projected onto the surface of the object to be measured; a single-wavelength light source located on the polarization element -Side to provide a single-wavelength beam that can pass through the polarizing element and then be projected onto the surface of the object under test;-a light path switching unit that can selectively enter and fix the white beam to the polarizing element On the path of travel, move the white beam to the path of the polarizing element to switch the light entering the 20 20 1230784 polarization element to the single-wavelength beam or the white beam; and an analysis element 'fixed to the polarized beam On the travel path after being reflected by the test object to receive and analyze the polarized light beam after being reflected by the test object. 5 10 15 The light path switching unit of the metrological spectroscopic ellipsometry device of the present invention may be any light path switching unit that can repeatedly and accurately fix the position to switch two light sources, preferably by a base plate, at least one A slide rail fixed to the bottom plate, a movable base slidably disposed on the slider, a bottom pole adjacent to the movable base, at least one spring connecting the movable base and the bottom pole, a The reflecting lens on the movable base is composed of a plug block; more preferably, the plug block is made of stainless steel, and the slide rail is a ball bearing slide; When the pedestal is moved away from the bottom and the plug and block is inserted between the movable pedestal and the bottom pole, the reflective lens can be fixed on the path of travel of the white beam to the polarizing element to prevent Break the white light beam into the polarizing element, and let the single-wavelength light beam enter the polarizing element. The type of the single-wavelength light source of the metering type spectroscopic ellipsometry device of the present invention is not made by Pgen, and the vehicle is preferably laser light. The L-month metering spectroscopic ellipsometry device preferably further includes a calibration lens (c0 out lenS), which is located on the-side of the single-wavelength light source from which the single-wavelength light beam is emitted, so as to calibrate the emission direction of the single-wavelength light beam. In the measurement-type spectroscopic expanding circular polarimeter device of the present invention, the analysis element preferably has analysis software capable of calculating elliptic parameters ^ and ′; more preferably, the analysis soft system is performed using a regression method. Operation. [Embodiment] 20 1230784 In order to enable the f review committee to better understand the technical content of the present invention, a preferred specific embodiment of a metrological spectroscopic ellipsometry device is described below. Fig. 1 and Fig. 2 are shown at the same time, and Fig. 丨 is a schematic diagram of the metrological spectroscopic circular polarizer device of the present invention, and Fig. 2 is a schematic diagram of the white beam optical path of the metrological spectroscopic circular polarizer device of the present invention. The metrological spectroscopic ellipsometry device of the present invention is used to measure the object to be measured 10, which includes a base 20 carrying the object to be measured 10, and a polarizing arm (polazer arm) 30 of the uncle's positive optical path. A white light source, a single-wavelength light source, a polarizing element 10 located on the optical path between the white light source and the object to be measured 10 is connected to a light path switching unit 60 of a polarizer arm 30 and an analysis element. Please see Figure 2. The general spectroscopic ellipsometry device makes white light beams emitted by a white light source pass through 40 polarizing arms 30, and then polarized by a polarizing element, and then incident on the object to be measured. The object is reflected to the analysis element for analysis. The measurement-type spectroscopic ellipsometry device 15 of the present invention is configured to mount a light path switching unit 60 having a loadable polarizing arm 30 on the polarizing arm 30 without changing the above-mentioned structure for measuring a test object with a white light source Above. For a detailed perspective view of the light path switching unit 60, please refer to FIG. 3, which includes a bottom plate 61, two ball sliders 62 fixed to the bottom plate 6 丨, a movable stand 63 slidably disposed on the ball slide 62, and a movable stand 63 Adjacent bottom bar 64, two connected 20 to the movable temple 63 and the bottom plate 61 spring 68 (see Figure 4), a reflective lens 65 on the movable base 63, a stainless steel plug 66 (please See FIG. 4) and a handle 67 that can push the movable base 63. When the movable pedestal 63 is in contact with the bottom bar 64 ', as shown in FIG. 3, the reflecting lens 65 is located outside the path from the white beam 40 to the polarizing element, so the white beam 40 can pass the polarization arm 30 and enter 1230784 in parallel. The test object 10 is shown in FIG. 2. When you want to measure the day with a single-wavelength beam, ^ 'Just push the movable pedestal 6 3 upwards with the handle 6 7 to make it open with the bottom bar 64, and put the base 66 into the movable table Between the base μ and the bottom bar 64, as shown in FIG. 4, the reflecting lens 65 can be located on the path from the white light beam 40 to the polarization element 5, as shown in FIG. 5, and the white light beam 40 is blocked from entering the polarization element. On the same day, the single-wavelength light beam 50 was first calibrated by a calibration lens (c〇llimati〇n 1), and then the light path was changed to the reflection lens 65 by the reflection lens 52. After being reflected by the reflection lens 65, the single-wavelength light beam 50 was passed. The polarizing element reaches the object under test 10, and after it is reflected by the object under test 10, the analysis element receives 10 beams, and calculates the elliptic parameters # 和 ′ using the regression method analysis method. In this way, it can successfully perform self-calibration measurement with a single wavelength light source under the framework of the original spectral ellipsometry. The metrological spectroscopic ellipsometry device of the present invention can change the 15-spectrum ellipsometry without changing Under the original architecture, a single wave The long and spectral ellipsometry are integrated into one. The design of the light path switching unit allows the reflective lens 65 to be positioned repeatedly and accurately on the light path of the white beam, so that the light source can be accurately switched and the same hardware Under the framework, a single wavelength beam or white beam is used for measurement, and the measurement results of these two different light sources are compared to '20 to further determine whether the state of the spectroscopic ellipsometry device is abnormal 'or these two measurements. The result is a fixed error, and this judgment has a particularly significant impact on the measurement results of nanometer-level element sizes today, which can greatly improve the reliability of the measurement results of the Nanning-type ellipsometry. The description is for example only. The scope of the rights claimed in the present invention shall be based on the scope of the patent application, and ^ in the above embodiment. 5 [Schematic description of the figure] Figure 1 is a measurement type of the present invention-a preferred embodiment Schematic diagram of a spectroscopic circularly polarizing device. Figure 2 is a schematic diagram of the white beam optical path of a metering spectroscopic circularly polarizing device of the present invention-a preferred embodiment. Fig. 10 is a detailed perspective view of a light path switching unit according to a preferred embodiment of the present invention. Fig. 4 is a detailed perspective view of a light path switching unit according to a preferred embodiment of the present invention. Schematic diagram of the single wavelength beam path of the measuring spectrum sugar circle polarimeter device. 15 [Illustration of the drawing number] 10 DUT 20 Base 30 Polarization arm 40 White beam 50 Single wavelength beam 51 Calibration lens 52 Reflective lens 60 Light path switching unit 61 Base plate 62 Ball slide 63 Removable pedestal 64 Bottom pole 65 68 Reflective lens spring 66 Plug block 67 Handle