EP2232142A2 - Device and method for maintaining and operating a flame - Google Patents
Device and method for maintaining and operating a flameInfo
- Publication number
- EP2232142A2 EP2232142A2 EP09703009A EP09703009A EP2232142A2 EP 2232142 A2 EP2232142 A2 EP 2232142A2 EP 09703009 A EP09703009 A EP 09703009A EP 09703009 A EP09703009 A EP 09703009A EP 2232142 A2 EP2232142 A2 EP 2232142A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- flame
- burner
- operating
- maintaining
- geometry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/46—Details
- F23D14/48—Nozzles
- F23D14/58—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C99/00—Subject-matter not provided for in other groups of this subclass
- F23C99/001—Applying electric means or magnetism to combustion
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/46—Details
- F23D14/72—Safety devices, e.g. operative in case of failure of gas supply
- F23D14/74—Preventing flame lift-off
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D99/00—Subject matter not provided for in other groups of this subclass
- F23D99/002—Burners specially adapted for specific applications
- F23D99/004—Burners specially adapted for specific applications for use in particular heating operations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2207/00—Ignition devices associated with burner
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
- F23D2900/21—Burners specially adapted for a particular use
- F23D2900/21005—Burners specially adapted for a particular use for flame deposition, e.g. flame hydrolysis deposition [FHD]
Definitions
- the invention relates to a device and a method for maintaining and operating a flame according to the preamble of the claims.
- the object of the present invention is to avoid the disadvantages of the prior art, in which a device and a
- the essence of the invention is the controlled ignition of a fuel gas mixture by the combination of an ignition source, with a flame.
- An ignition source is the energy that triggers the oxidation or combustion of the fuel gas mixture. This can be in particular a Corona opinion, the Barierreentladung.
- the flame-forming gas mixture is passed through or passed by the ignition source, so that a simultaneous ignition of the over the entire burner width is possible.
- the pulse frequency, the pulse ratio (On: Off) and / or the ignition of the ignition source can be varied over wide ranges, resulting in a high variability of the flame geometry and the flame parameter leads.
- the deposition behavior of the layer-forming components or the various surface modifications can be influenced in a targeted manner.
- FIG. 1 shows an embodiment of the device according to the invention in the operating state in an overview and Fig. 2: the embodiment of FIG. 1 in a cross section.
- the device according to the invention shown in Fig. 1 consists of a burner (1), a burner attachment (2), an anode (3), an operating state existing flame (4), a dialectic (5), a cathode (6) and a Exit geometry (7).
- a burner attachment (2) is mounted, on which in turn the electrically disabled barrier is mounted.
- the electrically impeded barrier consists of an anode (3) and a cathode (6) insulated with a dialectic (5).
- a non-combustible gas mixture can be introduced, which can be ignited via the dialectically impeded barrier, wherein the flame geometry is controllable by the barrier voltage and / or the pulse width of the barrier discharge.
- a non-combustible gas mixture can be produced inter alia by reducing the proportion of fuel gas in relation to the oxygen content (for example, from 5% to 2.75% in the case of propane gas). This reduces the required fuel gas concentration and thus the fuel gas consumption by more than 40% compared to conventional burners.
- Reactive and / or layer-forming substances or components such as, for example, organometallic compounds or suitable halides or hybrids, can be admixed to the fuel gas mixture either in powdery form, in gaseous form or in liquid form as a mixture (for example a solution or as a single component).
- This admixture with the fuel gas can be done either before the ignition of the same and thus before the ignition source, such as.
- the corona or barrier discharge or only after passing through the fuel gas mixture by the ignition source (corona or barrier discharge).
- a fuel gas for the flame can serve both organic gases and hydrogen.
- Oxygen is added to this fuel gas in an inert gas stream, it being possible for both nitrogen and noble gases to serve as the inert gas.
- the burner used is a commercial 300 mm long burner. On the burner, a 270 mm long and 30 mm high ceramic attachment with a 2.5 mm wide gap geometry is screwed on. At the upper edge of the gap, a cathode of Kanthai insulated with a 1 mm aluminum oxide alumina is attached over the entire width of the burner. The anode of Kanthai is adjusted parallel to the cathode with a distance of 2.5 mm. Between anode and cathode 100 kV barrier voltage are applied. The voltage source consists of a HV generator with a clockable input to which a function generator is connected. At the burner inlet, the propane fuel gas with the 0.6% precursor TMS (tetramethylsilane) is admixed via a Ventoridüse. The following volume flows are used:
- the pulsed clocking of the barrier voltage with 50 Hz in the ratio (On: Off 1: 2) achieves an optimal homogeneous deposition (30 nm) on glass samples, which passes at a distance of 20 mm at a speed of 170 mm / s under the flame become.
- a mixture of fuel gas, oxygen-containing inert gas and a film-forming gaseous, liquid or solid powdery additive by means of an ignition source (e.g.
- the ignition source for example, barium discharge is pulsed in the range between 0 Hz to 100 Hz, with a pulse ratio (on / off) of 2: 1 to 1: 3,
- the gas mixture or parts thereof pass through the ignition source (for example barrier discharge), the gas mixture or parts thereof at the ignition source (e.g.
- alkane preferably propane, butane or methane are used individually or in mixture,
- a hydrocarbon or a mixture of hydrocarbons is used as a fuel gas.
- the mixture in the composition is preferably below the explosion limit and does not form a self-supporting flame, Air or an oxygen-containing inert gas is added to the fuel gas and the mixture is preferably below the explosion or ignition composition,
- the mixture of air and propane gas is used in the ratio> 20 to 1, preferably 23 to 1 to 40 to 1,
- the layer-forming component separate from the carrier gas and fuel gas, is mixed with it after passing the ignition source (for example barrier discharge),
- the ignition source for example barrier discharge
- the fuel gas and the carrier gas pass the ignition source (e.g., barrier) and the film forming components pass it before the ignition
- the layer-forming component is an organosilicon or organometallic compound
- the layer-forming component is a hydride or halide
- the layer-forming compound is admixed with an organic liquid, preferably an alcohol,
- the layer-forming component is a metal salt dissolved in an organic, especially alcoholic, medium
- the ignition source e.g., barrier discharge
- the ignition source is formed in the form of a linear gap
- the ignition source e.g., barrier discharge
- the ignition source e.g., barrier discharge
- the gas guide through the ignition source (for example barrier discharge) has a vertical profile, the barrier preferably being arranged at the narrowest part of the vertical profile, the exit geometries used being different therefrom and
- Individual devices according to the invention can be arranged in cascades next to one another or behind one another over a substrate can be operated so that large areas of this substrate can be applied to the substrate by the deposition of film-forming substances or components from the flame.
- the maintenance / operation of a flame is made possible by means of a barrier discharge, wherein the flame is pulsed (flame "on” / flame “off”) continuously or discontinuously switchable.
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
Vorrichtung und Verfahren zum Aufrechterhalten und Betrieb einer Flamme Apparatus and method for maintaining and operating a flame
Die Erfindung betrifft eine Vorrichtung und ein Verfahren zum Aufrechterhalten und Betrieb einer Flamme gemäß der Gattung der Patentansprüche.The invention relates to a device and a method for maintaining and operating a flame according to the preamble of the claims.
Aus dem Stand der Technik sind seit Jahrzehnten verschiedenste Gasbrenner bekannt. Bei diesen Brennern wird im Betriebszustand über einen kontinuierlichen brennenden Gasstrom eine Flammer erzeugt, vermittels derer durch den Zusatz von Komponenten Schichten auf den unterschiedlichsten Substraten abscheidbar sind oder Oberflächen modifiziert werden.For decades, various gas burners have been known from the state of the art. In the case of these burners, a flame is produced in the operating state via a continuous burning gas stream, by means of which layers can be deposited on a wide variety of substrates by the addition of components or surfaces are modified.
Der Nachteil dieser Brenner ist, dass in ihrem Betriebszustand kontinuierlich eine Beschichtungs- oder Erhaltungsflamme nach einmaliger Entzündung generiert werden muss, was zu einem hohen Brenngasgemischverbrauch und damit zu hohen Betriebskosten führt. Das Abscheideverhalten der schichtbildenden Komponenten wird gemäß dem Stand der Technik durch die thermische Belastung des Brenners negativ beeinflusst.The disadvantage of this burner is that in its operating state continuously a coating or maintenance flame must be generated after a single ignition, resulting in a high fuel gas mixture consumption and thus high operating costs. The deposition behavior of the layer-forming components is adversely affected according to the prior art by the thermal load of the burner.
Darüber hinaus muss wegen dem bestehenden Explosionsrisiko eine ständige Flammenüberwachung erfolgen, was bei Produktionsstätten mit einer hohen Anzahl an Brennern oder ausgedehnten Brennerflammen einen hohen sicherheitstechnischen Aufwand erfordert, um Explosionen zu verhindern.In addition, due to the existing explosion risk, a continuous flame monitoring must be carried out, which requires a high safety effort in production facilities with a high number of burners or extensive burner flames to prevent explosions.
Die Aufgabe der vorliegenden Erfindung ist es, die Nachteile des Standes der Technik zu vermeiden, in dem eine Vorrichtung und einThe object of the present invention is to avoid the disadvantages of the prior art, in which a device and a
Verfahren zum Aufrechterhalten und Betrieb einer Flamme bereitgestellt werden, die keine ständige Flammenüberwachung erforderlich machen, einen positiven Einfluss auf das Abscheideverhalten von schichtbildenden Komponenten der Brennergasflamme haben und die thermische Belastung des Brenners sowie die Betriebskosten dessen gegenüber dem Stand der Technik verringern. Gelöst wird diese Aufgabe durch eine Vorrichtung gemäß dem ersten Patentanspruch sowie einem Verfahren gemäß dem 2., 3. oder 4. Patentanspruch. Vorteilhafte Ausgestaltungen der Erfindung sind in den nachgeordneten Ansprüchen angegeben.Provided a method for maintaining and operating a flame, which do not require continuous flame monitoring, have a positive influence on the deposition behavior of layer forming components of the burner gas flame and reduce the thermal load of the burner and the operating costs of the prior art. This object is achieved by a device according to the first claim and a method according to the second, third or fourth claim. Advantageous embodiments of the invention are specified in the subordinate claims.
Das Wesen der Erfindung besteht in der gesteuerten Zündung eines Brenngasgemisches durch die Kombination einer Zündquelle, mit einer Flamme.The essence of the invention is the controlled ignition of a fuel gas mixture by the combination of an ignition source, with a flame.
Eine Zündquelle ist die Energie, die die Oxidation bzw. Verbrennung des Brenngasgemisches auslöst. Dies kann insbesondere eine Coronabzw, die Barierreentladung sein.An ignition source is the energy that triggers the oxidation or combustion of the fuel gas mixture. This can be in particular a Coronabzw, the Barierreentladung.
Dabei wird das flammenbildende Gasgemisch durch die Zündquelle durchgeleitet oder vorbeigeleitet, so dass eine gleichzeitige Zündung des über die gesamte Brennerbreite möglich ist.In this case, the flame-forming gas mixture is passed through or passed by the ignition source, so that a simultaneous ignition of the over the entire burner width is possible.
Erfindungsgemäß ist es mit dieser Kombination möglich, auch brennbare Gasgemische, die ohne Hilfe der Zündquelle, nicht brennen, zu entzünden und die Flamme aufrecht zu halten.According to the invention, it is possible with this combination to ignite flammable gas mixtures, which do not burn without the aid of the ignition source, and to keep the flame upright.
Damit wird es erfindungsgemäß möglich, derartige Flammen ungepulst oder gepulst, kontinuierlich oder diskontinuierlich zu betreiben, wobei die Pulsfrequenz, das Pulsverhältnis (An : Aus) und/oder die Zündenergie der Zündquelle über breite Bereiche variierbar sind, was zu einer hohen Variabilität der Flammengeometrie und der Flammenparameter führt.Thus, it is possible according to the invention to operate such flames unpulsed or pulsed, continuous or discontinuous, the pulse frequency, the pulse ratio (On: Off) and / or the ignition of the ignition source can be varied over wide ranges, resulting in a high variability of the flame geometry and the flame parameter leads.
Damit können das Abscheideverhalten der schichtbildenden Komponenten oder die unterschiedlichsten Oberflächenmodifikationen (z.B. Hydrophierung der Oberflächenenergie) gezielt beeinflusst werden.In this way, the deposition behavior of the layer-forming components or the various surface modifications (for example hydrophobization of the surface energy) can be influenced in a targeted manner.
Die Erfindung wird nachstehend an Hand der folgenden Figuren und einem Ausführungsbeispiel näher erläutert ohne auf diese beschränkt zu werden. Es zeigen dabei:The invention will be explained in more detail below with reference to the following figures and an embodiment without being limited thereto. It shows:
Fig. 1 : eine Ausführungsform der erfindungsgemäßen Vorrichtung im Betriebszustand in einer Übersichtsdarstellung und Fig. 2: die Ausführungsform gemäß Fig. 1 in einem Querschnitt.1 shows an embodiment of the device according to the invention in the operating state in an overview and Fig. 2: the embodiment of FIG. 1 in a cross section.
Die in Fig. 1 dargestellte erfindungsgemäße Vorrichtung besteht aus einem Brenner (1), einem Brennaufsatz (2), einer Anode (3), einer im Betriebszustand bestehenden Flamme (4), einem Dialektrikum (5), einer Kathode (6) und einer Austrittsgeometrie (7).The device according to the invention shown in Fig. 1 consists of a burner (1), a burner attachment (2), an anode (3), an operating state existing flame (4), a dialectic (5), a cathode (6) and a Exit geometry (7).
Auf einem bekannten Brenner (1) ist ein Brenneraufsatz (2) montiert, auf welchem wiederum die elektrisch behinderte Barriere montiert ist. Die elektrisch behinderte Barriere besteht aus einer Anode (3) und einer mit einem Dialektrikum (5) isolierten Kathode (6). Durch das Anlegen einerOn a known burner (1) a burner attachment (2) is mounted, on which in turn the electrically disabled barrier is mounted. The electrically impeded barrier consists of an anode (3) and a cathode (6) insulated with a dialectic (5). By creating a
Spannung zwischen Anode (3) und Kathode (6) kommt es zu einer dialektrisch behinderten Entladung zwischen Anode (3) und Kathode (6) durch das Dialektrikum (5). Diese zündet das Brenngas, welches durch den Brenner (1) und den Brenneraufsatz (2) mit einer entsprechendenVoltage between anode (3) and cathode (6) causes a dielectrically impeded discharge between anode (3) and cathode (6) through the dialectic (5). This ignites the fuel gas, which through the burner (1) and the burner attachment (2) with a corresponding
Austrittsgeometrie (7) durch die Barriere strömt.Exit geometry (7) flows through the barrier.
In die erfindungsgemäße Vorrichtung ist ein nicht selbstständig brennbares Gasgemisch einleitbar, das über die dialektrisch behinderte Barriere zündbar ist, wobei die Flammengeometrie durch die Barrierenspannung und/oder die Impulsbreite der Barriereentladung steuerbar ist.In the inventive device, a non-combustible gas mixture can be introduced, which can be ignited via the dialectically impeded barrier, wherein the flame geometry is controllable by the barrier voltage and / or the pulse width of the barrier discharge.
Ein nicht selbständig brennbares Gasgemisch ist unter anderem dadurch erzeugbar, dass der Brenngasanteil im Verhältnis zum Sauerstoffanteil verringert wird (bspw. bei Propangas von 5% auf 2,75%). Dadurch reduziert sich die erforderliche Brenngaskonzentration und damit der Brenngasverbrauch um über 40% gegenüber herkömmlichen Brennern.A non-combustible gas mixture can be produced inter alia by reducing the proportion of fuel gas in relation to the oxygen content (for example, from 5% to 2.75% in the case of propane gas). This reduces the required fuel gas concentration and thus the fuel gas consumption by more than 40% compared to conventional burners.
Dem Brenngasgemisch können reaktive und/oder schichtbildende Stoffe oder Komponenten, wie bspw. metallorganische Verbindungen oder geeignete Halogenide oder Hybride entweder pulverfδrmig, gasförmig oder in Flüssiger Form als Gemisch (bspw. Lösung oder als einzelne Komponente zugemischt werden. Diese Zumischung zum Brenngas kann entweder vor der Zündung desselben und damit vor der Zündquelle, wie bspw. der Corona- oder Barriereentladung, erfolgen oder erst nach dem Passieren des Brenngasgemisches durch die Zündquelle (Corona- oder Barriereentladung) realisiert werden.Reactive and / or layer-forming substances or components, such as, for example, organometallic compounds or suitable halides or hybrids, can be admixed to the fuel gas mixture either in powdery form, in gaseous form or in liquid form as a mixture (for example a solution or as a single component). This admixture with the fuel gas can be done either before the ignition of the same and thus before the ignition source, such as. The corona or barrier discharge, or only after passing through the fuel gas mixture by the ignition source (corona or barrier discharge).
Die Realisierung der Kombination Corona/Barriere plus Flamme kann in unterschiedlichen geometrischen Formen erfolgen. Dafür eignen sich sowohl lineare, gekrümmte oder ringförmige Corona- bzw. Barrieregeometrien. Dabei kann auch die Austrittsquerschnittgeometrie strömungstechnisch bedingt unterschiedlichste Formen besitzen.The realization of the combination corona / barrier plus flame can take place in different geometrical forms. Both linear, curved or annular corona or barrier geometries are suitable for this purpose. In this case, the outlet cross-sectional geometry can also have a wide variety of forms due to fluidic reasons.
Als Brenngas für die Flamme können sowohl organische Gase als auch Wasserstoff dienen. Diesem Brenngas wird in einem Inertgasstrom Sauerstoff zugefügt, wobei als Inertgas sowohl Stickstoff als auch Edelgase dienen können.As a fuel gas for the flame can serve both organic gases and hydrogen. Oxygen is added to this fuel gas in an inert gas stream, it being possible for both nitrogen and noble gases to serve as the inert gas.
Ausführungsbeispielembodiment
Als Brenner wird ein handelsüblicher 300 mm langer Brenner eingesetzt. Auf dem Brenner wird ein 270 mm langer und 30 mm hoher Keramikaufsatz mit einer 2,5 mm breiten Spaltgeometrie aufgeschraubt. Am oberen Spaltrand wird über die gesamte Brennerbreite eine mit einem 1 mm Dialektrikum aus Aluminiumoxid isolierte Kathode aus Kanthai befestigt. Die Anode aus Kanthai wird parallel gegenüber der Kathode mit einem Abstand von 2,5 mm justiert. Zwischen Anode und Kathode werden 100 KV Barrierespannung angelegt. Die Spannungsquelle besteht aus einem HV Generator mit einem taktbaren Eingang, an welchem ein Funktionsgenerator angeschlossen wird. Am Brennereingang wird über eine Ventoridüse das Propan-Brenngas mit dem 0,6 %-gen Precursor TMS (Tetramethylsilan) zugemischt. Dabei werden folgende Volumenströme genutzt:The burner used is a commercial 300 mm long burner. On the burner, a 270 mm long and 30 mm high ceramic attachment with a 2.5 mm wide gap geometry is screwed on. At the upper edge of the gap, a cathode of Kanthai insulated with a 1 mm aluminum oxide alumina is attached over the entire width of the burner. The anode of Kanthai is adjusted parallel to the cathode with a distance of 2.5 mm. Between anode and cathode 100 kV barrier voltage are applied. The voltage source consists of a HV generator with a clockable input to which a function generator is connected. At the burner inlet, the propane fuel gas with the 0.6% precursor TMS (tetramethylsilane) is admixed via a Ventoridüse. The following volume flows are used:
Lufϊtvolumenstrom 200 l/min Propanvolumenstrom (mit 0,6 % TMS) 5,6 l/min Ein diskontinuierlicher Betrieb des Verfahrens wurde durch das Zu- und Abschalten der Barrierenspannung realisiert. Dazu kann etwas zeitversetzt auch der Propangasstrom zu- bzw. abgeschaltet werden.Air flow rate 200 l / min Propane flow rate (with 0.6% TMS) 5.6 l / min A discontinuous operation of the process was realized by the switching on and off of the barrier voltage. For this purpose, the propane gas flow can also be switched on or off with a little time delay.
Durch die gepulste Taktung des Barrierespannung mit 50 Hz im Verhältnis (An : Aus 1 : 2) erreicht man eine optimale homogene Abscheidung (30 nm) auf Glasproben, welche im Abstand von 20 mm mit einer Geschwindigkeit von 170 mm/s unter der Flamme vorbeibewegt werden.The pulsed clocking of the barrier voltage with 50 Hz in the ratio (On: Off 1: 2) achieves an optimal homogeneous deposition (30 nm) on glass samples, which passes at a distance of 20 mm at a speed of 170 mm / s under the flame become.
Im Rahmen der Erfindung liegt dabei, dass bei der erfindungsgemäßen Vorrichtung / bei dem erfindungsgemäßen Verfahren:It is within the scope of the invention that in the apparatus according to the invention / in the method according to the invention:
• ein Gemisch von Brenngas, sauerstoffhaltigem Inertgas und einem schichtbildenden gasförmigen, Flüssigen oder festen pulverförmigen Zusatz mit Hilfe einer Zündquelle (z.B.A mixture of fuel gas, oxygen-containing inert gas and a film-forming gaseous, liquid or solid powdery additive by means of an ignition source (e.g.
Barriereentladung) gezündet und die sich bildende Flamme aufrecht erhalten wird,Barrier discharge) ignited and the forming flame is maintained,
• die Zündquelle (z.B. Barierreentladung impulsmäßig im Bereich zwischen 0 Hz bis 100 Hz, mit einem Pulsverhältnis (An/ Aus) von 2: 1 bis 1 :3 betrieben wird,The ignition source (for example, barium discharge is pulsed in the range between 0 Hz to 100 Hz, with a pulse ratio (on / off) of 2: 1 to 1: 3,
• ein kontinuierlicher oder diskontinuierlicher Betrieb des erfindungsgemäßen Brenners möglichist,A continuous or discontinuous operation of the burner according to the invention is possible,
• das Gasgemisch oder Teile davon die Zündquelle (z.B. Barriereentladung) durchströmen, • das Gasgemisch oder Teile davon an der Zündquelle (z.B.The gas mixture or parts thereof pass through the ignition source (for example barrier discharge), the gas mixture or parts thereof at the ignition source (e.g.
Barriereentladung) vorbeigetuhrt werden,Barrier discharge) are passed,
• als Brenngas ein Alkan, bevorzugt Propan, Butan oder Methan einzeln oder im Gemisch verwendet werden,As fuel gas an alkane, preferably propane, butane or methane are used individually or in mixture,
• als Brenngas ein Kohlenwasserstoff oder ein Gemisch von Kohlenwasserstoffen verwendet wird,As a fuel gas, a hydrocarbon or a mixture of hydrocarbons is used,
• das Gemisch in der Zusammensetzung bevorzugt unterhalb der Explosionsgrenze liegt und keine selbsttragende Flamme ausbildet, • dem Brenngas Luft oder ein sauerstoffhaltiges Inertgas zugesetzt wird und das Gemisch bevorzugt unterhalb der Explosions- beziehungsweise Entflammungszusammensetzung liegt,The mixture in the composition is preferably below the explosion limit and does not form a self-supporting flame, Air or an oxygen-containing inert gas is added to the fuel gas and the mixture is preferably below the explosion or ignition composition,
• das Gemisch von Luft und Propangas im Verhältnis > 20 zu 1, bevorzugt 23 zu 1 bis 40 zu 1 verwendet wird,The mixture of air and propane gas is used in the ratio> 20 to 1, preferably 23 to 1 to 40 to 1,
• die schichtbildende Komponente, getrennt von dem Trägergas und Brenngas diesen nach Passieren der Zündquelle (z.B. Barriereentladung) zugemischt wird,The layer-forming component, separate from the carrier gas and fuel gas, is mixed with it after passing the ignition source (for example barrier discharge),
• das Brenngas und das Trägergas die Zündquelle (z.B. Barriere) passieren und die schichtbildenden Komponenten diesen vor demThe fuel gas and the carrier gas pass the ignition source (e.g., barrier) and the film forming components pass it before the ignition
Passieren der Barriereentladung zugesetzt wird,Passing the barrier discharge is added,
• die schichtbildende Komponente eine siliziumorganische oder metallorganische Verbindung darstellt,The layer-forming component is an organosilicon or organometallic compound,
• die schichtbildende Komponente ein Hydrid oder Halogenid darstellt,The layer-forming component is a hydride or halide,
• die schichtbildenden Verbindung einer organischen Flüssigkeit, bevorzugt einen Alkohol, zugemischt wird,The layer-forming compound is admixed with an organic liquid, preferably an alcohol,
• die schichtbildende Komponente ein Metallsalz darstellt, dass in einem organischen, insbesondere alkoholischem Medium gelöst ist,The layer-forming component is a metal salt dissolved in an organic, especially alcoholic, medium
• die Zündquelle (z.B. Barriereentladung) in Form eines linearen Spaltes ausgebildet wird,The ignition source (e.g., barrier discharge) is formed in the form of a linear gap,
• die Zündquelle (z.B. Barriereentladung) einen ringförmigen Spalt darstellt • die Zündquelle (z.B. Barriereentladung) segmentiert ist,The ignition source (e.g., barrier discharge) is an annular gap, the ignition source (e.g., barrier discharge) is segmented,
• die Gasfuhrung durch die Zündquelle (z.B. Barriereentladung) ein vertikales Profil besitzt, wobei bevorzugt die Barriere am schmälsten Teil des vertikalen Profils angeordnet wird, wobei die dabei verwendete Austrittsgeometrien verschieden sein können undThe gas guide through the ignition source (for example barrier discharge) has a vertical profile, the barrier preferably being arranged at the narrowest part of the vertical profile, the exit geometries used being different therefrom and
• einzelne erfindungsgemäße Vorrichtungen können in Kaskaden nebeneinander oder hintereinander über einem Substrat angeordnet betrieben werden, so dass große Flächen dieses Substrates durch die Abscheidung von schichtbildenden Stoffen oder Komponenten aus der Flamme auf dem Substrat aufgetragen werden können.Individual devices according to the invention can be arranged in cascades next to one another or behind one another over a substrate can be operated so that large areas of this substrate can be applied to the substrate by the deposition of film-forming substances or components from the flame.
Durch die erfindungsgemäße Vorrichtung / das erfmdungsgemäße Verfahren wird die Aufrechterhaltung / der Betrieb einer Flamme vermittels einer Barriereentladung ermöglicht, wobei die Flamme pulsierend (Flamme „an"/ Flamme „aus") kontinuierlich oder diskontinuierlich schaltbar ist.By means of the device / the method according to the invention, the maintenance / operation of a flame is made possible by means of a barrier discharge, wherein the flame is pulsed (flame "on" / flame "off") continuously or discontinuously switchable.
Durch die konkrete Taktung und Gestaltung der Barriere sind verschiedenste Oberflächenmorphologien vermittels Flammen- beschichtung erzeugbar. Due to the concrete timing and design of the barrier, a wide variety of surface morphologies can be generated by means of flame coating.
Bezugszeichenliste:LIST OF REFERENCE NUMBERS
1 Brenner1 burner
2 Brenneraufsatz2 burner attachment
3 Anode3 anode
4 Flamme im Betriebszustand4 flame in operating condition
5 Dialektrikum5 dialectic
6 Kathode6 cathode
7 Austrittsgeometrie 7 exit geometry
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102008005474 | 2008-01-18 | ||
| PCT/DE2009/000052 WO2009089830A2 (en) | 2008-01-18 | 2009-01-16 | Device and method for maintaining and operating a flame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP2232142A2 true EP2232142A2 (en) | 2010-09-29 |
Family
ID=40640365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP09703009A Ceased EP2232142A2 (en) | 2008-01-18 | 2009-01-16 | Device and method for maintaining and operating a flame |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8529246B2 (en) |
| EP (1) | EP2232142A2 (en) |
| DE (1) | DE112009000622A5 (en) |
| WO (1) | WO2009089830A2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8147240B2 (en) | 2009-03-17 | 2012-04-03 | Hni Technologies Inc. | Thin chamber burner |
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| US4582475A (en) | 1980-06-27 | 1986-04-15 | Eaton Corporation | Method and apparatus for igniting combustible mixtures |
| US4523905A (en) * | 1983-07-21 | 1985-06-18 | Nu-Way Energy Limited | Burner for gaseous fuels |
| DE8802400U1 (en) | 1988-02-24 | 1989-06-22 | Matthäus, Götz, 4620 Castrop-Rauxel | Burner for processing at least two combustion partners |
| US5876684A (en) * | 1992-08-14 | 1999-03-02 | Materials And Electrochemical Research (Mer) Corporation | Methods and apparati for producing fullerenes |
| NO180315C (en) | 1994-07-01 | 1997-03-26 | Torfinn Johnsen | Combustion chamber with equipment to improve combustion and reduce harmful substances in the exhaust gas |
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| EP1490630B1 (en) * | 2002-03-22 | 2006-08-02 | Pyroplasma KG | Fuel combustion device |
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| DE10260709B3 (en) * | 2002-12-23 | 2004-08-12 | Siemens Ag | Method and device for influencing combustion processes in fuels |
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-
2009
- 2009-01-16 EP EP09703009A patent/EP2232142A2/en not_active Ceased
- 2009-01-16 DE DE112009000622T patent/DE112009000622A5/en not_active Withdrawn
- 2009-01-16 US US12/863,092 patent/US8529246B2/en not_active Expired - Fee Related
- 2009-01-16 WO PCT/DE2009/000052 patent/WO2009089830A2/en not_active Ceased
Non-Patent Citations (1)
| Title |
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| See references of WO2009089830A2 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US8529246B2 (en) | 2013-09-10 |
| WO2009089830A2 (en) | 2009-07-23 |
| WO2009089830A3 (en) | 2011-12-29 |
| US20110053101A1 (en) | 2011-03-03 |
| DE112009000622A5 (en) | 2010-12-16 |
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