EP2200101A1 - Moteur à ultrasons - Google Patents

Moteur à ultrasons Download PDF

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Publication number
EP2200101A1
EP2200101A1 EP08022231A EP08022231A EP2200101A1 EP 2200101 A1 EP2200101 A1 EP 2200101A1 EP 08022231 A EP08022231 A EP 08022231A EP 08022231 A EP08022231 A EP 08022231A EP 2200101 A1 EP2200101 A1 EP 2200101A1
Authority
EP
European Patent Office
Prior art keywords
oscillator
ultrasonic motor
motor according
housing
guide element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08022231A
Other languages
German (de)
English (en)
Inventor
Marc Thelen
Jürgen Sayer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physik Instrumente PI GmbH and Co KG
Original Assignee
Physik Instrumente PI GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physik Instrumente PI GmbH and Co KG filed Critical Physik Instrumente PI GmbH and Co KG
Priority to EP08022231A priority Critical patent/EP2200101A1/fr
Publication of EP2200101A1 publication Critical patent/EP2200101A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0065—Friction interface

Definitions

  • the present invention relates to an ultrasonic motor comprising a housing and at least one arranged in the housing oscillator in the form of a piezoelectric plate having at least two side surfaces, at least two end faces and at least two major surfaces, wherein on one of the side surfaces of the oscillator at least one friction element for moving an output element and on the opposite side surface between the housing and the oscillator at least one elastic element for elastically pressing the at least one friction element is arranged on the output element.
  • Such ultrasonic motors can be used for example in high-precision technological one, two or three-coordinate tables, in high-precision microscope stages, in high-precision optical systems such. B. in lenses of high-precision cameras or in geophysical devices are used.
  • the holder of the oscillator of such ultrasonic motors is of crucial importance. This has a significant influence i.a. on the speed, efficiency, rigidity and hyste- resis of the whole drive.
  • Ultrasonic motors are known in which the ultrasonic oscillator is held by means of rubber holders (holder 8 in Figs. 32, 34 and 35 of the above document). Such motors are characterized by a simple mounting technology and low manufacturing costs, but they do not allow high positioning accuracy.
  • the rubber holder determines the low engine stiffness.
  • the rubber holder has a hysteresis that determines the sensitivity range of the engine. Both the engine stiffness and the hysteresis of the rubber holders limits the positioning accuracy of such ultrasonic motors. The positioning accuracy in this case is about 5 - 10 microns. In many cases, this accuracy is insufficient.
  • an ultrasonic motor in which the piezoelectric plate designed as an ultrasonic oscillator is located in a first housing part having two stops, between which the Oszi-Ilator is clamped substantially rigid. Due to the substantially rigid clamping of the oscillator results in a very low damping of the vibrations thereof, ie there is a system with high mechanical quality.
  • the main disadvantage of this engine is that for the high-precision positioning of the oscillator must be firmly fixed in the first housing part. The tolerances of the oscillator dimensions in the first housing part must always guarantee that there is no gap between the stops and the faces of the oscillator.
  • the oscillator of the motor has a positive tolerance of 2-5 .mu.m, relative to the stops of the housing.
  • a smaller tolerance leads to the appearance of a gap, which in turn to Reduction of positioning accuracy leads.
  • the oscillator is strongly compressed by the stops and can thereby jam between them. Therefore, compliance with appropriate tolerances is enormously important. In a mass production, however, it is very difficult to ensure accurate tolerances. The compliance with exact tolerances also leads to higher production costs for such ultrasonic motors.
  • the housing temperature also has an influence on the clamping or holding situation of the oscillator.
  • a reduction in housing temperature may result in improper compression of the oscillator, while increasing the housing temperature may result in the occurrence of a gap, which in turn results in the loss of accuracy.
  • ultrasonic motors can not be used in high-precision devices that are exposed to corresponding external environmental influences.
  • the object of the present invention is to simplify the technology for producing high-precision ultrasonic motors for low-cost mass production or to increase the reproducibility in the production of such motors, and at the same time to provide an ultrasonic motor which has good rigidity and hysteresis values even at high speed achieved at acceptable damping losses and thus a high positioning accuracy.
  • the present invention is therefore based on the object, a high-precision ultrasonic motor of the type mentioned in such a way that the known from the prior art and discussed above problems and disadvantages are reduced or even avoided and in particular to provide a high-precision ultrasonic motor with new advantageous properties, the comparatively easy to implement.
  • a high-precision ultrasonic motor of the type mentioned in which the oscillator is rigidly supported on one of its end faces via a guide member on the housing, and the oscillator is elastically supported on the housing at least on the opposite end face via at least one spring element.
  • an elastic support is a support with high flexibility and correspondingly low pressure modulus.
  • the guide element may be arranged in a sliding manner relative to the housing. This ensures that the oscillator can perform almost unimpeded movements in a direction which is substantially perpendicular to the direction in which the oscillator is supported on its end faces. This is particularly important in the case of wear on the friction element, i. the removal of material on the friction element and the associated reduction in its extent. Without the possibility of moving the oscillator in the direction of the output element, there would be significant losses in the efficiency of the engine.
  • the guide element at least partially surrounds the oscillator. As a result, a secure attachment of the guide element is given to the oscillator.
  • the guide element is in one piece or in several parts. This extends the design possibilities with regard to the design of the ultrasonic motor.
  • the guide element is in one piece and has a substantially U-shaped cross-sectional geometry. This is a form of the guide element that is particularly simple and inexpensive to realize.
  • the guide element is in two parts, and each of the two parts of the guide element has a substantially U-shaped cross-sectional geometry.
  • a U-shaped part of the guide element serves to receive the second U-shaped part of the guide element, in the recess of which the oscillator engages. It is provided that the part of the guide element which is in contact with the oscillator, against the other part of the guide member is slidably displaceable, wherein the other part of the guide member is supported on the housing.
  • a sliding of the guide member relative to the housing is not intended, but only a sliding of the two parts of the guide member against each other.
  • the holding element allows easy attachment or retention of the spring element or the spring elements.
  • the retaining element is in one or more parts. This extends the design possibilities with regard to the design of the ultrasonic motor.
  • the holding element has substantially the same geometry as the guide element. This facilitates and simplifies the production of the ultrasonic motor.
  • the at least one elastic element and / or the at least one spring element has a spiral spring. This makes it possible in a particularly simple manner, the realization of the ultrasonic motor.
  • the guide element and the holding element are integrally formed with each other. This results in a reduction of the components of the ultrasonic motor and consequently a simpler way of mounting.
  • the guide element and / or the holding element may comprise or comprise a polymeric material, preferably a thermoplastic.
  • a polymeric material for example polyetheretherketone, polyamide, polyoxymethylene or polyphenylene sulfide, can be comparatively simple as well shape into complicated geometries.
  • they often have favorable tribological properties, ie they have a low coefficient of friction in contact with other materials.
  • the polymeric material may also be modified accordingly, eg filled with particles and / or fibers.
  • particles in this case materials such as polytetrafluoroethylene, graphite, molybdenum disulfide, zinc sulfide or barium sulfate are conceivable.
  • fibers materials such as glass, aramid or carbon can be used.
  • the at least one friction element is integrally connected to the oscillator and preferably glued to it. This extends the possibilities for producing the ultrasonic motor.
  • the ratio of the contact surface provided for contact with the output element to the base surface of the at least one friction element is less than or equal to 1:50.
  • the base area here is the surface of the friction element which is in contact with the oscillator. Due to the very small contact area results in a more reliable drive of the ultrasonic motor.
  • the contact surface remains substantially the same up to a decrease of the height H of the friction element caused by the operation of 10%. This results in almost constant operating conditions over very long periods of time.
  • the at least one friction element has special geometric shapes and configurations.
  • the friction element may be favorable for the friction element to have a substantially triangular geometry in the direction of one of the main surfaces of the oscillator, or for the friction element to have at least two concavely curved side surfaces, wherein it may be advantageous for the concavely curved side surfaces to be in the direction of the contact surface taper continuously, or that the friction element has two substantially planar flat side surfaces, two inclined planar side surfaces and two concave curved side surfaces. All of the aforementioned advantageous embodiments with respect to the geometry of the friction element have a positive effect on uniform operating conditions or constant function of the ultrasonic motor.
  • the at least one friction element comprises a ceramic material and preferably consists of this, or that the at least one friction element is at least partially coated with a ceramic material. This gives the friction element a high wear resistance, i. the abrasion of the friction element during operation of the ultrasonic motor remains very low.
  • the at least one friction element is embodied integrally with the oscillator. This reduces i.a. the number of manufacturing steps for the production of the ultrasonic motor.
  • the invention is not limited to the individual advantageous embodiments listed above and all possible combinations thereof, but also to combinations of partial features of various of the advantageous embodiments listed above.
  • Fig. 1 shows in the representations 1 to 4, a first possible embodiment of the ultrasonic motor 1.
  • the oscillator 3 in the form of a piezoelectric plate in a substantially U-shaped housing 2 is arranged.
  • a friction element 7 On a side surface 4 of the oscillator 3 is a friction element 7, which is integral with the piezoelectric plate of the oscillator 3.
  • the friction element 7 is provided to the movement of the vibrated by electrical voltage application oscillator 3 to a in Fig. 1 not shown output element by appropriate Attack to transfer this.
  • the oscillator 3 is supported on the housing 2 via two elastic elements 8 in the form of spiral springs.
  • a coil spring for example, a rubber-elastic element can be used.
  • the oscillator is supported on the housing 2 via a guide element 9.
  • the guide element 9 in this case consists of tribologically optimized polyetheretherketone and, viewed in cross section, has a substantially U-shaped geometry, the two lateral limbs of which comprise the oscillator.
  • the oscillator 3 is elastically supported by two coil springs 10, wherein between the coil springs 10 and the oscillator 3, a holding element 11 is located.
  • the coil springs 10 in turn are supported on the housing 2.
  • two coil springs as well as the use of only a single coil spring or a spring element with a different geometry is conceivable.
  • the holding member 11 has the same geometry and configuration as the guide member 9, i. It is also made of tribologically optimized polyetheretherketone and has a U-profile in cross-section, in which case the two legs surround the oscillator and contact its main surfaces 6, 6 '. Furthermore, the retaining element 11 has receptacles for fastening the spring element 10.
  • Fig. 2 shows in the illustrations 5 to 7, another possible embodiment of the ultrasonic motor 1. To avoid repetition, will be in the following only to the differences Fig. 1 received.
  • Both the guide element 9, and the holding member 11 is made in two parts, each of the two parts in cross-section having a U-shaped geometry.
  • the inner part of the guide element 9, which is in contact with the oscillator 3 and laterally surrounds it, is designed such that it can be received by the outer part, which is in contact with the housing 2.
  • the inner part of the holding member 11, which is in contact with the oscillator 3, is received in the outer part of the holding member 11, which is in abutment with the spring elements 10 is located.
  • Both parts of the guide element and holding element are made of tribologically optimized polyetheretherketone.
  • Fig. 3 shows a possible embodiment of the friction element of the ultrasonic motor.
  • the friction element 7 the base 13, which is in contact with the oscillator 3.
  • the friction element has the contact surface 12, which is provided for contact with an output element.
  • the contact surface 12 is substantially smaller than the base surface, the ratio is 1 to 80.
  • the functional element 7 has a substantially triangular geometry with a height H.
  • the side surfaces 16 and 16 ' are flat and inclined, and they taper from the base 13 in the direction of the contact surface 12.
  • the side surfaces 15 and 15' which adjoin the vertical side surfaces 14 and 14 ', have a concave curvature. They, too, taper in the direction of the contact surface 12.
  • the ultrasonic motor In the case of the ultrasonic motor according to the invention, its mounting takes place in such a way that one of its end faces is essentially rigidly supported or rigidly supported, and the corresponding opposite end face is elastically supported.
  • the rigid support takes place here via a solid guide element, which is preferably made of a polymeric material and in a particularly advantageous embodiment of a thermoplastic material.
  • the corresponding material has a high pressure modulus, so that there is no significant elastic deformation at a force load by the deforming in operation oscillator on the guide element, and therefore results in the substantially rigid support.
  • the guide element allows easy sliding relative to the housing.
  • the material of the guide element slip-improving fillers such as polytetrafluoroethylene or graphite are mixed.
  • the said slight sliding of the guide member relative to the housing allows a nearly unrestrained movement of the oscillator in the direction parallel to the side surface.
  • the entire oscillator can move up unhindered in the wear direction, so that always take place an optimal attack of the friction element on the output element can.
  • the described retraction is realized via the engaging on a side surface elastic elements that press the oscillator or arranged on it friction element in the direction of the output element.
  • the oscillator is elastically supported or supported via a spring element or a plurality of spring elements.
  • the spring elements are preferably selected such that they also allow a slight movement of the oscillator in the direction of the friction element, so that, for example, in the case of wear of the friction element, the above-described retraction of the oscillator is not hindered.
  • a holding element is arranged between the one or more spring element or spring elements, on the one hand holds the oscillator, and on the other hand has a receptacle for the or the spring element / spring elements.
  • the guide element and the holding element in two parts, wherein the housing facing the outer part of the guide member is immovably connected thereto, and the Has housing facing outer part of the support member has no connection to the oscillator.
  • an inner part is in each case arranged, which is guided through the outer part with respect to a plane parallel to the main surfaces of the oscillator.
  • the respective inner part holds the oscillator, wherein it engages laterally in a preferred embodiment.
  • Inner and outer part of the guide element and the holding element are tribologically matched materials, and are preferably made of a polymeric material, and in a particularly advantageous embodiment of a thermoplastic material which may be filled with the tribological properties improving fillers.
  • the tribological matching of the materials of the outer and inner part of the guide element or holding element results in a particularly favorable sliding behavior, so that the movement of the oscillator in the direction of the friction element or in the direction of the elastic elements can take place almost unhindered.
  • the friction element provided for contact with the output element may have a special geometry in a preferred embodiment. This geometry is chosen so that the contact surface is very small compared to the base of the friction element, wherein the contact surface is substantially in the region of the thickness center of the piezoelectric plate of the oscillator. The only extremely small and centrally arranged contact surface causes forces to be largely avoided in the direction of the main surfaces of the oscillator caused by the contact of the friction element with the driven element during operation of the engine.
  • the shape of the friction element can be chosen so that the contact surface changes only slightly when wear of the friction element, at least up to a reduction in height of 10%, i. gets bigger.
  • the friction element has side surfaces tapering towards the contact surface, wherein at least two of the side surfaces have a concave curvature. If, during operation of the ultrasonic motor, wear of the friction element occurs, the special geometry of the friction element causes the contact surface to remain almost constant, so that the motor will be used without significant changes in its operating behavior or function even if wear occurs on the friction element can.

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
EP08022231A 2008-12-22 2008-12-22 Moteur à ultrasons Withdrawn EP2200101A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP08022231A EP2200101A1 (fr) 2008-12-22 2008-12-22 Moteur à ultrasons

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP08022231A EP2200101A1 (fr) 2008-12-22 2008-12-22 Moteur à ultrasons

Publications (1)

Publication Number Publication Date
EP2200101A1 true EP2200101A1 (fr) 2010-06-23

Family

ID=40377116

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08022231A Withdrawn EP2200101A1 (fr) 2008-12-22 2008-12-22 Moteur à ultrasons

Country Status (1)

Country Link
EP (1) EP2200101A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013034146A3 (fr) * 2011-09-06 2013-05-10 Physik Instrumente (Pi) Gmbh & Co. Kg Moteur à ultrasons
CN103296920A (zh) * 2012-02-28 2013-09-11 株式会社腾龙 振动体保持机构、超声波马达以及透镜驱动装置
EP2680334A1 (fr) 2012-06-28 2014-01-01 Leica Geosystems AG Commande piezo-électrique avec oscillateur piezo-électrique à articulation rotative
DE102013110356A1 (de) 2013-09-19 2015-04-02 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallaktor
DE102014222026B3 (de) * 2014-10-29 2016-02-18 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
DE102016110771B3 (de) * 2016-06-13 2017-08-03 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
CN107907550A (zh) * 2017-10-30 2018-04-13 郑州旭飞光电科技有限公司 玻璃基板切片固定装置和切片观察设备
WO2018145697A1 (fr) * 2017-02-10 2018-08-16 Physik Instrumente (Pi) Gmbh & Co. Kg Moteur piézoélectrique

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3920726A1 (de) * 1988-06-29 1990-01-04 Olympus Optical Co Ultraschalloszillator
US5416375A (en) * 1992-06-15 1995-05-16 Olympus Optical Co., Ltd. Ultrasonic motor
EP0755054A2 (fr) * 1995-07-18 1997-01-22 Nanomotion Ltd Moteur céramique
US5872418A (en) 1994-10-31 1999-02-16 Pi Ceramic Gmbh Piezoelectric motor
US20030052573A1 (en) 2001-06-12 2003-03-20 Physik-Instrumente (Pi) Gmbh & Co. Kg Piezoelectric adjusting element
US6979934B1 (en) 1999-06-30 2005-12-27 Pi Ceramic Gmbh Piezoelectric drive, especially a holding frame, a friction element and a circuit configuration
EP1959512A2 (fr) * 2007-02-14 2008-08-20 Seiko Epson Corporation Transducteur piézoélectrique, actionneur piézoélectrique et dispositif portable

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3920726A1 (de) * 1988-06-29 1990-01-04 Olympus Optical Co Ultraschalloszillator
US5416375A (en) * 1992-06-15 1995-05-16 Olympus Optical Co., Ltd. Ultrasonic motor
US5872418A (en) 1994-10-31 1999-02-16 Pi Ceramic Gmbh Piezoelectric motor
EP0755054A2 (fr) * 1995-07-18 1997-01-22 Nanomotion Ltd Moteur céramique
US6979934B1 (en) 1999-06-30 2005-12-27 Pi Ceramic Gmbh Piezoelectric drive, especially a holding frame, a friction element and a circuit configuration
US20030052573A1 (en) 2001-06-12 2003-03-20 Physik-Instrumente (Pi) Gmbh & Co. Kg Piezoelectric adjusting element
EP1959512A2 (fr) * 2007-02-14 2008-08-20 Seiko Epson Corporation Transducteur piézoélectrique, actionneur piézoélectrique et dispositif portable

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103843242B (zh) * 2011-09-06 2017-07-11 物理设备（Pi）两合公司 超声波电机
CN103843242A (zh) * 2011-09-06 2014-06-04 菲斯克仪器（Pi）有限公司 超声波电机
WO2013034146A3 (fr) * 2011-09-06 2013-05-10 Physik Instrumente (Pi) Gmbh & Co. Kg Moteur à ultrasons
US9833813B2 (en) 2011-09-06 2017-12-05 Physik Instrumente GmbH & Co. KG Ultrasonic motor
CN103296920A (zh) * 2012-02-28 2013-09-11 株式会社腾龙 振动体保持机构、超声波马达以及透镜驱动装置
EP2680334A1 (fr) 2012-06-28 2014-01-01 Leica Geosystems AG Commande piezo-électrique avec oscillateur piezo-électrique à articulation rotative
DE102013110356A1 (de) 2013-09-19 2015-04-02 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallaktor
DE102013110356B4 (de) 2013-09-19 2018-08-30 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallaktor
DE102014222026B3 (de) * 2014-10-29 2016-02-18 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
DE102016110771B3 (de) * 2016-06-13 2017-08-03 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
WO2017215704A1 (fr) 2016-06-13 2017-12-21 Physik Instrumente (Pi) Gmbh & Co. Kg Moteur à ultrasons
CN109314474A (zh) * 2016-06-13 2019-02-05 物理仪器(Pi)两合有限公司 超声波电机
WO2018145697A1 (fr) * 2017-02-10 2018-08-16 Physik Instrumente (Pi) Gmbh & Co. Kg Moteur piézoélectrique
CN110383668A (zh) * 2017-02-10 2019-10-25 物理仪器(Pi)两合有限公司 压电电动机
CN110383668B (zh) * 2017-02-10 2022-02-18 物理仪器(Pi)两合有限公司 压电电动机
US11383273B2 (en) 2017-02-10 2022-07-12 Physik Instrumente (Pi) Gmbh & Co. Kg Piezo motor
CN107907550A (zh) * 2017-10-30 2018-04-13 郑州旭飞光电科技有限公司 玻璃基板切片固定装置和切片观察设备

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