EP2326963A4 - Vorrichtung zum prüfen von integrierten schaltkreisen - Google Patents

Vorrichtung zum prüfen von integrierten schaltkreisen

Info

Publication number
EP2326963A4
EP2326963A4 EP08782943.8A EP08782943A EP2326963A4 EP 2326963 A4 EP2326963 A4 EP 2326963A4 EP 08782943 A EP08782943 A EP 08782943A EP 2326963 A4 EP2326963 A4 EP 2326963A4
Authority
EP
European Patent Office
Prior art keywords
integrated circuitry
testing integrated
testing
circuitry
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08782943.8A
Other languages
English (en)
French (fr)
Other versions
EP2326963A1 (de
Inventor
Stephen John Sleijpen
William John Stacey
Julian Paul Kolodko
Neil Fyfe Edwards
Neil Mcalpin
Eric Patrick O'donnell
John Robert Sheahan
Jason Mark Thelander
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zamtec Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Publication of EP2326963A1 publication Critical patent/EP2326963A1/de
Publication of EP2326963A4 publication Critical patent/EP2326963A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04585—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on thermal bent actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0451—Control methods or devices therefor, e.g. driver circuits, control circuits for detecting failure, e.g. clogging, malfunctioning actuator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
EP08782943.8A 2008-08-19 2008-08-19 Vorrichtung zum prüfen von integrierten schaltkreisen Withdrawn EP2326963A4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/AU2008/001195 WO2010019981A1 (en) 2008-08-19 2008-08-19 Apparatus for testing integrated circuitry

Publications (2)

Publication Number Publication Date
EP2326963A1 EP2326963A1 (de) 2011-06-01
EP2326963A4 true EP2326963A4 (de) 2014-01-22

Family

ID=41706746

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08782943.8A Withdrawn EP2326963A4 (de) 2008-08-19 2008-08-19 Vorrichtung zum prüfen von integrierten schaltkreisen

Country Status (3)

Country Link
EP (1) EP2326963A4 (de)
KR (1) KR101241606B1 (de)
WO (1) WO2010019981A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110441553B (zh) * 2019-09-05 2024-04-05 河南豫力汽车配件制造有限公司 一种测试汽车电磁式电源总开关的多功能简易装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227717A (en) * 1991-12-03 1993-07-13 Sym-Tek Systems, Inc. Contact assembly for automatic test handler
US7151388B2 (en) * 2004-09-30 2006-12-19 Kes Systems, Inc. Method for testing semiconductor devices and an apparatus therefor
WO2008053929A1 (fr) * 2006-11-02 2008-05-08 Tokyo Electron Limited Appareil permettant d'inspecter une structure fine, procédé permettant d'inspecter une structure fine et appareil de support de substrat

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2821046B2 (ja) * 1991-09-05 1998-11-05 三菱電機エンジニアリング株式会社 半導体素子用特性検査装置
JPH09330960A (ja) * 1996-06-08 1997-12-22 Tokyo Electron Ltd 検査装置
US6164894A (en) * 1997-11-04 2000-12-26 Cheng; David Method and apparatus for integrated wafer handling and testing
US6825680B1 (en) * 2000-06-20 2004-11-30 Nortel Networks Limited Automated semiconductor probing device
US6782331B2 (en) * 2001-10-24 2004-08-24 Infineon Technologies Ag Graphical user interface for testing integrated circuits
US6710590B1 (en) * 2002-12-12 2004-03-23 Advantest Corporation Test head Hifix for semiconductor device testing apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227717A (en) * 1991-12-03 1993-07-13 Sym-Tek Systems, Inc. Contact assembly for automatic test handler
US7151388B2 (en) * 2004-09-30 2006-12-19 Kes Systems, Inc. Method for testing semiconductor devices and an apparatus therefor
WO2008053929A1 (fr) * 2006-11-02 2008-05-08 Tokyo Electron Limited Appareil permettant d'inspecter une structure fine, procédé permettant d'inspecter une structure fine et appareil de support de substrat

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2010019981A1 *

Also Published As

Publication number Publication date
KR20110033208A (ko) 2011-03-30
KR101241606B1 (ko) 2013-03-11
EP2326963A1 (de) 2011-06-01
WO2010019981A1 (en) 2010-02-25

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20110316

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA MK RS

DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20140107

RIC1 Information provided on ipc code assigned before grant

Ipc: G01R 31/28 20060101AFI20131219BHEP

Ipc: H01L 21/66 20060101ALI20131219BHEP

Ipc: B41J 2/01 20060101ALI20131219BHEP

Ipc: B41J 2/045 20060101ALI20131219BHEP

Ipc: G01R 1/02 20060101ALI20131219BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ZAMTEC LIMITED

18W Application withdrawn

Effective date: 20140611