EP2270433A3 - Kapazitiver Drehwinkelsensor - Google Patents

Kapazitiver Drehwinkelsensor Download PDF

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Publication number
EP2270433A3
EP2270433A3 EP10006223A EP10006223A EP2270433A3 EP 2270433 A3 EP2270433 A3 EP 2270433A3 EP 10006223 A EP10006223 A EP 10006223A EP 10006223 A EP10006223 A EP 10006223A EP 2270433 A3 EP2270433 A3 EP 2270433A3
Authority
EP
European Patent Office
Prior art keywords
rotor
rotation
rotation angle
conductor
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10006223A
Other languages
English (en)
French (fr)
Other versions
EP2270433A2 (de
EP2270433B1 (de
Inventor
Martin Zimmermann-Schwitter
Gallus Merki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Camille Bauer Metrawatt AG
Original Assignee
Camille Bauer AG
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Publication date
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Publication of EP2270433A3 publication Critical patent/EP2270433A3/de
Application granted granted Critical
Publication of EP2270433B1 publication Critical patent/EP2270433B1/de
Not-in-force legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Liquid Crystal (AREA)

Abstract

Diese Erfindung betrifft eine Vorrichtung zur kapazitiven Abtastung von Kreisteilungen, vielfach als kapazitiver Drehwinkelsensor, aber auch als Drehwinkelcodierer oder -geber bezeichnet. Viele Anwendungen erfordern solche Drehwinkelsensoren mit aussergewöhnlich hoher Messgenauigkeit und Auflösung des angezeigten bzw. ausgegebenen Winkelwertes, oft auf wenige Winkelminuten. Eine verbreitete Bauart solcher Drehwinkelsensoren besteht aus ein oder zwei stationären Kondensatorelektroden oder - belägen, wovon mindestens eine über den Umfang segmentiert ist, und einem drehbaren Rotor, der mit dem Objekt mechanisch verbunden ist, dessen Drehwinkel gemessen werden soll. Zwischen den beiden stationären Kondensatorelektroden wird ein elektrisches Feld erzeugt. Dieses Feld und dadurch die Kapazität zwischen den Elektroden wird bei Drehung des Rotors, der eine variable, elektrisch wirksame Struktur aufweist, so verändert, dass eine Bestimmung der Winkellage des Objekts mit grosser Genauigkeit möglich ist. Die erfindungsgemässe Lösung vermindert oder vermeidet grossen Schaltungsaufwand und nachträgliche elektrische Kompensation und Korrektur der ermittelten Werte in der Weise, dass die elektrisch wirksame Struktur des Rotors der erfindungsgemässen, genau definierten mathematischen Funktion entspricht. Der Rotor kann ein Leiter oder ein Nichtleiter sein, seine elektrisch wirksame, d.h. das elektrische Feld beeinflussende Struktur ist in beiden Fällen durch die Formgebung bedingt.
EP10006223.1A 2009-07-04 2010-06-16 Kapazitiver Drehwinkelsensor Not-in-force EP2270433B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009031664A DE102009031664A1 (de) 2009-07-04 2009-07-04 Kapazitiver Drehwinkelsensor

Publications (3)

Publication Number Publication Date
EP2270433A2 EP2270433A2 (de) 2011-01-05
EP2270433A3 true EP2270433A3 (de) 2013-01-23
EP2270433B1 EP2270433B1 (de) 2014-08-13

Family

ID=42938418

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10006223.1A Not-in-force EP2270433B1 (de) 2009-07-04 2010-06-16 Kapazitiver Drehwinkelsensor

Country Status (4)

Country Link
EP (1) EP2270433B1 (de)
DE (1) DE102009031664A1 (de)
DK (1) DK2270433T3 (de)
ES (1) ES2522520T3 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009019172A1 (de) 2009-04-28 2010-11-04 Hengstler Gmbh Kapazitiver Drehsensor
DE102011089518A1 (de) * 2011-12-22 2013-04-04 Continental Automotive Gmbh Vorrichtung und Verfahren zum Bestimmen einer Position eines Elements
EP2824426B1 (de) 2013-07-09 2018-05-09 Leica Geosystems AG Kapazitiver Drehlagengeber
CN103528605B (zh) * 2013-10-15 2015-11-11 北京航空航天大学 一种电容型绝对式旋转编码器
CN104089552B (zh) * 2014-07-01 2017-01-25 宁波狮球通风机电有限公司 罩极电机转子斜槽斜度检测仪
DE102015118083A1 (de) 2015-10-23 2017-04-27 Miele & Cie. Kg Verfahren und Drehwinkelsensor zum Messen einer Winkelstellung einer drehbaren Gebereinheit
DE102017126271A1 (de) * 2017-11-09 2019-05-09 Webasto SE Positionierung von Motoren mittels kapazitiver Messung
CN108253882A (zh) * 2018-04-10 2018-07-06 中国工程物理研究院电子工程研究所 一种微马达的角度测量装置
US11255700B2 (en) * 2018-08-06 2022-02-22 Allegro Microsystems, Llc Magnetic field sensor
DE102018132098A1 (de) 2018-12-13 2020-06-18 Thyssenkrupp Ag Elektronische Leiterplatte
CN111137838B (zh) * 2019-12-20 2022-08-30 清华大学 一种mems容栅式角位移传感器及其制造方法
US20210270593A1 (en) * 2020-02-27 2021-09-02 Netzer Precision Motion Sensors Ltd. Angular position sensor with noise compensation
WO2025175571A1 (en) * 2024-02-23 2025-08-28 Siemens Aktiengesellschaft Capacitive encoder

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4234016A1 (de) * 1991-10-10 1993-04-15 Papst Motoren Gmbh & Co Kg Kapazitiv arbeitende positionsmessvorrichtung
EP1538422A1 (de) * 1999-04-19 2005-06-08 Netzer Precision Motion Sensors Ltd. Kapazitiver Lagesensor
WO2007043962A1 (en) * 2005-10-14 2007-04-19 Hexagon Metrology Ab Method for signal processing of capacitive measurement scales

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4429307A (en) 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output
EP1251338B1 (de) 2001-04-20 2004-11-17 Camille Bauer AG Kapazitiver Sensor und Verfahren zur Messung von Kapazitätsänderungen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4234016A1 (de) * 1991-10-10 1993-04-15 Papst Motoren Gmbh & Co Kg Kapazitiv arbeitende positionsmessvorrichtung
EP1538422A1 (de) * 1999-04-19 2005-06-08 Netzer Precision Motion Sensors Ltd. Kapazitiver Lagesensor
WO2007043962A1 (en) * 2005-10-14 2007-04-19 Hexagon Metrology Ab Method for signal processing of capacitive measurement scales

Also Published As

Publication number Publication date
DK2270433T3 (en) 2014-11-24
ES2522520T3 (es) 2014-11-14
DE102009031664A1 (de) 2011-01-05
EP2270433A2 (de) 2011-01-05
EP2270433B1 (de) 2014-08-13

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