EP2203033A3 - Extreme ultraviolet light source device - Google Patents

Extreme ultraviolet light source device Download PDF

Info

Publication number
EP2203033A3
EP2203033A3 EP09015807A EP09015807A EP2203033A3 EP 2203033 A3 EP2203033 A3 EP 2203033A3 EP 09015807 A EP09015807 A EP 09015807A EP 09015807 A EP09015807 A EP 09015807A EP 2203033 A3 EP2203033 A3 EP 2203033A3
Authority
EP
European Patent Office
Prior art keywords
raw material
discharge electrodes
energy beam
extreme ultraviolet
pulsed power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09015807A
Other languages
German (de)
French (fr)
Other versions
EP2203033B1 (en
EP2203033A2 (en
Inventor
Takuma Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of EP2203033A2 publication Critical patent/EP2203033A2/en
Publication of EP2203033A3 publication Critical patent/EP2203033A3/en
Application granted granted Critical
Publication of EP2203033B1 publication Critical patent/EP2203033B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • X-Ray Techniques (AREA)

Abstract

The invention relates to an extreme ultraviolet light source device, comprising a pair of discharge electrodes (2a, 2b, 52a, 52b) arranged spaced apart from each other; a pulsed power supply means (3, 53) supplying pulsed power to said discharge electrodes (2a, 2b); a raw material supply means (7) adapted for supplying raw material (M) for generating extreme ultraviolet radiation onto said discharge electrodes (2a, 2b, 52a, 52b); an energy beam emitting means (10, 60) adapted for radiating an energy beam (LB2) to the raw material (M) on said discharge electrodes (2a, 2b, 52a, 52b) to gasify said raw material (M); a means (11, 61, 85, 95, 105) for forming a depression (MA) in the raw material (M) supplied onto said discharge electrodes (2a, 2b, 52a, 52b); and a controller (6, 56). Said controller (6, 56) is adapted to control the depression forming means (11, 61, 85, 95, 105) such that it forms a depression (MA) in the raw material (M) supplied onto the discharge electrodes (2a, 2b, 52a, 52b) before the voltage between the electrodes (2a, 2b, 52a, 52b) increases by means of the supply of pulsed power to the discharge electrodes (2a, 2b, 52a, 52b) by said pulsed power supply means (3, 53), and before the energy beam (LB2) is radiated to the raw material (M) on the electrodes (2a, 2b, 52a, 52b) by said energy beam emitting means (10, 60). The invention also relates to a process for generating EUV radiation.
EP20090015807 2008-12-25 2009-12-21 Extreme ultraviolet light source device Active EP2203033B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008329570A JP4893730B2 (en) 2008-12-25 2008-12-25 Extreme ultraviolet light source device

Publications (3)

Publication Number Publication Date
EP2203033A2 EP2203033A2 (en) 2010-06-30
EP2203033A3 true EP2203033A3 (en) 2010-09-08
EP2203033B1 EP2203033B1 (en) 2014-09-10

Family

ID=42140034

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20090015807 Active EP2203033B1 (en) 2008-12-25 2009-12-21 Extreme ultraviolet light source device

Country Status (2)

Country Link
EP (1) EP2203033B1 (en)
JP (1) JP4893730B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010047419B4 (en) 2010-10-01 2013-09-05 Xtreme Technologies Gmbh Method and apparatus for generating EUV radiation from a gas discharge plasma
JP5724986B2 (en) * 2012-10-30 2015-05-27 ウシオ電機株式会社 Discharge electrode
DE102013000407B4 (en) * 2013-01-11 2020-03-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Process for improving the wettability of a rotating electrode in a gas discharge lamp
JP6089955B2 (en) * 2013-05-20 2017-03-08 株式会社Ihi Plasma light source
RU2670273C2 (en) * 2017-11-24 2018-10-22 Общество с ограниченной ответственностью "РнД-ИСАН" Device and method for emission generation from laser plasma
JP2023149176A (en) 2022-03-30 2023-10-13 ウシオ電機株式会社 light source device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005060321A2 (en) * 2003-12-17 2005-06-30 Philips Intellectual Property & Standards Gmbh Method and device for generating in particular euv radiation and/or soft x-ray radiation
WO2005101924A1 (en) * 2004-04-14 2005-10-27 Xtreme Technologies Gmbh Method and device for obtaining euv radiation from a gas-discharge plasma
EP1804555A1 (en) * 2005-12-28 2007-07-04 Ushiodenki Kabushiki Kaisha EUV radiation source with cooled aperture
EP1976344A2 (en) * 2007-03-28 2008-10-01 Tokyo Institute Of Technology Extreme ultraviolet light source device and extreme ultraviolet radiation generating method
EP2046100A1 (en) * 2007-10-01 2009-04-08 Tokyo Institute of Technology A method for generating extreme ultraviolet radiation and an extreme ultraviolet light source device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2897005B1 (en) * 1998-02-27 1999-05-31 工業技術院長 Laser plasma light source and radiation generating method using the same
JP4052155B2 (en) 2003-03-17 2008-02-27 ウシオ電機株式会社 Extreme ultraviolet radiation source and semiconductor exposure apparatus
JP5149514B2 (en) * 2007-02-20 2013-02-20 ギガフォトン株式会社 Extreme ultraviolet light source device
JP2008270149A (en) * 2007-03-28 2008-11-06 Tokyo Institute Of Technology Extreme ultraviolet light source device and extreme ultraviolet light generating method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005060321A2 (en) * 2003-12-17 2005-06-30 Philips Intellectual Property & Standards Gmbh Method and device for generating in particular euv radiation and/or soft x-ray radiation
WO2005101924A1 (en) * 2004-04-14 2005-10-27 Xtreme Technologies Gmbh Method and device for obtaining euv radiation from a gas-discharge plasma
EP1804555A1 (en) * 2005-12-28 2007-07-04 Ushiodenki Kabushiki Kaisha EUV radiation source with cooled aperture
EP1976344A2 (en) * 2007-03-28 2008-10-01 Tokyo Institute Of Technology Extreme ultraviolet light source device and extreme ultraviolet radiation generating method
EP2046100A1 (en) * 2007-10-01 2009-04-08 Tokyo Institute of Technology A method for generating extreme ultraviolet radiation and an extreme ultraviolet light source device

Also Published As

Publication number Publication date
EP2203033B1 (en) 2014-09-10
JP2010153563A (en) 2010-07-08
JP4893730B2 (en) 2012-03-07
EP2203033A2 (en) 2010-06-30

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