EP2504894A1 - Agencement de miroirs servant au guidage d'un faisceau laser dans un système laser et procédé de guidage d'un faisceau laser - Google Patents

Agencement de miroirs servant au guidage d'un faisceau laser dans un système laser et procédé de guidage d'un faisceau laser

Info

Publication number
EP2504894A1
EP2504894A1 EP10781675A EP10781675A EP2504894A1 EP 2504894 A1 EP2504894 A1 EP 2504894A1 EP 10781675 A EP10781675 A EP 10781675A EP 10781675 A EP10781675 A EP 10781675A EP 2504894 A1 EP2504894 A1 EP 2504894A1
Authority
EP
European Patent Office
Prior art keywords
mirror
resonator
laser beam
laser
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10781675A
Other languages
German (de)
English (en)
Inventor
Joachim Meier
Ulrike Wegner
Maximilian Josef Lederer
Daniel Kopf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
High Q Laser GmbH
Original Assignee
High Q Laser GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by High Q Laser GmbH filed Critical High Q Laser GmbH
Priority to EP10781675A priority Critical patent/EP2504894A1/fr
Publication of EP2504894A1 publication Critical patent/EP2504894A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/004—Systems comprising a plurality of reflections between two or more surfaces, e.g. cells, resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813—Configuration of resonator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106—Mode locking
    • H01S3/1112—Passive mode locking
    • H01S3/1115—Passive mode locking using intracavity saturable absorbers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0657—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments

Definitions

  • the invention relates to a mirror arrangement for guiding a laser beam in a laser system according to the preamble of claim 1, a laser system with such a laser arrangement and a beam guidance method for a laser beam according to the preamble of claim 15.
  • Pulses with a pulse duration in the femtosecond or picosecond range often require large distances between the end mirrors, e.g. if low pulse repetition rates are required, i. typically less than -30 MHz.
  • laser systems are mode-locked laser arrangements according to the principle of pulse decoupling or cavity dumping, for example with Nd: YV0 4 as laser material and average powers between 7.8 W and pulse energies of 15.6 ⁇ J at repetition rates of 500 kHz and 10 W, respectively and 10 ⁇ J at 1 MHz.
  • Nd Nd: YV0 4
  • Such laser systems are used, for example, for material processing.
  • the prior art describes various methods in which two or more mirrors are arranged be reflected that an optical beam or laser beam multiple times between these mirrors and thereby the total path length can be increased on a small footprint.
  • such a multi-pass Herriott cell consists of two mirrors as end mirrors defining the cell, at least one of them with a concave surface, which are arranged at a certain distance from one another.
  • the mirror arrangement itself forms an optical resonator in which a beam is reflected several times and repeats itself after a certain number of passes.
  • an encircling pattern of reflection points forms on the end mirrors, lying on an ellipse or a circle.
  • the beam is decoupled from the mirror array again.
  • this closed beam path in the cell can be disrupted either by separate mirrors or by bores on one of the end mirrors (see, for example, Kowalevicz et al., "Design principles of q-preserving multipass-eave femtosecond lasers” J. Opt. Soc. Am. B, Vol. 23, No. 4, April 2006).
  • the publications by Kowalevicz et al. ("Generation of 150nj pulses from a ultiple-pass cavity Kerr-lens mode-locked Ti: AL201 oscilator" Optic Letters Opt. Soc. Am., Vol. 23, No.
  • Another beam-folding mirror arrangement is known, for example, from EP 1 588 461, wherein two reflective planar surfaces are arranged such that the laser beam is reflected several times at each of the reflecting surfaces and the beam path reflects a beam incident in the folding device and a beam emerging from the folding device has, wherein the reflective surfaces are oriented against each other with an opening angle greater than 0 °.
  • Such a linear arrangement thus leads to a zig-zag course of the beam path, wherein the reflection points lie on the two reflective surfaces in a line and have a varying distance.
  • the space available for beam folding is only in one plane, i. two-dimensional, used.
  • An object of the present invention is to provide an improved laser system, in particular a diode-pumped, mode-locked laser system.
  • Another object is to provide such a laser system which has increased compactness and / or greater robustness.
  • the invention relates to a mirror arrangement for guiding a laser beam in a laser system or a corresponding beam guidance method for a
  • the mirror arrangement is based on at least two mirrors, which define a resonator for folded beam guidance as an end mirror and between which the beam path is guided back and forth several times, wherein reflections occur in each case at the end mirrors.
  • the beam path in the resonator can be additionally folded by the use of one or more further mirrors, so that the compactness of the arrangement or a total structure using this can be further increased.
  • a laser beam is guided or coupled, so that it passes through a first beam path as part of the total beam path in the resonator.
  • the beam path between the end mirrors wherein the reflection points occurring there lie on a circular line and with one direction of rotation, eg clockwise.
  • the second beam path is preferably formed by back reflection under an angle change such that five reflection points each also occur on the end mirrors, whereby they can lie in the interstices of the reflection point pattern of the first beam path.
  • both beam paths are interlocked with opposite direction of rotation. This is based on an important finding, which results from the consideration of the beam pattern on the end mirrors.
  • Reflection points between the beam paths these can still be interlocked even with different numbers of reflection points.
  • the present invention allows by reversing the direction of rotation at the reversal point the simultaneous use of both directions of rotation, associated with an increase in the number of reflection points and thus an increase in the resonator length with the same size.
  • the coupling or decoupling of the laser beam can be designed.
  • Mirror arrangement or a corresponding method and a laser system using the mirror arrangement are shown schematically below and described purely by way of example. Show in detail the representation of a first embodiment of the inventive mirror arrangement and the inventive beam guiding method for a laser beam;
  • Fig.9-10 shows the representation of a second
  • Fig.1-8 shows the representation of a first
  • Beam guiding method for a laser beam wherein beam guidance is explained in different figures.
  • Fig.l the situation when coupling a laser beam as the input laser beam ES is shown in the resonator, which is formed as Herriott cell at least from a first end mirror 1 and a second end mirror 2 with concave surface.
  • the arrangement of the two end mirrors 1 and 2 shown in this embodiment is chosen purely by way of example. In particular, both mirrors can in principle also be exchanged in their position. Between the two end mirrors runs a connecting these optical resonator axis OA, which is shown in this example as a straight line. In folded arrangements, however, the optical resonator axis OA can also have a correspondingly folded, ie angled course.
  • the Resonator is preceded by a focusing mirror 3 for the input laser beam ES and the output laser beam AS.
  • this focusing mirror 3 directs the laser beam onto a coupling-in mirror 4 and thus into the actual resonator, the axis of the focusing mirror 3 lying in a plane with the resonator axis OA.
  • the laser beam is guided by the coupling mirror 4 onto the first end mirror 1 and then, as shown in FIG. 4, onto the second end mirror 2.
  • multiple reflection occurs at each of the first and second end mirrors 1,2, in this example, four reflection points appear on the end mirrors 1,2, which form a pattern in which the reflection points on the corner points of a square lie.
  • the sequence of reflections at the first and second end mirrors 1, 2 in this case defines a direction of rotation with respect to the resonator axis OA as the axis of rotation.
  • the entirety of the reflections and the intervening beam paths form a first beam path with a defined direction of rotation, wherein this can run clockwise or counterclockwise.
  • the laser beam thus travels with a defined direction of rotation between the first and second end mirrors in the resonator to and fro.
  • the resonator designed so that the direction of rotation is inverted or inverted in a reversal point and the laser beam in the resonator at least partially passes through with the first beam path opposite direction of rotation, whereby a second beam path is defined.
  • a second beam path is defined.
  • an inverting mirror 5 is used to generate the reversal point, so that this causes after passing through the first beam path, a change of the direction of rotation or rotation initiating back reflection.
  • the laser beam is decoupled from the arrangement at this point, which is indicated in FIG. 6 by the dotted arrow.
  • the laser beam now passes through the resonator again in a second beam path of changed or inverted rotational direction, the first and second beam paths being spatially separated.
  • the first and second beam paths form a closed and self-repeating common beam path, which would be traversed again in the case of a return reflection at the beginning of the first beam path.
  • the first and the second beam path have the same number of reflection points, in particular three, four or five reflection points, which lie on a common circular line on each of the two end mirrors 1, 2.
  • the laser beam passes through the pattern of reflection points shown in FIG. 5 and FIG. 6 for both end mirrors 1, 2 and beam paths, respectively in the order of FIG Reflection points 1-8.
  • the different directions of the two beam paths result in opposite directions of rotation.
  • the laser beam After passing through the second beam path, the laser beam is finally guided out of the resonator again as output laser beam AS, which is shown in FIG.
  • the focusing mirror 3 is arranged so that it causes for the output laser beam AS after passing through the second beam path parallel to the resonator axis OA beam offset.
  • the resonator or the mirror arrangement may have a separation mirror 6 shown in FIG. 8 and separating the input laser beam ES and the output laser beam AS.
  • FIGS. 9-10 show the illustration of a second exemplary embodiment of the invention
  • the integration of the second exemplary embodiment of the mirror arrangement according to the invention into an exemplary laser system for generating or amplifying femtosecond or picosecond pulses is shown in FIG.
  • the laser system is designed as mode-locked laser arrangements according to the principle of pulse decoupling or cavity dumping, with Nd: YV0 4 crystals as laser media XTAL1 and XTAL2.
  • Nd YV0 4 crystals as laser media XTAL1 and XTAL2.
  • a saturable absorber mirror SESAM for generating a mode coupling
  • a Pockels cell PC quarter-wave plate ⁇ / 4 and a thin-film polarizer TFP used as pulse extraction components and laser diode sources LD1 and LD2 for pumping the laser media XTAL1 and XTAL2.
  • a photodiode PD a pulse delay generator PDG and a high-voltage supply HVD for the BBO Pockels cell PC and mirror elements M1 to M13
  • the Herriott cell HZ shown in FIGS. 9 and 10 being formed by the mirror elements M8-M13 is and the mirror element M3 represents the output mirror of the laser system.
  • the mirror elements M9 and MIO are used for the Herriott cell as the input and output coupling mirror, the mirror element M8 serving as the focusing mirror.
  • the mirror element M11 which serves as the second end mirror of the Herriott cell, has a radius of curvature of 1600 mm, whereas the mirror elements M12 and M13, which serve as first end mirrors and folding mirrors, are made flat.
  • the mirror elements M1 and M4 are dichroic mirrors which are in conjunction with the fiber-coupled ones Laser diode sources LD1 and LD2 serve as pumping arrangements. With this arrangement, powers between 7.8 W are achieved at repetition rates of 500 kHz and 10 W at 1 MHz.
  • the illustrated laser system is only an example of the use of a mirror assembly according to the invention, so that its use is not limited thereto.
  • the mirror arrangement according to the invention or the beam guidance method according to the invention can be used for a laser beam in a multiplicity of laser systems if a compact and / or robust resonator or an integration of large beam distances is to take place there in a limited space.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Laser Surgery Devices (AREA)
  • Radiation-Therapy Devices (AREA)

Abstract

L'invention concerne un agencement de miroirs servant au guidage d'un faisceau laser dans un système laser, ledit agencement comportant au moins un premier miroir d'extrémité (1) et un second miroir d'extrémité (2), lesdits miroirs d'extrémité (1, 2) définissant un résonateur présentant un axe optique de résonateur (OA). Le faisceau laser est guidé dans le résonateur en tant que faisceau laser d'entrée (ES) et, après réflexion multiple sur chacun des premier et second miroirs d'extrémité (1, 2), est guidé hors du résonateur en tant que faisceau laser de sortie (AS). La succession des réflexions sur le premier et le second miroir d'extrémité (1, 2) détermine un sens de rotation défini comme axe de rotation par rapport à l'axe du résonateur (OA), entre le premier et le second miroir d'extrémité dans le résonateur, une première trajectoire de faisceau étant alors définie et le faisceau laser circulant dans le résonateur entre le premier et le second miroir d'extrémité selon un sens de rotation défini comme axe de rotation par rapport à l'axe du résonateur (OA). Le résonateur est conçu de telle manière que le sens de rotation soit inversé en un point d'inversion et que le faisceau laser traverse le résonateur dans une direction de rotation au moins partiellement à contre-courant de la première trajectoire de faisceau, une seconde trajectoire de faisceau étant alors définie.
EP10781675A 2009-11-26 2010-11-19 Agencement de miroirs servant au guidage d'un faisceau laser dans un système laser et procédé de guidage d'un faisceau laser Withdrawn EP2504894A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP10781675A EP2504894A1 (fr) 2009-11-26 2010-11-19 Agencement de miroirs servant au guidage d'un faisceau laser dans un système laser et procédé de guidage d'un faisceau laser

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP09177261A EP2328243A1 (fr) 2009-11-26 2009-11-26 Agencement de miroir destiné au guidage d'un faisceau laser dans un système laser et procédé de guidage de faisceau pour un faisceau laser
EP10781675A EP2504894A1 (fr) 2009-11-26 2010-11-19 Agencement de miroirs servant au guidage d'un faisceau laser dans un système laser et procédé de guidage d'un faisceau laser
PCT/EP2010/067825 WO2011064147A1 (fr) 2009-11-26 2010-11-19 Agencement de miroirs servant au guidage d'un faisceau laser dans un système laser et procédé de guidage d'un faisceau laser

Publications (1)

Publication Number Publication Date
EP2504894A1 true EP2504894A1 (fr) 2012-10-03

Family

ID=42199580

Family Applications (2)

Application Number Title Priority Date Filing Date
EP09177261A Withdrawn EP2328243A1 (fr) 2009-11-26 2009-11-26 Agencement de miroir destiné au guidage d'un faisceau laser dans un système laser et procédé de guidage de faisceau pour un faisceau laser
EP10781675A Withdrawn EP2504894A1 (fr) 2009-11-26 2010-11-19 Agencement de miroirs servant au guidage d'un faisceau laser dans un système laser et procédé de guidage d'un faisceau laser

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP09177261A Withdrawn EP2328243A1 (fr) 2009-11-26 2009-11-26 Agencement de miroir destiné au guidage d'un faisceau laser dans un système laser et procédé de guidage de faisceau pour un faisceau laser

Country Status (10)

Country Link
US (1) US8780947B2 (fr)
EP (2) EP2328243A1 (fr)
JP (1) JP5826186B2 (fr)
KR (1) KR101735429B1 (fr)
CN (1) CN102668276B (fr)
AU (1) AU2010323288B2 (fr)
BR (1) BR112012012658A2 (fr)
CA (1) CA2781030A1 (fr)
IL (1) IL219531A (fr)
WO (1) WO2011064147A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9151940B2 (en) * 2012-12-05 2015-10-06 Kla-Tencor Corporation Semiconductor inspection and metrology system using laser pulse multiplier
WO2017137502A1 (fr) * 2016-02-11 2017-08-17 Tom Rubin Cellule à long parcours
EP3264038A1 (fr) * 2016-06-30 2018-01-03 HILTI Aktiengesellschaft Procede de comparaison d'un faisceau de reception se produisant sur un recepteur laser a l'aide d'un faisceau laser rotatif
KR101929329B1 (ko) * 2017-02-03 2018-12-18 주식회사 이오테크닉스 씬디스크 레이저 장치
KR102025759B1 (ko) * 2017-12-06 2019-09-26 주식회사 이오테크닉스 씬디스크 레이저 장치
EP3747089B1 (fr) * 2018-01-29 2024-03-06 Idea Machine Development Design & Production Ltd. Laser coaxial compact
DE102020204808A1 (de) * 2020-04-16 2021-10-21 Trumpf Laser Gmbh Vorrichtung zur spektralen Verbreiterung von Laserpulsen

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Publication number Priority date Publication date Assignee Title
US7022A (en) * 1850-01-15 Cideb-mill
US3437954A (en) 1965-03-31 1969-04-08 Bell Telephone Labor Inc Optical delay line devices
JPH04134890A (ja) * 1990-09-27 1992-05-08 Okuma Mach Works Ltd レーザ発振器
AT408589B (de) * 1999-07-07 2002-01-25 Femtolasers Produktions Gmbh Laservorrichtung
EP1588461B8 (fr) 2003-01-28 2007-12-12 High Q Laser Production GmbH Dispositif replie pour guider le faisceau dans un laser
US20070223540A1 (en) * 2006-01-27 2007-09-27 Time-Bandwidth Products Ag Pulsed laser

Also Published As

Publication number Publication date
US8780947B2 (en) 2014-07-15
AU2010323288B2 (en) 2014-06-12
CN102668276A (zh) 2012-09-12
US20130114631A1 (en) 2013-05-09
JP2013512557A (ja) 2013-04-11
KR20120105016A (ko) 2012-09-24
CN102668276B (zh) 2014-10-29
IL219531A (en) 2015-09-24
WO2011064147A1 (fr) 2011-06-03
IL219531A0 (en) 2012-06-28
AU2010323288A1 (en) 2012-05-24
JP5826186B2 (ja) 2015-12-02
BR112012012658A2 (pt) 2017-09-26
CA2781030A1 (fr) 2011-06-03
KR101735429B1 (ko) 2017-05-15
EP2328243A1 (fr) 2011-06-01

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