EP2243007A4 - System and methods of phase diversity wavefront sensing - Google Patents

System and methods of phase diversity wavefront sensing Download PDF

Info

Publication number
EP2243007A4
EP2243007A4 EP08844854.3A EP08844854A EP2243007A4 EP 2243007 A4 EP2243007 A4 EP 2243007A4 EP 08844854 A EP08844854 A EP 08844854A EP 2243007 A4 EP2243007 A4 EP 2243007A4
Authority
EP
European Patent Office
Prior art keywords
methods
phase diversity
wavefront sensing
diversity wavefront
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08844854.3A
Other languages
German (de)
French (fr)
Other versions
EP2243007A1 (en
Inventor
Thomas D. Raymond
Paul Pulaski
Stephen W. Farrer
Daniel R. Neal
Alan H. Greenaway
David M. Faichnie
Heather I. Campbell Dalgarno
Graham N. Craik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AMO Wavefront Sciences LLC
Original Assignee
AMO Wavefront Sciences LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AMO Wavefront Sciences LLC filed Critical AMO Wavefront Sciences LLC
Publication of EP2243007A1 publication Critical patent/EP2243007A1/en
Publication of EP2243007A4 publication Critical patent/EP2243007A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J2009/002—Wavefront phase distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0203—Phased array of beams

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Eye Examination Apparatus (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
EP08844854.3A 2007-10-30 2008-10-28 System and methods of phase diversity wavefront sensing Withdrawn EP2243007A4 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US98383007P 2007-10-30 2007-10-30
US2887708P 2008-02-14 2008-02-14
US4804208P 2008-04-25 2008-04-25
PCT/US2008/081402 WO2009058747A1 (en) 2007-10-30 2008-10-28 System and methods of phase diversity wavefront sensing

Publications (2)

Publication Number Publication Date
EP2243007A1 EP2243007A1 (en) 2010-10-27
EP2243007A4 true EP2243007A4 (en) 2017-03-01

Family

ID=40591421

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08844854.3A Withdrawn EP2243007A4 (en) 2007-10-30 2008-10-28 System and methods of phase diversity wavefront sensing

Country Status (4)

Country Link
EP (1) EP2243007A4 (en)
AU (1) AU2008318889B2 (en)
CA (2) CA2912003C (en)
WO (1) WO2009058747A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102095503B (en) * 2010-11-30 2012-07-04 中国科学院国家天文台南京天文光学技术研究所 Wavefront detection and reconstruction method based on differential sensor
DE102012204704A1 (en) 2012-03-23 2013-09-26 Carl Zeiss Smt Gmbh Measuring device for measuring an imaging quality of an EUV objective
DE102015219330A1 (en) 2015-10-07 2017-04-13 Carl Zeiss Smt Gmbh Method and apparatus for beam analysis
DE102016211310B3 (en) 2016-06-23 2017-07-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. DEVICE FOR MEASURING A BERRATION, PICTURE SYSTEMS AND METHOD FOR MEASURING A BERRATION
CN110879136A (en) * 2019-12-11 2020-03-13 中国科学院长春光学精密机械与物理研究所 Optical system distortion measuring method and device
CN113203485B (en) * 2021-04-27 2022-08-05 浙江大学 Device and method for realizing axial phase difference wavefront reconstruction through single exposure

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004113856A1 (en) * 2003-06-20 2004-12-29 Heriot-Watt University Phase-diversity wavefront sensor
US7232999B1 (en) * 2003-07-30 2007-06-19 Kestrel Corporation Laser wavefront characterization

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5598261A (en) * 1995-07-07 1997-01-28 Lockheed Missiles & Space Company, Inc. Wavefront sensor for a scanning imager
JP4344090B2 (en) * 1998-03-10 2009-10-14 イギリス国 3D image forming system
US6107617A (en) * 1998-06-05 2000-08-22 The United States Of America As Represented By The Secretary Of The Air Force Liquid crystal active optics correction for large space based optical systems
EP1476715B1 (en) * 2002-01-24 2018-10-10 Icos Vision Systems N.V. Improved spatial wavefront analysis and 3d measurement
US7583389B2 (en) * 2006-04-07 2009-09-01 Amo Wavefront Sciences, Llc Geometric measurement system and method of measuring a geometric characteristic of an object
TWI455326B (en) * 2007-09-13 2014-10-01 Omnivision Tech Inc Transmissive detectors, systems incorporating same, and associated methods

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004113856A1 (en) * 2003-06-20 2004-12-29 Heriot-Watt University Phase-diversity wavefront sensor
US7232999B1 (en) * 2003-07-30 2007-06-19 Kestrel Corporation Laser wavefront characterization

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
BLANCHARD P M ET AL: "PHASE-DIVERSITY WAVE-FRONT SENSING WITH A DISTORTED DIFFRACTION GRATING", APPLIED OPTICS, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC; US, vol. 39, no. 35, 10 December 2000 (2000-12-10), pages 6649 - 6655, XP001017744, ISSN: 0003-6935, DOI: 10.1364/AO.39.006649 *
See also references of WO2009058747A1 *
SLIMANE DJIDEL ET AL: "High-speed, 3-dimensional, telecentric imaging", SCIENCE APPL. OPT. OPT. COMMUN OPT. LETT. OPT. EXPRESS OPT. EXPRESS OPT. EXPRESS OPT. EXPRESS JULY OPTICS EXPRESS, 4 September 2006 (2006-09-04), pages 82 - 86, XP055180342, Retrieved from the Internet <URL:http://www.opticsinfobase.org/DirectPDFAccess/553514A0-C23E-3DAA-BD02D64E50A149F6_97946/oe-14-18-8269.pdf?da=1&id=97946&seq=0&mobile=no> [retrieved on 20150331] *

Also Published As

Publication number Publication date
CA2713418A1 (en) 2009-05-07
AU2008318889B2 (en) 2014-01-23
WO2009058747A1 (en) 2009-05-07
CA2912003C (en) 2017-07-18
AU2008318889A1 (en) 2009-05-07
EP2243007A1 (en) 2010-10-27
CA2713418C (en) 2016-01-26
CA2912003A1 (en) 2009-05-07

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Inventor name: CAMPBELL DALGARNO, HEATHER, I.

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Inventor name: GREENAWAY, ALAN, H.

Inventor name: FARRER, STEPHEN, W.

Inventor name: RAYMOND, THOMAS, D.

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