EP2678120A1 - Equipment and method for depositing a film of ordered particles on a moving substrate - Google Patents
Equipment and method for depositing a film of ordered particles on a moving substrateInfo
- Publication number
- EP2678120A1 EP2678120A1 EP12704426.1A EP12704426A EP2678120A1 EP 2678120 A1 EP2678120 A1 EP 2678120A1 EP 12704426 A EP12704426 A EP 12704426A EP 2678120 A1 EP2678120 A1 EP 2678120A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- particles
- substrate
- transfer zone
- layer
- installation according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C19/00—Apparatus specially adapted for applying particulate materials to surfaces
- B05C19/02—Apparatus specially adapted for applying particulate materials to surfaces using fluidised-bed techniques
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C19/00—Apparatus specially adapted for applying particulate materials to surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
- B05D1/20—Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
- B05D1/20—Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
- B05D1/202—Langmuir Blodgett films (LB films)
- B05D1/204—LB techniques
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2252/00—Sheets
- B05D2252/02—Sheets of indefinite length
Definitions
- the invention relates to the field of installations and methods for depositing a film of ordered particles on a moving substrate.
- the particle size may be between a few nanometers and several hundred micrometers.
- the particles, preferably of spherical shape, may for example be silica particles.
- the invention has many applications, particularly in the field of fuel cells, optics, photonics, polymer coating, chips, MEMs, surface structuring for organic electronics and photovoltaic, etc. STATE OF THE PRIOR ART
- the particles are maintained ordered by the pressure exerted upstream by the moving particles intended to later reach this transfer zone.
- the particle transfer zone is connected upstream to an inclined ramp on which the particles coming from a dispensing device run past, it is these same particles present on the inclined ramp which exert an pressure on the particles contained in the transfer zone, and which therefore make it possible to maintain the order of the particles in this zone, until the deposition on the substrate, by capillarity.
- the kinetic energy required for the ordering of the particles is here brought by the inclined ramp carrying the carrier liquid and the particles.
- Other solutions are nevertheless possible, such as the setting in motion, with the aid of a pump, of the carrier liquid on a horizontal plane, the downstream part of which constitutes the zone of transfer of the particles.
- Another solution is to replace said pump by a blower for applying a flow of air to the surface of the carrier liquid, on which the particles float.
- these clusters of particles eventually meet each other during the initial filling of the transfer zone, when the filling rate thereof becomes high, gaps are formed between these clusters, which makes the film non homogeneous, and therefore unsatisfactory.
- the ordering of the particles within each cluster may be suitable, the clusters together form a set of particles in which there are voids, which does not make it possible to obtain a film having, in every point, a structure called "compact hexagonal" in which each particle is surrounded and contacted by six other particles in contact with each other.
- the particle film located in the transfer zone before the plant is put into operation has quality defects that require it to be removed by deposition on a dedicated substrate. This first results in unnecessary consumption of particles and substrates, impacting production costs. These same costs are also increased because of the complexity of the process, which therefore requires a purge phase to deposit the part of the non-conforming film, then to evacuate. In addition, the risks of dissemination of the particles are amplified, especially when they are small, for example less than 400 nm.
- the object of the invention is therefore to remedy at least partially the disadvantages mentioned above, relating to the embodiments of the prior art.
- the invention firstly relates to an installation for depositing a film of ordered particles on a moving substrate, the installation comprising:
- a transfer zone comprising a particle inlet and a particle outlet spaced from one another by two opposite lateral flanges, retaining a carrier liquid on which the particles float,
- said installation being designed to allow the deposition, on the substrate, of the film of ordered particles escaping from said particle outlet, preferably by means of a capillary bridge which thus ensures the connection between the carrier liquid contained in the transfer zone and said substrate on which the ordered particle film is intended to be deposited.
- the installation further comprises a plurality of suction nozzles capable of attracting the particles present in the transfer zone towards its two lateral flanges.
- the invention therefore provides suction nozzles for stretching the film of particles over the entire width of the transfer zone, in order to avoid the formation of a set of particles in which there are voids, like this. was the case in the prior art.
- these nozzles allow a satisfactory ordering of the particles in the transfer zone, during the priming phase consisting of its initial filling. Then, in normal mode, these nozzles can be inactivated, the particle ordering then being performed automatically.
- the invention is remarkable in that it makes it possible, in a simple and effective manner, to avoid the formation of clusters first isolated and then grouped together in an unsatisfactory way, as was the case in the prior art.
- the suction nozzles are indeed a simple way to stretch the film laterally, towards each of the two flanges, and ensure that the film produced has, in every point, a so-called "compact hexagonal" structure, in which each particle is surrounded and contacted by six other particles in contact with each other.
- the installation comprises only two suction nozzles, respectively capable of attracting the particles present in the transfer zone towards one and the other of the two lateral flanges.
- each flange could be associated with several nozzles, without departing from the scope of the invention.
- the installation comprises an inclined ramp of particle circulation, attached to said inlet of the transfer zone, and on which said carrier liquid is also intended to circulate.
- the kinetic energy necessary for the ordering of the particles in the normal regime is here brought by the inclined ramp carrying the carrier liquid and particles.
- Other solutions are nevertheless possible, such as the setting in motion, with the aid of a pump, of the carrier liquid on a horizontal plane, the downstream part of which constitutes the zone of transfer of the particles.
- Another solution is to replace the pump by a blower for applying a flow of air to the surface of the carrier liquid, on which the particles float.
- the installation comprises means for temporary retention of the particles in the transfer zone at a distance from said substrate, these retention means being able to be displaced towards this substrate while retaining said particles.
- This displacement can be envisaged manually or automatically.
- these temporary retention means are provided to be moved towards the exit of the transfer zone and the substrate, to allow the deposition of the particle film on the latter.
- the retention means are also provided for depositing on the substrate upstream of the particle film.
- said means for temporary retention of the particles takes the form of a layer of hydrophobic material, floating on the surface of the carrier liquid.
- This solution proves to be simple and effective for blocking particles that can not pass over the layer because of the hydrophobic nature which prevents wetting of the upper surface of the layer, or to pass between the layer and the carrier liquid. Thanks to the small thickness of the dam which allows to deform easily to adapt to variations in shape of the surface of the carrier liquid.
- this layer has a thickness preferably between a few microns and several tens of microns for example between 50 and 100 ⁇ .
- PTFE polytetrafluoroethylene
- said temporary retention means take the form of a layer of which one downstream end is also remote from the substrate.
- said temporary retention means take the form of a layer of which a downstream end is located on said substrate.
- the layer can then have, on the carrier liquid, a behavior substantially identical to that of the ordered particle film formed in the transfer zone. This makes it possible to deposit this layer of particle retention on the substrate, also preferably via the capillary bridge, as was mentioned above.
- the invention also relates to a method for depositing a film of ordered particles on a moving substrate, using an installation as described above, according to which during at least part of the step initial filling of the particle transfer zone, said suction nozzles are actuated to attract the particles present in the transfer zone to its two lateral flanges.
- said nozzles are actuated alternately so as to attract the particles present in the transfer zone towards one and the other of the two lateral flanges, alternately. Simultaneous operation is nevertheless possible without departing from the invention.
- the alternating actuation which may incorporate pause periods between nozzle changes, is preferred for its greater simplicity of focus.
- the pause periods allow the particles to continue to accumulate, thus allowing the particles already present to be pressurized.
- the transfer zone which extends progressively continues to be fed continuously by other particles, so that the downstream front is maintained. preferentially at the same location on the installation.
- said temporary retention means take the form of a layer which is deposited progressively on the moving substrate, while the downstream front of the ordered particle film that it holds moves to the output of said transfer area.
- the retention layer is deposited on the substrate in the continuity of the deposition of the film of particles, in the same way as this layer of retention was in the continuity of the particle film in the transfer zone, before their deposition.
- Figure 1 shows a deposition installation according to a preferred embodiment of the present invention, in schematic section taken along the line I-I of Figure 2;
- FIG. 2 represents a schematic view from above of the depot installation shown in FIG. 1;
- Figures 3 to 9 show different stages of a deposition process implemented using the installation shown in the previous figures.
- FIG. 10 represents an alternative for the implementation of the method schematized in FIGS. 3 to 9.
- the installation comprises a device 2 for dispensing particles 4, whose size may be between a few nanometers and several hundreds of micrometers.
- the particles preferably of spherical shape, may for example be silica particles.
- the particles are silica spheres of about 1 ⁇ in diameter, stored in solution in the dispensing device 2.
- the proportion of the medium is about 7 g of particles per 200 ml of solution, here butanol.
- the particles shown in the figures adopt a diameter greater than their actual diameter.
- the dispensing device 2 has a controllable injection nozzle 6, about 500 ⁇ in diameter.
- the installation also comprises a liquid conveyor 10, incorporating an inclined ramp 12 for circulating the particles, and a substantially horizontal transfer zone 14.
- the upper end of the inclined ramp is designed to receive the particles injected from the dispensing device 2.
- This ramp is straight, inclined at an angle of between 5 and 60 °, preferably between 20 and 60 °, allowing the particles to be conveyed to the transfer zone 14.
- a carrier liquid 16 flows on this ramp 12, into the transfer zone.
- This liquid 16 can also be re-circulated using one or two pumps 18, between the transfer zone 14 and the upper end of the ramp.
- This is preferably a deionized water, on which the particles 4 can float.
- the lower end of this same ramp is connected to an inlet of the particle transfer zone 14.
- This inlet 22 is located at an inflection line 24 showing the junction between the surface of the carrier liquid present on the plane inclined of the ramp 12, and the surface of the carrier liquid present on the horizontal part of the transfer zone 14.
- the particle inlet 22 is spaced apart from a particle outlet 26 by means of two lateral flanges 28 holding the carrier liquid 16 in the zone 14. These flanges 28, opposite and at a distance from one another , extend parallel to a main flow direction of the carrier liquid and particles in the installation, this direction being shown schematically by the arrow 30 in Figures 1 and 2.
- the zone 14 therefore takes the form of a corridor or an open path to its entrance and exit.
- the transfer zone 14 is equipped with two suction nozzles 32a, 32b, capable of sucking the particles towards the two flanges 28, as will be described hereinafter. More precisely, at each rim 28 is associated a suction nozzle whose axes 34a, 34b are oriented orthogonally to the direction 30.
- the nozzles 32a, 32b can be fixed directly on the flanges 28, or on another part of the installation 1.
- the suction axes 34a, 34b are parallel to the inflection line 24, and at a short distance from that in a top view such as that shown in FIG. 2, this distance being for example between 0 mm (on the inflection line). 24) and 10 mm.
- the suction axes are preferably positioned at the air / liquid carrier interface.
- Each nozzle has an inner diameter of the order of 3 to 5 mm.
- the installation 1 is also provided with a substrate conveyor 36, for putting the substrate 38 in motion.
- This substrate can be rigid or flexible. In the latter case, it can be set in motion on a roll 40 whose axis is parallel to the outlet 26 of the zone 14, near which it is located. Indeed, the substrate 38 is intended to scroll very closely to the outlet 26, so that the particles escaping from this outlet can be easily deposited on the substrate, via a capillary bridge 42 connecting it to the carrier liquid 16. Alternatively the substrate may be in direct contact with the transfer zone without departing from the scope of the invention. The capillary bridge mentioned above is then no longer required.
- the width of the substrate corresponds to the width of the zone 14 and its outlet 26.
- the capillary bridge 42 is provided between the carrier liquid 16 which is located at the outlet 26, and a part of the substrate 38 conforming to the guide / driving roller 40.
- the axis of rotation of the latter roller may lie in the plane of the upper surface of the carrier liquid retained in the zone 14.
- the substrate 38 may be in scrolling in the vertical direction, orthogonal to direction 30.
- These means preferably take the form of a layer 50 of polytetrafluoroethylene (PTFE), with a thickness of between 50 and 100 ⁇ , floating on the surface of the carrier liquid 16.
- PTFE polytetrafluoroethylene
- the layer 50 extends between the two flanges 28, so that no particle can pass to the interfaces. Its downstream end is located at a distance from the substrate 38 and the outlet 26, upstream. Likewise, as mentioned above, its upstream end is at a distance "1" from the inlet 22 and the inflection line 24.
- the injection nozzle 6 is activated to begin dispensing the particles 4 on the ramp 12. This involves implementing an initial step of filling the transfer zone 14, by the particles 4, upstream of the layer 50.
- the particles dispensed by the device 5 circulate on the ramp 12, then enter the zone 14 in which they disperse, until being retained by the layer 50, as shown schematically in FIGS. 5 and 5a.
- the nozzles 32a and 32b are activated so as to stretch the particle film orthogonally to the direction in which they flow.
- FIG. 6a shows that at the beginning of suction, convection currents are established towards the associated rim 28.
- FIG. 6a ' shows that the film is pulled towards the suction nozzle 32b, and stretches laterally, with the particles moving along the layer 50. Therefore, they organize themselves by causing the decrease of the gaps, and causing the beginning of the ordering in the vicinity of the layer 50, as shown in Figure 6a ''.
- a flow rate of the order of 65 ml / min can be applied.
- the nozzle 32b is then deactivated, during a stopping time during which the particles 4 can reorder, as shown in Figure 6b, thanks in particular to the pressure exerted by the particles arriving in the transfer zone.
- FIG. 6c shows that at the beginning of the suction, convection currents are established in the direction of the other flange 28. Then, FIG. 6c 'shows that the film is pulled towards the suction nozzle 32a, and stretches laterally, with the particles moving along the layer 50. As a result, the particles continue to organize themselves further leading to the decrease of the gaps, and causing further sequencing of the film. A flow rate of the order of 65 ml / min can also be applied.
- the nozzle 32a is then deactivated, during a stopping time during which the particles 4 can reorder again, as shown in FIG. 6d, thanks in particular to the pressure exerted by the particles arriving in the transfer zone.
- the suction alternation described above can be repeated as many times as necessary, each suction time and each stopping time for example about 15 to 30 s.
- the activation of the nozzles is normally stopped after the complete filling of the part of the transfer zone 14 situated upstream of the layer 50.
- the upstream particle front 54 rises on the ramp 12 so that it is situated at a given horizontal distance "d" from the inflection line 24, as shown in FIG. distance "d” may be of the order of 30 mm.
- the particles 4 are perfectly ordered in the transfer zone and on the ramp 12, on which they are automatically ordered, without assistance, thanks to their kinetic energy put to use at the moment of the impact on the front 54.
- the scheduling is of the type shown in FIG. 6d near the layer 50a, namely that the film obtained has, at all points, a so-called "compact hexagonal" structure, in which each particle 4 is surrounded and contacted by six other particles 4 in contact with each other.
- the speed of displacement of the layer 50 on the surface of the carrier liquid 16 is adapted so that the position of the upstream front 54 of particles remains substantially unchanged.
- the means for ensuring this displacement are conventional, even if a manual movement could be envisaged, without departing from the scope of the invention.
- the displacement speed of the layer 50 may be of the order of 1.3 mm / s.
- the substrate 38 is set in motion, then the layer 50 is deposited on the same substrate 38 in the manner of the particle film that follows it, by borrowing the capillary bridge 42. This stage of the process has been shown diagrammatically in FIG.
- the layer 50 initially extends to the substrate 38, so as to overcome the presence of additional means for its movement to the substrate.
- the layer 50 can be driven directly by the substrate in scroll, on which it is initially deposited, preferably manually.
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1151516A FR2971956B1 (en) | 2011-02-24 | 2011-02-24 | INSTALLATION AND METHOD FOR DEPOSITING PARTICLE FILM ORDERED ON A SCROLLING SUBSTRATE |
PCT/EP2012/052842 WO2012113745A1 (en) | 2011-02-24 | 2012-02-20 | Equipment and method for depositing a film of ordered particles on a moving substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2678120A1 true EP2678120A1 (en) | 2014-01-01 |
EP2678120B1 EP2678120B1 (en) | 2015-05-13 |
Family
ID=45614852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20120704426 Not-in-force EP2678120B1 (en) | 2011-02-24 | 2012-02-20 | Equipment and method for depositing a film of ordered particles on a moving substrate |
Country Status (5)
Country | Link |
---|---|
US (1) | US9505021B2 (en) |
EP (1) | EP2678120B1 (en) |
ES (1) | ES2545224T3 (en) |
FR (1) | FR2971956B1 (en) |
WO (1) | WO2012113745A1 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2977810A1 (en) | 2011-07-13 | 2013-01-18 | Commissariat Energie Atomique | INSTALLATION AND METHOD FOR DEPOSITING OR ADJUSTABLE PARTICLE FILM OF ADJUSTABLE WIDTH TO A SCROLLING SUBSTRATE |
FR2985249B1 (en) | 2012-01-02 | 2014-03-07 | Commissariat Energie Atomique | METHOD OF TRANSFERRING OBJECTS TO A SUBSTRATE USING A COMPACT PARTICLE FILM |
FR2986722B1 (en) | 2012-02-10 | 2014-03-28 | Commissariat Energie Atomique | METHOD FOR TRANSFERRING OBJECTS TO A SUBSTRATE USING A COMPACT PARTICLE FILM, WITH A CONNECTER IMPLEMENTATION STEP ON THE OBJECTS |
FR2986720B1 (en) * | 2012-02-10 | 2014-03-28 | Commissariat Energie Atomique | METHOD FOR DEPOSITING PARTICLES ON A SUBSTRATE, COMPRISING A STEP FOR STRUCTURING A PARTICLE FILM ON A LIQUID CONVEYOR |
FR2986721B1 (en) | 2012-02-10 | 2014-06-27 | Commissariat Energie Atomique | METHOD FOR DEPOSITING A PARTICLE FILM ON A SUBSTRATE VIA A LIQUID CONVEYER, COMPRISING A STRUCTURING STEP OF THE FILM ON THE SUBSTRATE |
FR2995228B1 (en) * | 2012-09-10 | 2014-09-05 | Commissariat Energie Atomique | METHOD FOR FORMING A PARTICLE FILM ON A CARRIER LIQUID, WITH DISPLACEMENT OF AN INCLINED PARTICLE COMPRESSION RAMP |
FR3002800A1 (en) | 2013-03-01 | 2014-09-05 | Commissariat Energie Atomique | METHOD AND APPARATUS FOR CHARACTERIZING A DIFFERENT SURFACE. |
FR3004259B1 (en) | 2013-04-05 | 2015-05-15 | Commissariat Energie Atomique | OPTICAL METHOD FOR CHARACTERIZING A DIFFRACTIVE SURFACE AND APPARATUS FOR IMPLEMENTING SUCH A METHOD |
FR3005432B1 (en) | 2013-05-13 | 2015-06-05 | Commissariat Energie Atomique | METHOD FOR DEPOSITING A COMPACT PARTICLE FILM ON THE INNER SURFACE OF A WORKPIECE HAVING A HOLLOW DEDICATED BY THIS INTERNAL SURFACE |
FR3006111B1 (en) | 2013-05-24 | 2016-11-25 | Commissariat Energie Atomique | DEVICE FOR CONVERTING THERMAL ENERGY IN ELECTRICAL ENERGY WITH THERMO-SENSITIVE MOLECULES |
FR3011751B1 (en) | 2013-10-11 | 2015-12-25 | Commissariat Energie Atomique | INSTALLATION AND METHOD WITH IMPROVED EFFICIENCY OF FORMING COMPACT PARTICLE FILM AT THE SURFACE OF A CARRIER LIQUID |
FR3011752B1 (en) * | 2013-10-11 | 2015-12-25 | Commissariat Energie Atomique | INSTALLATION AND METHOD WITH IMPROVED EFFICIENCY OF FORMING COMPACT PARTICLE FILM AT THE SURFACE OF A CARRIER LIQUID |
FR3027449B1 (en) | 2014-10-21 | 2017-10-20 | Commissariat Energie Atomique | IMPROVED METHOD OF MAKING INTERCONNECTIONS FOR A 3D INTEGRATED CIRCUIT |
FR3044825B1 (en) | 2015-12-02 | 2018-04-20 | Commissariat Energie Atomique | SUBSTRATE FOR THIN FILM PHOTOVOLTAIC CELL STACK ARRANGEMENT, ASSOCIATED ARRANGEMENT, AND METHOD OF MANUFACTURING THE SAME |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2828386B2 (en) * | 1993-08-31 | 1998-11-25 | 科学技術振興事業団 | Manufacturing method of fine particle thin film |
AU2001282515A1 (en) * | 2000-08-17 | 2002-02-25 | Nano World Projects Corporation | Device for performing workings on monolayers of particles or molecules |
CA2385911A1 (en) * | 2002-05-10 | 2003-11-10 | Nanometrix Inc. | Method and apparatus for two dimensional assembly of particles |
US20050281944A1 (en) * | 2004-06-17 | 2005-12-22 | Jang Bor Z | Fluid-assisted self-assembly of meso-scale particles |
WO2008014604A1 (en) | 2006-08-02 | 2008-02-07 | Nanometrix Inc. | Modular transfer apparatus and process |
FR2911721B1 (en) | 2007-01-19 | 2009-05-01 | St Microelectronics Crolles 2 | MOSFET DEVICE ON SELF |
FR2959564B1 (en) | 2010-04-28 | 2012-06-08 | Commissariat Energie Atomique | DEVICE FORMING A PRESSURE GAUGE FOR THE DIPHASIC FLUID PRESSURE MEASUREMENT, METHOD OF MAKING THE SAME, AND ASSOCIATED FLUID NETWORK |
-
2011
- 2011-02-24 FR FR1151516A patent/FR2971956B1/en not_active Expired - Fee Related
-
2012
- 2012-02-20 ES ES12704426.1T patent/ES2545224T3/en active Active
- 2012-02-20 EP EP20120704426 patent/EP2678120B1/en not_active Not-in-force
- 2012-02-20 US US14/001,088 patent/US9505021B2/en not_active Expired - Fee Related
- 2012-02-20 WO PCT/EP2012/052842 patent/WO2012113745A1/en active Application Filing
Non-Patent Citations (1)
Title |
---|
See references of WO2012113745A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2012113745A1 (en) | 2012-08-30 |
FR2971956B1 (en) | 2013-03-29 |
EP2678120B1 (en) | 2015-05-13 |
US9505021B2 (en) | 2016-11-29 |
FR2971956A1 (en) | 2012-08-31 |
ES2545224T3 (en) | 2015-09-09 |
US20130330471A1 (en) | 2013-12-12 |
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