EP2523776A1 - Device and method for determining the position of a working surface of a working disc - Google Patents
Device and method for determining the position of a working surface of a working discInfo
- Publication number
- EP2523776A1 EP2523776A1 EP11702918A EP11702918A EP2523776A1 EP 2523776 A1 EP2523776 A1 EP 2523776A1 EP 11702918 A EP11702918 A EP 11702918A EP 11702918 A EP11702918 A EP 11702918A EP 2523776 A1 EP2523776 A1 EP 2523776A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- working
- working gap
- beam guiding
- gap
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
- B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
Definitions
- the invention relates to a device for determining the position of a working surface of a working disk of a double-side processing machine, in particular a Doppel substancesscUeifmaschine, wherein the double-side processing machine has two working wheels, which form a working gap for double side machining of flat workpieces between facing work surfaces, and of which at least one is rotatably driven, wherein the device comprises an optical measuring device with a radiation source, an optical detector device and an evaluation device, which are designed to be arranged outside the working gap.
- the invention also relates to a method for determining the position of a working surface of a working disk of a double-side processing machine, in particular a double-side grinding machine, in particular with the device according to the invention.
- process parameters for compensation of wear of the working disks are determined by means of process tests. These delivery parameters indicate the number of delivery steps and their size and distribution between the upper and lower working disk.
- the problem is that fluctuations in the frame parameters can not be considered. Such variations may be due, for example, to blank size, blank stock, disc manufacture or related tolerances, condition and temperature of a coolant, condition of a dressing tool, and so on. Even small variations in such frame parameters can have a significant impact on the delivery ratio, but often remain undetected by an operator in the field.
- the workpieces to be processed are usually fed in or out with feed and removal devices into the grinding gap.
- the positioning of the supply and discharge devices relative to the grinding gap must be accurate in the order of 10 ⁇ , so that the workpieces can enter or exit without problems.
- a change in position of the grinding gap is problematic in this respect and has hitherto been avoided by regular dressing.
- a new reference surface on the working disk is repeatedly created, the position of which is known from the position of the dressing tool.
- this type of referencing is cumbersome and undesirable.
- DE 24 27 709 proposes a mechanical scanning of the working disk surface by means of a pendulum sensor in contact with the disk.
- DE 195 37 586 A1 proposes an optical measurement for determining surfaces, surface profiles and volumes by means of confocal imaging, wherein rays are transmitted to the object via an optical fiber bundle and reflected by the latter and fed to a detector which performs a simultaneous detection of the reflected beams ,
- both measuring methods have the weakness that they provide permanently good measurement data only when the processing machine is stationary.
- Mechanical probes as they are known from DE 24 27 709 AI, subject to measurements on a running machine, in particular a grinding machine, regularly a considerable wear when they come into contact with the work surface. This problem could not be solved by optimized designs of the probe with regard to shaping, coating or reducing the bearing force.
- the known optical systems suffer from the fact that during operation of the processing machine in the measuring range between sensor and working disk are processing media, for example cooling lubricants and output particles, whereby the measurement is impaired or made impossible.
- processing media for example cooling lubricants and output particles
- the machining process must therefore be interrupted for the measurement, which is generally undesirable.
- a particular problem with the measurement during operation of double-side processing machines is the usually very narrow working gap.
- the target thickness of the machined workpieces is determined by the distance between the two working disks to each other. Not infrequently, this distance is on the order of a few millimeters. For this reason, known sensors can not be used for a measurement in the working gap.
- the present invention seeks to provide a device and a method of the type mentioned, with which the position of the working surface of a working disk reliably determine even at a narrow working gap and during operation of the machine.
- the invention achieves the object in that the optical measuring device has a StraU arrangements worn, which is adapted to at least partially be fed into the working gap, the StraMfiihrungs owned located at a introduced into the working gap StraWracnjjigs owned located in the working gap Has outlet opening for optical radiation generated by the radiation source, and wherein the beam guidance device, the optical radiation from the radiation source to the next substantially parallel to the work surfaces leads into the working gap, deflected at a measuring location on at least one deflection surface on a work surface, receives from the work surface reflected radiation and again leads out of the working gap to the optical detector means, wherein the evaluation device is adapted to, based a detection result of the detector device to determine the position of the working surface, and that the beam guiding device has a fluid supply connected to a fluid supply, with the at least one of the optical radiation after exiting the outlet opening of the beam guiding device in the working gap traversed measuring range is flushed.
- the invention solves the problem by the steps:
- a beam guiding device is introduced at least partially into the working gap, wherein the beam guiding device has an outlet opening in the working gap for the straightening device introduced into the working gap for optical strain generated by the straWing source,
- the optical strain generated by an optical radiation source is initially guided by the straightening device, starting from the straightening source, essentially parallel to the working surfaces into the working gap, deflected onto a working surface at a measuring location via at least one deflection surface,
- StraWung reflected by the work surface is received by the beam guiding device and again guided out of the working gap to an optical detector device,
- the position of the work surface is determined, and
- a distance, in particular a vertical distance, of the working surface relative to a reference position, for example a reference position of the optical measuring device is determined for determining the position of the working surface.
- the distance of the working surface can be determined to a point on the deflection of the Strahl Stirung device or a reference point of the detector device whose locations are known.
- the invention is based, on the one hand, on the idea that the components of the optical measuring device which require more installation space are arranged outside the working gap, wherein only the measuring beam is guided into the working gap and led out of it again by means of the straightening device.
- the arranged within the working gap part of the device takes only a very small space, so that the measurement is easily possible, even with very narrow work columns.
- the Strahlbowungs adopted on a fluid supply, with which the area around the outlet opening of the radiation and in particular between the outlet opening and the work surface is flushed, so that no disturbing influences by processing media, such as cooling lubricant done.
- a gas or a liquid can be supplied for rinsing. Examples include nitrogen, compressed air, water, oil, etc.
- the measurement according to the invention should be done comparatively close to the edge of the working disk or work surface, since this edge is particularly critical in terms of wear.
- the components of the optical measuring device located outside the working gap can be arranged in a protective housing arranged outside the working gap or the working disk circumference be arranged to be protected from contamination or entry of processing media.
- the double-side processing machine can be a double-side grinding machine, in particular for plan machining of flat workpieces. In grinding machines occurs a high wear of the work surfaces and thus a special need for the position determination according to the invention.
- the working gap may have, for example, a thickness of less than 5 mm, in particular less than 3 mm.
- the position of the working surface with a measuring error of less than 5 ⁇ m at a working gap with a width of not more than 2 mm can be reliably measured even during an ongoing machining process, in particular grinding process can.
- the beam guiding device can have a guide channel opening into the outlet opening for guiding the optical radiation in the working gap, the at least one deflection surface within the guide channel, for example at the end of the guide channel is arranged.
- the fluid for rinsing the measuring range can also be supplied through the channel and exit from the channel through the same outlet opening as the optical radiation.
- the optical radiation source may be a laser source in a particularly practical manner.
- the evaluation device can be designed to determine the position of the working surface on the basis of a propagation time measurement of the optical radiation. By evaluating the transit time of the optical radiation between the time of emission by the optical radiation source and the time of detection by the detector device, the path traveled by the optical radiation from the radiation source to the working surface and back to the detector can be determined in a manner known per se , Thereby, the position of the work surface relative to the optical radiation source and / or the detector device can be determined.
- the optical measuring device can also be a triangulation measuring device. Triangulation-based measuring devices are known and commercially available.
- an adjusting device can be provided. hen, with the StraWbowungseinrichrung in the working gap in and out of the working gap is movable.
- the adjusting device can, for example, have a pivoting arm which holds the road guiding device and with which the jet guiding device can be pivoted into and out of the working gap into the working gap.
- the StraWchtungssystem can therefore be moved, so that it can be driven on the one hand for the measurement in the working gap and then moved out of the gap.
- This is conceivable, for example, in processing machines with planetary kinematics, so that the beam guidance is moved synchronized with a rotor disk movement into or out of the gap.
- a surface profile of the working disk can be determined.
- mount the strapping device on a rail with which it can be moved into or out of the working gap.
- a surface profile can be used, for example, to determine a wear-related deviation of the worktop profile of a desired profile by means of the evaluation.
- the machining process can be stopped when a predetermined limit deviation between the measured work surface profile and the desired profile is exceeded.
- a notification can then also be made to an operator of the machine, for example, in that a dressing process for the working disks is required.
- the early detection of a change in the working wheel profile can be compensated by a suitable adaptation of the process parameters, so that the total number of required dressing operations is reduced.
- the adaptation of the process parameters can be selected automatically or manually on the basis of the evaluation data of the evaluation device.
- the tension guiding system according to the invention is so flat that it can also be inserted into particularly narrow working gaps.
- the beam guiding device can have a height of less than 5 mm, in particular less than 3 mm, in a direction perpendicular to the main beam guiding direction (ie, usually in the vertical direction during operation of the device).
- the device has a second StraWchtungs issued, which is adapted to be at least partially inserted into the working gap, wherein the second StraM Operationssein- direction at an inserted into the working gap second StraM implementations recognized located in the working gap outlet opening for has generated by a radiation source optical radiation, and wherein the second StraM implementations recognized the optical radiation from the radiation source initially leads substantially parallel to the work surfaces in the working gap, at a measuring location on at least one deflection on the other of the two working surfaces deflects, from this Working surface receives reflected radiation and again out of the working gap leads to an optical detector device, wherein an evaluation device is adapted to, based on a detection result of the detector or worn to determine the position of this work surface, and that the second StraM enclosures worn also has a connected to a Fhiidsmall fluid supply, with the at least one of the optical StraMung after exiting the exit opening of the second StraM enclosures driven in Ar Beitsspalt traversed second measuring
- the Schwarzsspaltrise is subject in practice significant interference, such as wear of the working wheels, thermally induced deformation of machine components (frames, spindles, etc.) or elastic deformation due to force.
- machine components frames, spindles, etc.
- elastic deformation due to force In the case of known machines for double side surface grinding, in particular in a continuous process, an attempt is made to minimize this interference by a 100% measurement of the machined components as well as tempering devices and a particularly rigid design of the machine frame. With reasonable effort, however, this is only possible to a limited extent.
- By direct measurement of the grinding gap on the working disk surfaces these disturbances can be detected together and compensated by a suitable control by the evaluation by the work disks are delivered accordingly. There are much higher machining accuracies than in the known solutions.
- the double-side processing machine can be a continuous-processing machine in which each workpiece to be machined is guided into and out of the working gap during its machining process.
- Such continuous processing machines also Double Disc Grinding Due to the large number of workpieces entering the working gap, (DDG) machines require an exact detection of the wear of the working surfaces and thus an impermissible gap change. Otherwise, it may lead to inaccurate introduction of the workpieces in the working gap and thus to machining errors.
- a measurement of the position of the work surface is also possible during workpiece machining.
- the double-side machining machine works on the principle of planetary kinematics, in the working gap so at least one rotor disc is arranged, which receives in recesses to be machined workpieces and by means of a rolling device is set in rotation, whereby the at least one rotor disc and thus the in their recorded workpieces move along cycloidal paths in the working gap.
- the advantage lies in the fact that in particular with an adjustability of the StraW Installations adopted also the disc shape, in particular a disc topography, can be measured. When tuning machines with planetary kinematics, this can be crucial.
- the double-side processing machine may comprise a control device which regulates the position of the working surface and / or the width of the working gap to a constant value on the basis of the position of the working surface determined by the evaluation device.
- a work disk control device can be provided, which is designed to adjust at least the work disk measured by the optical radiation in its particularly vertical position. For example, due to wear, the thickness of the work covering of the measured working disk can decrease.
- the control device the work disk control device can be controlled so that this concerned working disk again nach Pope in a position in which the work surface again assumes its predetermined desired position and / or the working gap again its predetermined nominal width.
- FIG. 1 shows a device according to the invention in a side view
- Fig. 2 is an enlarged detail of the device of FIG. 1 in a
- FIG. 3 is a plan view of the device of Fig. 1,
- FIG. 4 is a view corresponding to the view of FIG. 3, wherein the upper working disk is not shown,
- FIG. 5 is a partial perspective view of the device according to the invention.
- FIG. 6 is an enlarged detail corresponding to the detail A of FIG.
- FIG. 8 shows a diagram with a measurement signal recorded by the method according to the invention.
- FIGS. 1 to 7 show an apparatus 10 according to the invention for determining the position of the working surface of a working disk of a double-side grinding machine.
- the upper working disk 12 and the lower working disk 14 are shown in the figures for the sake of simplicity.
- At least one of the cylindrical arrays Beitsscalen 12, 14 is rotatably drivable in a conventional manner via a suitable drive about a vertical axis of rotation.
- the upper working disk 12 has an upper working surface 16 to be recognized in particular in the enlarged illustration in FIG.
- the lower working disk 14 has a working surface 16 of the upper working disk 12 facing lower working surface 18. Between the work surfaces 16, 18 limit the working wheels 12, 14 a working gap 20.
- the working wheels 12, 14 part of a double-sided grinding machine by the continuous process in which the workpieces to be processed are fed in and out by means of a feed device, not shown, during a machining process in the working gap.
- a feed device not shown
- the double-side grinding machine is a double-sided grinding machine with planetary kinematics, in which the workpieces to be processed are located in the working gap arranged rotor discs and are moved together with the carriers along cycloid trajectories in the working gap.
- the device 10 has an optical measuring device 24, which is arranged in a protective housing 22 outside the working gap 20.
- it is a known triangulation sensor, comprising a laser source, an optical detector device and an evaluation device.
- the protective housing 22 is arranged outside the working gap 20
- an approximately semi-oval-shaped in the plan view StraWschreibungseiimchtung 26 is inserted into the working gap 20.
- the StraW elements owned 26 has a channel 28, at the end facing away from the housing 22 in the working gap a particular in Figure 6 to be recognized and compared to the vertical by 45 ° inclined deflection surface 30 for optical radiation, formed for example by a deflection mirror or a deflection prism, is provided.
- the channel 28 has an outlet opening 32 which is open towards the lower working surface 18.
- laser radiation 34 emitted by the laser source is guided through an opening 36 of the housing 22 into the channel 28 and thus parallel to the working surfaces 16, 18 in the working gap 20 and to the deflection surface 30.
- the radiation 34 is deflected by 90 ° down to the lower working surface 18.
- the radiation 34 is reflected by the lower working surface 18 and reaches back to the deflection surface 30, which in turn deflects this by 90 ° in a direction parallel to the work surfaces 16, 18 and out of the working gap.
- the radiation passes back through the opening 36 back into the housing 22 and to the optical detector means.
- the evaluation device determines the position of the lower working surface 18 relative to a reference position of the arranged in the housing 22 optical measuring device 24 according to the triangulation principle.
- the road-clocking device 26 has a fluid supply 38 connected to a fluid supply (not shown).
- compressed air is supplied from the fluid supply 38 to the channel 28 via a supply channel 40, so that the compressed air also flows through the channel 28 and impinges on the lower working surface 18 through the outlet opening 32.
- the channel 28 and in particular the outlet opening 32 and the measuring range between the outlet opening 32 and the point of impingement of the optical radiation 34 on the lower working surface 18 are rinsed. So there is no distortion of the measurement due to processing media or other contaminants, such as abraded particles.
- the housing 22 and with it the road guidance device 26 can be pivoted out of the working gap 20 about a vertical axis from the operating position shown in the figures. In this way it is possible to use the device only for a measuring operation in the working gap 20 introduce. However, it is also possible to record a surface profile of the lower working surface 18 by pivoting the StraW Adjusts worn during a measuring operation.
- a second beam guiding device can additionally be provided, which directs optical radiation in an analogous manner, as shown in the figures, to the upper working surface 16 in order also to determine its position.
- the construction and the function of the second road guidance device may be identical to the road traffic guidance device 26 shown in the figures.
- FIG. 8 shows a time profile of a position of the lower working surface 18 determined by the device according to the invention relative to a reference position, the lower working surface 18 being approximately 10 ⁇ in the periods 150 s to 180 s and 275 s to approximately 320 s was adjusted down.
- the data were taken on a DDG600 machine of the applicant with a conventional grinding wheel.
- the measurement according to the invention with a measurement tolerance of a few micrometers is possible in a precise manner.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010005032A DE102010005032B4 (en) | 2010-01-15 | 2010-01-15 | Device and method for determining the position of a working surface of a working disk |
PCT/EP2011/000043 WO2011085950A1 (en) | 2010-01-15 | 2011-01-07 | Device and method for determining the position of a working surface of a working disc |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2523776A1 true EP2523776A1 (en) | 2012-11-21 |
EP2523776B1 EP2523776B1 (en) | 2015-11-11 |
Family
ID=43856232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11702918.1A Not-in-force EP2523776B1 (en) | 2010-01-15 | 2011-01-07 | Device and method for determining the position of a working surface of a working disc |
Country Status (5)
Country | Link |
---|---|
US (1) | US20120293811A1 (en) |
EP (1) | EP2523776B1 (en) |
CN (1) | CN102695585A (en) |
DE (1) | DE102010005032B4 (en) |
WO (1) | WO2011085950A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3061565B1 (en) * | 2015-02-24 | 2020-11-25 | OFFICINA MECCANICA DOMASO S.p.A. | Adjusting device for a grinding machine |
CN106346329B (en) * | 2016-08-30 | 2018-02-27 | 江苏同庆车辆配件有限公司 | The edge-neatening apparatus of sealing ring on a kind of rail wagon brake system |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3761186A (en) * | 1972-01-17 | 1973-09-25 | Itt | Apparatus for optically inspecting the condition of a surface having known variations in the condition |
FR2664984B1 (en) * | 1990-07-18 | 1992-09-25 | Snecma | NON - DESTRUCTIVE RADIATION TESTING APPARATUS HAVING A LASER SIGHT. |
DE4415582C2 (en) * | 1994-05-04 | 1997-03-06 | Autec Gmbh | Optical distance measuring device for distance measurement in cavities |
DE19537586C2 (en) | 1995-10-09 | 2002-03-28 | Schleifmittelwerk P Lapport & | Measuring device for determining surfaces, surface profiles and volumes |
DE19813041A1 (en) | 1998-03-25 | 1999-10-07 | Siegfried Hillenbrand | Measurement device for rotating object, especially tool, workpiece, or machine part |
EP1118429B1 (en) * | 1999-05-07 | 2007-10-24 | Shin-Etsu Handotai Co., Ltd | Method and device for simultaneously grinding double surfaces, and method and device for simultaneously lapping double surfaces |
US6368881B1 (en) * | 2000-02-29 | 2002-04-09 | International Business Machines Corporation | Wafer thickness control during backside grind |
EP1754018B1 (en) * | 2004-06-08 | 2018-07-11 | Micro-Epsilon Messtechnik GmbH & Co. KG | Device and method for inspecting the internal surfaces of holes |
DE102005023353A1 (en) * | 2004-06-08 | 2006-01-05 | Micro-Epsilon Messtechnik Gmbh & Co Kg | Hole bore internal inspection unit uses multicolour light source and adjustable chromatic aberration projection lens to allow distance determination from spectrum |
DE102004040429B4 (en) * | 2004-08-20 | 2009-12-17 | Peter Wolters Gmbh | Double-sided polishing machine |
JP2006231471A (en) * | 2005-02-25 | 2006-09-07 | Speedfam Co Ltd | Double-sided polishing machine and its sizing controlling method |
EP2122327B1 (en) * | 2007-03-13 | 2013-12-25 | Advanced Liquid Logic, Inc. | Method for improving absorbance detection of a droplet |
JP2008227393A (en) * | 2007-03-15 | 2008-09-25 | Fujikoshi Mach Corp | Double-side polishing apparatus for wafer |
DE102007056627B4 (en) * | 2007-03-19 | 2023-12-21 | Lapmaster Wolters Gmbh | Method for grinding several semiconductor wafers simultaneously |
DE102008049972A1 (en) * | 2008-10-01 | 2010-04-22 | Peter Wolters Gmbh | Method for measuring the thickness of disc-shaped workpieces machined in a processing machine |
US8593627B2 (en) * | 2011-09-15 | 2013-11-26 | Millennium Industries Corporation | Apparatus and method for inspecting the inner surface of a tubular structure for contamination |
-
2010
- 2010-01-15 DE DE102010005032A patent/DE102010005032B4/en not_active Expired - Fee Related
-
2011
- 2011-01-07 CN CN2011800050984A patent/CN102695585A/en active Pending
- 2011-01-07 WO PCT/EP2011/000043 patent/WO2011085950A1/en active Application Filing
- 2011-01-07 EP EP11702918.1A patent/EP2523776B1/en not_active Not-in-force
- 2011-01-07 US US13/522,459 patent/US20120293811A1/en not_active Abandoned
Non-Patent Citations (1)
Title |
---|
See references of WO2011085950A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE102010005032A1 (en) | 2011-07-21 |
CN102695585A (en) | 2012-09-26 |
EP2523776B1 (en) | 2015-11-11 |
US20120293811A1 (en) | 2012-11-22 |
DE102010005032B4 (en) | 2012-03-29 |
WO2011085950A1 (en) | 2011-07-21 |
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