EP2646770A1 - Dispositif de mesure non incrémentale de position et de forme de solides en mouvement - Google Patents

Dispositif de mesure non incrémentale de position et de forme de solides en mouvement

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Publication number
EP2646770A1
EP2646770A1 EP11810556.8A EP11810556A EP2646770A1 EP 2646770 A1 EP2646770 A1 EP 2646770A1 EP 11810556 A EP11810556 A EP 11810556A EP 2646770 A1 EP2646770 A1 EP 2646770A1
Authority
EP
European Patent Office
Prior art keywords
fiber
lens
grating
elements
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11810556.8A
Other languages
German (de)
English (en)
Inventor
Thorsten Pfister
Lars Buettner
Juergen Czarske
Florian Dreier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universitaet Dresden
Original Assignee
Technische Universitaet Dresden
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Filing date
Publication date
Application filed by Technische Universitaet Dresden filed Critical Technische Universitaet Dresden
Publication of EP2646770A1 publication Critical patent/EP2646770A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver

Definitions

  • the invention relates to a device for non-incremental position and shape measurement of moving solids for process measurement, the device includes a laser Doppier distance sensor in wavelength division multiplexing with at least two different wavelengths ⁇ , ⁇ 2 and with a nodular, fiber optic probe in its sensor structure .
  • the sensor structure of the laser Doppers distance sensor contains two further modules, which are fiber optically connected to the measuring head:
  • the detection unit wherein in the detection unit, the bichromatic scattered light is split into the two wavelengths corresponding to the different wavelengths ⁇ , ⁇ ⁇ 2 and then detected separately by means of two photodetectors and wherein the detection unit is connected to an evaluation unit in which the signal evaluation according to the principle of laser Doppler Distance sensor is designed to determine the position, speed and shape of the solid.
  • the precise, non-contact and absolute position and shape measurement of moving solids is an important problem particularly in the monitoring of turbomachinery. Improving the operational safety, the service life and, in particular, the energy efficiency of engines and turbomachines, such as electric motors, engines, generators or gas and steam turbines, is of great interest from an environmental point of view.
  • the control or knowledge of the rotor dynamics is of crucial importance in order to minimize losses and wear. Due to the extreme environmental conditions (high temperatures, pressure fluctuations, oscillations, electromagnetic fields) and the occurring high speeds up to the supersonic range, however, there are hardly any suitable measurement methods with which dynamic rotor deformations and blade vibrations during operation can be performed precisely and with the necessary high time resolution can be detected metrologically. In addition, the smallest possible miniature sensors are necessary here, which must be both robust and temperature-resistant.
  • Capacitive or inductive sensors are used as standard for gap width and vibration measurements in turbo machines. These are printed in the publications AG Sheard, SG OOonnetl, JF Stringfellow: High Temperature Proximity Measurement in Aero and Industrial Turbomachinery, Journal of Engineering Gas Turbines and Power 121, p 167-173, 1999, T. Fabian, FB Prinz, G. Brasseur: Capacitive sensor for active tip clearance control in a palm-sized gas turbine generator, IEEE Trans. Instrum. Meas. 54, pp. 1133-43, 2005, A. Steiner: Techniques for blade tip measurements with capacitive probes, Meas. Be. Technol. 11, pp. 865-9, 2000; C. Roeseier, A.
  • DMS Strain gauges
  • Optical methods work quickly and without contact and offer, due to the principle of the small laser wavelengths, a high resolution.
  • the measurement rate in most optical distance sensors either by mechanical scanning processes (TD-OCT, autofocus sensor) according to the publications A. Kempe, S. Schlamp, T. Rösgen: Low-coherence interferometric tip-clearance probe, Opt. Lett. 28, pp. 1323-5, 2003 and A. Kempe, S. Schlamp, T. Rösgen, K. Haffner: Spatial and Temporal High-Resolution Optical Tip-Clearance Probe for Harsh Environments, Proc 13th Int. Symp.
  • Tagashira Optical blade-tip clearance sensor for non-metal gas turbine blades, J. Gas Turbine Soc. Japan (GTSJ) 29, pp. 479-84, 2001 and E. Shafir and G. Berkovic: Expanding the realm of fiber optic confocal sensing for probing position, displacement, and velocity, Appl. Opt. 45, pp. 7772-7777, 2006,
  • Laser Doppler vibrometer as described in the document A. J. Oberholsten P.S. Heyns: Online condition monitoring of axial-flow turbomachinery blade-s using rotor-axial Eulerian laser Doppler vibrometry, Mechanical Systems and Signal Processing, Vol. 23, pp. 1634-1643, 2009
  • the design is based on the laser Doppler distance sensor whose operating principle is described in the publications T. Pfister: Investigation of novel laser Doppler methods for position and shape measurement of moving solid surfaces, Shaker Verlag, Aachen, 2008, T. Pfister, L. Büttner, J. Czarske: Laser Doppler profile sensor with sub-micrometre position resolution for velocity and absolute radius measurements of roincing objects, Meas. Be. Techno). 16, pp. 627-641, 2005, J. Czarske, L. Büttner, T. Pfister: Laser Doppler Distance Sensor and its Applications, Photonik 5/2008, p. 44-47 and T. Pfister, L. Büttner, J. Czarske, H. Krain, R.
  • Schodl Turbo machine tip clearance and vibration measurements using a fiber optic laser Doppler position sensor, Meas. Be. Technol. 17, pp. 1693-1706, 2006 and DE 10 2004 025 801 A1 and which is based on the generation of two interference fringe systems superimposed in a common measuring volume, of which at least one is fan-shaped. Ideally, both are fan-shaped with opposite orientations: A convergent strip system according to FIG. 1b, in which the strip spacing along the z-axis (corresponds to the optical axis) is continuously reduced. takes, and a divergent strip system according to Fig. 1a, in which the interference fringe spacing increases continuously accordingly.
  • the interference fringe systems are described by a fringe spacing function di (z) and d 2 (z), respectively.
  • the convergence or divergence of the interference fringes is achieved by utilizing the wavefront curvature of laser beams.
  • the beam waist of the Gaussian beam is placed in front of the measuring volume in order to produce a diverging strip system.
  • the adjustment of the beam waist behind the measurement volume results in a converging strip system.
  • the two stripe systems must be physically distinguishable, which can be achieved, for example, by different laser wavelengths (wavelength division multiplexing), carrier frequencies (frequency multiplexing), etc. If a scattering object traverses the measurement volume, then the scattered light can be separated from and assigned to the two strip systems, so that two Doppler frequencies fi and can be determined. The quotient of these two Doppler frequencies q ⁇ ).
  • the scattering object velocity v x no longer depends on the scattering object velocity v x and can thus be used as a calibration function for determining the axial position z of the scattering object within the measurement volume. This represents a progress compared to the conventional LDV.
  • the actual strip spacings d.sub.z) and d.sub.2 (z) can then be determined from the strip pitch profiles known from the previous sensor calibration. Together with the two Doppler frequencies, the scattering object speed then results
  • FIG. 2 schematically summarizes the operating principle of the laser Doppler distance sensor and shows how the axial object position z can be determined absolutely and independently of the additionally measured lateral object velocity v x from the measured Doppler frequencies fi and f2.
  • the 2D form of rotating solids can be determined absolutely and with sub-micron resolution using the laser Doppler distance sensor according to DE 10 2004 025 801 A1. Due to the non-incremental measuring principle, an absolute position and shape measurement is also possible with sudden changes in radius, as is described, for example, in US Pat. in the case of bladed rotors occur between the individual rotor blades, possible.
  • the essential feature of the laser Doppler distance sensor is that its measurement uncertainty, in contrast to conventional distance sensors inherently independent of the object speed, so that at the same time a high measurement rate up to the MHz range and high position resolution can be achieved down to the submicron range.
  • the laser Doppler distance sensor is predestined for the precise and time-resolved measurement of deformations and vibrations of fast rotating components (turned parts, shafts, rotors of engines and turbomachines). This has already been successfully demonstrated by test measurements on a transonic radial compressor of the German Aerospace Center (DLR) at speeds of up to 50,000 rpm and peripheral speeds of up to 600 m / s, as described in the publications T. Pfister, L. Büttner, J.
  • DLR German Aerospace Center
  • a first design which can also be used in commercial LDV sensors, is mainly used for frequency multiplex sensor assemblies.
  • a fiber-optic measuring head with four transmitting fibers for the four partial beams of the total of two interference fringes of the laser Doppler distance sensor is used, which are using a separate optics and then aligned to a common point of intersection. This can be done by means of a common front lens or by means of separate optics for the four transmitted beams.
  • another glass fiber or optics for the scattered light detection is needed, so that a total of five separate glass fibers must be supplied to the measuring head.
  • Such a measuring head can be used in principle for all known multiplexing techniques (wavelength, polarization, frequency and time multiplex) and there are also ways to miniaturize this probe.
  • the difficulty is that in particular the four transmission optics both with respect to the beam direction and with respect to the beam waist days must be aligned and adjusted very precisely to each other, which is mechanically very complex and limits the miniaturization.
  • mechanical interference and in particular temperature changes are a major problem with such a measuring head since this alters the alignment of the four transmitting optics so that in the worst case the four transmitting beams do not intersect, making a measurement completely impossible.
  • this design not only miniaturization limits, but also a use especially at high temperatures or under harsh Environmental conditions is not possible or only with great technical effort.
  • a laser beam is split by acousto-optical modulators (AOMs) and a Strahlteiferorulfei into four sub-beams with frequency shift from 0 to 120 MHz and coupled with Kollimationsiinsen in single mode fibers.
  • AOMs acousto-optical modulators
  • Strahlteiferorulfei a Strahlteifer Jewishfei into four sub-beams with frequency shift from 0 to 120 MHz and coupled with Kollimationsiinsen in single mode fibers.
  • the individual partial beams are collimated with separate optics and here brought to cross over with a common front lens in the measuring volume.
  • a further optical system with a Muitimode fiber is provided, which can be integrated in the measuring head and images the scattered light onto a photodetector.
  • the electrical output signal of the photodetector is split with a power divider and down-mixed with the carrier frequencies of the two measurement channels in the baseband. In order to prevent aliasing effects and to eliminate unwanted frequency components, the two resulting baseband signals are filtered with a low pass.
  • the adjustment is complicated in the measuring head used and, in addition, the robustness to vibrations or temperature gradients is problematic.
  • Second construction version The second design with wavelength division multiplexing shown in FIG. 4 according to the publications T. Pfisten Investigation of novel laser Doppler method for position and shape measurement of moving solid surfaces, Shaker Verlag, Aachen, 2008 and T. Pfister, L. Büttner, J. Czarske: Laser Doppler profile sensor with sub-micrometre Position resofution for velocity and absolute radius measurements of rotating objects, Meas. Be. Technol. 16, p. 627-641, 2005 comprises two laser diodes of different emission wavelength whose light fields are superimposed by means of a dichroic mirror and focused on an optical transmission diffraction grating. The +1. Diffraction order and the -1.
  • the diffraction order of the grating in each case forms the two partial beams for the two interference fringe systems of the laser-duplex distance sensor and are mapped into the measuring volume by means of a Kepplerteieskops.
  • the scattered light is detected in the reverse direction and divided back into the two wavelengths ⁇ and ⁇ 2 with a second dichroic mirror and detected separately.
  • the third construction is a further development of the second construction with regard to higher robustness and lower complexity, as described in the publications T. Pfister, L. Büttner, J. Czarske, H. Krain, R. Schodl: Turbo machine tip clearance and vibration measurements using a fiber optic laser Doppler Position sensor, Meas. Be. Technol. 17, pp. 1693-1705, 2006, L. Büttner, J. Czarske, H. Knuppertz: Laser Doppler velocity profile sensor with sub-micrometer spatial resolution employing ftber-optics and a diffractive fens, Appl. Opt. 44, no. 12, pp. 2274-2280, 2005 and T. Pfister: Investigation of novel laser Doppler method for position and shape measurement of moving solid surfaces, Shaker Verlag, Aachen, 2008 is described.
  • FIG. 5 it is a modular structure of the laser Doppler distance sensor 10, which is divided into three units, which are interconnected via optical fibers: A light source unit 2 with two fiber-coupled, transversely singlemode laser diodes 21, 22 different Wavelength ⁇ 1 and whose light fields are merged via a fiber fusion coupler 23 into a single mode fiber 24, a purely passive fiber-coupled measuring head 3 and a detection unit 4 for wavelength-dependent separation and detection of the scattered light 6, wherein the measuring head 3 and the detection unit 4 via a detection fiber 5 for the transmission of the scattered light 6 in conjunction.
  • the special feature is that, in contrast to the second construction, only one transmission fiber 24 is necessary, in which both wavelengths Ai and A2 are guided to the measuring head 3.
  • a deictive lens 25 DOE
  • DOE deictive lens 25
  • dispersion is inherently about 30 times stronger than with refractive lenses according to the publication L. Büttner, J. Czarske, H. Knuppertz: Laser Doppler velocity profile sensor with sub- micrometer-spatial-solution employing fiber-optics and a diffractive lens, Appl. Opt. 44, no. 12, pp. 2274-2280, 2005.
  • diffractive optics is used in standard LDV sensors with only one measurement channel, i. with only one interference fringe system, already used recessed.
  • the entire transmission optics is integrated into a diffractive micro-optical element which contains a sub-element (for example a grating) for dividing the laser beam into two sub-beams and two subsequent deflection elements for the subsequent superposition of the sub-beams. Examples of these are shown in FIGS. 6 and 7 in accordance with the publications W Stork, A. Wagner, C. Kunze: Laser Doppler Sensor System for Speed and Length Measurements at Moving Surfaces, Proc.SPIE, Vof. 4398, 106, 2001 and D. odarress et al., Measurement Science Enterprise Inc. (Pasadena, Calif., USA) in cooperation with VioSense Corporation (2400 Lincoln Ave., Altadena, California 91001, USA).
  • Fig. 6 shows a miniature laser Doppler veto-zimeter (LDV) with diffractive micro-optical element
  • Fig. 7 shows a planar integrated miniature laser Doppler velocimeter (LDV) with a planar integrated icro-beam splitter and with two focusing diffractive elements for beam combination represents.
  • LDV miniature laser Doppler veto-zimeter
  • Fig. 7 shows a planar integrated miniature laser Doppler velocimeter (LDV) with a planar integrated icro-beam splitter and with two focusing diffractive elements for beam combination represents.
  • the diffractive structures can be applied to different substrates or to only one glass substrate, with the front and back sides of the glass substrate according to FIG. 6 also being usable.
  • focusing elements can also be realized by means of the diffractive structures.
  • the invention has for its object to provide a device for non-incremental measurement of position and shape of moving solids, which is designed so suitable that the device can be minimized turistert so strong that they are in the same way as capacitive encoder in the Integrating the housing of a turbomachine and allowing the laser Doppler distance sensor to withstand high temperatures of several hundred degrees Celsius without the need for active cooling.
  • the object is solved by the features of patent claim 1.
  • the device for non-incremental positron and shape measurement of moving solids contains a wavelength division multiplexed laser Doppler distance sensor with at least two different wavelengths Ai and K and with a modular, fiber-optic measuring head in its sensor structure,
  • the sensor structure of the laser Doppler distance sensor includes two further modules which are fiber optically connected to the measuring head: a light source unit and a detection unit,
  • the bichromatic scattered light is split into the different wavelengths ⁇ , and A 2 corresponding to the two measuring channels and then detected separately by two photodetectors, and
  • the detection unit is connected to an evaluation unit, in which the signal evaluation is carried out according to the principle of the laser Doppler distance sensor for determining the position, speed and shape of the solid, wherein according to the characterizing part of patent claim 1 the measuring head is designed as a modular passive, fiber optic dHTrakttver miniature measuring head,
  • the bichromatic laser light beam emitted from the transmitting fiber by means of a beam splitting grating in each case two partial beams in the +1. Settlement Ordinance and the -1.
  • Splits diffraction order which are brought by means of two downstream deflection elements in a local area, which represents the common measurement volume, and that in front of the beam-splitting grating, a lens is arranged, which focuses the laser beam emitted from the transmitting fiber laser beam in the environment of the measuring volume, wherein by the chromatic aberration (dispersion) of the lens, a separation of the beam waist in z-direction is such that the beam waist for the one wavelength ⁇ before the measurement volume and the beam waist for the other wavelength ⁇ 2 are behind the measurement volume.
  • the lens may be a diffractive lens or a refractive lens, preferably an aspheric.
  • the radiating grating may be a reflection tone grating or a transmission diffraction grating, preferably the sub-beams of the +1. Diffraction order and the -1. Adjusts diffraction order favoring.
  • the deflection elements may be diffractive gratings whose lattice constant is smaller than the lattice constant of the beam-dividing lattice and which are preferably oriented to the formation of the beam bundles of only one diffraction order (+1 or -1).
  • the beam-splitting grating and the two deflection elements can be arranged on the front and back of a substrate.
  • the device has the following parameters
  • the radiation of the laser beams for the two different wavelengths ⁇ and ⁇ 2 are sufficiently increased to waist radii where or w 0, 2 in the vicinity of the measurement volume, so that from the resulting expansion of the interference fringe systems in the z-direction, the desired measurement range length - 2V2-where ,, / sin ⁇ (-1.2) results and that a sufficiently large number of interference fringes (typically 10 10) is present in the measurement vowel, wherein the angle ⁇ is half the crossing angle between the sub-beams bundling in the measurement volume,
  • the beam waist is located for the one wavelength ⁇ before the measurement volume and for the other wavelength A 2 behind the measurement volume, and preferably each about 1-2 times the Rayleigh length from the intersection in the measurement volume.
  • the scattered light detection can take place in the sideways direction or in the backward direction.
  • the scattered light can be coupled into a detection fiber (Muttimodemaschine MMF), which is preferably arranged parallel to the transmitting fiber (Sing! Emodemaschine SMF).
  • a deflecting element preferably a wedge prism
  • the adjustment of the detection optics can be made such that a displacement of the prism by means of a displacement / rotating device in the direction of optical axis (z-direction), the radial position of the scattered light spot is adjusted and the azimuthal position of the scattered light spot using the displacement / rotating means via a rotation of the wedge prism can be changed, wherein alternatively an adjustment of the detection optics on the position (azimuthal, radial ) of the detection fiber is reachable.
  • diffractive elements can be used that are located in the vicinity of the beam splitter.
  • the lens in front of the radiation splitting grating may be integrated in the substrate.
  • the beam-dividing grating located in the substrate can be a reflection grating and deflecting elements for guiding the partial beams to the deflecting elements can be present in the substrate.
  • a single optical fiber may be used for transmitted light beams and scattered light detection, e.g. can also be designed as Doppterkernmaschine, passed through the SMF core, the bichromatic transmitted light to the measuring head and their MMF Kem is used for the dissipation of scattered light.
  • optical elements of the transmission optics and of the receiving optics can be integrated on a substrate, with possibly additional deflecting elements being necessary and the beam path also being folded.
  • the effect of the lens may also be integrated into the grating, the deflectors or the deflecting elements in a diffractive or holographic manner. All optical elements can be designed to be transmissive or reflective.
  • the diffractive elements can also be designed holographically.
  • the integration of the optical elements or the light pipe within the substrate can also be realized by means of light waveguide technology, for which photonic crystal structures can also be used.
  • temperature-resistant quartz glass For all optical elements, preferably lens, wedge prism, and for the substrates of the diffractive elements, preferably beam-splitting grating and deflecting elements, temperature-resistant quartz glass can be used.
  • the entire measuring head can be designed for high ambient temperatures without the need for active cooling, using quartz glass optics, high-temperature fibers and special materials for the housing, which can be Zerodur, ceramic or high-temperature steel.
  • the device can also be realized by means of time-domain multiplexing (TDM), wherein an adaptive optics are simultaneously integrated in the measuring head.
  • TDM time-domain multiplexing
  • the device can thus be provided with diffractive grating optics in combination with fiber optics as well as a special dispersion management unit, with which the device can be miniaturized very easily, whereby only a very small number of optical components is needed. Furthermore, the device can be designed with a manageable effort using manageable quartz glass optics, high-temperature fibers and special materials for the housing for high ambient temperatures, without the need for active cooling.
  • three diffractive gratings as is already known for standard LDV sensors, are used for the first time in combination with a special dispersion management for the realization of the laser Doppler distance sensor.
  • the device according to the invention for the first time permits a highly miniaturized, fiber-coupled construction of the laser Doppler distance sensor which, in addition, requires only one fiber-optic access path for the connection.
  • all optics can be relatively easily made of the above-mentioned quartz glass and the adjustment effort is low.
  • FIG. 1 shows a diverging (left) interference fringe system - FIG. 1a - and a converging (right) interference fringe system - FIG. 1b wherein the two fringe systems of different wavelengths of light ⁇ 1 and ⁇ 2 are superimposed in one measuring area and by measuring the resulting two Doppler Frequencies both the axial position z and the velocity (x-component) of a scattering object can be determined, according to the prior art,
  • interference fringes di (z) and di (z) depending on the position z, 3 shows a structure of the laser Doppler distance sensor with Freufquenzmultiplex and fiber optic measuring head, wherein the prior art, the stray light detection for the sake of clarity in Vorwörtsoplasty is shown, but takes place in practice in the reverse direction,
  • Fig. 5 shows a modular design of the laser Doppler distance sensor
  • Wavelength-division multiplex using a purely passive, fiber-coupled diffractive lens (DOE) optical measuring head according to the prior art
  • LDV laser Doppler velocimeter
  • LDV planar integrated miniature laser Doppler velocimeter
  • Fig. 8 shows a fiber-coupled miniature measuring head according to the invention, wherein
  • FIG. 8b shows a scattered light cone which is deflected by a prism and focused on the multimode fiber (MMF) via the lens (asphere), FIG.
  • FIG. 9a shows a beam path of the transmitted light fields for the two different wavelengths A 1 and ⁇ 2 , whose waist positions are marked by crosses, and
  • FIG. 9b shows a scattered light cone which is deflected by a prism and focused on the multimode fiber (MMF) via the lens (asphere), FIG.
  • FIG. 10 shows a schematic representation of a fiber-coupled miniature measuring head according to the invention, in which all the optical elements are integrated on a substrate and a double-core fiber is used, wherein FIG. 10a shows a beam path of the transmitted light fields for the two different wavelengths Ai and A 2 , whose waist positions are indicated by crosses are marked, and
  • Fig. 10b is a rotated by 90 ° sectional image to the beam path for the
  • the device 1 for non-incremental position and shape measurement of moving solids 7 shown in FIG. 8 contains a wavelength-division multiplexed laser Doppler distance sensor 10 with at least two different wavelengths Ai and A 2 and with a modular, fiber-optic measuring head 30 in its sensor structure.
  • the sensor structure of the laser Doppler distance sensor 10 contains two further modules, which are fiber optically connected to the measuring head 30: a light source unit 2 and a detection unit 4,
  • two laser beam bundles 37 of different wavelengths Ai and A 2 are coupled into at least one glass fiber (singlemode fiber - SMF) 24,
  • the bichromatic scattered light is split into the different wavelengths At and ⁇ 2 corresponding to the two measuring channels 41, 42 and subsequently detected separately by means of two photodetectors 43, 44, and the detection unit 4 is connected to an evaluation unit 8, in which the signal evaluation according to the principle of the laser Doppler distance sensor 10 for determining the position, speed and shape of the solid 7 is executed.
  • the measuring head is designed as a modulated, passive optical fiber diffractive miniature measuring head 30 with dispersion management, which transmits the bichromatic laser light beam 37 emitted from the transmitting fiber (SMF) by means of a beam splitting grating 26 into two partial beam bundles 27, 28 in the +1. Diffraction order and -1.
  • SMF transmitting fiber
  • the lens 32 is a dif ractive lens or refractive lens, preferably an aspheric.
  • the beam-splitting grating 26 is a reflection grating or a transmission diffraction grating, which preferably the partial beams of the +1. Diffraction order and the -1. Adjusts diffraction order favoring.
  • the deflection elements 29, 40 represent diffractive gratings whose lattice constant is smaller than the lattice constant of the beam-dividing lattice 26 and which are preferably oriented to the formation of only one diffraction order (+1 or -1).
  • the beam-splitting grating 26 and the two deflection elements 29, 40 can be arranged on the front side 1 1 and rear side 12 of a substrate 47.
  • the beam waist 33 is located for the one wavelength Ai before the measurement volume 31 and the beam waist 34 for the other wavelength ⁇ 2 behind the Messvofumen 31, and preferably each about 1-2 times Rayleigh length from the intersection point 35 in Messvofumen 31.
  • the scattered light detection can be done in the sideways direction or in the reverse direction.
  • the scattered light 6 is coupled into a detection fiber ⁇ multimode fiber MMF) 5, which is preferably arranged parallel to the singlemode fiber SMF 24.
  • the scattered light 6 can be deflected laterally for coupling into the detection fiber 5 by means of a deflection element 36, preferably a keying prism, which is provided with a central bore 9 so as not to disturb the transmission beams 37, and then by means of the lens 32 already present in the transmission optics the end face 13 of the detection fiber 5 are focused.
  • the adjustment of the detection optics 36, 32, 5 takes place in such a way that the radial position of a scattered light spot 39 is adjusted via a displacement of the prism 36 by means of a displacement / rotation device 38 in the direction of the optical axis (z-direction), wherein the azimuthal position of Scattered light spots 39 can be changed by means of the displacement / rotating device 38 by means of a rotation of the wedge prism 36, wherein alternatively an adjustment of the detection optics 36, 32, 5 can be achieved via the position (azimuthally, radially) of the detection fiber (MMF) 5.
  • the detection fiber 5 lies outside the plane which is spanned by the partial beams 27, 28 of the transmitted light field.
  • the lens 32 may also be integrated into the substrate 47.
  • the radiating grid 26 located in the substrate 47 is a reflection grating and deflection elements 51, 52 for guiding the partial beams 27, 28 to the deflection elements 29, 0 are present in the substrate 47.
  • multi-mode fiber MMF, 5 can also be a single optical fiber 48 used for transmitted light beam 37 and scattered light detection, which is formed for example as Dopplerkernmaschine, through the SMF core 49, the bichromatic transmitted light beam 37 for Sensor head 30 passed and whose M MF core 50 is used for the dissipation of the scattered light 6.
  • optical elements of transmission optics and of receiving optics can be integrated on a substrate 47, whereby optionally additional deflection elements 51, 52 are necessary and the beam path is also folded.
  • the effect of the lens 32 can also be integrated into the grating 26, the deflection elements 51, 52 or the deflection elements 29, 40 in a diffractive or holographic manner.
  • All optical elements can be designed to be transmissive or reflective.
  • the diffractive elements 45, 46 can also be designed holographically.
  • optical waveguide technology for which photonic crystal structures can also be used.
  • optical waveguide technology for which photonic crystal structures can also be used.
  • temperature-resistant quartz glass can be used for all optical elements, preferably lens 32, wedge prism 36, as well as for the substrates 47 of the diffractive elements, preferably beam-splitting grating 26 and deflection elements 29, 40.
  • glass fibers 48 high temperature fibers can be used.
  • the entire measuring head 30 can be made using quartz glass optics, high temperature fibers and special materials for the housing, e.g. Zerodur, ceramic or high temperature steel, designed for high ambient temperatures without the need for active cooling.
  • the device 1 can alternatively also be realized by means of time-domain multiplexing (TDM), wherein an adaptive optics are integrated into the measuring head 30 at the same time.
  • TDM time-domain multiplexing
  • the measuring head 30 of the laser Doppler distance sensor 10 shown in FIGS. 8, 8a, 8b is no longer constructed as before by means of two telescopes according to FIG. 5, but rather only a single dispersive lens 32 is arranged present in front of the grating 26, which takes over the focusing of the laser beams 27, 28 and the waist separation, and the beam combination behind the beam-splitting grating 26 by means of two diffractive deflecting elements 29, 40 as shown in FIG. 8.
  • the transmission optics consists of only three components: the lens 32, the beam-splitting grating 26 for beam splitting and one or two diffractive elements 29, 40 for beam combination.
  • the superimposed beam waists 33, 34 of the two laser wavelengths ⁇ and ⁇ 2 at the fiber end of the single mode fiber - SMF - 24 at the measuring head 30 are imaged by means of a specially selected dispersive lens 32, for example an asphere, in the measuring volume 31.
  • a specially selected dispersive lens 32 for example an asphere
  • the main fields of the different wavelengths and A 2 are split with the beam splitting grating 26 (using the +1 diffraction order and the -1 diffraction order) and with one deflecting element 29, 40 per partial beam 27, 28 brought in the measuring volume center to the crossover according to FIG. 8a.
  • the deflection elements 29, 40 can be embodied as a grid whose grating period must be smaller than the grating period of the beam-splitting grating 26.
  • the dispersion management according to the invention provides that the parameters
  • the beam waist 33 is located for the one wavelength ⁇ before the measurement volume 31 and the beam waist 34 for the other wavelength ⁇ 2 behind the measurement volume 31, and preferably each about 1-2 times Rayleigh length from the intersection point 35.
  • the chromatic Abberatton the lens 32 is specifically exploited and amplified by the magnification in the figure.
  • Detektiön the scattered light 6 can be done as shown in Fig. 8b.
  • the same lens 32 is used to Detektiön the scattered light 6 from the solid body 7 in the reverse direction and to focus on the detection fiber 5 (multimode fiber - MMF -), which also images the transmitted light 37 into the measuring volume 31.
  • the detection fiber (MMF) 5 is positioned not slightly on the optical axis but slightly offset adjacent to the transmission fiber ⁇ single mode fiber SMF -) 24, a special wedge prism 36 is provided between the lens 32 and the beam splitting grating 26 in the measuring head 30 to move the Spot 39 of the scattered light 6 to move the multimode detection fiber 5.
  • the wedge prism 36 is further provided with a central bore 9, so that the transmitted light field 37 is not affected. Via a displacement of the prism 36 in the direction of the optical axis (z-direction), the radial position of the scattered light spot 39 can be adjusted. The azimuthal position of the scattered light spot 39 can be changed, for example, by means of the displacement / rotating device 38 via a rotation of the wedge prism 36. Alternatively, instead, an adjustment of the detection optics on the Position (azimuthal, radial) of the detection fiber (MF) 5 can be achieved. Preferably, the detection fiber 5 is outside the plane which is spanned by the partial beams 27, 28 of the transmitted light field. It can thereby be avoided that direct reflections on the solid body 7, which have no information content, are coupled into the detection fiber 5.
  • the scattered light optics can also be realized by the focusing of the scattered light 6 by means of diffractive elements 45, 46, which can be integrated into the substrate 47 for the beam-splitting grating 26 or for the deflection elements 29, 40, as in FIG. 10a, 10b is shown.
  • Both the lens 32 and the wedge prism 36 and the beam-splitting grating 26 and the deflection elements 29, 40 and the glass fibers 24, 5, 48 can be made of temperature-resistant quartz glass, so that operation at high temperatures is possible, Thus, this measuring head structure with reasonable effort using quartz glass optics, high-temperature fibers and special materials for the housing for high ambient temperatures, without the need for active cooling.
  • the measuring head 30 of the laser Doppler distance sensor 10 can be very easily miniaturized by the embodiment of the invention, since only a very small number of optical components is needed.
  • FIGS. 9a and 9b in another measuring head 30 according to the invention, the number of components and the mechanical complexity are further reduced by the two diffractive elements: beam-splitting grating 26 and deflecting elements 29, 30 on the front side 11 and the back side 12 of a substrate 47 are arranged, whereby the elements are automatically adjusted perfectly to each other.
  • optical elements can be integrated on a substrate 47, wherein the optical beam path can also be folded, possibly with the use of additional deflection elements 51, 52 according to FIGS. 10a, 10b.
  • all optical elements can be designed to be transmissive or refiective.
  • the beam splitting Grid 26 shown in contrast to Fig. 8 as a reflection grating.
  • the lens 32 can also be designed as a diffractive lens according to FIGS. 10a, 10b.
  • the lens effect can also be integrated into the grating 26, the deflection elements 51, 52 or the deflection elements 29, 40 in a diffractive or holographic manner, as shown in FIG. 7.
  • a single optical fiber 48 may also be used, which, as shown in FIGS. 10a, 10b, may be a Doppet core fiber.
  • the progress over the prior art is that the measuring head 30 according to the invention can be made very compact by only a few optical components.
  • the use of high-temperature fibers and optical components made of temperature-resistant glass (quartz glass) also enables measurements at very high temperatures without active cooling.
  • only the distance between the fiber end of the transmitting fiber 24 and the lens 32 needs to be adjusted for the adjustment of the measuring head 30, which allows a simultaneous displacement of the beam waist 33, 34 of the two Wellentangen to the crossing point 35 of the partial beams 27, 28.
  • the adjustment of the wedge prism 36 is only necessary once during assembly of the measuring head 30. Due to the fact that the miniaturized measuring head 30 basically requires only one provision for the adjustment, this device 1 is insensitive to vibrations.
  • the fiber-coupled, compact and purely optically passive measuring head 30 can be used excellently for measuring vibrations of the blades 7 as well as gap width measurements in turbomachines. Due to the large miniaturization potential, the necessary compactness of the sensor for use in turbomachinery is given. Since very high temperatures up to more than 1000 ° C occur in turbomachines, the measuring head 30 has to withstand these. This has been implemented in the device by Hochtemperatrumaschinen and temperature-resistant optics. Due to the spatial separation of transmitter unit 2 and detection unit 4 to the measuring head 30 by maintaining the modular design of FIG. 5 also active optical components nents, such as laser diodes and photodetectors, are decoupled from the harsh environment of turbomachinery.
  • the device 1 according to the invention offers the following advantages over the prior art:
  • the purely passive, fiber-optic measuring head 30 can be constructed extremely compact as a dispersion management miniature measuring head, since in addition to the glass fibers 24, 5, 48 including receiving optics only a maximum of four optical elements are necessary, which still wholly or partially on a substrate 47 in - can be canceled.
  • the adjustment effort is extremely low, especially when the elements are integrated on a substrate 47. This makes the sensor structure extremely robust.
  • Only one lens 32 is necessary, for which a single lens (singlet) is sufficient (an asphere, for example). In particular, no achromats are needed.
  • the inventive device 1 allows for the first time a design of the measuring head 30 of the laser Doppler distance sensor 10 for such high temperatures to over 1000 ° C without active cooling, which was basically not possible with the previously known measuring head assemblies.
  • High-temperature fibers with special temperature-resistant metal coating can be used as optical fibers.
  • a stable design of the housing to these high temperatures is possible with the help of special steels, Zerodur or ceramics.
  • a further advantage of the miniature measuring head 30 according to the invention is that the transmitting fiber 24 and the receiving fiber 5 run parallel, so that both can be guided in one tube and thus (in contrast to the construction from FIG. 5) only one access cable to the measuring head 30 is necessary ,
  • the advantage of the device 1 according to the invention over previous implementations of a laser Doppler distance sensor 10 is the very simple structure with only a few optical components, resulting in a large miniaturization potential.
  • the device 1 makes it possible to design the laser Doppler distance sensor 10 relatively easily for high temperatures, as present in turbomachinery, for example.

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
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Abstract

L'invention concerne un dispositif (1) de mesure non incrémentale de la position et de la forme de solides en mouvement (7), comprenant un capteur de distance laser à effet Doppler (10). La tête de mesure se présente sous forme de tête de mesure miniature (30) qui divise le faisceau de lumière laser (37) bichromatique émis par la fibre émettrice (24), en deux faisceaux partiels au moyen d'un réseau séparateur de faisceau (26), ces deux faisceaux partiels (27, 28) étant amenés en superposition dans une zone localisée au moyen de deux éléments déflecteurs (29, 40). Une lentille (32) est placée devant le réseau séparateur de faisceau (26), de telle manière que pour une des longueurs d'onde (λ1) le col du faisceau (33) est placé devant le volume de mesure (31) et que pour l'autre longueur d'onde (λ2) le col du faisceau (34) est placé derrière le volume de mesure (31).
EP11810556.8A 2010-11-30 2011-09-15 Dispositif de mesure non incrémentale de position et de forme de solides en mouvement Withdrawn EP2646770A1 (fr)

Applications Claiming Priority (2)

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DE102010053726A DE102010053726B4 (de) 2010-11-30 2010-11-30 Vorrichtung zur nicht-inkrementellen Positions- und Formvermessung bewegter Festkörper
PCT/DE2011/001762 WO2012072060A1 (fr) 2010-11-30 2011-09-15 Dispositif de mesure non incrémentale de position et de forme de solides en mouvement

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EP2646770A1 true EP2646770A1 (fr) 2013-10-09

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US (1) US20130278939A1 (fr)
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CN (1) CN103282738A (fr)
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WO (1) WO2012072060A1 (fr)

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CN103282738A (zh) 2013-09-04
DE102010053726A1 (de) 2012-05-31
DE112011104133A5 (de) 2013-09-19
WO2012072060A1 (fr) 2012-06-07
DE102010053726B4 (de) 2012-11-29

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