EP2243007A4 - Système et procédés de détection de front d'onde de diversité de phase - Google Patents
Système et procédés de détection de front d'onde de diversité de phase Download PDFInfo
- Publication number
- EP2243007A4 EP2243007A4 EP08844854.3A EP08844854A EP2243007A4 EP 2243007 A4 EP2243007 A4 EP 2243007A4 EP 08844854 A EP08844854 A EP 08844854A EP 2243007 A4 EP2243007 A4 EP 2243007A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- methods
- phase diversity
- wavefront sensing
- diversity wavefront
- sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J2009/002—Wavefront phase distribution
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0203—Phased array of beams
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Eye Examination Apparatus (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US98383007P | 2007-10-30 | 2007-10-30 | |
US2887708P | 2008-02-14 | 2008-02-14 | |
US4804208P | 2008-04-25 | 2008-04-25 | |
PCT/US2008/081402 WO2009058747A1 (fr) | 2007-10-30 | 2008-10-28 | Système et procédés de détection de front d'onde de diversité de phase |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2243007A1 EP2243007A1 (fr) | 2010-10-27 |
EP2243007A4 true EP2243007A4 (fr) | 2017-03-01 |
Family
ID=40591421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08844854.3A Withdrawn EP2243007A4 (fr) | 2007-10-30 | 2008-10-28 | Système et procédés de détection de front d'onde de diversité de phase |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP2243007A4 (fr) |
AU (1) | AU2008318889B2 (fr) |
CA (2) | CA2912003C (fr) |
WO (1) | WO2009058747A1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102095503B (zh) * | 2010-11-30 | 2012-07-04 | 中国科学院国家天文台南京天文光学技术研究所 | 基于差分传感器的波前检测和重构方法 |
DE102012204704A1 (de) | 2012-03-23 | 2013-09-26 | Carl Zeiss Smt Gmbh | Messvorrichtung zum Vermessen einer Abbildungsgüte eines EUV-Objektives |
DE102015219330A1 (de) * | 2015-10-07 | 2017-04-13 | Carl Zeiss Smt Gmbh | Verfahren und Vorrichtung zur Strahlanalyse |
DE102016211310B3 (de) | 2016-06-23 | 2017-07-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur messung einer aberration, abbildungssysteme und verfahren zur messung einer aberration |
CN110879136A (zh) * | 2019-12-11 | 2020-03-13 | 中国科学院长春光学精密机械与物理研究所 | 一种光学系统畸变测量方法及设备 |
CN113203485B (zh) * | 2021-04-27 | 2022-08-05 | 浙江大学 | 一种通过单次曝光实现轴向相位差波前重建的装置及方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004113856A1 (fr) * | 2003-06-20 | 2004-12-29 | Heriot-Watt University | Capteur a front d'ondes a diversite de phase |
US7232999B1 (en) * | 2003-07-30 | 2007-06-19 | Kestrel Corporation | Laser wavefront characterization |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5598261A (en) * | 1995-07-07 | 1997-01-28 | Lockheed Missiles & Space Company, Inc. | Wavefront sensor for a scanning imager |
EP1064651B1 (fr) * | 1998-03-10 | 2002-07-17 | QinetiQ Limited | Systeme d'imagerie tridimensionnel |
US6107617A (en) * | 1998-06-05 | 2000-08-22 | The United States Of America As Represented By The Secretary Of The Air Force | Liquid crystal active optics correction for large space based optical systems |
EP1476715B1 (fr) * | 2002-01-24 | 2018-10-10 | Icos Vision Systems N.V. | Analyse spatiale amelioree d'un front d'onde et mesure en 3d |
US7616330B2 (en) * | 2006-04-07 | 2009-11-10 | AMO Wavefront Sciences, LLP | Geometric measurement system and method of measuring a geometric characteristic of an object |
TWI455326B (zh) * | 2007-09-13 | 2014-10-01 | Omnivision Tech Inc | 透射式偵測器、使用該偵測器之系統及其方法 |
-
2008
- 2008-10-28 AU AU2008318889A patent/AU2008318889B2/en not_active Ceased
- 2008-10-28 CA CA2912003A patent/CA2912003C/fr not_active Expired - Fee Related
- 2008-10-28 EP EP08844854.3A patent/EP2243007A4/fr not_active Withdrawn
- 2008-10-28 CA CA2713418A patent/CA2713418C/fr not_active Expired - Fee Related
- 2008-10-28 WO PCT/US2008/081402 patent/WO2009058747A1/fr active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004113856A1 (fr) * | 2003-06-20 | 2004-12-29 | Heriot-Watt University | Capteur a front d'ondes a diversite de phase |
US7232999B1 (en) * | 2003-07-30 | 2007-06-19 | Kestrel Corporation | Laser wavefront characterization |
Non-Patent Citations (3)
Title |
---|
BLANCHARD P M ET AL: "PHASE-DIVERSITY WAVE-FRONT SENSING WITH A DISTORTED DIFFRACTION GRATING", APPLIED OPTICS, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC; US, vol. 39, no. 35, 10 December 2000 (2000-12-10), pages 6649 - 6655, XP001017744, ISSN: 0003-6935, DOI: 10.1364/AO.39.006649 * |
See also references of WO2009058747A1 * |
SLIMANE DJIDEL ET AL: "High-speed, 3-dimensional, telecentric imaging", SCIENCE APPL. OPT. OPT. COMMUN OPT. LETT. OPT. EXPRESS OPT. EXPRESS OPT. EXPRESS OPT. EXPRESS JULY OPTICS EXPRESS, 4 September 2006 (2006-09-04), pages 82 - 86, XP055180342, Retrieved from the Internet <URL:http://www.opticsinfobase.org/DirectPDFAccess/553514A0-C23E-3DAA-BD02D64E50A149F6_97946/oe-14-18-8269.pdf?da=1&id=97946&seq=0&mobile=no> [retrieved on 20150331] * |
Also Published As
Publication number | Publication date |
---|---|
EP2243007A1 (fr) | 2010-10-27 |
AU2008318889A1 (en) | 2009-05-07 |
WO2009058747A1 (fr) | 2009-05-07 |
CA2713418A1 (fr) | 2009-05-07 |
CA2912003C (fr) | 2017-07-18 |
CA2713418C (fr) | 2016-01-26 |
CA2912003A1 (fr) | 2009-05-07 |
AU2008318889B2 (en) | 2014-01-23 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
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17P | Request for examination filed |
Effective date: 20100826 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA MK RS |
|
DAX | Request for extension of the european patent (deleted) | ||
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: CAMPBELL DALGARNO, HEATHER, I. Inventor name: CRAIK, GRAHAM, N. Inventor name: GREENAWAY, ALAN, H. Inventor name: FARRER, STEPHEN, W. Inventor name: RAYMOND, THOMAS, D. Inventor name: NEAL, DANIEL, R. Inventor name: PULASKI, PAUL Inventor name: FAICHNIE, DAVID, M. |
|
RA4 | Supplementary search report drawn up and despatched (corrected) |
Effective date: 20170201 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G01J 9/00 20060101ALI20170126BHEP Ipc: G01J 1/02 20060101AFI20170126BHEP Ipc: G01J 1/04 20060101ALI20170126BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 20210501 |