EP2297761B1 - Method and device for producing vacuum interrupters or assemblies of vacuum interrupters, and vacuum interrupter - Google Patents

Method and device for producing vacuum interrupters or assemblies of vacuum interrupters, and vacuum interrupter Download PDF

Info

Publication number
EP2297761B1
EP2297761B1 EP09779504.1A EP09779504A EP2297761B1 EP 2297761 B1 EP2297761 B1 EP 2297761B1 EP 09779504 A EP09779504 A EP 09779504A EP 2297761 B1 EP2297761 B1 EP 2297761B1
Authority
EP
European Patent Office
Prior art keywords
process chamber
vacuum
chamber
soldering
vacuum interrupter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP09779504.1A
Other languages
German (de)
French (fr)
Other versions
EP2297761A1 (en
Inventor
Robert Hack
Paul Kaiser
Frank Graskowski
Ulrich Brzezinski
Thomas Pfohl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
PVA TePla AG
Original Assignee
Siemens AG
PVA TePla AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, PVA TePla AG filed Critical Siemens AG
Publication of EP2297761A1 publication Critical patent/EP2297761A1/en
Application granted granted Critical
Publication of EP2297761B1 publication Critical patent/EP2297761B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66—Vacuum switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66—Vacuum switches
    • H01H33/662—Housings or protective screens
    • H01H33/66207—Specific housing details, e.g. sealing, soldering or brazing
    • H01H2033/66215—Details relating to the soldering or brazing of vacuum switch housings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66—Vacuum switches
    • H01H33/662—Housings or protective screens
    • H01H33/66261—Specific screen details, e.g. mounting, materials, multiple screens or specific electrical field considerations
    • H01H2033/66276—Details relating to the mounting of screens in vacuum switches

Definitions

  • the invention relates to a method for the production of vacuum interrupters or assemblies of vacuum interrupters with a Lötreasch.
  • Such a method is for example from the EP 1 148 526 A2 known.
  • pre-assembled vacuum interrupters ie vacuum interrupters, which are composed of all components, but not yet final assembled, that are soldered vacuum-tight, transferred to a Lötreasch, which is evacuated to high vacuum.
  • the soldering process chamber After reaching the high vacuum, the soldering process chamber is heated to a soldering temperature, wherein the soldering temperature represents the temperature at which solder introduced into the preassembled vacuum interrupter at the locations to be soldered becomes liquid and a vacuum-tight soldering is formed.
  • the soldering process chamber is cooled, vented and the soldered vacuum interrupter can be removed.
  • soldering process chamber the entire temperature and pressure range of the process of environmental conditions, ie room temperature and atmospheric pressure, to high vacuum and soldering temperature passes.
  • the pumping down to a high vacuum takes a long time Period of time. Cooling the process chamber to ambient temperature with each batch change results in long reheat times until the process chamber is reheated to the soldering temperature.
  • Object of the present invention is to develop a method of the type mentioned, which allows for shorter process times a more flexible process management while improving the quality of the vacuum interrupters.
  • the method according to the invention is therefore preheated in a pre-treatment chamber and pre-evacuated, so that under the present vacuum conditions degassing of existing at the pre-assembled vacuum interrupters or assemblies residual gases or precipitates takes place. Therefore , by subsequently transferring under vacuum conditions to a soldering process chamber in which the soldering temperature T soldering at which the solder material liquefies, it is possible to keep the soldering process chamber permanently under high vacuum conditions and in a temperature range close to the soldering temperature In particular, the soldering process chamber at no time must be exposed to ambient air and therefore has a greater purity.
  • Assemblies of vacuum interrupters in the sense of the invention means any combination of components of a vacuum interrupter, to which the inventive method is feasible, so a collection of components of a vacuum interrupter, which can be soldered under vacuum conditions, such as contacts and to be solubilized contact discs of a contact system of the vacuum interrupter.
  • the at least one preassembled vacuum interrupter or assembly is first introduced into a loading process chamber of the pretreatment chamber and at low vacuum to a lying above the ambient temperature Temperature is heated, and then transported under high vacuum conditions in a heating process chamber of the pre-treatment chamber and heated under high vacuum to a temperature below the brazing temperature.
  • Such a method is advantageous because by heating to a temperature above the ambient temperature T 1 under low vacuum already in a first step, a large part of the gases and precipitates contained in the preassembled vacuum interrupters can be pumped or removed, so that the process time overall further reduced.
  • Such a method for producing vacuum interrupters is advantageous because for each method step at least one vacuum interrupter or assembly can be located in the process chamber associated with the respective process step, so that a clocked partial process management with multiple batches in different process chambers is simultaneously possible. Overall, this leads to a clearer reduction of the required process times. Furthermore, the energy costs are reduced by the different temperature and pressure differences for the respective process chambers, because only a comparatively lower pressure or temperature difference must be passed through for each chamber.
  • respective time intervals of a method step in the pretreatment chamber, the soldering process chamber, the cooling process chamber and the aeration chamber are the same length.
  • the pretreatment chamber has a low-vacuum loading process chamber and a high-vacuum heating process chamber.
  • a design of the pretreatment chamber is advantageous because it achieves a further reduction of the process time by making it possible to carry out different steps in different process chambers.
  • the cooling process chamber is arranged downstream of a ventilation process chamber.
  • the loading process chamber and the aeration process chambers are formed by one and the same chamber, wherein the transfer unit is designed like a carousel.
  • Such a device is particularly advantageous because in a carousel-like design of the transfer unit, for example, four batches of vacuum interrupters can be present in parallel in the device, one in each process chamber, so that a continuous process management with the same process times for the individual process steps to reduce the total required process time leads.
  • the invention further relates to a vacuum interrupter or assembly made by a method of the invention as described above.
  • vacuum interrupters are advantageous because they are flexible and therefore inexpensive to produce with high quality due to low process times.
  • FIG. 1 shows a schematic flow diagram in an XY representation, wherein the X-axis of the process time corresponds to t and the Y-axis in the upper region of the prevailing in the respective process chamber temperature and the Y-axis in the lower part of the diagram of a logarithmic representation of in corresponds to the prevailing pressure prevailing pressure chamber.
  • a loading process chamber 2 In a first time interval t 1, a loading process chamber 2 is pumped off to a pressure below the ambient pressure in the low-vacuum range and simultaneously heated to a temperature T1 above the room temperature.
  • a receiving unit with at least one pre-assembled vacuum interrupter or assembly is transferred by means of a transfer unit into a heating process chamber under vacuum conditions, in which within a time interval t 2 high vacuum conditions, ie pressures in the range ⁇ 10 -5 mbar are generated and at the same time Temperature T 2 , which is below a soldering temperature T solder , at which the material used as solder liquefies, heated. In this heating process chamber thus residual gases and precipitates are removed at the pre-assembled vacuum interrupters.
  • the heating from room temperature to T1 in the loading process chamber is optional and can also be performed in the heating process chamber within the time interval t2.
  • the receiving unit with the at least one vacuum interrupter is in turn transferred to the soldering process chamber while maintaining the vacuum conditions, so that during a time interval t 3 in the LötRIShunt under high vacuum conditions to a soldering temperature T solder is heated, which is selected is that a solder introduced in the preassembled vacuum interrupters or assemblies for vacuum-tight soldering of the components together liquefies and thus forms the vacuum-tight soldering of the components together.
  • T solder cooling within the soldering process chamber is effected to a temperature below the soldering temperature T soldering .
  • the steps corresponding to the time intervals t 1 to t 4 of the method according to the invention thus take place in the time intervals t 1 to t 4 as follows: the heating of the vacuum interrupter to a temperature above the ambient temperature in the interval t 1 , the step of heating to a temperature T 2 below the soldering temperature in the interval t 2 and the step of heating to a temperature T solder according to the soldering temperature in the interval t 3 , wherein further the step of evacuating the loading process chamber takes place in a low vacuum in the interval t 1 , wherein the step further on high vacuum in the interval t 2 takes place, and wherein in the interval t 4, the step of cooling the vacuum interrupter takes place in the Abkühlmaschinesch.
  • the time intervals t1, t2, t3 and t4 are preferably the same length.
  • FIG. 2 shows a schematic representation of an apparatus for carrying out the method according to the invention described above with a transfer unit 1, which is designed like a carousel in the embodiment and a transfer under vacuum conditions from a loading / aeration process chamber 2, which form one and the same chamber, in a heating process chamber 3 and a Soldering process chamber 4 and a Abkühlvonsch 5 allows by lowering and raising a receiving unit 6, which with at least one vacuum interrupter 7 or assembly, in the embodiment of the FIG. 2 a plurality of vacuum interrupters 7 is provided with reference to with reference to FIG. 1 described vacuum and temperature conditions an introduction into the respective process chambers along the dashed line is possible.
  • the loading / aeration process chamber 2, the heating process chamber 3, the soldering process chamber 4 and the Abkühlvonsch 5 are arranged above the transfer unit 1 and connected by suitable Vakuumschieber- and lock systems (figuratively not shown) with this, so that by lowering and raising the receiving unit. 6 a transfer is possible.
  • the transfer unit is carousel-shaped, so that the loading and venting process chambers 2 are formed by one and the same process chamber and are provided for both loading and unloading.
  • Other embodiments of a device are also conceivable, for example with a linear one Transfer unit, in which case the loading process chamber at the beginning of the device and the aeration process chamber at the end of the device are arranged with interposed heating process and Lötluischn.

Landscapes

  • Manufacturing Of Electrical Connectors (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Description

Verfahren und Vorrichtung zur Herstellung von Vakuumschaltröhren oder Baugruppen von Vakuumschaltröhren und VakuumschaltröhreMethod and device for producing vacuum interrupters or subassemblies of vacuum interrupters and vacuum interrupters

Die Erfindung betrifft ein Verfahren zur Herstellung von Vakuumschaltröhren oder Baugruppen von Vakuumschaltröhren mit einer Lötprozesskammer.The invention relates to a method for the production of vacuum interrupters or assemblies of vacuum interrupters with a Lötprozesskammer.

Ein derartiges Verfahren ist aus der EP-A-0682351 bekannt.Such a method is known from EP-A-0682351 known.

Ein derartiges Verfahren ist beispielsweise aus der EP 1 148 526 A2 bekannt. Bei dem dort offenbarten Verfahren zur Herstellung von Vakuumschaltröhren werden vormontierte Vakuumschaltröhren, d. h. Vakuumschaltröhren, welche aus allen Bauteilen zusammengesetzt sind, aber noch nicht endmontiert, d. h. vakuumdicht verlötet sind, in eine Lötprozesskammer überführt, welche auf Hochvakuum evakuiert wird. Nach Erreichen des Hochvakuums wird die Lötprozesskammer auf eine Löttemperatur erwärmt, wobei die Löttemperatur die Temperatur darstellt, bei welcher in der vormontierten Vakuumschaltröhre an den zu verlötenden Stellen eingebrachtes Lot flüssig wird und eine vakuumdichte Lötung ausgebildet wird. Nach Abschließen des Lötprozesses wird die Lötprozesskammer abgekühlt, belüftet und die verlötete Vakuumschaltröhre kann entnommen werden. Mit einem derartigen Lötprozess ist es möglich, Vakuumschaltröhren mit einem Enddruck im Bereich von 10-6 mbar herzustellen. Nachteilig bei dem Verfahren der eingangs erwähnten Art ist, dass die Lötprozesskammer den gesamten Temperatur- und Druckbereich des Prozesses von Umgebungsbedingungen, also Raumtemperatur und Normaldruck, bis Hochvakuum und Löttemperatur, durchläuft. Dies führt dazu, dass durch das Beaufschlagen der Lötprozesskammer während des Beladens mit Atmosphärendruck das Abpumpen auf Hochvakuum einen langen Zeitraum in Anspruch nimmt. Das Abkühlen der Prozesskammer auf Umgebungstemperatur bei jedem Chargenwechsel führt zu langen Wiedererwärmungszeiten, bis die Prozesskammer wieder auf die Löttemperatur erwärmt ist.Such a method is for example from the EP 1 148 526 A2 known. In the method disclosed there for producing vacuum interrupters are pre-assembled vacuum interrupters, ie vacuum interrupters, which are composed of all components, but not yet final assembled, that are soldered vacuum-tight, transferred to a Lötprozesskammer, which is evacuated to high vacuum. After reaching the high vacuum, the soldering process chamber is heated to a soldering temperature, wherein the soldering temperature represents the temperature at which solder introduced into the preassembled vacuum interrupter at the locations to be soldered becomes liquid and a vacuum-tight soldering is formed. After completion of the soldering process, the soldering process chamber is cooled, vented and the soldered vacuum interrupter can be removed. With such a soldering process, it is possible to produce vacuum interrupters with a final pressure in the range of 10 -6 mbar. A disadvantage of the method of the type mentioned is that the soldering process chamber the entire temperature and pressure range of the process of environmental conditions, ie room temperature and atmospheric pressure, to high vacuum and soldering temperature passes. As a result of the loading of the soldering process chamber during atmospheric pressure pumping, the pumping down to a high vacuum takes a long time Period of time. Cooling the process chamber to ambient temperature with each batch change results in long reheat times until the process chamber is reheated to the soldering temperature.

Aufgabe der vorliegenden Erfindung ist es, ein Verfahren der eingangs erwähnten Art weiterzubilden, welches bei verkürzten Prozesszeiten eine flexiblere Verfahrensführung bei gleichzeitiger Verbesserung der Qualität der Vakuumschaltröhren ermöglicht.Object of the present invention is to develop a method of the type mentioned, which allows for shorter process times a more flexible process management while improving the quality of the vacuum interrupters.

Erfindungsgemäß gelöst wird diese Aufgabe bei einem Verfahren der eingangs erwähnten Art dadurch, dass bei dem Verfahren zur Herstellung von Vakuumschaltröhren mit einer Lötprozesskammer

  1. a) mindestens eine vormontierte Vakuumschaltröhre oder Baugruppe in eine der Lötprozesskammer vorgeordnete Vorbehandlungskammer eingebracht und vorerwärmt und vorevakuiert wird;
  2. b) die vorbehandelte Vakuumschaltröhre oder Baugruppe in die Lötprozesskammer überführt und unter Hochvakuum auf eine Löttemperatur gebracht wird; und danach
  3. c) die gelötete und evakuierte Vakuumschaltröhre oder Baugruppe in eine Abkühlprozesskammer transportiert und dort abgekühlt wird;
wobei das Überführen und Transportieren der Vakuumschaltröhre oder Baugruppe unter Vakuumbedingungen erfolgt.According to the invention, this object is achieved in a method of the type mentioned above in that in the method for producing vacuum interrupters with a Lötprozesskammer
  1. a) at least one pre-assembled vacuum interrupter or assembly is placed in a pre-treatment chamber upstream of the brazing process chamber and preheated and pre-evacuated;
  2. b) transferring the pretreated vacuum interrupter or assembly into the brazing process chamber and bringing it under high vacuum to a brazing temperature; and then
  3. c) the soldered and evacuated vacuum interrupter or assembly is transported to and cooled in a cooling process chamber;
wherein the transfer and transport of the vacuum interrupter or assembly takes place under vacuum conditions.

Bei dem erfindungsgemäßen Verfahren wird also in einer Vorbehandlungskammer vorerwärmt und vorevakuiert, so dass unter den vorliegenden Vakuumbedingungen eine Entgasung von an den vormontierten Vakuumschaltröhren oder Baugruppen vorhandenen Restgasen oder Niederschlägen stattfindet. Durch das anschließende Überführen unter Vakuumbedingungen in eine Lötprozesskammer, in welcher die Erwärmung auf eine Löttemperatur TLöt stattfindet, bei der das Lotmaterial sich verflüssigt, ist es daher möglich, die Lötprozesskammer dauerhaft unter Hochvakuumbedingungen und in einem Temperaturbereich nahe der Löttemperatur zu halten, so dass die Lötprozesskammer insbesondere zu keiner Zeit mit Umgebungsluft beaufschlagt werden muss und daher eine größere Reinheit aufweist. Durch die größere Reinheit wird somit in vorteilhafter Weise die Qualität der hergestellten Vakuumschaltröhren verbessert, und durch die ständige Beaufschlagung der Lötprozesskammer mit Hochvakuum und das Halten in einem Temperaturbereich nahe der Löttemperatur wird die Zeit zum Erreichen der Prozessbedingungen durch Reduktion der Heiz- und Pumpzeiten reduziert. Baugruppen von Vakuumschaltröhren bedeutet in Sinn der Erfindung dabei jede Zusammenstellung von Bauteilen einer Vakuumschaltröhre, an welcher das erfindungsgemäße Verfahren durchführbar ist, also eine Zusammenstellung von Bauteilen einer Vakuumschaltröhre, welche unter Vakuumbedingungen verlötet werden kann, beispielsweise Kontaktstücke und daran anzulötende Kontaktscheiben eines Kontaktsystems der Vakuumschaltröhre.In the method according to the invention is therefore preheated in a pre-treatment chamber and pre-evacuated, so that under the present vacuum conditions degassing of existing at the pre-assembled vacuum interrupters or assemblies residual gases or precipitates takes place. Therefore , by subsequently transferring under vacuum conditions to a soldering process chamber in which the soldering temperature T soldering at which the solder material liquefies, it is possible to keep the soldering process chamber permanently under high vacuum conditions and in a temperature range close to the soldering temperature In particular, the soldering process chamber at no time must be exposed to ambient air and therefore has a greater purity. The greater purity thus advantageously improves the quality of the vacuum interrupter tubes produced, and the constant pressurization of the high temperature vacuum processing chamber and holding in a temperature range close to the brazing temperature reduces the time required to achieve the process conditions by reducing the heating and pumping times. Assemblies of vacuum interrupters in the sense of the invention means any combination of components of a vacuum interrupter, to which the inventive method is feasible, so a collection of components of a vacuum interrupter, which can be soldered under vacuum conditions, such as contacts and to be solubilized contact discs of a contact system of the vacuum interrupter.

In einer weiteren vorteilhaften Ausgestaltung des erfindungsgemäßen Verfahrens wird die mindestens eine vormontierte Vakuumschaltröhre oder Baugruppe zunächst in eine Beladeprozesskammer der Vorbehandlungskammer eingebracht und bei Niedrigvakuum auf eine oberhalb der Umgebungstemperatur liegende Temperatur erwärmt, und anschließend unter Hochvakuumbedingungen in eine Erwärmungsprozesskammer der Vorbehandlungskammer transportiert und unter Hochvakuum auf eine Temperatur unterhalb der Löttemperatur erwärmt wird.In a further advantageous embodiment of the method according to the invention, the at least one preassembled vacuum interrupter or assembly is first introduced into a loading process chamber of the pretreatment chamber and at low vacuum to a lying above the ambient temperature Temperature is heated, and then transported under high vacuum conditions in a heating process chamber of the pre-treatment chamber and heated under high vacuum to a temperature below the brazing temperature.

Ein derartiges Verfahren ist vorteilhaft, weil durch die Erwärmung auf eine oberhalb der Umgebungstemperatur liegende Temperatur T1 unter Niedrigvakuum bereits in einem ersten Schritt ein großer Teil der in den vormontierten Vakuumschaltröhren enthaltenen Gase und Niederschläge abgepumpt bzw. entfernt werden kann, so dass sich die Prozesszeit insgesamt weiter reduziert.Such a method is advantageous because by heating to a temperature above the ambient temperature T 1 under low vacuum already in a first step, a large part of the gases and precipitates contained in the preassembled vacuum interrupters can be pumped or removed, so that the process time overall further reduced.

In weiterer vorteilhafter Ausgestaltung des erfindungsgemäßen Verfahrens wird nach dem Abkühlen der mindestens einen Vakuumschaltröhre oder Baugruppe in der Abkühlprozesskammer ein weiteres Überführen in eine Belüftungskammer durchgeführt.In a further advantageous embodiment of the method according to the invention, after the cooling of the at least one vacuum interrupter or subassembly in the cooling process chamber, a further transfer to a ventilation chamber is carried out.

Ein derartiges Verfahren zur Herstellung von Vakuumschaltröhren ist vorteilhaft, weil für jeden Verfahrensschritt jeweils mindestens eine Vakuumschaltröhre oder Baugruppe sich in der dem jeweiligen Verfahrensschritt zugeordneten Prozesskammer befindlich sein kann, so dass eine getaktete Teilprozessführung mit mehreren Chargen in verschiedenen Prozesskammern gleichzeitig möglich ist. Dies führt insgesamt zu einer deutlicheren Reduzierung der erforderlichen Prozesszeiten. Weiterhin werden durch die unterschiedlichen Temperatur- und Druckdifferenzen für die jeweiligen Prozesskammern die Energiekosten gesenkt, weil für jede Kammer nur eine vergleichsweise geringere Druck- bzw. Temperaturdifferenz durchlaufen werden muss.Such a method for producing vacuum interrupters is advantageous because for each method step at least one vacuum interrupter or assembly can be located in the process chamber associated with the respective process step, so that a clocked partial process management with multiple batches in different process chambers is simultaneously possible. Overall, this leads to a clearer reduction of the required process times. Furthermore, the energy costs are reduced by the different temperature and pressure differences for the respective process chambers, because only a comparatively lower pressure or temperature difference must be passed through for each chamber.

In einer besonders bevorzugten Ausführungsform des Verfahrens sind jeweilige Zeitintervalle eines Verfahrensschrittes in der Vorbehandlungskammer, der Lötprozesskammer, der Abkühlprozesskammer und der Belüftungskammer gleich lang. Dadurch wird die Prozesszeit noch weiter verkürzt, weil mehrere Chargen von Vakuumschaltröhren gleichzeitig in der Vorrichtung produziert werden können, weil bei jedem Wechsel von einer zur nächsten Prozesskammer jeweils eine weitere Charge in die Vorrichtung eingeschleust werden kann.In a particularly preferred embodiment of the method, respective time intervals of a method step in the pretreatment chamber, the soldering process chamber, the cooling process chamber and the aeration chamber are the same length. As a result, the process time is further reduced because several batches of vacuum interrupters can be produced simultaneously in the device, because each time a change from one to the next process chamber another batch can be introduced into the device.

Die Erfindung betrifft des Weiteren eine Vorrichtung zur Durchführung des oben beschriebenen erfindungsgemäßen Verfahrens umfassend

  • eine einer Lötprozesskammer (4) vorgeordnete Vorbehandlungskammer (2, 3) zum Vorerwärmen und Vorevakuieren mindestens einer vormontierten Vakuumschaltröhre (7);
  • eine der Lötprozesskammer (4) nachgeordnete Abkühlprozesskammer (5) zum Abkühlen der Vakuumschaltröhre (7) auf Umgebungstemperatur, und
mindestens eine Überführungseinheit zum Überführen und Transportieren der Vakuumschaltröhre (7) unter Vakuumbedingungen.The invention further relates to a device for carrying out the method according to the invention described above
  • a pretreatment chamber (2, 3) upstream of a soldering process chamber (4) for preheating and pre-evacuating at least one preassembled vacuum interrupter (7);
  • one of the soldering process chamber (4) downstream cooling process chamber (5) for cooling the vacuum interrupter (7) to ambient temperature, and
at least one transfer unit for transferring and transporting the vacuum interrupter (7) under vacuum conditions.

Mit einer derartigen Vorrichtung ist es in vorteilhafter Weise möglich, die Lötprozesskammer ständig unter den für den Lötprozess nötigen Prozessbedingungen, als unter Hochvakuum und auf einer Temperatur nahe der Löttemperatur, zu halten, wodurch eine höhere Qualität durch die Reinheit der Lötprozesskammer erreicht wird und durch die geringeren Heiz- und Pumpzeiten auch eine geringere Prozesszeit bei gleichzeitiger Energieeinsparung erreicht ist.With such a device, it is advantageously possible to keep the soldering process chamber constantly under the process conditions necessary for the soldering process, as under high vacuum and at a temperature close to the soldering temperature, whereby a higher quality is achieved by the purity of the soldering process chamber and by the Lower heating and pumping times and a lower process time is achieved with simultaneous energy savings.

In einer vorteilhaften Ausgestaltung der erfindungsgemäßen Vorrichtung weist die Vorbehandlungskammer eine Beladeprozesskammer mit Niedrigvakuum und eine Erwärmungsprozesskammer mit Hochvakuum auf. Eine solche Ausbildung der Vorbehandlungskammer ist vorteilhaft, weil dadurch eine weitere Reduzierung der Prozesszeit erreicht ist, indem verschiedene Schritte in verschiedenen Prozesskammern durchführbar sind.In an advantageous embodiment of the device according to the invention, the pretreatment chamber has a low-vacuum loading process chamber and a high-vacuum heating process chamber. Such a design of the pretreatment chamber is advantageous because it achieves a further reduction of the process time by making it possible to carry out different steps in different process chambers.

In weiterer Ausgestaltung der erfindungsgemäßen Vorrichtung ist der Abkühlprozesskammer eine Belüftungsprozesskammer nachgeordnet.In a further embodiment of the device according to the invention, the cooling process chamber is arranged downstream of a ventilation process chamber.

In einer bevorzugten Ausführungsform der erfindungsgemäßen Vorrichtung sind die Beladeprozesskammer und die Belüftungsrozesskammern durch ein und dieselbe Kammer gebildet, wobei die Überführungseinheit karussellartig ausgebildet ist.In a preferred embodiment of the device according to the invention, the loading process chamber and the aeration process chambers are formed by one and the same chamber, wherein the transfer unit is designed like a carousel.

Eine derartige Vorrichtung ist besonders vorteilhaft, weil bei einer karussellartigen Ausbildung der Überführungseinheit beispielsweise vier Chargen von Vakuumschaltröhren parallel in der Vorrichtung vorhanden sein können, jeweils eine in jeder Prozesskammer, so dass eine kontinuierliche Verfahrensführung mit gleichen Prozesszeiten für die einzelnen Prozessschritte zu einer Verringerung der insgesamt benötigten Prozesszeit führt.Such a device is particularly advantageous because in a carousel-like design of the transfer unit, for example, four batches of vacuum interrupters can be present in parallel in the device, one in each process chamber, so that a continuous process management with the same process times for the individual process steps to reduce the total required process time leads.

Die Erfindung betrifft weiterhin eine Vakuumschaltröhre oder Baugruppe, die mit einem erfindungsgemäßen Verfahren wie oben beschrieben hergestellt ist. Derartige Vakuumschaltröhren sind vorteilhaft, weil sie bei hoher Qualität durch geringe Prozesszeiten flexibel und damit kostengünstig herstellbar sind.The invention further relates to a vacuum interrupter or assembly made by a method of the invention as described above. Such vacuum interrupters are advantageous because they are flexible and therefore inexpensive to produce with high quality due to low process times.

Die Erfindung wird im Folgenden anhand der Zeichnung und eines Ausführungsbeispiels mit Bezug auf die beiliegenden Figuren näher erläutert. Es zeigen:

Figur 1
ein schematisches Diagramm des Verfahrensablauf des erfindungsgemäßen Verfahrens; und
Figur 2
eine schematische Darstellung einer Vorrichtung zur Durchführung des erfindungsgemäßen Verfahrens.
The invention will be explained in more detail below with reference to the drawing and an embodiment with reference to the accompanying figures. Show it:
FIG. 1
a schematic diagram of the process flow of the method according to the invention; and
FIG. 2
a schematic representation of an apparatus for performing the method according to the invention.

Figur 1 zeigt ein schematisches Ablaufdiagramm in einer XY-Darstellung, wobei die X-Achse der Prozesszeit t entspricht und die Y-Achse im oberen Bereich der in der jeweiligen Prozesskammer vorherrschenden Temperatur entspricht und die Y-Achse im unteren Bereich des Diagramms einer logarithmischen Darstellung des in der jeweiligen Prozesskammer herrschenden Druckes entspricht. Im Ausführungsbeispiel gemäß der Figur 1 wird in einem ersten Zeitintervall t1 eine Beladeprozesskammer 2 auf einen Druck unterhalb des Umgebungsdruckes im Niedrigvakuumbereich abgepumpt und gleichzeitig auf eine Temperatur T1 oberhalb der Raumtemperatur erwärmt. Nach Abschluss des Zeitintervalls t1 wird eine Aufnahmeeinheit mit mindestens einer vormontierten Vakuumschaltröhre oder Baugruppe mittels einer Überführungseinheit in eine Erwärmungsprozesskammer unter Vakuumbedingungen überführt, in welcher innerhalb eines Zeitintervalls t2 Hochvakuumbedingungen, d. h. Drucke im Bereich <10-5 mbar erzeugt werden und gleichzeitig auf eine Temperatur T2, welche unterhalb einer Löttemperatur TLöt liegt, bei welcher sich das als Lot verwendete Material verflüssigt, erwärmt. In dieser Erwärmungsprozesskammer werden somit Restgase und Niederschläge an den vormontierten Vakuumschaltröhren entfernt. Die Erwärmung von Raumtemperatur auf T1 in der Beladeprozesskammer ist dabei optional und kann auch in der Erwärmungsprozesskammer innerhalb des Zeitintervalls t2 durchgeführt werden. Nach Abschluss des Zeitintervalls t2 wird wiederum durch die Überführungseinheit die Aufnahmeeinheit mit der mindestens einen Vakuumschaltröhre in die Lötprozesskammer unter Aufrechterhaltung der Vakuumbedingungen überführt, so dass während eines Zeitintervalls t3 in der Lötprozesskammer unter Hochvakuumbedingungen auf eine Löttemperatur TLöt erwärmt wird, welche so gewählt ist, dass ein in den vormontierten Vakuumschaltröhren oder Baugruppen eingebrachtes Lot zum vakuumdichten Verlöten der Bauteile miteinander sich verflüssigt und somit die vakuumdichte Verlötung der Bauteile miteinander ausbildet. Nach Erreichen der Löttemperatur TLöt wird noch innerhalb der Lötprozesskammer ein Abkühlen auf eine Temperatur unterhalb der Löttemperatur TLöt bewirkt. Nach Abschluss des Zeitintervalls t3 wird die Aufnahmeeinheit mit den nun verlöteten Vakuumschaltröhren oder Baugruppen unter Aufrechterhaltung von Vakuumbedingungen mittels der Überführeinheit in eine Abkühlprozesskammer überführt, in welcher die Vakuumschaltröhren unter Niedrigvakuumbedingungen auf Umgebungstemperatur abgekühlt werden, so dass am Ende des Zeitintervalls t4 ein Belüften ermöglicht ist und die fertig gestellten Vakuumschaltröhren der Vorrichtung entnommen werden können. Die den Zeitintervallen t1 bis t4 entsprechenden Schritte des erfindungsgemäßen Verfahrens finden in den Zeitintervallen t1 bis t4 also folgendermaßen statt: die Erwärmung der Vakuumschaltröhre auf eine Temperatur oberhalb der Umgebungstemperatur im Intervall t1, der Schritt der Erwärmung auf eine Temperatur T2 unterhalb der Löttemperatur im Intervall t2 und der Schritt der Erwärmung auf eine Temperatur TLöt entsprechend der Löttemperatur in dem Intervall t3, wobei weiterhin der Schritt der Evakuierung der Beladeprozesskammer auf Niedrigvakuum im Intervall t1 stattfindet, wobei weiterhin der Schritt auf Hochvakuum im Intervall t2 stattfindet, und wobei in dem Intervall t4 der Schritt des Abkühlens der Vakuumschaltröhre in der Abkühlprozesskammer stattfindet. Die Zeitintervalle t1, t2, t3 und t4 sind dabei vorzugsweise gleich lang. FIG. 1 shows a schematic flow diagram in an XY representation, wherein the X-axis of the process time corresponds to t and the Y-axis in the upper region of the prevailing in the respective process chamber temperature and the Y-axis in the lower part of the diagram of a logarithmic representation of in corresponds to the prevailing pressure prevailing pressure chamber. In the embodiment according to the FIG. 1 In a first time interval t 1, a loading process chamber 2 is pumped off to a pressure below the ambient pressure in the low-vacuum range and simultaneously heated to a temperature T1 above the room temperature. After completion of the time interval t 1 , a receiving unit with at least one pre-assembled vacuum interrupter or assembly is transferred by means of a transfer unit into a heating process chamber under vacuum conditions, in which within a time interval t 2 high vacuum conditions, ie pressures in the range <10 -5 mbar are generated and at the same time Temperature T 2 , which is below a soldering temperature T solder , at which the material used as solder liquefies, heated. In this heating process chamber thus residual gases and precipitates are removed at the pre-assembled vacuum interrupters. The heating from room temperature to T1 in the loading process chamber is optional and can also be performed in the heating process chamber within the time interval t2. After completion of the time interval t 2 , the receiving unit with the at least one vacuum interrupter is in turn transferred to the soldering process chamber while maintaining the vacuum conditions, so that during a time interval t 3 in the Lötprozesskammer under high vacuum conditions to a soldering temperature T solder is heated, which is selected is that a solder introduced in the preassembled vacuum interrupters or assemblies for vacuum-tight soldering of the components together liquefies and thus forms the vacuum-tight soldering of the components together. After reaching the soldering temperature T solder cooling within the soldering process chamber is effected to a temperature below the soldering temperature T soldering . After completion of the time interval t 3 , the receiving unit with the now soldered vacuum interrupters or assemblies while maintaining vacuum conditions by means of the transfer unit in a Abkühlprozesskammer transferred, in which the vacuum interrupters are cooled under low vacuum conditions to ambient temperature, so that at the end of the time interval t4 a venting is possible and the finished vacuum interrupters of the device can be removed. The steps corresponding to the time intervals t 1 to t 4 of the method according to the invention thus take place in the time intervals t 1 to t 4 as follows: the heating of the vacuum interrupter to a temperature above the ambient temperature in the interval t 1 , the step of heating to a temperature T 2 below the soldering temperature in the interval t 2 and the step of heating to a temperature T solder according to the soldering temperature in the interval t 3 , wherein further the step of evacuating the loading process chamber takes place in a low vacuum in the interval t 1 , wherein the step further on high vacuum in the interval t 2 takes place, and wherein in the interval t 4, the step of cooling the vacuum interrupter takes place in the Abkühlprozesskammer. The time intervals t1, t2, t3 and t4 are preferably the same length.

Figur 2 zeigt eine schematische Darstellung einer Vorrichtung zur Durchführung des oben beschriebenen erfindungsgemäßen Verfahrens mit einer Überführungseinheit 1, welche im Ausführungsbeispiels karussellartig ausgebildet ist und ein Überführen unter Vakuumbedingungen von einer Belade-/Belüftungsprozesskammer 2, die ein und dieselbe Kammer bilden, in eine Erwärmungsprozesskammer 3 und eine Lötprozesskammer 4 sowie eine Abkühlprozesskammer 5 ermöglicht, indem durch Absenken und Anheben einer Aufnahmeeinheit 6, welche mit mindestens einer Vakuumschaltröhre 7 oder Baugruppe, im Ausführungsbeispiel der Figur 2 einer Mehrzahl von Vakuumschaltröhren 7 versehen ist, unter den mit Bezug auf Figur 1 beschriebenen Vakuum- und Temperaturbedingungen ein Einbringen in die jeweiligen Prozesskammern entlang der strichliert dargestellten Linie ermöglicht ist. Die Belade-/Belüftungsprozesskammer 2, die Erwärmungsprozesskammer 3, die Lötprozesskammer 4 sowie die Abkühlprozesskammer 5 sind dabei über der Überführungseinheit 1 angeordnet und mittels geeigneter Vakuumschieber- und Schleusensysteme (figürlich nicht dargestellt) mit dieser verbunden, so dass durch Absenken und Anheben der Aufnahmeeinheit 6 ein Überführen ermöglicht ist. FIG. 2 shows a schematic representation of an apparatus for carrying out the method according to the invention described above with a transfer unit 1, which is designed like a carousel in the embodiment and a transfer under vacuum conditions from a loading / aeration process chamber 2, which form one and the same chamber, in a heating process chamber 3 and a Soldering process chamber 4 and a Abkühlprozesskammer 5 allows by lowering and raising a receiving unit 6, which with at least one vacuum interrupter 7 or assembly, in the embodiment of the FIG. 2 a plurality of vacuum interrupters 7 is provided with reference to with reference to FIG. 1 described vacuum and temperature conditions an introduction into the respective process chambers along the dashed line is possible. The loading / aeration process chamber 2, the heating process chamber 3, the soldering process chamber 4 and the Abkühlprozesskammer 5 are arranged above the transfer unit 1 and connected by suitable Vakuumschieber- and lock systems (figuratively not shown) with this, so that by lowering and raising the receiving unit. 6 a transfer is possible.

Im Ausführungsbeispiels der Figur 2 ist die Überführungseinheit karussellartig ausgebildet, so dass die Belade- und die Belüftungsprozesskammer 2 durch ein und dieselbe Prozesskammer gebildet sind und sowohl zum Beladen als auch zum Entladen vorgesehen ist. Es sind auch andere Ausführungsformen einer Vorrichtung denkbar, beispielsweise mit einer linearen Überführungseinheit, wobei in diesem Fall die Beladeprozesskammer am Anfang der Vorrichtung und die Belüftungsprozesskammer am Ende der Vorrichtung angeordnet sind mit dazwischen angeordneten Erwärmungsprozess- und Lötprozesskammern.In the embodiment of FIG. 2 For example, the transfer unit is carousel-shaped, so that the loading and venting process chambers 2 are formed by one and the same process chamber and are provided for both loading and unloading. Other embodiments of a device are also conceivable, for example with a linear one Transfer unit, in which case the loading process chamber at the beginning of the device and the aeration process chamber at the end of the device are arranged with interposed heating process and Lötprozesskammern.

Durch gleich lang gewählte Zeitintervalle t1 bis t4 für die verschiedenen Prozessschritte ist es somit möglich, mehrere Chargen von Vakuumschaltröhren gleichzeitig in der Vorrichtung zu produzieren, in dem beim Überführen einer ersten Aufnahmeeinheit 6 mit vormontierten Vakuumschaltröhren aus der Belade-/Belüftungsprozesskammer 2 in die Erwärmungsprozesskammer 3 eine nächste Aufnahmeeinheit 6 in die Belade-/Belüftungsprozesskammer 2 eingebracht wird, und auch jeweils beim Wechsel von der Erwärmungsprozesskammer in die Lötprozesskammer und in die Abkühlprozesskammer, so dass bei jedem Wechsel von einer zur nächsten Prozesskammer jeweils eine weitere Charge in die Vorrichtung eingeschleust werden kann.By the same time selected time intervals t1 to t4 for the various process steps, it is thus possible to produce several batches of vacuum interrupters simultaneously in the device in which when transferring a first receiving unit 6 with pre-assembled vacuum interrupters from the loading / aeration process chamber 2 in the Erwärmungsprozesskammer. 3 a next receiving unit 6 is introduced into the loading / aeration process chamber 2, and also when changing from the heating process chamber in the Lötprozesskammer and in the Abkühlprozesskammer, so that each time a change from one to the next process chamber another batch can be introduced into the device ,

Claims (9)

  1. Method for producing vacuum interrupters (7) or assemblies of vacuum interrupters by means of a soldering process chamber (4), in which
    a) at least one preassembled vacuum interrupter (7) or assembly is introduced into a pretreatment chamber (2, 3) connected upstream of the soldering process chamber (4) and is preheated and pre-evacuated;
    b) the pretreated vacuum interrupter (7) or assembly is transferred into the soldering process chamber (4) and is brought to a soldering temperature (TLöt) in a high vacuum; and after that
    c) the soldered and evacuated vacuum interrupter (7) or assembly is transported into a cooling process chamber (5) and is cooled there;
    the transferring and transporting of the vacuum interrupter or assembly being performed under vacuum conditions.
  2. Method according to Claim 1,
    characterized in that the at least one preassembled vacuum interrupter (7) or assembly is initially introduced into a loading process chamber (2) of the pretreatment chamber (2, 3) and is heated to a temperature (T1) lying above the ambient temperature in a low vacuum, and is subsequently transported under high vacuum conditions into a heating process chamber (3) of the pretreatment chamber (2, 3) and is heated to a temperature below the soldering temperature (T2) in a high vacuum.
  3. Method according to Claim 1 or 2,
    characterized in that a further transfer into an aeration chamber is carried out after the cooling of the at least one vacuum interrupter (7) or assembly in the cooling process chamber (5).
  4. Method according to one of Claims 1 to 3,
    characterized in that respective time intervals (t1, t2, t3, t4) of a method step in the pretreatment chamber (2, 3), the soldering process chamber (4), the cooling process chamber (5) and the aeration chamber are equally long.
  5. Vacuum interrupter or assembly,
    characterized in that the vacuum interrupter or assembly is produced by a method according to one of Claims 1 to 4.
  6. Device for carrying out the method according to one of Claims 1 to 4, comprising
    - a pretreatment chamber (2, 3), connected upstream of a soldering process chamber (4), for preheating and pre-evacuating at least one preassembled vacuum interrupter (7);
    - a cooling process chamber (5), connected downstream of the soldering process chamber (4), for cooling the vacuum interrupter (7) to ambient temperature, and
    at least one transfer unit for transferring and transporting the vacuum interrupter (7) under vacuum conditions.
  7. Device according to Claim 6,
    characterized in that the pretreatment chamber (2, 3) has a loading process chamber (2) with a low vacuum and a heating process chamber (3) with a high vacuum.
  8. Device according to Claim 6 or 7,
    characterized in that an aeration process chamber (2) is connected downstream of the cooling process chamber (5).
  9. Device according to Claim 8,
    characterized in that the loading process chamber (2) and the aeration process chamber (2) are formed by one and the same chamber (2), the feeding unit (7) being formed in the manner of a carousel.
EP09779504.1A 2008-07-14 2009-05-19 Method and device for producing vacuum interrupters or assemblies of vacuum interrupters, and vacuum interrupter Not-in-force EP2297761B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008033725 2008-07-14
PCT/EP2009/056043 WO2010006830A1 (en) 2008-07-14 2009-05-19 Method and device for producing vacuum interrupters or assemblies of vacuum interrupters, and vacuum interrupter

Publications (2)

Publication Number Publication Date
EP2297761A1 EP2297761A1 (en) 2011-03-23
EP2297761B1 true EP2297761B1 (en) 2016-01-27

Family

ID=41027055

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09779504.1A Not-in-force EP2297761B1 (en) 2008-07-14 2009-05-19 Method and device for producing vacuum interrupters or assemblies of vacuum interrupters, and vacuum interrupter

Country Status (3)

Country Link
EP (1) EP2297761B1 (en)
CN (1) CN102089845B (en)
WO (1) WO2010006830A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112885626B (en) * 2021-01-26 2021-11-02 杭州厚域科技有限公司 Machining method of vacuum switch assembly
CN117415402B (en) * 2023-12-19 2024-02-23 武汉飞特电气有限公司 Method for manufacturing vacuum switch tube assembly by using welding treatment chamber

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3926619C2 (en) * 1989-07-15 1993-11-04 Calor Emag Elektrizitaets Ag METHOD FOR PRODUCING A VACUUM SWITCHING CHAMBER
JP2941682B2 (en) * 1994-05-12 1999-08-25 株式会社東芝 Vacuum valve and method of manufacturing the same
JP2000076965A (en) * 1998-08-28 2000-03-14 Toshiba Fa Syst Eng Corp Manufacture of vacuum valve
DE10019070A1 (en) * 2000-04-18 2001-10-25 Moeller Gmbh Device for de-gassing and soldering pre-mounted vacuum switch tubes has base plate with solder point(s), opening for connecting suction pump, bell, stimulation coil, generator and susceptor

Also Published As

Publication number Publication date
WO2010006830A1 (en) 2010-01-21
EP2297761A1 (en) 2011-03-23
CN102089845A (en) 2011-06-08
CN102089845B (en) 2013-12-18

Similar Documents

Publication Publication Date Title
DE102014106631B4 (en) Device and method for producing soldered connections
DE4225378A1 (en) METHOD FOR SOLDERING PCBS UNDER LOW PRESSURE
DE2841767A1 (en) TRANSFER DEVICE FOR COVERING ELECTRONIC COMPONENTS OR DGL.
DE2426940C2 (en) Method for producing a laminated glass pane
EP2297761B1 (en) Method and device for producing vacuum interrupters or assemblies of vacuum interrupters, and vacuum interrupter
DE112009001885T5 (en) Vacuum processing apparatus and vacuum processing method
DE1496444A1 (en) Method and device for hardening and cooling glass
DE3119587C2 (en) Method and apparatus for manufacturing cathode ray tubes
DE3915040C2 (en)
EP2794499A2 (en) Method and device for producing vacuum tubes for solar thermal installations
DE102009042148B4 (en) 14.09.2009Equipment press and process for the production of plate-shaped workpieces
DE102009049270B4 (en) Vapor-phase soldering machine with conveyor
DE69609989T2 (en) METHOD AND DEVICE FOR TREATING COMPONENTS WITH A GAS MIXTURE
DE2924274A1 (en) METHOD OF MANUFACTURING A GAS DISCHARGE INDICATOR
DE102022206409A1 (en) Device and method for soldering assemblies and use of the device
DE102014109883A1 (en) Device for forming and press-hardening a sheet steel blank
EP1473372B1 (en) Apparatus for transporting metallic parts
WO2019149635A1 (en) Method for producing a glass sheet for vacuum insulating glass
EP4015657B1 (en) Thermal treatment of components
DE1282411B (en) Device for the continuous production and processing of electronic components under vacuum, in particular for the vapor deposition of layers
DE102020205397A1 (en) Process for the production of a hot-formed and press-hardened sheet steel component
EP3851235A1 (en) Device and method for controlled heat transfer, in particular by a condensing liquid on workpieces of larger dimensions and masses
WO2022128880A1 (en) Heat treatment of a component
DE3448599B4 (en) Vacuum equipment esp. for IC prodn.
DE677220C (en) Process for the production of plates for copper oxide rectifiers

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20101210

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA RS

DAX Request for extension of the european patent (deleted)
RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: SIEMENS AKTIENGESELLSCHAFT

Owner name: PVA TEPLA AG

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20150619

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 773051

Country of ref document: AT

Kind code of ref document: T

Effective date: 20160215

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502009012101

Country of ref document: DE

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20160127

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160427

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160428

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160527

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160527

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160531

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502009012101

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160519

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

26N No opposition filed

Effective date: 20161028

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20160519

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160531

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160531

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160427

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20170131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160531

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160519

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160519

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 773051

Country of ref document: AT

Kind code of ref document: T

Effective date: 20160519

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160519

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20090519

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160127

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20210720

Year of fee payment: 13

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502009012101

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221201