EP2320090B1 - High vacuum pump - Google Patents

High vacuum pump Download PDF

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Publication number
EP2320090B1
EP2320090B1 EP10013671.2A EP10013671A EP2320090B1 EP 2320090 B1 EP2320090 B1 EP 2320090B1 EP 10013671 A EP10013671 A EP 10013671A EP 2320090 B1 EP2320090 B1 EP 2320090B1
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EP
European Patent Office
Prior art keywords
lubricant
rotor
vacuum pump
stator
high vacuum
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Application number
EP10013671.2A
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German (de)
French (fr)
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EP2320090A2 (en
EP2320090A3 (en
Inventor
Mirko Mekota
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a high vacuum pump according to the preamble of the first claim, such as from WO 2007/022 332 A2 known.
  • Vacuum pumps of molecular and turbomolecular design have proven to produce high vacuum.
  • a generic vacuum pump has a fast rotating rotor that rotates at tens of thousands of revolutions per minute.
  • Various types of storage are known, including non-contact magnetic bearings and bearings, such as ball bearings with oil or grease lubrication and ceramic balls. These known bearings lead to an electrically insulated suspension of the rotor, so that it can come to a charging of the rotor with appropriate fluids to be pumped.
  • uncontrolled electrical discharge, so-called flashovers, between rotor and stator which lead to mechanical damage to these components and are therefore undesirable.
  • the EP 1 915 512 A2 Suggests two solutions to this problem.
  • the first solution provides a filamentous and conductive body contacting the rotor.
  • the second solution is to generate by geometric design at a specific location flashovers between the rotor and stator.
  • the first solution is disadvantageous in that the body and its contacting point on the rotor are subject to wear due to the contact which occurs even at a low relative speed. The abrasion generated by this wear accumulates in the ball bearing and destroys it.
  • the second solution has the disadvantage that the component to which the flashovers take place, erosion damage occur. This erosion means wear, so that the arrangement lacks long-term stability. After some time, the arrangement does not work anymore and uncontrolled flashovers occur again.
  • the means for lubricating the rolling bearing are adapted such that such a discharge of the rotor is caused to prevent flashovers between the rotor and the stator. Damage to the rotor and stator is thus prevented. Since the already existing means for lubricating the bearing are adjusted and used, this is done advantageously without the use of other components. This is inexpensive and avoids mistakes. In addition, this solution is very low wear compared to the prior art and allows long service life.
  • a further embodiment provides that a conductive feed wick is used. In addition to the advantages mentioned above, this is advantageous because a lasting good discharge due to the constant contact is effected.
  • Another embodiment provides to use a conductive lubricant. This is a virtually completely wear-free solution.
  • the conductive lubricant comprises carbon nanotubes.
  • the addition of these carbon nanotubes causes a well-defined in the sense of the claim formulated to claim 1 sufficiently good conductivity, without a deterioration of the essential properties for use in a high vacuum pump properties of the lubricant occurs.
  • the means is designed as a lubricant circuit. This improves the discharge of the rotor, since an additional transport takes place. This solution is also advantageous in a vibration-decoupled mounting of the rolling bearing in elastomeric bodies, since the discharge via the lubricant circuit and not interrupted by the elastomer body contact from outer ring to housing of the high vacuum pump of the bearing.
  • FIG Fig. 1 A section through a high vacuum pump 100 is shown in FIG Fig. 1 shown.
  • the high vacuum pump has a housing 102 which has a flange 104 and which allows releasable attachment to a container to be evacuated.
  • the flange defines the gas inlet 106.
  • the housing surrounds the components of the stator 120, which includes a bladed stator disk 122 and a spacer 124. Depending on requirements such as pumping speed and compression, the number of stator disks is dimensioned.
  • other molecular pumping principles can be used, for example, according to the Holweck, Siegbahn and 9.kanal principle.
  • the stator cooperates with the rotor 110, which includes a bladed rotor disk 114 and a shaft 112.
  • the number of rotor disks mounted on the shaft corresponds to the number of stator disks.
  • the rotor may also include other pump-active elements that interact with stator elements, such as a Holweck cylinder.
  • a motor coil 128 is disposed in the housing and puts the shaft and thus the rotor in rapid rotation.
  • the shaft is rotatably supported by a permanent magnetic bearing 126.
  • the gas inlet remote end of the shaft is supported by a bearing assembly 170.
  • the bearing assembly comprises a roller bearing 130, which in this example is designed as a grease-lubricated ball bearing.
  • a roller bearing 130 On the shaft sits the inner ring 134 of the ball bearing, the outer ring 132 is supported by means of a Axialschwingringes 140 and a Radialschwingringes 142 in the axial and radial directions swingable in the housing.
  • Axialschwingring and Radialschwingring are designed as electrically non-conductive elastomer rings.
  • Between inner ring and outer ring balls 136 are arranged as rolling elements.
  • a cover plate 144 closes the space between the inner ring and outer ring and holds the lubricant reservoir 144 in the rolling bearing.
  • the lubricant supply contains the grease as a lubricant and is designed as a lifetime lubrication.
  • the described type of bearing with non-contact permanent magnetic bearing and roller bearings causes, especially when ceramic balls are used in the rolling bearing, a good electrical insulation of the rotor relative to the stator.
  • the insulation is removed, in which a conductive grease is used in the lubricant supply.
  • the electrical charging of the rotor is prevented because it is earthed via the rolling bearing and the grease.
  • either axial or radial ring or both may be made of electrically conductive material, such as an embedded conductive material elastomer.
  • an electrical conductor may be provided between the outer ring and the housing.
  • Both fat and axial and radial resonant rings can be loaded with carbon nanotubes for improved electrical conductivity.
  • the achieved conductivity must only be so dimensioned that the charging of the rotor is so low that the field strengths between rotor and stator reach no value that allows discharge by flashover or sparks.
  • the Fig. 2 shows a section through the bearing assembly of the high vacuum pump in an alternative embodiment.
  • This alternative bearing arrangement 270 comprises a ball bearing 230 whose inner ring 234 is fixed on the shaft 212.
  • the outer ring 232 is oscillatable by means of a Axialschwingrings 240 and a Radialschwingrings 242 Housing 202 is supported. Between the inner ring and outer ring are the balls 236.
  • the lubrication takes place through a lubricant circuit 268. This is in Fig. 2 illustrated by arrows. Part of this lubricant circuit is the lubricant reservoir 252. It has at least one supply wick 250 which is in sliding contact with a conically shaped and arranged on the shaft spray nut 256.
  • the lubricant 250 shown by dots is transferred from the lubricant reservoir to the spray nut. About the centrifugal force, the lubricant is conveyed along the cone in the space between the bearing inner ring and bearing outer ring and there causes the lubrication. The lubricant falls from the intermediate space back into the lubricant reservoir and can be re-supplied to the ball bearing there by capillary action via the feed wick in the next circulation of the lubricant circuit.
  • grounding of the rotor via the means for lubricating the ball bearing can be done via two alternative ways, whereby both ways can be realized simultaneously.
  • the lubricant itself can be made conductive. This is achieved by the addition of conductive substances to lubricants, such as graphite. Carbon nanotubes prove to be particularly advantageous. Lubricant circulation and filling of the lubricant reservoir then cause a conductive connection from shaft to housing. The charging of the rotor is thereby kept so low that there is no electrical discharge or spark between the rotor and stator.
  • the feed wick can be made of conductive material.
  • Feed wick and lubricant reservoir comprise a felt-like material which stores the lubricant in its pores and promotes it via capillary action.
  • Electrical conductivity is sufficiently effected by admixture of metallic fibers or conductive carbon fiber.
  • the Fig. 3 shows a section through the bearing assembly of the high vacuum pump in a third embodiment.
  • the bearing assembly 370 has a ball bearing 330. Its inner ring 334 is fixed on the shaft 312. Its outer ring 332 is supported in the housing 302 by means of an axial oscillating ring 340 and a radial oscillating ring 342 in the axial and radial directions.
  • a lubricant-containing lubricant circuit 368 is provided, which in Fig. 3 is illustrated by arrows.
  • the lubricant circuit comprises a lubricant pump 352, which contains the lubricant 350, which in Fig. 3 is illustrated by dots through which feed channel 360 feeds into a feed nozzle 362.
  • the lubricant is conveyed to the conically shaped spray nut 356.
  • the lubricant is conveyed by the centrifugal force along the cone in the ball bearing. From there it enters the drainage channel 364 and through this back into the lubricant pump.
  • the adaptation of the means for lubricating the ball bearing in this example is to carry out the lubricant itself conductive. This is achieved in an advantageous variant via the addition of carbon nanotubes.
  • the lubricant circuit then causes a conductive connection from shaft to housing. As a result, the charging of the rotor is kept so low that none of the electrical discharges occurring between the rotor and the stator occur in the prior art.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung betrifft eine Hochvakuumpumpe nach dem Oberbegriff des ersten Anspruchs, wie beispielsweise aus der WO 2007/022 332 A2 bekannt.The invention relates to a high vacuum pump according to the preamble of the first claim, such as from WO 2007/022 332 A2 known.

Vakuumpumpen nach molekularer und turbomolekularer Bauart haben sich zur Erzeugung von Hochvakuum bewährt. Eine gattungsgemäße Vakuumpumpe weist einen schnell drehenden Rotor auf, der sich mit einigen Zehntausend Umdrehungen pro Minute dreht. Verschiedene Arten der Lagerung sind bekannt, darunter berührungslose Magnetlager und Wälzlager, beispielsweise Kugellager mit Öl- oder Fettschmierung und keramischen Kugeln. Diese bekannten Lagerungen führen zu einer elektrisch isolierten Aufhängung des Rotors, so dass es bei entsprechenden abzupumpenden Fluiden zu einer Aufladung des Rotors kommen kann. In der Folge entstehen unkontrollierte elektrische Entladung, so genannte Überschläge, zwischen Rotor und Stator, die zu einer mechanischen Beschädigung dieser Komponenten führen und daher unerwünscht sind.Vacuum pumps of molecular and turbomolecular design have proven to produce high vacuum. A generic vacuum pump has a fast rotating rotor that rotates at tens of thousands of revolutions per minute. Various types of storage are known, including non-contact magnetic bearings and bearings, such as ball bearings with oil or grease lubrication and ceramic balls. These known bearings lead to an electrically insulated suspension of the rotor, so that it can come to a charging of the rotor with appropriate fluids to be pumped. As a result, uncontrolled electrical discharge, so-called flashovers, between rotor and stator, which lead to mechanical damage to these components and are therefore undesirable.

Die EP 1 915 512 A2 schlägt zur Beseitigung dieses Problems zwei Lösungen vor. Die erste Lösung sieht einen den Rotor berührenden fadenförmigen und leitfähigen Körper vor. Die zweite Lösung besteht darin, durch geometrische Gestaltung an einer gezielten Stelle Überschläge zwischen Rotor und Stator zu erzeugen.The EP 1 915 512 A2 Suggests two solutions to this problem. The first solution provides a filamentous and conductive body contacting the rotor. The second solution is to generate by geometric design at a specific location flashovers between the rotor and stator.

Beide Lösungen weisen Nachteile auf. Die erste Lösung ist nachteilig, da der Körper und die mit ihm in Kontakt befindliche Stelle am Rotor aufgrund der Berührung Verschleiss unterliegt, der selbst bei einer geringen Relativgeschwindigkeit auftritt. Der durch diesen Verschleiß erzeugte Abrieb sammelt sich im Kugellager und zerstört dieses.Both solutions have disadvantages. The first solution is disadvantageous in that the body and its contacting point on the rotor are subject to wear due to the contact which occurs even at a low relative speed. The abrasion generated by this wear accumulates in the ball bearing and destroys it.

Die zweite Lösung weist den Nachteil auf, dass das Bauteil, an welchem gezielt die Überschläge stattfinden, Erosionsschäden auftreten. Diese Erosion bedeutet Verschleiss, so dass es der Anordnung an Langzeitstabilität mangelt. Nach einiger Zeit funktioniert die Anordnung nicht mehr und es treten erneut unkontrollierte Überschläge auf.The second solution has the disadvantage that the component to which the flashovers take place, erosion damage occur. This erosion means wear, so that the arrangement lacks long-term stability. After some time, the arrangement does not work anymore and uncontrolled flashovers occur again.

Es ist daher Aufgabe der Erfindung, eine Hochvakuumpumpe vorzustellen, in der Überschläge zwischen Rotor und Stator vermieden werden.It is therefore an object of the invention to provide a high vacuum pump, are avoided in the flashovers between the rotor and stator.

Diese Aufgabe wird gelöst durch eine Hochvakuumpumpe mit den Merkmalen des ersten Anspruchs. Die abhängigen Ansprüche geben vorteilhafte Weiterbildungen an.This object is achieved by a high vacuum pump having the features of the first claim. The dependent claims indicate advantageous developments.

Die Mittel zur Schmierung des Wälzlagers sind derart angepasst, dass eine derartige Entladung des Rotors bewirkt wird, dass Überschläge zwischen Rotor und Stator verhindert werden. Die Beschädigung von Rotor und Stator wird somit verhindert. Da die ohnehin vorhandenen Mittel zur Schmierung des Wälzlagers angepasst und verwendet werden, geschieht dies vorteilhaft ohne den Einsatz weiterer Bauteile. Dies ist kostengünstig und vermeidet Fehler. Zudem ist diese Lösung gegenüber dem Stand der Technik sehr verschleißarm und erlaubt lange Standzeiten.The means for lubricating the rolling bearing are adapted such that such a discharge of the rotor is caused to prevent flashovers between the rotor and the stator. Damage to the rotor and stator is thus prevented. Since the already existing means for lubricating the bearing are adjusted and used, this is done advantageously without the use of other components. This is inexpensive and avoids mistakes. In addition, this solution is very low wear compared to the prior art and allows long service life.

Eine Weiterbildung sieht vor, dass ein leitfähiger Zufuhrdocht verwendet wird. Neben den oben genannten Vorteilen ist dies vorteilhaft, da eine dauerthaft gute Entladung aufgrund des ständigen Kontakts bewirkt wird.A further embodiment provides that a conductive feed wick is used. In addition to the advantages mentioned above, this is advantageous because a lasting good discharge due to the constant contact is effected.

Eine andere Weiterbildung sieht vor, ein leitfähiges Schmiermittel zu verwenden. Dies ist eine praktisch vollständig verschleißfreie Lösung.Another embodiment provides to use a conductive lubricant. This is a virtually completely wear-free solution.

Gemäß einer Ausführungsform umfasst das leitfähige Schmiermittel Kohlenstoffnanoröhrchen. Der Zusatz dieser Kohlenstoffnanoröhrchen bewirkt eine im Sinne des zu Anspruch 1 formulierten Zieles ausreichend gute Leitfähigkeit, ohne dass eine Verschlechterung der für den Einsatz in einer Hochvakuumpumpe wesentlichen Eigenschaften des Schmiermittels auftritt.In one embodiment, the conductive lubricant comprises carbon nanotubes. The addition of these carbon nanotubes causes a well-defined in the sense of the claim formulated to claim 1 sufficiently good conductivity, without a deterioration of the essential properties for use in a high vacuum pump properties of the lubricant occurs.

Gemäß einer anderen Weiterbildung wird vorgeschlagen, dass das Mittel als Schmiermittelkreislauf ausgebildet ist. Dies verbessert die Entladung des Rotors, da ein zusätzlicher Transport stattfindet. Diese Lösung ist zudem vorteilhaft bei einer schwingungsentkoppelten Halterung des Wälzlagers in Elastomerkörpern, da die Entladung über den Schmiermittelkreislauf und nicht über den vom Elastomerkörper unterbrochenen Kontakt von Außenring zu Gehäuse der Hochvakuumpumpe des Wälzlagers erfolgt.According to another embodiment, it is proposed that the means is designed as a lubricant circuit. This improves the discharge of the rotor, since an additional transport takes place. This solution is also advantageous in a vibration-decoupled mounting of the rolling bearing in elastomeric bodies, since the discharge via the lubricant circuit and not interrupted by the elastomer body contact from outer ring to housing of the high vacuum pump of the bearing.

An Hand von Ausführungsbeispielen und deren Weiterbildungen soll die Erfindung näher erläutert und die Darstellung ihrer Vorteile vertieft werden.
Es zeigen:

Fig. 1:
Schnitt durch eine Hochvakuumpumpe mit fettgeschmierten Wälzlager,
Fig. 2:
Schnitt durch die Lageranordnung einer Hochvakuumpumpe mit Dochtschmierung,
Fig. 3:
Schnitt durch die Lageranordnung einer Hochvakuumpumpe mit Ölumlaufschmierung.
With reference to embodiments and their developments, the invention will be explained in more detail and the representation of its benefits to be deepened.
Show it:
Fig. 1:
Section through a high vacuum pump with grease-lubricated bearings,
Fig. 2:
Section through the bearing assembly of a high vacuum pump with wick lubrication,
3:
Section through the bearing assembly of a high vacuum pump with oil circulation lubrication.

Ein Schnitt durch eine Hochvakuumpumpe 100 ist in Fig. 1 gezeigt. Die Hochvakuumpumpe besitzt ein Gehäuse 102, welches einen Flansch 104 aufweist und die lösbare Befestigung an einem auszupumpenden Behälter erlaubt. Der Flansch begrenzt den Gaseinlass 106.A section through a high vacuum pump 100 is shown in FIG Fig. 1 shown. The high vacuum pump has a housing 102 which has a flange 104 and which allows releasable attachment to a container to be evacuated. The flange defines the gas inlet 106.

Das Gehäuse umgibt die Bauteile des Stators 120, der eine beschaufelte Statorscheibe 122 und ein Distanzelement 124 umfasst. Abhängig von Anforderungen wie Saugvermögen und Kompression ist die Zahl der Statorscheiben bemessen. Neben den oder als Ersatz für die hier gezeigten turbomolekularen Pumpstufen können andere molekulare Pumpprinzipien zum Einsatz kommen, beispielsweise nach Holweck-, Siegbahn- und Seitenkanalprinzip.The housing surrounds the components of the stator 120, which includes a bladed stator disk 122 and a spacer 124. Depending on requirements such as pumping speed and compression, the number of stator disks is dimensioned. In addition to or as a substitute for the turbomolecular pumping stages shown here, other molecular pumping principles can be used, for example, according to the Holweck, Siegbahn and Seitenkanal principle.

Der Stator wirkt mit dem Rotor 110 zusammen, welcher eine beschaufelte Rotorscheibe 114 und eine Welle 112 umfasst. Die Zahl der auf der Welle angebrachten Rotorscheiben entspricht der Zahl der Statorscheiben. Der Rotor kann zudem weitere pumpaktive Elemente umfassen, die mit Statorelementen zusammenwirken, beispielsweise ein Holweckzylinder.The stator cooperates with the rotor 110, which includes a bladed rotor disk 114 and a shaft 112. The number of rotor disks mounted on the shaft corresponds to the number of stator disks. The rotor may also include other pump-active elements that interact with stator elements, such as a Holweck cylinder.

Eine Motorspule 128 ist im Gehäuse angeordnet und versetzt die Welle und damit den Rotor in schnelle Drehung.A motor coil 128 is disposed in the housing and puts the shaft and thus the rotor in rapid rotation.

Am gaseinlasseitigen Ende ist die Welle durch ein permanentmagnetisches Lager 126 drehbar unterstützt. Das dem Gaseinlass abgelegene Ende der Welle wird von einer Lageranordnung 170 getragen.At the gas inlet end, the shaft is rotatably supported by a permanent magnetic bearing 126. The gas inlet remote end of the shaft is supported by a bearing assembly 170.

Die Lageranordnung umfasst ein Wälzlager 130, welches in diesem Beispiel als fettgeschmiertes Kugellager gestaltet ist. Auf der Welle sitzt der Innenring 134 des Kugellagers, der Außenring 132 ist mittels eines Axialschwingringes 140 und eines Radialschwingringes 142 in axialer und radialer Richtung schwingfähig im Gehäuse gehaltert. Axialschwingring und Radialschwingring sind als elektrisch nicht-leitende Elastomerringe ausgeführt. Zwischen Innenring und Außenring sind Kugeln 136 als Wälzkörper angeordnet. Eine Deckscheibe 144 schließt den Raum zwischen Innenring und Außenring ab und hält den Schmiermittelvorrat 144 im Wälzlager.The bearing assembly comprises a roller bearing 130, which in this example is designed as a grease-lubricated ball bearing. On the shaft sits the inner ring 134 of the ball bearing, the outer ring 132 is supported by means of a Axialschwingringes 140 and a Radialschwingringes 142 in the axial and radial directions swingable in the housing. Axialschwingring and Radialschwingring are designed as electrically non-conductive elastomer rings. Between inner ring and outer ring balls 136 are arranged as rolling elements. A cover plate 144 closes the space between the inner ring and outer ring and holds the lubricant reservoir 144 in the rolling bearing.

Der Schmiermittelvorrat beinhaltet das Fett als Schmiermittel und ist als Lebensdauerschmierung bemessen.The lubricant supply contains the grease as a lubricant and is designed as a lifetime lubrication.

Die beschriebene Art der Lagerung mit kontaktfreiem Permanentmagnetlager und Wälzlager bewirkt, insbesondere wenn Keramikkugeln im Wälzlager zum Einsatz kommen, eine gute elektrische Isolierung des Rotors gegenüber dem Stator.The described type of bearing with non-contact permanent magnetic bearing and roller bearings causes, especially when ceramic balls are used in the rolling bearing, a good electrical insulation of the rotor relative to the stator.

Die Isolierung wird aufgehoben, in dem im Schmiermittelvorrat ein leitfähiges Fett eingesetzt wird. Die elektrische Aufladung des Rotors wird verhindert, da dieser über das Wälzlager und das Fett geerdet ist.The insulation is removed, in which a conductive grease is used in the lubricant supply. The electrical charging of the rotor is prevented because it is earthed via the rolling bearing and the grease.

Zur Verbesserung der Erdung können Axialschwingring oder Radialschwingring oder beide aus elektrisch leitfähigem Material hergestellt sein, beispielsweise einem Elastomer mit eingebettetem leitfähigen Stoff. Alternativ kann ein elektrischer Leiter zwischen Außenring und Gehäuse vorgesehen sein.To improve grounding, either axial or radial ring or both may be made of electrically conductive material, such as an embedded conductive material elastomer. Alternatively, an electrical conductor may be provided between the outer ring and the housing.

Sowohl Fett als auch Axial- und Radialschwingringe können mit Kohlenstoffnanoröhrchen versetzt werden, um eine verbesserte elektrische Leitfähigkeit zu erreichen. Die erreichte Leitfähigkeit muss dabei lediglich so bemessen sein, dass die Aufladung des Rotors so gering ist, dass die Feldstärken zwischen Rotor und Stator keinen Wert erreichen, der eine Entladung durch Überschlag oder Funken zulässt.Both fat and axial and radial resonant rings can be loaded with carbon nanotubes for improved electrical conductivity. The achieved conductivity must only be so dimensioned that the charging of the rotor is so low that the field strengths between rotor and stator reach no value that allows discharge by flashover or sparks.

Die Fig. 2 zeigt einen Schnitt durch die Lageranordnung der Hochvakuumpumpe in einer alternativen Ausführung.The Fig. 2 shows a section through the bearing assembly of the high vacuum pump in an alternative embodiment.

Diese alternative Lageranordnung 270 umfasst ein Kugellager 230, dessen Innenring 234 auf der Welle 212 fixiert ist. Der Außenring 232 ist mittels eines Axialschwingrings 240 und eines Radialschwingrings 242 schwingfähig im Gehäuse 202 gehaltert. Zwischen Innenring und Außenring befinden sich die Kugeln 236. Die Schmierung erfolgt durch einen Schmiermittelkreislauf 268. Dieser ist in Fig. 2 durch Pfeile veranschaulicht. Teil dieses Schmiermittelkreislaufs ist der Schmiermittelspeicher 252. Er besitzt wenigstens einen Zufuhrdocht 250, der in gleitendem Kontakt mit einer konisch gestalteteten und auf der Welle angeordneten Spritzmutter 256 steht. Über diesen Zufuhrdocht wird das durch Punkte dargestellte Schmiermittel 250 aus dem Schmiermittelspeicher auf die Spritzmutter übertragen. Über die Fliehkraftwirkung wird das Schmiermittel entlang des Konus in den Raum zwischen Lagerinnenring und Lageraußenring gefördert und bewirkt dort die Schmierung. Das Schmiermittel fällt aus dem Zwischenraum zurück in den Schmiermittelspeicher und kann dort per Kapillarwirkung über den Zufuhrdocht im nächsten Umlauf des Schmiermittelkreislaufs erneut dem Kugellager zugeführt werden.This alternative bearing arrangement 270 comprises a ball bearing 230 whose inner ring 234 is fixed on the shaft 212. The outer ring 232 is oscillatable by means of a Axialschwingrings 240 and a Radialschwingrings 242 Housing 202 is supported. Between the inner ring and outer ring are the balls 236. The lubrication takes place through a lubricant circuit 268. This is in Fig. 2 illustrated by arrows. Part of this lubricant circuit is the lubricant reservoir 252. It has at least one supply wick 250 which is in sliding contact with a conically shaped and arranged on the shaft spray nut 256. About this Zufuhrdocht the lubricant 250 shown by dots is transferred from the lubricant reservoir to the spray nut. About the centrifugal force, the lubricant is conveyed along the cone in the space between the bearing inner ring and bearing outer ring and there causes the lubrication. The lubricant falls from the intermediate space back into the lubricant reservoir and can be re-supplied to the ball bearing there by capillary action via the feed wick in the next circulation of the lubricant circuit.

Die Erdung des Rotors über die Mittel zur Schmierung des Kugellagers kann über zwei Alternative Wege erfolgen, wobei auch beide Wege gleichzeitig realisiert sein können.The grounding of the rotor via the means for lubricating the ball bearing can be done via two alternative ways, whereby both ways can be realized simultaneously.

Zum einen kann das Schmiermittel selbst leitfähig ausgeführt sein. Dies gelingt über den Zusatz von leitfähigen Stoffen um Schmiermittel, beispielsweise Grafit. Besonders vorteilhaft erweisen sich Kohlenstoffnanoröhrchen. Schmiermittelkreislauf und Füllung des Schmiermittelspeichers bewirken dann eine leitfähige Verbindung von Welle zu Gehäuse. Die Aufladung des Rotors wird hierdurch so gering gehalten, dass es zu keinen elektrischen Entladungen oder Funken zwischen Rotor und Stator kommt.On the one hand, the lubricant itself can be made conductive. This is achieved by the addition of conductive substances to lubricants, such as graphite. Carbon nanotubes prove to be particularly advantageous. Lubricant circulation and filling of the lubricant reservoir then cause a conductive connection from shaft to housing. The charging of the rotor is thereby kept so low that there is no electrical discharge or spark between the rotor and stator.

Zum anderen kann der Zufuhrdocht aus leitfähigem Material gestaltet sein. Zufuhrdocht und Schmiermittelspeicher umfassen ein filzartiges Material, welches das Schmiermittel in seinen Poren speichert und über Kapillarwirkung fördert.On the other hand, the feed wick can be made of conductive material. Feed wick and lubricant reservoir comprise a felt-like material which stores the lubricant in its pores and promotes it via capillary action.

Elektrische Leitfähigkeit in ausreichendem Maße wird durch Beimengung metallischer Fasern oder leitfähiger Karbonfaser bewirkt.Electrical conductivity is sufficiently effected by admixture of metallic fibers or conductive carbon fiber.

Die Fig. 3 zeigt einen Schnitt durch die Lageranordnung der Hochvakuumpumpe in einer dritten Ausführungsform.The Fig. 3 shows a section through the bearing assembly of the high vacuum pump in a third embodiment.

Die Lageranordnung 370 weist ein Kugellager 330 auf. Dessen Innenring 334 ist auf der Welle 312 fixiert. Sein Außenring 332 ist mittels eines Axialschwingrings 340 und eines Radialschwingrings 342 in axialer und radialer Richtung schwingfähig im Gehäuse 302 gehaltert. Als Mittel zur Schmierung des Kugellagers ist ein Schmiermittel beinhaltender Schmiermittelkreislauf 368 vorgesehen, der in Fig. 3 durch Pfeile veranschaulicht ist. Der Schmiermittelkreislauf umfasst eine Schmiermittelpumpe 352, welche das Schmiermittel 350, welches in Fig. 3 durch Punkte veranschaulicht ist, durch den Zufuhrkanal 360 in eine Zufuhrdüse 362 fördert. Aus der Zufuhrdüse wird das Schmiermittel auf die konisch gestaltete Spritzmutter 356 gefördert. Das Schmiermittel wird durch die Fliehkraft entlang des Konus in das Kugellager weitergefördert. Von dort gelangt es in den Ablaufkanal 364 und durch diesen zurück in die Schmiermittelpumpe.The bearing assembly 370 has a ball bearing 330. Its inner ring 334 is fixed on the shaft 312. Its outer ring 332 is supported in the housing 302 by means of an axial oscillating ring 340 and a radial oscillating ring 342 in the axial and radial directions. As means for lubricating the ball bearing, a lubricant-containing lubricant circuit 368 is provided, which in Fig. 3 is illustrated by arrows. The lubricant circuit comprises a lubricant pump 352, which contains the lubricant 350, which in Fig. 3 is illustrated by dots through which feed channel 360 feeds into a feed nozzle 362. From the feed nozzle, the lubricant is conveyed to the conically shaped spray nut 356. The lubricant is conveyed by the centrifugal force along the cone in the ball bearing. From there it enters the drainage channel 364 and through this back into the lubricant pump.

Die Anpassung des Mittels zum Schmieren des Kugellagers besteht in diesem Beispiel darin, das Schmiermittel selbst leitfähig auszuführen. Dies gelingt in einer vorteilhaften Variante über den Zusatz von Kohlenstoffnanoröhrchen. Der Schmiermittelkreislauf bewirkt dann eine leitfähige Verbindung von Welle zu Gehäuse. Die Aufladung des Rotors wird hierdurch so gering gehalten, dass es zu keinen der im Stand der Technik auftretenden elektrischen Entladungen zwischen Rotor und Stator kommt.The adaptation of the means for lubricating the ball bearing in this example is to carry out the lubricant itself conductive. This is achieved in an advantageous variant via the addition of carbon nanotubes. The lubricant circuit then causes a conductive connection from shaft to housing. As a result, the charging of the rotor is kept so low that none of the electrical discharges occurring between the rotor and the stator occur in the prior art.

Claims (5)

  1. A high-vacuum pump (100) comprising a stator (120); a fast-rotating rotor (110); and a rolling element bearing (130; 230; 330),
    characterized in that
    a means (144; 268; 368) for lubricating the rolling element bearing is provided that is adapted to prevent flashovers, such as uncontrolled electrical discharges, between the stator (120) and the rotor (110) by electrically discharging the rotor.
  2. A high-vacuum pump in accordance with claim 1,
    characterized in that
    the means (268) comprises a conductive supply wick (254).
  3. A high-vacuum pump in accordance with claim 1 or claim 2,
    characterized in that
    the means (144; 268; 368) comprises a conductive lubricant (144; 250; 350).
  4. A high-vacuum pump in accordance with claim 3,
    characterized in that
    the conductive lubricant (144; 250; 350) includes carbon nanotubes.
  5. A high-vacuum pump in accordance with any one of the preceding claims,
    characterized in that
    the means is configured as a lubricant circuit (268; 368).
EP10013671.2A 2009-11-06 2010-10-15 High vacuum pump Active EP2320090B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910052180 DE102009052180A1 (en) 2009-11-06 2009-11-06 High vacuum pump

Publications (3)

Publication Number Publication Date
EP2320090A2 EP2320090A2 (en) 2011-05-11
EP2320090A3 EP2320090A3 (en) 2017-06-07
EP2320090B1 true EP2320090B1 (en) 2019-02-20

Family

ID=43500019

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10013671.2A Active EP2320090B1 (en) 2009-11-06 2010-10-15 High vacuum pump

Country Status (2)

Country Link
EP (1) EP2320090B1 (en)
DE (1) DE102009052180A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011109930A1 (en) * 2011-08-10 2013-02-14 Pfeiffer Vacuum Gmbh Rolling bearing and vacuum pump with roller bearings
DE102011119907A1 (en) * 2011-12-01 2013-06-06 Pfeiffer Vacuum Gmbh Rolling bearing for a vacuum pump
DE102013210109A1 (en) * 2013-05-29 2014-12-04 Pfeiffer Vacuum Gmbh vacuum pump
CN108678975A (en) * 2018-07-17 2018-10-19 中国工程物理研究院机械制造工艺研究所 A kind of anti-vibration molecular pump
EP3594498B1 (en) 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh System with a recirculation device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10037423A1 (en) * 2000-07-21 2002-02-07 Atecs Mannesmann Ag Rolling bearing arrangement for an electric motor (current-insulated rolling bearing
US7404698B2 (en) * 2005-08-16 2008-07-29 Edwards Vacuum, Inc. Turbomolecular pump with static charge control
DE102006053237A1 (en) * 2006-11-11 2008-05-29 Pfeiffer Vacuum Gmbh Storage module for a vacuum pump
GB0712777D0 (en) * 2007-07-02 2007-08-08 Edwards Ltd Vacuum Pump

Non-Patent Citations (1)

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Title
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Also Published As

Publication number Publication date
DE102009052180A1 (en) 2011-05-12
EP2320090A2 (en) 2011-05-11
EP2320090A3 (en) 2017-06-07

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