Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F27—FURNACES; KILNS; OVENS; RETORTS
  • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
  • F27D3/00—Charging; Discharging; Manipulation of charge
  • F27D3/0084—Charging; Manipulation of SC or SC wafers
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
  • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
  • H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces

Definitions

• the present invention relates to the field of support devices, also called shovels, used for charging batches of plates or "wafers" in heat treatment furnaces.
• These devices consist of a body comprising a handle for handling the plates (transporting the plates in the oven and outside thereof) extended by a loading part which supports a lot of plates generally arranged in a basket.
• Known loading carriers generally consist at least in part of monolithic silicon carbide (SiC) such as the material Crystrar® Reaction Bonded (RB) from the company Saint Gobain which is a silicon-SiC material.
• SiC monolithic silicon carbide
• RB Crystrar® Reaction Bonded
• this type of material has high thermomechanical properties, which makes it possible to reduce the stresses on the plates, and in particular those of large dimensions (up to 30 cm side or diameter).
• the loading supports made of monolithic ceramic material remain fragile in the face of both mechanical and thermal shocks (in particular during the cooling phases). Once damaged, even locally, it is all the support that must be changed.
• the present invention aims to overcome the aforementioned disadvantages by providing a support device for loading plates in a heat treatment furnace which can be made in different sizes easily, that is to say without requiring the use of molds. specific for each size of support, and this while having a good resistance to thermomechanical stresses.
• a support device for loading plates or substrates in a heat treatment furnace characterized in that it comprises at least first and second structural members made of thermostructural composite material, the first element forming the handle of the device while the second element forms the loading part of said device, and in that said first and second elements are assembled together by a removable fastening system.
• each element is made of thermostructural composite material (ceramic matrix composite materials (CMC)) which is known for its good mechanical properties and its ability to retain these properties at high temperature.
• CMC ceramic matrix composite materials
• each element of the support device of the invention being linked together by removable links, it is possible to repair or change only the damaged element while retaining the rest of the device.
• Each element can be made of a thermostructural composite material best suited to the environmental conditions to which it must be subjected.
• the first element forming the handle of the device will not be exposed to temperatures as high as the second and third elements since it is not introduced into the oven. However, it undergoes significant torsional and bending stresses because it corresponds to the part of the support by which the support is manipulated when a load is present on the second and third elements.
• the first element comprises a honeycomb core of refractory material and a skin made of a fibrous reinforcement of carbon fibers or ceramic, said reinforcement being densified by a matrix at least partly ceramic.
• the matrix comprises a first carbon phase and a second silicon carbide phase.
• the skin of the first element consisting of a reinforcement is made of carbon fiber densified by a silicon carbide matrix.
• the second element is intended to undergo significant thermal shocks especially during removal from the oven.
• the second element comprises a fibrous reinforcement obtained by three-dimensional weaving of carbon or ceramic son and densified by a matrix at least partly ceramic.
• the matrix comprises a first carbon phase and a second silicon carbide phase.
• the reinforcement of the second element is made of carbon fibers and the matrix is a silicon carbide matrix.
• the second element comprises a porous core of refractory material, an intermediate layer comprising a portion of the refractory material, a ceramic phase and a refractory solid filler, and a ceramic skin covering said intermediate layer.
• the skin is silicon carbide.
• the support device further comprises a third element of thermostructural composite material, this third being assembled to the second element by a removable fixing system thus forming an extension of the loading portion of the device.
• Other unitary elements may be added to extend the loading portion of the device of the invention. According to the invention, each added element is assembled to the adjacent element by a removable fastening system.
• the third element comprises a porous core of refractory material, an intermediate layer comprising a portion of the refractory material, a ceramic phase and a refractile solid filler, and a ceramic skin covering said intermediate layer.
• Each removable fastening system may comprise one or more screws formed of a carbon fiber reinforcement densified by a ceramic matrix.
• Each removable fastening system may further comprise one or more junction plates for connecting two adjacent elements of said device.
• two adjacent structural elements are interconnected by overlapping the ends opposite the two structural elements, said ends each having a portion of reduced thickness having a complementary shape with respect to the other portion.
• FIG. 1 is an exploded schematic view of a loading support device according to an embodiment of the invention
• FIGS. 1A and 1B are detailed views showing the fastening systems of the elements of the device of FIG. 1,
• FIG. 2 is a schematic view showing the support device of FIG. 1 after assembly
• FIG. 3 is a schematic view showing the loading of plates on the loading support device of FIG. 2,
• Figure 4 is a schematic perspective view showing the loading of the plates in a heat treatment furnace by means of a loading support device according to the invention.
• Figure 1 shows a support device or shovel 100 for loading plates or substrates in a heat treatment furnace according to an embodiment of the invention.
• the support device 100 comprises a first element 110 forming the handle of the support, a second element 120 and a third element 130, the second and third elements forming the loading part of the support device which is intended to be introduced into the furnace of heat treatment.
• the loading device comprises three unitary elements.
• the loading device according to the invention may also comprise only two elements such as, for example, the first element 110 forming the handle of the device and the second element 120 which, in this case, forms on its own the loading part of the device. device.
• the loading device according to the invention may comprise more than three unitary elements. In general, the number of unit elements is chosen as a function of the length of the loading device that one wishes to achieve.
• the first element 110 has a parallelepipedal shape and has a first end 111 adapted to cooperate with a stand 140 allowing the handling of the support device and a second end 112 adapted to be fixed to a first end 121 of the second element 120.
• the second end 112 comprises a first portion 1120 extended by a second portion of reduced thickness 1121 ( Figure 1A).
• the second element 120 has a first end 121 adapted to be fixed on the second end 112 of the first element. More specifically, the first end 121 comprises a first portion 1210 extended by a second portion of reduced thickness 1211.
• the portions of reduced thickness 1121 and 1211 have an identical length so as to completely overlap during assembly of the first and second members 110 and 120 as illustrated in FIG. 2.
• the ends 112 and 121 having complementary, they define, once assembled, two flat bearing surfaces for holding plates 161 and 162 respectively disposed on each side of the ends 112 and 121.
• Fixing the first element 110 with the second element 120 is provided by a removable fastening system 160 comprising the plates 161 and 162 and screws 1631 and 1641. More specifically, the first element is assembled with the second element by clamping the plates. 161 and 162, by means of the screws 1631 and 1641 passing through the two ends 112 and 121 via orifices 1124 and 1224 formed respectively in these two ends.
• the plate 161 comprises two orifices 1610 having a thread adapted to cooperate with that of the two screws 1641 and two orifices 1611 for the other two screws 1631.
• the plate 162 has two orifices 1620 having a thread capable of cooperating with the two screws 1631 and two orifices 1621 passage for the other two screws 1641.
• the second element 120 extends from its first end 121 by a flared portion 122 which itself is extended by a portion 123 having a geometry adapted to receive a basket 180 ( Figures 3 and 4).
• the third element extends longitudinally between a first end 131, intended to be connected to the second end 124 of the second element 120, and a second end 132 forming the free end of the support device 100.
• the third element 130 has identical geometry to that of the portion 123 of the second element 120.
• the first end 131 of the third element is fixed to the second end 124 of the second element 120 by a removable fastening system 170 comprising holding plates 126, 127,
• the plates 126, 127, 133 and 134 are respectively disposed in recesses 1270, 1280, 1330 and 1340 formed in the second and third elements 120 and 130 ( Figure 1B).
• the fixing of the third element 130 with the second element 120 is ensured by the clamping of the plates 126, 127, 133 and 134, by means of the screws 128 and 135 passing through the two ends 131 and 124 via orifices 1310 and 1240 formed respectively in these two ends.
• the plates 126 and 127 each comprise respectively two orifices 1260 and 1270 having a thread capable of cooperating with that of the screws 135 and two orifices 1261 and 1271 passing through the screws 128.
• the plates 133 and 134 each respectively comprise two orifices. 1330 and 1340 having a thread adapted to cooperate with that of the screws 128 and two orifices 1331 and 1341 for the screws 135.
• the plates 161, 162 and the screws 1641, 1631 form a first removable fastening system 160 which allows the disassembly of the first and second elements 110 and 120.
• the first element 110 comprises a honeycomb core of refractory material and a skin consisting of a fibrous reinforcement of carbon or ceramic fibers, in particular SiC, the reinforcement being densified by a matrix at least partly ceramic.
• a preform of the core of the first element 110 is machined in a block of carbon foam.
• the skin reinforcement of the first element 110 is made from a fibrous texture made of carbon fibers or SiC.
• the fibrous textures used may be of various types such as, in particular:
• UD Unidirectional web
• nD multidirectional webs
• the reinforcement is then densified by a matrix at least partly ceramic.
• the densification of the reinforcement can be carried out liquid by impregnating the latter with a precursor resin of an SiC matrix such as, for example, a polycarbosilane (PCS) or polytitanocarbosilane (PTCS) or polysilazane (PSZ) type resin.
• a precursor resin of an SiC matrix such as, for example, a polycarbosilane (PCS) or polytitanocarbosilane (PTCS) or polysilazane (PSZ) type resin.
• the reinforcement is further impregnated, before the impregnation with the precursor resin of SiC, with a precursor resin of the carbon matrix such as a phenolic type resin.
• the reinforcement is disposed on the core preform and is held in shape on the latter using a holding tool.
• the resin or resins are then converted (polymerization / carbonization) by heat treatment.
• the operations impregnation and polymerization / carbonization can be repeated several times if necessary to obtain specific mechanical characteristics.
• the densification of the fiber preform may also be carried out, in a known manner, by gaseous means by chemical vapor infiltration of the carbon matrix (CVI).
• CVI carbon matrix
• a densification combining liquid and gaseous is sometimes used to facilitate implementation, limit costs and production cycles.
• a first element 110 is thus obtained which has a relatively low mass while having a very good resistance to bending and twisting.
• the second element 120 comprises a fiber reinforcement densified by a matrix at least partly ceramic.
• the fiber reinforcement is obtained by three-dimensional weaving (3D) carried out in a known manner by means of a Jacquard weaving loom on which a bundle of warp yarns or strands has been arranged in a plurality of layers, the warp yarns being linked by weft threads.
• 3D weaving can be interlock weave.
• Interlock weaving is here understood to mean a weave in which each layer of weft threads binds several layers of warp yarns with all the threads of the same weft column having the same movement in the plane of the weave. .
• the fibrous reinforcement of the second member 120 may be woven from carbon fiber yarns or ceramic such as silicon carbide.
• the densification of the fibrous reinforcement consists in filling the porosity of the reinforcement, in all or part of the volume thereof, with the material constituting the matrix.
• the densification of the reinforcement can be carried out by a liquid route by impregnating the latter with a precursor resin of an SiC matrix such as, for example, a polycarbosilane (PCS) or polytitanocarbosilane (PTCS) or polysilazane (PSZ) type resin.
• a precursor resin of an SiC matrix such as, for example, a polycarbosilane (PCS) or polytitanocarbosilane (PTCS) or polysilazane (PSZ) type resin.
• the reinforcement is further impregnated, before the impregnation with the precursor resin of SiC, with a precursor resin of the carbon matrix such as a phenolic type resin.
• the reinforcement After impregnation, the reinforcement is maintained in shape on the latter using a holding tool.
• the resin or resins are then converted (polymerization / carbonization) by heat treatment.
• the impregnation and polymerization / carbonization operations can be repeated several times if necessary to obtain specific mechanical characteristics.
• the densification of the reinforcement may also be carried out, in a known manner, by gaseous means by chemical vapor infiltration of the carbon matrix (CVI).
• CVI carbon matrix
• a densification combining liquid and gaseous is sometimes used to facilitate implementation, limit costs and production cycles.
• the second element 120 comprises a porous core of refractory material, an intermediate layer comprising a part of the refractory material, a phase ceramic and a refractory solid filler, and a ceramic skin covering said intermediate layer.
• the preform of the core is machined in a thermostructural composite material starting from very low density but which has sufficient rigidity to allow its machining.
• the constituent material of the preform may be any type of refractory material provided that it is porous and machinable.
• the materials used may be, for example, carbon, silicon carbide, alumina, etc. They may be in various forms such as a foam or a composite material comprising a fiber reinforcement consolidated by a matrix, such as the composite materials C / C or C / SiC formed from a fibrous reinforcement or carbon foams or silicon carbide which has, for example, a volume ratio of porosity greater than or equal to 80%.
• the porous core is formed from a carbon / carbon composite material (C / C) formed of a carbon fiber reinforcement pre-densified or consolidated by a carbon matrix.
• This material can be machined easily, for example by milling, which makes it possible to produce complex shapes.
• the reinforcement is formed of a carbon fiber felt having a relatively low fiber ratio.
• the fibers are linked together by a carbon matrix. Consolidation of the reinforcement may be performed by liquid impregnation thereof with a liquid composition containing a carbon precursor and then carbonizing at a controlled temperature and pressure.
• the consolidation can be performed by gas.
• the reinforcement is placed in an oven in which a reactive gas phase is admitted.
• the pressure and the temperature prevailing in the furnace and the composition of the gas phase are chosen so as to allow the diffusion of the gas phase within the porosity of the preform to form the matrix by deposition, in contact with the fibers, of a solid material resulting from a decomposition of a constituent of the gas phase or a reaction between several constituents.
• the densification must be adjusted to mechanically bind the fibers of carbon at least at their intersections by the matrix while maintaining a volume rate of porosity of the resulting material important (eg greater than or equal to 80%).
• a liquid coating composition comprising a refractile solid filler in the form of a powder, in particular a ceramic powder, a ceramic precursor polymer and a possible solvent for the polymer.
• the liquid composition preferably comprises a polymer solvent of the ceramic precursor, the quantity of solvent being chosen in particular to adjust the viscosity of the composition.
• the liquid composition can be applied by brush, brush or other method, for example by spray guns. It can be applied in several successive layers. After each layer, an intermediate crosslinking of the ceramic precursor polymer can be carried out.
• the ceramic material obtained by the liquid route can be SiC, the ceramic precursor polymer can then be chosen from PCS and PTCS, precursors of SiC or from silicones.
• Other ceramic materials can be obtained by liquid means such as S13 silicon nitride from polysilazane pyrolyzed under ammonia gas or boron nitride BN from polyborazine.
• the solid filler may comprise a refractory powder, in particular a ceramic powder such as a carbide powder such as SiC, a nitride or boride powder.
• a ceramic powder such as a carbide powder such as SiC, a nitride or boride powder.
• the particle size of the powder is chosen so that the grains have an average size of preferably less than 100 microns, for example between 5 and 50 microns.
• the particle size is indeed chosen so that the powder grains have a sufficiently small dimension to penetrate the surface porosity of the composite material, but not too small to allow a superficial diffusion of gas in the preform during the subsequent step of chemical vapor infiltration. In this way, a good adhesion of the coating formed during this subsequent step of chemical vapor infiltration can be obtained by anchoring in the surface porosity of the material.
• a mixture of ceramic powders having at least two different average particle sizes is used to meet these conditions.
• the mass amount of solid filler in the liquid composition is preferably from 0.4 to 4 times the amount by weight of ceramic precursor polymer.
• the preform then comprises on all its external surfaces a coating layer which at least partially closes the macroporosities of the material of the preform to a limited depth from the surface of the part.
• the part thus comprises a lower porosity layer in the vicinity of its surface in comparison with its initial porosity which is always present in the heart of the room and which forms the core of the structure.
• This intermediate coating layer is a barrier that will limit the diffusion of gases to preserve the porosity of the core and allow the formation of a surface deposit during the chemical infiltration step.
• a ceramic deposition is performed by chemical vapor infiltration on all the external surfaces of the part. This deposit makes it possible to gradually fill in the residual porosity, to consolidate the assembly formed by the phase resulting from the crosslinking of the precursor and the solid filler, and to form a uniform coating of ceramic which forms a ceramic skin on all the external surfaces of the room. This skin gives the necessary stiffness to the entire structure.
• the infiltration is carried out in an oven in which is admitted a gaseous precursor of ceramics, especially SiC such as methyltrichlorosilane (MTS) giving SiC by decomposition of the MTS.
• a gaseous precursor of ceramics especially SiC such as methyltrichlorosilane (MTS) giving SiC by decomposition of the MTS.
• MTS methyltrichlorosilane
• the monolithic SiC thus obtained has a Young's modulus of about 420 GPa, which makes it possible to have a significant stiffness on the surface of the part.
• other gaseous precursors of ceramics can be used depending on the desired stiffness or other properties.
• a laminated structure which comprises a core essentially made of porous C / C composite material sandwiched between an intermediate layer mainly comprising a portion of the C / C composite material whose matrix is further composed of a ceramic phase and the solid filler. , and a ceramic skin.
• the second element thus obtained has a low apparent density (less than or equal to 1) while having a high stiffness imparted by the ceramic skin, which allows the second element 120 to be both light and very resistant vis-à-vis -vis the bending and thermal shock.
• the third member 130 comprises a porous core of refractory material, an intermediate layer comprising a portion of the refractory material, a ceramic phase and a refractile solid filler, and a ceramic skin covering said intermediate layer. It is made in the same manner as that described above for the second element 120.
• the third element 130 therefore also has both a low mass and a very good resistance to the bending and thermal shock.
• the screws 1631, 1641, 128 and 135 used to fix the elements 110, 120 and 130 between them are preferably made of composite material C / SiC in order to limit the differential expansion with these elements.
• These screws are, for example, made from a fiber reinforcement obtained by three-dimensional weaving of carbon fiber son and densified by an SiC matrix (liquid and / or gaseous route).
• the removable fastening systems between the elements 110, 120 and 130 can be made by a "half-wood" type fitting, that is to say by overlapping and screwing (directly into the ends of the elements or via holding plates) of the two ends of the elements to be assembled as described above for the assembly of the first element 110 with the second element 120.
• elements 110, 120 and 130 may also be interconnected by holding plates or junction screwed together as previously described for the assembly of the second element 120 with the third element 130.
• the support device 100 is adapted to be used in the same way as the support devices or shovels of the prior art.
• a basket 180 in which are placed plates or wafer 190 to be treated is deposited, via a support 183, on the second and third elements 120, 130, the basket 180 further comprising two repositions 181 and 182 for depositing the basket on the oven floor.
• the assembly can then be manipulated to deposit the basket 180 containing the plates 190 in a furnace 200 for heat treatment ( Figure 4).
• the second and third elements 120 and 130 having a very good resistance to bending and thermal shock, the plates 190 can be deposited in the oven and removed from it without risk of breaking the support device of the invention.

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• 2009
  • 2009-10-07 FR FR0956979A patent/FR2950959B1/fr not_active Expired - Fee Related
• 2010
  • 2010-10-07 WO PCT/FR2010/052114 patent/WO2011042666A1/fr active Application Filing
  • 2010-10-07 EP EP10782334A patent/EP2486353A1/de not_active Withdrawn

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