EP2379981A4 - Optische bildgebung zur inspektion optischer geräte - Google Patents

Optische bildgebung zur inspektion optischer geräte

Info

Publication number
EP2379981A4
EP2379981A4 EP10732068.1A EP10732068A EP2379981A4 EP 2379981 A4 EP2379981 A4 EP 2379981A4 EP 10732068 A EP10732068 A EP 10732068A EP 2379981 A4 EP2379981 A4 EP 2379981A4
Authority
EP
European Patent Office
Prior art keywords
optical
device inspection
imaging
optical device
optical imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10732068.1A
Other languages
English (en)
French (fr)
Other versions
EP2379981B1 (de
EP2379981A2 (de
Inventor
Mark E Froggatt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Luna Innovations Inc
Original Assignee
Luna Innovations Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Luna Innovations Inc filed Critical Luna Innovations Inc
Publication of EP2379981A2 publication Critical patent/EP2379981A2/de
Publication of EP2379981A4 publication Critical patent/EP2379981A4/de
Application granted granted Critical
Publication of EP2379981B1 publication Critical patent/EP2379981B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
    • G01B9/02014—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation by using pulsed light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/35—Testing of optical devices, constituted by fibre optics or optical waveguides in which light is transversely coupled into or out of the fibre or waveguide, e.g. using integrating spheres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
EP10732068.1A 2009-01-17 2010-01-14 Optische bildgebung zur inspektion optischer geräte Active EP2379981B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14552709P 2009-01-17 2009-01-17
PCT/US2010/020976 WO2010083269A2 (en) 2009-01-17 2010-01-14 Optical imaging for optical device inspection

Publications (3)

Publication Number Publication Date
EP2379981A2 EP2379981A2 (de) 2011-10-26
EP2379981A4 true EP2379981A4 (de) 2015-02-25
EP2379981B1 EP2379981B1 (de) 2017-11-01

Family

ID=42340281

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10732068.1A Active EP2379981B1 (de) 2009-01-17 2010-01-14 Optische bildgebung zur inspektion optischer geräte

Country Status (4)

Country Link
US (1) US8537367B2 (de)
EP (1) EP2379981B1 (de)
JP (1) JP5540017B2 (de)
WO (1) WO2010083269A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108645600A (zh) * 2018-04-28 2018-10-12 海正药业(杭州)有限公司 一种弥散光纤发光均匀性检测仪及其检测方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2780691A4 (de) * 2011-11-16 2015-07-01 Luna Innovations Inc Verfahren und vorrichtung für ofdr-based elektrophorese
US9429696B2 (en) 2012-06-25 2016-08-30 Intuitive Surgical Operations, Inc. Systems and methods for reducing measurement error in optical fiber shape sensors
US8909040B1 (en) 2013-02-05 2014-12-09 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method and apparatus of multiplexing and acquiring data from multiple optical fibers using a single data channel of an optical frequency-domain reflectometry (OFDR) system
FR3014200B1 (fr) * 2013-12-02 2017-05-26 Commissariat Energie Atomique Controle de structure industrielle
US9587834B2 (en) * 2014-02-13 2017-03-07 Siemens Energy, Inc. Flashback detection in gas turbine engines using distributed sensing
US9876575B2 (en) * 2014-04-30 2018-01-23 Infinera Corporation Hybrid optical transmitter and/or receiver structure
US9791346B1 (en) * 2016-04-20 2017-10-17 Stmicroelectronics Sa Semiconductor device and wafer with reference circuit and related methods
DE102017101626B4 (de) 2017-01-27 2018-09-13 Carl Zeiss Ag Vorrichtungen, Verfahren und Probenhalter zum Testen von photonischen integrierten Schaltungen sowie photonische integrierte Schaltungen
FR3077887B1 (fr) 2018-02-13 2021-07-23 St Microelectronics Crolles 2 Sas Puce optoelectronique et procede de test de circuits photoniques d'une telle puce
FR3077888B1 (fr) 2018-02-13 2020-02-28 Stmicroelectronics (Crolles 2) Sas Puce optoelectronique et procede de test de circuits photoniques d'une telle puce
US11182399B2 (en) * 2018-09-04 2021-11-23 Spirent Communications, Inc. Effective correlation of multiple time-series result sets
US11048053B2 (en) * 2019-11-27 2021-06-29 The Charles Stark Draper Laboratory, Inc. Movable flexure and MEMS elements for improved optical coupling to photonic integrated circuits
US11513228B2 (en) 2020-03-05 2022-11-29 Santec Corporation Lidar sensing arrangements
US11486792B2 (en) * 2020-06-05 2022-11-01 Santec Corporation Tunable light source for optical fiber proximity and testing
US11499923B2 (en) 2020-09-30 2022-11-15 Openlight Photonics, Inc. On-chip photonic integrated circuit optical validation
CN117242324A (zh) 2021-03-11 2023-12-15 应用材料公司 测量光学薄膜及光学基板的光损耗的方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301148A (ja) * 1988-05-30 1989-12-05 Shimadzu Corp 赤外線散乱トモグラフィ装置
US5202745A (en) * 1990-11-07 1993-04-13 Hewlett-Packard Company Polarization independent optical coherence-domain reflectometry
US5268741A (en) * 1992-01-31 1993-12-07 Hewlett-Packard Company Method and apparatus for calibrating a polarization independent optical coherence domain reflectometer
US5844235A (en) * 1995-02-02 1998-12-01 Yokogawa Electric Corporation Optical frequency domain reflectometer for use as an optical fiber testing device
US5798521A (en) 1996-02-27 1998-08-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Apparatus and method for measuring strain in bragg gratings
US6069698A (en) * 1997-08-28 2000-05-30 Olympus Optical Co., Ltd. Optical imaging apparatus which radiates a low coherence light beam onto a test object, receives optical information from light scattered by the object, and constructs therefrom a cross-sectional image of the object
JPH1172431A (ja) * 1997-08-28 1999-03-16 Olympus Optical Co Ltd 光断層イメージング装置
US6201608B1 (en) * 1998-03-13 2001-03-13 Optical Biopsy Technologies, Inc. Method and apparatus for measuring optical reflectivity and imaging through a scattering medium
US7187810B2 (en) 1999-12-15 2007-03-06 Medispectra, Inc. Methods and systems for correcting image misalignment
US7440087B2 (en) * 2004-02-24 2008-10-21 Luna Innovations Incorporated Identifying optical fiber segments and determining characteristics of an optical device under test based on fiber segment scatter pattern data
JP2006052992A (ja) * 2004-08-10 2006-02-23 Fuji Xerox Co Ltd 光導波路配線基板又は光電気混載基板の検査方法
US8004686B2 (en) * 2004-12-14 2011-08-23 Luna Innovations Inc. Compensating for time varying phase changes in interferometric measurements
EP1869511B1 (de) * 2005-03-10 2012-08-01 Luna Innovations, Inc. Berechnung der doppelbrechung in einem wellenleiter auf der basis der rayleigh-streuung
EP1746403A1 (de) * 2005-07-19 2007-01-24 Agilent Technologies, Inc. Optische Reflektometrieanalyse mit einer Zeitanpassung auf Teil-Ansprechsignalen
CA2626116C (en) * 2005-10-11 2012-08-21 Duke University Systems and method for endoscopic angle-resolved low coherence interferometry
KR101024266B1 (ko) * 2006-05-09 2011-03-29 도쿄엘렉트론가부시키가이샤 촬상 위치 보정 방법, 촬상 방법, 기판 촬상 장치 및, 컴퓨터 프로그램이 기록된 기록 매체
US8175685B2 (en) * 2006-05-10 2012-05-08 The General Hospital Corporation Process, arrangements and systems for providing frequency domain imaging of a sample
US7538883B2 (en) * 2006-06-16 2009-05-26 Luna Innovations Incorporated Distributed strain and temperature discrimination in polarization maintaining fiber
EP3540401B1 (de) * 2006-07-26 2021-03-31 Intuitive Surgical Operations, Inc. Hochauflösende interferometrische optische frequenzbereichsreflektometrie (ofdr)
JP2008122295A (ja) * 2006-11-14 2008-05-29 Kitasato Gakuen オプティカル・コヒーレンス・トモグラフィー装置
US8116624B1 (en) * 2007-01-29 2012-02-14 Cirrex Systems Llc Method and system for evaluating an optical device
JP4871791B2 (ja) * 2007-06-07 2012-02-08 株式会社山武 光コヒーレンストモグラフィ装置

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
H. GERSEN ET AL: "Real-Space Observation of Ultraslow Light in Photonic Crystal Waveguides", PHYSICAL REVIEW LETTERS, vol. 94, no. 7, 25 February 2005 (2005-02-25), XP055162142, ISSN: 0031-9007, DOI: 10.1103/PhysRevLett.94.073903 *
KOKUBUN Y ET AL: "Direct measurement of propagation constant in optical waveguides by heterodyne scattering detection (HSD) method", IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 7, no. 12, 12 December 1995 (1995-12-12), pages 1465 - 1467, XP011424948, ISSN: 1041-1135, DOI: 10.1109/68.477284 *
PARK Y ET AL: "Optical frequency domain reflectometry based on real-time Fourier transformation", OPTICS EXPRESS, OSA (OPTICAL SOCIETY OF AMERICA), WASHINGTON DC, (US), vol. 15, no. 8, 3 April 2007 (2007-04-03), pages 4597 - 4616, XP002541512, ISSN: 1094-4087 *
SERGEY BOZHEVOLNYI ET AL: "Near-field imaging of light propagation in photonic crystal waveguides: Explicit role of Bloch harmonics", PHYSICAL REVIEW B, vol. 66, no. 23, 10 December 2002 (2002-12-10), XP055161791, ISSN: 0163-1829, DOI: 10.1103/PhysRevB.66.235204 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108645600A (zh) * 2018-04-28 2018-10-12 海正药业(杭州)有限公司 一种弥散光纤发光均匀性检测仪及其检测方法
CN108645600B (zh) * 2018-04-28 2021-01-22 海正药业(杭州)有限公司 一种弥散光纤发光均匀性检测仪及其检测方法

Also Published As

Publication number Publication date
JP2012515350A (ja) 2012-07-05
US8537367B2 (en) 2013-09-17
JP5540017B2 (ja) 2014-07-02
EP2379981B1 (de) 2017-11-01
WO2010083269A2 (en) 2010-07-22
US20110273719A1 (en) 2011-11-10
EP2379981A2 (de) 2011-10-26
WO2010083269A3 (en) 2010-10-21

Similar Documents

Publication Publication Date Title
EP2379981A4 (de) Optische bildgebung zur inspektion optischer geräte
EP2395343A4 (de) Optische bildmessungsvorrichtung
GB2516780B (en) Apparatus for optical sensing
EP2415392A4 (de) Optische bildmessvorrichtung
EP2301423A4 (de) Optisches bildmessgerät
GB0902569D0 (en) An optical device
EP2347692A4 (de) Bildgebungsvorrichtung
EP2430827A4 (de) Bildaufnahmevorrichtung
EP2422269A4 (de) Vorrichtung zur optischen positionserkennung
EP2581028A4 (de) Bildgebungsvorrichtung für endoskope
EP2508946A4 (de) Vorrichtung für stereoskopische bilder
EP2421238A4 (de) Bildlesevorrichtung
GB2488283B (en) Image Processing device
HK1160712A1 (en) Imaging device
GB2475006B (en) Inspection device
GB201205249D0 (en) Imaging device
EP2472851A4 (de) Bildaufnahmevorrichtung
EP2518999A4 (de) Bildgebungsvorrichtung
GB0909295D0 (en) Optical apparatus
EP2519997A4 (de) Optische vorrichtung
IL198719A0 (en) Optical imaging system
EP2518472A4 (de) Optische bildmessvorrichtung
EP2352064A4 (de) Optische vorrichtung und bildgebungsvorrichtung
EP2474848A4 (de) Bildgebungsvorrichtung
EP2416362A4 (de) Festkörperabbildungsvorrichtung

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20110707

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20150127

RIC1 Information provided on ipc code assigned before grant

Ipc: H04B 10/07 20130101ALI20150121BHEP

Ipc: H04B 10/00 20130101ALI20150121BHEP

Ipc: G01M 11/00 20060101ALI20150121BHEP

Ipc: G01B 9/02 20060101AFI20150121BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20170127

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: LUNA INNOVATIONS INCORPORATED

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20170821

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: AT

Ref legal event code: REF

Ref document number: 942478

Country of ref document: AT

Kind code of ref document: T

Effective date: 20171115

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602010046371

Country of ref document: DE

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 9

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20171101

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 942478

Country of ref document: AT

Kind code of ref document: T

Effective date: 20171101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180201

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180201

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180202

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180301

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602010046371

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20180802

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180114

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20180131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180131

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180131

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180114

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180114

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20100114

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171101

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20230125

Year of fee payment: 14

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230518

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240129

Year of fee payment: 15

Ref country code: GB

Payment date: 20240129

Year of fee payment: 15