EP2600410A4 - Transparent electrode for thin film solar cell, substrate having transparent electrode for thin film solar cell and thin film solar cell using same, and production method for transparent electrode for thin film solar cell - Google Patents

Transparent electrode for thin film solar cell, substrate having transparent electrode for thin film solar cell and thin film solar cell using same, and production method for transparent electrode for thin film solar cell Download PDF

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Publication number
EP2600410A4
EP2600410A4 EP11812165.6A EP11812165A EP2600410A4 EP 2600410 A4 EP2600410 A4 EP 2600410A4 EP 11812165 A EP11812165 A EP 11812165A EP 2600410 A4 EP2600410 A4 EP 2600410A4
Authority
EP
European Patent Office
Prior art keywords
thin film
solar cell
film solar
transparent electrode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11812165.6A
Other languages
German (de)
French (fr)
Other versions
EP2600410A1 (en
EP2600410B1 (en
Inventor
Yuko Tawada
Takashi Fujibayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaneka Corp
Original Assignee
Kaneka Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaneka Corp filed Critical Kaneka Corp
Publication of EP2600410A1 publication Critical patent/EP2600410A1/en
Publication of EP2600410A4 publication Critical patent/EP2600410A4/en
Application granted granted Critical
Publication of EP2600410B1 publication Critical patent/EP2600410B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • H01L31/022483—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of zinc oxide [ZnO]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
EP11812165.6A 2010-07-28 2011-06-07 Transparent electrode for thin film solar cell, substrate having transparent electrode for thin film solar cell and thin film solar cell using same, and production method for transparent electrode for thin film solar cell Active EP2600410B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010169142 2010-07-28
PCT/JP2011/063054 WO2012014572A1 (en) 2010-07-28 2011-06-07 Transparent electrode for thin film solar cell, substrate having transparent electrode for thin film solar cell and thin film solar cell using same, and production method for transparent electrode for thin film solar cell

Publications (3)

Publication Number Publication Date
EP2600410A1 EP2600410A1 (en) 2013-06-05
EP2600410A4 true EP2600410A4 (en) 2017-05-03
EP2600410B1 EP2600410B1 (en) 2020-09-30

Family

ID=45529792

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11812165.6A Active EP2600410B1 (en) 2010-07-28 2011-06-07 Transparent electrode for thin film solar cell, substrate having transparent electrode for thin film solar cell and thin film solar cell using same, and production method for transparent electrode for thin film solar cell

Country Status (4)

Country Link
US (1) US9166080B2 (en)
EP (1) EP2600410B1 (en)
JP (1) JP5719846B2 (en)
WO (1) WO2012014572A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013150708A1 (en) * 2012-04-02 2013-10-10 パナソニック株式会社 Solar cell element and method for manufacturing same
WO2013183207A1 (en) * 2012-06-06 2013-12-12 パナソニック株式会社 Solar cell device and method for generating electricity using solar cell device
CN106298811B (en) * 2016-09-28 2018-06-01 京东方科技集团股份有限公司 Array substrate and preparation method thereof, display device
JP7181753B2 (en) * 2018-10-12 2022-12-01 株式会社アドバンテスト Analysis device, analysis method and analysis program
JPWO2021020457A1 (en) * 2019-07-31 2021-02-04

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004311704A (en) * 2003-04-07 2004-11-04 Kanegafuchi Chem Ind Co Ltd Substrate for thin film photoelectric converter and thin film photoelectric converter using the same
US6936188B1 (en) * 2000-03-27 2005-08-30 Tohoku Techno Arch Co., Ltd. Zinc oxide semiconductor material
US20070122632A1 (en) * 2003-10-02 2007-05-31 Zijp Johannes P Coating which is applied to substrate, a solar cell, and method for applying the coating to the substrate

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6242080B1 (en) 1997-07-09 2001-06-05 Canon Kabushiki Kaisha Zinc oxide thin film and process for producing the film
JPH1179891A (en) * 1997-07-09 1999-03-23 Canon Inc Zinc oxide thin film, its production, photoelectric conversion device and its production
JP2000276943A (en) * 1999-03-26 2000-10-06 Tohoku Ricoh Co Ltd Transparent conductive film
WO2005093854A1 (en) 2004-03-25 2005-10-06 Kaneka Corporation Substrate for thin-film solar cell, method for producing the same, and thin-film solar cell employing it
JP2005311292A (en) 2004-03-25 2005-11-04 Kaneka Corp Substrate for thin film solar cell, manufacturing method therefor, and thin film solar cell using the same
US20090293954A1 (en) * 2008-05-30 2009-12-03 Semiconductor Energy Laboratory Co., Ltd. Photoelectric Conversion Device And Method For Manufacturing The Same
JP5127925B2 (en) * 2008-07-07 2013-01-23 三菱電機株式会社 Thin film solar cell and manufacturing method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6936188B1 (en) * 2000-03-27 2005-08-30 Tohoku Techno Arch Co., Ltd. Zinc oxide semiconductor material
JP2004311704A (en) * 2003-04-07 2004-11-04 Kanegafuchi Chem Ind Co Ltd Substrate for thin film photoelectric converter and thin film photoelectric converter using the same
US20070122632A1 (en) * 2003-10-02 2007-05-31 Zijp Johannes P Coating which is applied to substrate, a solar cell, and method for applying the coating to the substrate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2012014572A1 *

Also Published As

Publication number Publication date
JP5719846B2 (en) 2015-05-20
EP2600410A1 (en) 2013-06-05
EP2600410B1 (en) 2020-09-30
US20130118580A1 (en) 2013-05-16
JPWO2012014572A1 (en) 2013-09-12
US9166080B2 (en) 2015-10-20
WO2012014572A1 (en) 2012-02-02

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