EP2183508A1 - Dry-type vacuum pump comprising a device for sealing against lubricating fluids, and centrifuging element equipping such a device - Google Patents

Dry-type vacuum pump comprising a device for sealing against lubricating fluids, and centrifuging element equipping such a device

Info

Publication number
EP2183508A1
EP2183508A1 EP08761080A EP08761080A EP2183508A1 EP 2183508 A1 EP2183508 A1 EP 2183508A1 EP 08761080 A EP08761080 A EP 08761080A EP 08761080 A EP08761080 A EP 08761080A EP 2183508 A1 EP2183508 A1 EP 2183508A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump according
bearing
dry
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08761080A
Other languages
German (de)
French (fr)
Other versions
EP2183508B1 (en
Inventor
Albert Cacard
François HOUZE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of EP2183508A1 publication Critical patent/EP2183508A1/en
Application granted granted Critical
Publication of EP2183508B1 publication Critical patent/EP2183508B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation

Definitions

  • Dry type vacuum pump comprising a sealing device for lubricating fluids and centrifugal element equipping such a device
  • the present invention relates to a dry type vacuum pump such as a rotary lobe vacuum pump, in particular of multi-stage type such as "Roots” or “Claw” type or such as a spiral vacuum pump. (“Scroll”) or like a screw vacuum pump.
  • a dry type vacuum pump such as a rotary lobe vacuum pump, in particular of multi-stage type such as "Roots” or “Claw” type or such as a spiral vacuum pump. (“Scroll”) or like a screw vacuum pump.
  • these pumps comprise one or more stages placed in series in which circulates a gas to be pumped between a gas inlet inlet and a gas discharge outlet.
  • the rotary lobe pumps “Roots” comprise two rotors of identical profiles, rotating inside a stator (pump body) in opposite directions. During rotation, the sucked gas is trapped in the free space between the rotors and the stator, then it is discharged by the exhaust. The operation is carried out without any mechanical contact between the rotors and the body of the pump, which allows the total absence of oil in the compression chamber.
  • “Claw” double-nose pumps also include two lobe rotors, rotating in opposite directions in a cylinder, sucking the gas and compressing it.
  • the shape of the lobes is particular to ensure dry compression.
  • the rotors are carried by rotary shafts supported by at least one lubricated bearing, for example with oil or by grease.
  • the rotation of the shafts in the bearings generates pollutants such as grease particles or drops of oil which, when subjected to pressure variations, can migrate to the pumping stages.
  • the object of the present invention is therefore to provide a dry vacuum pump whose sealing device requires little or no maintenance operation on the pump, while ensuring that the pumping stages are free of oil or grease, and more particularly, free from mists or vapors of these lubricants.
  • the subject of the invention is a dry type vacuum pump comprising at least one rotary shaft supported by at least one lubricated bearing and at least one lubricant fluid sealing device capable of coming from said bearing for sealing at the shaft passage, the sealing device being mounted between the lubricated bearing and a dry pumping stage, characterized in that the said sealing device comprises a centrifugal element mounted integrally in rotation on the said shaft and comprising at least a through duct capable of separating the lubricant fluids from the fluid likely to flow from said bearing to the dry pumping stage.
  • the centrifuge element further comprises a filter body placed in the through conduit, such as, for example, a fibrous material.
  • the through pipe is located closer to the shaft than the circumferential surface of the centrifuge element. It is expected that the diameter of the orifice of the through pipe is greater on the bearing side than on the side of the dry pumping stage.
  • the through pipe has a truncated cone shape whose top is located on the side of the dry pumping stage.
  • a portion of the through pipe has a narrowing or that the through pipe is formed by a recess of the truncated cone-shaped centrifugal element whose axis of revolution coincides with the axis rotation of the centrifuge element and whose vertex communicates with a predefined number of orifices on the side of the pumping stage.
  • the conductance of the through-pipe is greater than the conductance of a peripheral passage of the fluid formed between the circumferential surface of the centrifuge element and the inner wall of the stator.
  • the sealing device comprises a check valve placed vis-à-vis the orifice of the through conduit located on the side of the pumping stage.
  • the non-return valve is preferably formed by a disc slidably mounted on the rotary shaft.
  • the peripheral passage has a labyrinth seal.
  • the labyrinth seal may have a plurality of rings mounted in the stator and the circumferential surface of the centrifuge element may have a plurality of corresponding grooves.
  • each ring is open and elastic to be mounted in the stator.
  • each ring at rest is greater than the diameter of the inner wall of the stator so that after insertion of the rings in the stator, they are pressed against the inner wall of the stator by the elastic force of the Ring.
  • the sealing device further comprises a deflector mounted on the shaft between the bearing and the centrifugal element.
  • the invention also relates to a lubricated fluid sealing device centrifugal element intended to be mounted integrally in rotation on a rotary shaft of dry type vacuum pump, between a lubricated bearing and a dry pumping stage, characterized in that it comprises at least one through pipe through which a fluid is able to flow from the bearing to the dry pumping stage to separate the lubricant fluids fluid.
  • FIG. 1 is a longitudinal sectional view of a portion of the vacuum pump according to the invention
  • FIG. 2 is a diagrammatic front view of an exemplary embodiment of the centrifugal element according to the invention
  • FIG. 3 is a longitudinal sectional view of a portion of the vacuum pump of FIG. 1
  • FIGS. 4, 5 and 6 are longitudinal sectional views of alternative embodiments of the vacuum pump of FIG. 1.
  • the invention applies to a dry type vacuum pump comprising at least one rotary shaft supported by at least one lubricated bearing and at least one lubricant fluid sealing device capable of coming from the bearing for sealing at the level of the shaft passage, the sealing device being mounted between the lubricated bearing and a dry pumping stage.
  • a vacuum pump such as a vacuum pump comprising two rotary lobe shafts, in particular of multi-stage type, such as "Roots” or “Claw” type or of a similar principle, there are therefore four sealing devices at the four levels of the pump.
  • the invention also applies to any type of dry vacuum pump, such as spiral vacuum pumps or screw vacuum pumps.
  • Figure 1 shows a portion of the vacuum pump 1 according to a first embodiment of the invention.
  • the inside of the stator 3 of the vacuum pump 1 comprises a bearing 5, a pumping stage 7 and a sealing device 9 to the lubricated fluids for the passage of a rotary shaft 11, mounted between the bearing 5 and the pumping stage 7.
  • the bearing 5 comprises a bearing 13 lubricated with a fluid, such as grease or oil.
  • a fluid such as grease or oil.
  • the bearing 5 is advantageously in communication with an oil sump (not shown) also distributing the oil to the gears of the shafts.
  • the shaft 11 rotatable about the axis of rotation 14 extends into the pump stage 7 where it carries a rotor 15 such as rotating lobes.
  • the pumping stage 7 is said to be "dry” because in operation, the rotors 15 rotate inside the stator 3 in opposite directions without any mechanical contact between the rotors 15 and the body 3 of the pump 1, which allows the total absence of oil.
  • the sealing device 9 greatly limits the passage of lubricating fluids such as grease or oil from the bearing 5 to the dry pumping stages 7 while allowing the shaft 11 to rotate when the vacuum pump 1 is in operation.
  • the sealing device 9 comprises a centrifugal element 17 integrally mounted in rotation on the shaft 11 and comprising at least one through conduit 19 capable of separating the lubricant fluids from the fluid likely to flow from the bearing 5 to the dry pumping stage 7.
  • the fluid capable of flowing from the bearing to the dry pumping stage comprises a mixture of lubricating fluid and gas.
  • the centrifugal element 17 will rotate at the same rotational speed as the shaft 11, for example at 6000 rpm for a primary vacuum pump Roots type.
  • the through pipe 19 carried by the centrifugal element 17 will also rotate about the axis of rotation 14 of the shaft 11 of the pump 1 and at the same speed of rotation.
  • the lubricant fluid in the form of mist, liquid or residual particles having a mass or a density greater than the gas, flowing in the through pipe 19, will be removed from the center 14 of the centrifugal element 17.
  • centrifugal force created by the rapid rotation of the centrifugal element 17 projects the lubricant fluids on the inner side faces 21 of the pipe 19, thus separating the lubricating fluid from the fluid by centrifugation.
  • the sealing device separates the mist and / or the vapor from the lubricant, from the fluid.
  • the diameter of the orifice 39 of the through pipe 19 is greater on the bearing side 5 than on the side of the dry pumping stage 7.
  • part of the through pipe 19 presents a narrowing 53 formed by a recess of the centrifugal element 17 in the form of a truncated cone whose axis of revolution coincides with the axis of rotation 14 of the centrifugal element 17 and whose vertex communicates with a predefined number of orifices 39 on the side of the pumping stage 7.
  • the frustoconical shape will in particular allow, by the effect of centrifugal force, to guide the vapors and mists of lubricants trapped along the walls in order to evacuate them from the pipe 19.
  • the lubricated fluid is then directed to the base of the centrifuge element 17 allowing the sealing device to be self-cleaning.
  • FIG. 2 shows a centrifugal element 17 having eight orifices 39 of through pipes 19 and an opening 25 in the center of the centrifugal element 17 for the passage of the shaft 11.
  • the centrifuge element 17 advantageously comprises a filter body placed in the through conduit 19, such as a fibrous material (not shown).
  • the fibrous material may for example be based on steel wool or glass wool.
  • the fibrous material may for example be based on steel wool or glass wool.
  • the filter body self-cleans.
  • the sealing device 9 comprises a deflector 27 mounted on the shaft 11 between the bearing 5 and the centrifugal element 17.
  • the deflector 27 makes it possible to modify the flow of the fluid coming from the bearing 5 to form a first means of coarse separation of the lubricants in the form of liquids, greases and particles originating from the bearing 5.
  • a corresponding groove 29 is provided in the stator 3 located opposite the peripheral end 31 of the deflector 27.
  • a channel (not shown) starts from the groove 29 and extends into the stator 3 of the pump 1.
  • This channel can communicate with the oil pan of lubricated bearings.
  • the lubricant flowing in the groove 29 is then driven into the channel and then to the oil sump.
  • the through pipe 19 is situated closer to the shaft 11 than to the circumferential surface 33 of the centrifugal element 17, as illustrated by FIG.
  • the complementary rolling effect is produced by a localized overpressure between the deflector 27 and the centrifugal element 17. It is due to the small space between the deflector 27 and the centrifugal element 17.
  • the rolling effect also makes it possible to reject the lubricants at the periphery of the deflector 27.
  • the conductance of the through conduit 19 is greater than the conductance of the peripheral passage of the fluid formed between the circumferential surface 33 of the centrifuge element 17 and the inner wall 35 of the stator 3.
  • the flow of the fluid is preferred through the through conduit 19 of the centrifuge element 17 rather than the periphery thereof, when the pressure on the bearing side 5 is higher.
  • the fluid is well filtered by the centrifugal element 17 and the pressure differential on either side of it is limited, the flow through the peripheral passage being very small in view of the high conductance.
  • the sealing device 9 comprises a non-return valve 37 vis-a-vis the orifice 39 of the through pipe 19, situated on the side of the pumping stage 7.
  • the position of the valve 37 makes it possible to orient the preferred path of the fluid as a function of the pressure differential.
  • the fluid When moved away from the orifice 39, the fluid preferably flows through the through conduit 19 since it has the largest conductance.
  • the fluid When pressed against the orifice 39, the fluid preferably flows through the peripheral passage of the centrifugal element 17.
  • the opening and closing of the pipe 19 by the valve 37 is naturally controlled by the pressure difference on either side thereof.
  • the valve 37 is placed on the shaft 11 so as to be in a position remote from the orifice 39 when the pressure on the bearing side 5 is greater than the pressure of the pumping stage 7.
  • the sealing device 9 is optimized because the turbulent movements of gas and lubricants inside the through pipe 19 are avoided, the flow through the through pipe 19 occurring only in a only sense.
  • the pressures on either side of the sealing device 9 can therefore be automatically equilibrated by two separate passages depending on whether the fluid is loaded with lubricants or not.
  • nonreturn valve 37 by a simple disc mounted in axial sliding on the shaft 11, for example a metal disc, the travel of the valve 37 being defined by the centrifugal element 17 and a stop 41 fixed to the tree 11.
  • the radius of the valve 37 is provided sufficiently large to be able to obstruct the orifices 39 of the through pipes 19 opening on the side of the pumping stage 7.
  • valve 37 is thus pushed by the fluid flow towards the pumping stage 7 and retained by the stop 41 (see FIG. 1) when the pressure of the bearing 5 is greater than the pressure of the pumping stage 7, thus releasing the passage through the through conduit 19 of the centrifuge element 17.
  • valve 37 is attracted to the centrifugal element 17 by the fluid flow when the pressure of the bearing 5 is lower than the pressure of the pumping stage 7, obstructing the passage of the fluid in the through pipe 19.
  • the low conductance of the peripheral passage of the gases accelerates them, causing the residues to the groove 29 of the stator 3.
  • the peripheral passage of the fluid is formed by a labyrinth seal 43.
  • the labyrinth seal 43 comprises a series of baffles limiting the conductance of the passage between the stator 3 and the centrifugal element 17.
  • the baffles are formed by corresponding grooves and grooves respectively carried by the stator and the rotary member and centered vis-à-vis non-contact to prevent significant friction at high rotational speeds of the rotary member.
  • the peripheral passage is thus formed between the circumferential surface 33 of the centrifugal element 17 and the stator 3 of the pump 1, which makes it possible to avoid friction at the high rotational speed of the centrifugal element. 17.
  • the invention advantageously provides and independently of the pipe 19, a labyrinth seal 43 characterized in that it comprises a plurality of rings 45 mounted in the stator 3 and in that the circumferential surface 33 of the centrifuge element 17 has several corresponding grooves 47.
  • the rings 45 are distinct elements of the stator 3 and are open and resilient in order to be mounted in the stator 3.
  • each ring 45 at rest is greater than the diameter of the inner wall 35 of the stator 3 so that after insertion of the rings 45 into the stator 3, they are pressed against the inner wall 35 of the stator 3 by the elastic force of the ring 45.
  • an auxiliary mounting tube is disposed around the centrifugal element 17 carrying the rings 45, so that the rings 45 are compressed, the ends of each ring 45 joining.
  • the elasticity of the rings 45 is chosen so that they remain firmly fixed to the stator 3.
  • a labyrinth seal 43 is thus obtained between the stator 3 and the centrifugal element 17 whose grooves 47 and grooves 45 are easy to fabricate, center and assemble.
  • this type of labyrinth seal 43 applies to both the centrifugal element 17 of the present invention and any rotary element rotating in a stator, such as a rotor or a rotating shaft.
  • the flow of fluid from the bearing 5 is deflected by the deflector 27, separating coarsely the particles and lubricating liquids.
  • valve 37 is pushed towards the pumping stage 7 thus freeing access to the through conduit 19 so that a majority of the fluid flows through the centrifuge element 17.
  • the gas is thus separated from the lubricating fluids by centrifugation.
  • the valve 37 is attracted to the centrifuge element 17, obstructing the passage of fluid in the through conduit 19, so that a majority of the fluid flows through the peripheral passage, causing the lubricant residues.
  • constriction 53 of the through conduit 19 may be formed by a constriction of the conduit 19 (not shown).
  • Figures 4 and 5 illustrate other advantageous embodiments of the invention in which the diameter of the orifice 39 of the through pipe 19 is greater on the bearing side 5 than on the side of the dry pumping stage 7 .
  • the through pipe 19 has a narrowing section forming a step whose reduced diameter portion opens on the side of the dry pumping stage 7.
  • This variant has the advantage of being simple.
  • such a pipe 19 can be obtained for example by drilling with a forest floor.
  • the through pipe 19 has a truncated cone shape whose apex is situated on the side of the dry pumping stage 7.
  • the constriction 53, partial or continuous, of the through pipe 19 makes it possible to brake the lubricant residues projected on the internal lateral faces 21 of the pipe 19.
  • the through pipe 19 has the shape of a tube ( Figure 6). It is thus clear that a vacuum pump 1 comprising at least one sealing device 9 for lubricating fluids comprising a centrifugal element 17 mounted to rotate integrally with the shaft 11 and comprising at least one through conduit 19, makes it possible to provide a Lubricant tightness without friction parts and therefore without wear, requiring little maintenance.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)

Abstract

The invention relates to a dry-type vacuum pump comprising at least one rotary shaft (11) supported by at least one lubricated bearing (5) and at least one device (9) for sealing against the lubricating fluids which can emanate from said bearing (5) so as to provide sealing in the region of the shaft passage, the sealing device (9) being mounted between the lubricated bearing (5) and a dry pumping stage (7), characterized in that said sealing device (9) comprises a centrifuging element (17) mounted securely in terms of rotation on said shaft (11) and comprising at least one through-duct (19) designed to separate the lubricating fluids from the fluid which can circulate from said bearing (5) towards the dry pumping stage (7).

Description

Pompe à vide de type sèche comportant un dispositif d'étanchéité aux fluides lubrifiants et élément centrifugeur équipant un tel dispositif Dry type vacuum pump comprising a sealing device for lubricating fluids and centrifugal element equipping such a device
La présente invention concerne une pompe à vide de type sèche telle qu'une pompe à vide à lobes rotatifs, notamment de type multi-étagée, telle que de type « Roots » ou « Claw » ou telle qu'une pompe à vide à spirale (« Scroll ») ou encore telle qu'une pompe à vide à vis.The present invention relates to a dry type vacuum pump such as a rotary lobe vacuum pump, in particular of multi-stage type such as "Roots" or "Claw" type or such as a spiral vacuum pump. ("Scroll") or like a screw vacuum pump.
Généralement, ces pompes comportent un ou plusieurs étages placés en série dans lequel circule un gaz à pomper entre une entrée d'admission des gaz et une sortie de refoulement des gaz.Generally, these pumps comprise one or more stages placed in series in which circulates a gas to be pumped between a gas inlet inlet and a gas discharge outlet.
On distingue parmi les pompes à vide connues, celles à lobes rotatifs également connues sous le nom « Roots » avec deux ou trois lobes (bi-lobes, tri-lobes) ou celles à double bec, également connues sous le nom « Claw ».There are known vacuum pumps, those with rotary lobes also known as "Roots" with two or three lobes (bi-lobes, tri-lobes) or those with double beaks, also known as "Claw".
Ces pompes sont décrites par exemple dans les documents US 6,572,351, US 5,234,323, EP 0 365 695, US 4,789,314 et EP 1 227 246.These pumps are described for example in US 6,572,351, US 5,234,323, EP 0 365 695, US 4,789,314 and EP 1 227 246.
De façon générale, les pompes à lobes rotatifs « Roots » comprennent deux rotors de profils identiques, tournant à l'intérieur d'un stator (corps de pompe) en sens opposé. Lors de la rotation, le gaz aspiré est emprisonné dans l'espace libre compris entre les rotors et le stator, puis il est refoulé par l'échappement. Le fonctionnement s'effectue sans aucun contact mécanique entre les rotors et le corps de la pompe, ce qui permet l'absence totale d'huile dans la chambre de compression.In general, the rotary lobe pumps "Roots" comprise two rotors of identical profiles, rotating inside a stator (pump body) in opposite directions. During rotation, the sucked gas is trapped in the free space between the rotors and the stator, then it is discharged by the exhaust. The operation is carried out without any mechanical contact between the rotors and the body of the pump, which allows the total absence of oil in the compression chamber.
Les pompes double bec « Claw » comprennent également deux rotors à lobes, tournant en sens contraire dans un cylindre, en aspirant le gaz et le comprimant. Toutefois, la forme des lobes est particulière pour assurer une compression sèche."Claw" double-nose pumps also include two lobe rotors, rotating in opposite directions in a cylinder, sucking the gas and compressing it. However, the shape of the lobes is particular to ensure dry compression.
Les rotors sont portés par des arbres rotatifs supportés par au moins un palier lubrifié, par exemple à l'huile ou par de la graisse.The rotors are carried by rotary shafts supported by at least one lubricated bearing, for example with oil or by grease.
En fonctionnement, la rotation des arbres dans les paliers génère des polluants tels que des particules de graisse ou des gouttes d'huile qui, lorsqu'elles sont soumises à des variations de pression, peuvent migrer vers les étages de pompage.In operation, the rotation of the shafts in the bearings generates pollutants such as grease particles or drops of oil which, when subjected to pressure variations, can migrate to the pumping stages.
Or, il est indispensable qu'aucune trace d'huile ou de graisse ne se retrouve dans les étages de pompage pour les applications dites « sèches », tels que les procédés de fabrication de substrats semi-conducteurs. II convient donc d'isoler les paliers lubrifiés des étages de pompage secs par un dispositif d'étanchéité au travers duquel l'arbre est toujours susceptible de tourner.However, it is essential that no trace of oil or grease is found in the pump stages for so-called "dry" applications, such as semiconductor substrate manufacturing processes. It is therefore advisable to isolate the lubricated bearings of dry pumping stages by a sealing device through which the shaft is always rotatable.
Pour pallier à cela, on connaît déjà des joints frottants annulaires dits "à lèvres". Cependant, le frottement des joints sur l'arbre en rotation entraîne leur usure et aboutit rapidement à une perte d'étanchéité nécessitant des maintenances fréquentes de la pompe à vide, chaque intervention de maintenance nécessitant l'arrêt des installations de fabrication des semiconducteurs et de la pompe à vide, ce qui est très coûteux. Par ailleurs, la pression dans les étages de pompage varie fréquemment entre de hautes et de basses pressions provoquant d'importantes différences de pression entre les paliers et les étages de pompage.To overcome this, we already know annular rubbing seals called "lip". However, the friction of the seals on the rotating shaft causes their wear and quickly leads to a loss of tightness requiring frequent maintenance of the vacuum pump, each maintenance intervention requiring the shutdown of semiconductor manufacturing facilities and the vacuum pump, which is very expensive. In addition, the pressure in the pumping stages frequently varies between high and low pressures causing significant pressure differences between the bearings and the pumping stages.
Ces écarts de pressions répétitifs de part et d'autres des joints provoquent également leur usure prématurée. On connaît également d'autres techniques, utilisant des joints dynamiques sans contacts, permettant un équilibrage des pressions de part et d'autre d'une zone d'étanchéité entre le palier et l'étage de pompage sec.These differences in repetitive pressures on both sides of the joints also cause their premature wear. Other techniques are also known, using dynamic seals without contacts, allowing a balancing of the pressures on both sides of a sealing zone between the bearing and the dry pumping stage.
Ces joints dynamiques sans contact utilisent les turbulences du gaz comme moyen d'étanchéité. Toutefois, ces dispositifs ne permettent pas d'empêcher la migration des brouillards et vapeurs d'huile ou de graisse vers les zones de pompage.These non-contact dynamic seals utilize gas turbulence as a sealing means. However, these devices do not prevent the migration of mists and vapors of oil or grease to the pumping areas.
Le but de la présente invention est donc de proposer une pompe à vide sèche dont le dispositif d'étanchéité nécessite peu ou aucune opération de maintenance sur la pompe, tout en assurant que les étages de pompage soient exempts d'huile ou de graisse, et plus particulièrement, exempts de brouillards ou de vapeurs de ces lubrifiants.The object of the present invention is therefore to provide a dry vacuum pump whose sealing device requires little or no maintenance operation on the pump, while ensuring that the pumping stages are free of oil or grease, and more particularly, free from mists or vapors of these lubricants.
A cet effet, l'invention a pour objet une pompe à vide de type sèche comportant au moins un arbre rotatif supporté par au moins un palier lubrifié et au moins un dispositif d'étanchéité aux fluides lubrifiants susceptibles de provenir dudit palier pour l'étanchéité au niveau du passage d'arbre, le dispositif d'étanchéité étant monté entre le palier lubrifié et un étage de pompage sec, caractérisée en ce que ledit dispositif d'étanchéité comporte un élément centrifugeur monté solidairement en rotation sur ledit arbre et comportant au moins une conduite traversante apte à séparer les fluides lubrifiants du fluide susceptible de circuler depuis ledit palier vers l'étage de pompage sec.For this purpose, the subject of the invention is a dry type vacuum pump comprising at least one rotary shaft supported by at least one lubricated bearing and at least one lubricant fluid sealing device capable of coming from said bearing for sealing at the shaft passage, the sealing device being mounted between the lubricated bearing and a dry pumping stage, characterized in that the said sealing device comprises a centrifugal element mounted integrally in rotation on the said shaft and comprising at least a through duct capable of separating the lubricant fluids from the fluid likely to flow from said bearing to the dry pumping stage.
De préférence, l'élément centrifugeur comporte en outre un corps filtrant placé dans la conduite traversante, comme par exemple, un matériau fibreux. De préférence, la conduite traversante est située plus près de l'arbre que de la surface circonférentielle de l'élément centrifugeur. On prévoit que le diamètre de l'orifice de la conduite traversante est plus important du côté du palier que du côté de l'étage de pompage sec.Preferably, the centrifuge element further comprises a filter body placed in the through conduit, such as, for example, a fibrous material. Preferably, the through pipe is located closer to the shaft than the circumferential surface of the centrifuge element. It is expected that the diameter of the orifice of the through pipe is greater on the bearing side than on the side of the dry pumping stage.
Par exemple, on prévoit que la conduite traversante présente une forme en tronc de cône dont le sommet est situé du coté de l'étage de pompage sec. Alternativement, on prévoit qu'une partie de la conduite traversante présente un rétrécissement ou encore, que la conduite traversante est formée par un évidement de l'élément centrifugeur en forme de tronc de cône dont l'axe de révolution est confondu avec l'axe de rotation de l'élément centrifugeur et dont le sommet communique avec un nombre prédéfini d'orifices du côté de l'étage de pompage. On prévoit également que la conductance de la conduite traversante est supérieure à la conductance d'un passage périphérique du fluide formé entre la surface circonférentielle de l'élément centrifugeur et la paroi interne du stator.For example, it is expected that the through pipe has a truncated cone shape whose top is located on the side of the dry pumping stage. Alternatively, it is expected that a portion of the through pipe has a narrowing or that the through pipe is formed by a recess of the truncated cone-shaped centrifugal element whose axis of revolution coincides with the axis rotation of the centrifuge element and whose vertex communicates with a predefined number of orifices on the side of the pumping stage. It is also expected that the conductance of the through-pipe is greater than the conductance of a peripheral passage of the fluid formed between the circumferential surface of the centrifuge element and the inner wall of the stator.
De préférence, le dispositif d'étanchéité comporte un clapet anti-retour placé en vis-à-vis de l'orifice de la conduite traversante situé du côté de l'étage de pompage. Le clapet anti-retour est de préférence formé par un disque monté en coulissement sur l'arbre rotatif.Preferably, the sealing device comprises a check valve placed vis-à-vis the orifice of the through conduit located on the side of the pumping stage. The non-return valve is preferably formed by a disc slidably mounted on the rotary shaft.
Par exemple, on prévoit que le passage périphérique comporte un joint labyrinthe.For example, it is expected that the peripheral passage has a labyrinth seal.
Le joint labyrinthe peut comporter plusieurs bagues montées dans le stator et la surface circonférentielle de l'élément centrifugeur posséder plusieurs gorges correspondantes. Avantageusement, chaque bague est ouverte et élastique pour pouvoir être montée dans le stator.The labyrinth seal may have a plurality of rings mounted in the stator and the circumferential surface of the centrifuge element may have a plurality of corresponding grooves. Advantageously, each ring is open and elastic to be mounted in the stator.
De préférence, le diamètre externe de chaque bague au repos est supérieur au diamètre de la paroi interne du stator de sorte qu'après insertion des bagues dans le stator, celles-ci sont plaquées contre la paroi interne du stator par la force élastique de la bague. On peut prévoir aussi que le dispositif d'étanchéité comporte en outre un déflecteur monté sur l'arbre entre le palier et l'élément centrifugeur.Preferably, the outer diameter of each ring at rest is greater than the diameter of the inner wall of the stator so that after insertion of the rings in the stator, they are pressed against the inner wall of the stator by the elastic force of the Ring. It can also be provided that the sealing device further comprises a deflector mounted on the shaft between the bearing and the centrifugal element.
L'invention a aussi pour objet un élément centrifugeur de dispositif d'étanchéité aux fluides lubrifiés destiné à être monté solidairement en rotation sur un arbre rotatif de pompe à vide de type sèche, entre un palier lubrifié et un étage de pompage sec, caractérisé en ce qu'il comporte au moins une conduite traversante à travers laquelle un fluide est apte à circuler depuis le palier vers l'étage de pompage sec pour séparer les fluides lubrifiants du fluide.The invention also relates to a lubricated fluid sealing device centrifugal element intended to be mounted integrally in rotation on a rotary shaft of dry type vacuum pump, between a lubricated bearing and a dry pumping stage, characterized in that it comprises at least one through pipe through which a fluid is able to flow from the bearing to the dry pumping stage to separate the lubricant fluids fluid.
D'autres avantages et caractéristiques apparaîtront à la lecture de la description de l'invention, ainsi que des dessins annexés sur lesquels : la figure 1 est une vue en coupe longitudinale d'une partie de la pompe à vide selon l'invention, la figure 2 est une vue de face schématique d'un exemple de réalisation de l'élément centrifugeur selon l'invention, - la figure 3 est une vue en coupe longitudinale d'une partie de la pompe à vide de la figure 1, les figures 4, 5 et 6 sont des vues en coupe longitudinale de variantes de réalisation de la pompe à vide de la figure 1.Other advantages and characteristics will appear on reading the description of the invention, as well as the appended drawings in which: FIG. 1 is a longitudinal sectional view of a portion of the vacuum pump according to the invention, FIG. 2 is a diagrammatic front view of an exemplary embodiment of the centrifugal element according to the invention; FIG. 3 is a longitudinal sectional view of a portion of the vacuum pump of FIG. 1, FIGS. 4, 5 and 6 are longitudinal sectional views of alternative embodiments of the vacuum pump of FIG. 1.
Sur ces figures, les éléments identiques portent les mêmes numéros de référence.In these figures, the identical elements bear the same reference numbers.
L'invention s'applique à une pompe à vide de type sèche comportant au moins un arbre rotatif supporté par au moins un palier lubrifié et au moins un dispositif d'étanchéité aux fluides lubrifiants susceptibles de provenir du palier pour l'étanchéité au niveau du passage d'arbre, le dispositif d'étanchéité étant monté entre le palier lubrifié et un étage de pompage sec.The invention applies to a dry type vacuum pump comprising at least one rotary shaft supported by at least one lubricated bearing and at least one lubricant fluid sealing device capable of coming from the bearing for sealing at the level of the shaft passage, the sealing device being mounted between the lubricated bearing and a dry pumping stage.
On prévoit avantageusement de disposer un dispositif d'étanchéité pour chaque étage de pompage adjacent à un palier de la pompe à vide.Advantageously, provision is made for a sealing device for each pumping stage adjacent to a bearing of the vacuum pump.
Sur une pompe à vide telle une pompe à vide comportant deux arbres à lobes rotatifs, notamment de type multi-étagée, telle que de type « Roots » ou « Claw » ou d'un principe similaire, on dispose donc quatre dispositifs d'étanchéité aux quatre paliers de la pompe.On a vacuum pump such as a vacuum pump comprising two rotary lobe shafts, in particular of multi-stage type, such as "Roots" or "Claw" type or of a similar principle, there are therefore four sealing devices at the four levels of the pump.
Bien entendu, l'invention s'applique également à tout type de pompe à vide sèche, telle que les pompes à vide à spirale ou les pompes à vide à vis.Of course, the invention also applies to any type of dry vacuum pump, such as spiral vacuum pumps or screw vacuum pumps.
La figure 1 représente une partie de la pompe à vide 1 selon un premier mode de réalisation de l'invention.Figure 1 shows a portion of the vacuum pump 1 according to a first embodiment of the invention.
L'intérieur du stator 3 de la pompe à vide 1 comporte un palier 5, un étage de pompage 7 et un dispositif d'étanchéité 9 aux fluides lubrifiés pour le passage d'un arbre rotatif 11 , monté entre le palier 5 et l'étage de pompage 7.The inside of the stator 3 of the vacuum pump 1 comprises a bearing 5, a pumping stage 7 and a sealing device 9 to the lubricated fluids for the passage of a rotary shaft 11, mounted between the bearing 5 and the pumping stage 7.
Le palier 5 comporte un roulement 13 lubrifié par un fluide, tel que de la graisse ou de l'huile. Pour cela, le palier 5 est avantageusement en communication avec un carter d'huile (non représenté) distribuant également l'huile aux engrenages des arbres.The bearing 5 comprises a bearing 13 lubricated with a fluid, such as grease or oil. For this, the bearing 5 is advantageously in communication with an oil sump (not shown) also distributing the oil to the gears of the shafts.
Plus loin en aval dans la pompe 1, l'arbre 11 apte à tourner autour de l'axe de rotation 14, s'étend dans l'étage de pompage 7 où il porte un rotor 15 tel qu'à lobes rotatifs.Further downstream in the pump 1, the shaft 11 rotatable about the axis of rotation 14 extends into the pump stage 7 where it carries a rotor 15 such as rotating lobes.
L'étage de pompage 7 est dit « sec » car en fonctionnement, les rotors 15 tournent à l'intérieur du stator 3 en sens opposé sans aucun contact mécanique entre les rotors 15 et le corps 3 de la pompe 1, ce qui permet l'absence totale d'huile. Le dispositif d'étanchéité 9 permet de limiter fortement le passage des fluides lubrifiants tels que la graisse ou l'huile depuis le palier 5 vers les étages de pompage secs 7 tout en permettant à l'arbre 11 de tourner lorsque la pompe à vide 1 est en fonctionnement.The pumping stage 7 is said to be "dry" because in operation, the rotors 15 rotate inside the stator 3 in opposite directions without any mechanical contact between the rotors 15 and the body 3 of the pump 1, which allows the total absence of oil. The sealing device 9 greatly limits the passage of lubricating fluids such as grease or oil from the bearing 5 to the dry pumping stages 7 while allowing the shaft 11 to rotate when the vacuum pump 1 is in operation.
Selon l'invention, le dispositif d'étanchéité 9 comporte un élément centrifugeur 17 monté solidairement en rotation sur l'arbre 11 et comportant au moins une conduite traversante 19 apte à séparer les fluides lubrifiants du fluide susceptible de circuler depuis le palier 5 vers l'étage de pompage sec 7.According to the invention, the sealing device 9 comprises a centrifugal element 17 integrally mounted in rotation on the shaft 11 and comprising at least one through conduit 19 capable of separating the lubricant fluids from the fluid likely to flow from the bearing 5 to the dry pumping stage 7.
Le fluide susceptible de circuler depuis le palier vers l'étage de pompage sec comprend un mélange de fluide lubrifiant et de gaz. Ainsi, en fonctionnement de la pompe à vide 1 , l'élément centrifugeur 17 va tourner à la même vitesse de rotation que l'arbre 11, par exemple à 6000 tours/minute pour une pompe à vide primaire de type Roots.The fluid capable of flowing from the bearing to the dry pumping stage comprises a mixture of lubricating fluid and gas. Thus, in operation of the vacuum pump 1, the centrifugal element 17 will rotate at the same rotational speed as the shaft 11, for example at 6000 rpm for a primary vacuum pump Roots type.
Par conséquent, la conduite traversante 19 portée par l'élément centrifugeur 17 va également tourner autour de l'axe de rotation 14 de l'arbre 11 de la pompe 1 et à la même vitesse de rotation. Le fluide lubrifiant sous forme de brouillard, liquide ou particules résiduelles ayant une masse ou une densité supérieure au gaz, circulant dans la conduite traversante 19, va être éloigné du centre 14 de l'élément centrifugeur 17.Therefore, the through pipe 19 carried by the centrifugal element 17 will also rotate about the axis of rotation 14 of the shaft 11 of the pump 1 and at the same speed of rotation. The lubricant fluid in the form of mist, liquid or residual particles having a mass or a density greater than the gas, flowing in the through pipe 19, will be removed from the center 14 of the centrifugal element 17.
En effet, la force centrifuge créée par la rotation rapide de l'élément centrifugeur 17 projette les fluides lubrifiants sur les faces latérales internes 21 de la conduite 19, séparant ainsi le fluide lubrifiant du fluide par centrifugation.Indeed, the centrifugal force created by the rapid rotation of the centrifugal element 17 projects the lubricant fluids on the inner side faces 21 of the pipe 19, thus separating the lubricating fluid from the fluid by centrifugation.
Plus particulièrement, le dispositif d'étanchéité sépare le brouillard et/ou la vapeur du lubrifiant, du fluide.More particularly, the sealing device separates the mist and / or the vapor from the lubricant, from the fluid.
Avantageusement, le diamètre de l'orifice 39 de la conduite traversante 19 est plus important du côté du palier 5 que du côté de l'étage de pompage sec 7. Par exemple, sur la figure 1, une partie de la conduite traversante 19 présente un rétrécissement 53 formé par un évidement de l'élément centrifugeur 17 en forme de tronc de cône dont l'axe de révolution est confondu avec l'axe de rotation 14 de l'élément centrifugeur 17 et dont le sommet communique avec un nombre prédéfini d'orifices 39 du côté de l'étage de pompage 7.Advantageously, the diameter of the orifice 39 of the through pipe 19 is greater on the bearing side 5 than on the side of the dry pumping stage 7. For example, in FIG. 1, part of the through pipe 19 presents a narrowing 53 formed by a recess of the centrifugal element 17 in the form of a truncated cone whose axis of revolution coincides with the axis of rotation 14 of the centrifugal element 17 and whose vertex communicates with a predefined number of orifices 39 on the side of the pumping stage 7.
La forme en tronc de cône va notamment permettre, par l'effet de la force centrifuge, de guider les vapeurs et brouillards de lubrifiants piégés le long des parois afin de les évacuer de la conduite 19.The frustoconical shape will in particular allow, by the effect of centrifugal force, to guide the vapors and mists of lubricants trapped along the walls in order to evacuate them from the pipe 19.
Le fluide lubrifié est alors ainsi dirigé vers la base de l'élément centrifugeur 17 permettant au dispositif d'étanchéité d'être auto-nettoyant.The lubricated fluid is then directed to the base of the centrifuge element 17 allowing the sealing device to be self-cleaning.
D'autres modes de réalisation de la conduite traversante 19 seront décrits plus loin. En outre, on prévoit plusieurs conduites traversantes 19, de manière à optimiser le débit du gaz.Other embodiments of the through conduit 19 will be described later. In addition, several through pipes 19 are provided, so as to optimize the gas flow.
Ainsi, la figure 2 représente un élément centrifugeur 17 possédant huit orifices 39 de conduites traversantes 19 ainsi qu'une ouverture 25 au centre de l'élément centrifugeur 17 pour le passage de l'arbre 11.Thus, FIG. 2 shows a centrifugal element 17 having eight orifices 39 of through pipes 19 and an opening 25 in the center of the centrifugal element 17 for the passage of the shaft 11.
Pour améliorer encore l'étanchéité du dispositif 9 aux fluides lubrifiants, on prévoit également que l'élément centrifugeur 17 comporte avantageusement un corps filtrant placé dans la conduite traversante 19, tel qu'un matériau fibreux (non représenté).To further improve the sealing of the device 9 lubricating fluids, it is also provided that the centrifuge element 17 advantageously comprises a filter body placed in the through conduit 19, such as a fibrous material (not shown).
Le matériau fibreux peut être par exemple, à base de laine d'acier ou de laine de verre. Ainsi, lorsqu'un fluide circule dans la conduite 19, les résidus de lubrifiants sont piégés dans les fibres du corps filtrant.The fibrous material may for example be based on steel wool or glass wool. Thus, when a fluid flows in the pipe 19, the lubricant residues are trapped in the fibers of the filter body.
Puis, par l'effet de la force centrifuge, les vapeurs et/ou brouillards d'huile piégés dans le corps filtrant vont également être projetés vers les parois de l'élément centrifugeur 17, puis guidés vers la base de celui-ci. Ainsi, et de même que la conduite traversante 19, le corps filtrant s'auto-nettoie.Then, by the effect of the centrifugal force, the vapors and / or oil mist trapped in the filter body will also be projected towards the walls of the centrifugal element 17, and then guided towards the base thereof. Thus, and like the through conduit 19, the filter body self-cleans.
En outre, on prévoit avantageusement que le dispositif d'étanchéité 9 comporte un déflecteur 27 monté sur l'arbre 11 entre le palier 5 et l'élément centrifugeur 17.In addition, it is advantageously provided that the sealing device 9 comprises a deflector 27 mounted on the shaft 11 between the bearing 5 and the centrifugal element 17.
Le déflecteur 27 permet de modifier l'écoulement du fluide provenant du palier 5 pour former un premier moyen de séparation grossière des lubrifiants sous forme de liquides, graisses et particules provenant du palier 5.The deflector 27 makes it possible to modify the flow of the fluid coming from the bearing 5 to form a first means of coarse separation of the lubricants in the form of liquids, greases and particles originating from the bearing 5.
On prévoit une rainure 29 correspondante dans le stator 3 située face à l'extrémité périphérique 31 du déflecteur 27.A corresponding groove 29 is provided in the stator 3 located opposite the peripheral end 31 of the deflector 27.
Ainsi, lorsque le fluide circule depuis le palier 5 vers l'étage de pompage 7, les grosses particules et les liquides sont déviés par le déflecteur 27 dans la rainure 29, formant le premier filtrage grossier du fluide.Thus, when the fluid flows from the bearing 5 to the pumping stage 7, the large particles and the liquids are deflected by the deflector 27 into the groove 29, forming the first coarse filtering of the fluid.
De préférence, un canal (non représenté) part de la rainure 29 et s'étend dans le stator 3 de la pompe 1.Preferably, a channel (not shown) starts from the groove 29 and extends into the stator 3 of the pump 1.
Ce canal peut communiquer avec le carter d'huile des paliers lubrifiés. Le lubrifiant circulant dans la rainure 29 est alors entrainé dans le canal, puis vers le carter d'huile. Avantageusement, la conduite traversante 19 est située plus près de l'arbre 11 que de la surface circonférentielle 33 de l'élément centrifugeur 17, tel qu'illustré par la figure 2.This channel can communicate with the oil pan of lubricated bearings. The lubricant flowing in the groove 29 is then driven into the channel and then to the oil sump. Advantageously, the through pipe 19 is situated closer to the shaft 11 than to the circumferential surface 33 of the centrifugal element 17, as illustrated by FIG.
Cette disposition au plus près de l'axe de rotation 14 de l'arbre 11, permet au dispositif 9 de bénéficier au mieux de l'effet centrifuge ainsi que d'un effet de laminage complémentaire. L'effet de laminage complémentaire est produit par une surpression localisée entre le déflecteur 27 et l'élément centrifugeur 17. Il est du au faible espace entre le déflecteur 27 et l'élément centrifugeur 17.This arrangement closer to the axis of rotation 14 of the shaft 11, allows the device 9 to best benefit from the centrifugal effect and a complementary rolling effect. The complementary rolling effect is produced by a localized overpressure between the deflector 27 and the centrifugal element 17. It is due to the small space between the deflector 27 and the centrifugal element 17.
L'effet de laminage permet également de rejeter les lubrifiants en périphérie du déflecteur 27. Selon un aspect très avantageux de l'invention, la conductance de la conduite traversante 19 est supérieure à la conductance du passage périphérique du fluide formé entre la surface circonférentielle 33 de l'élément centrifugeur 17 et la paroi interne 35 du stator 3.The rolling effect also makes it possible to reject the lubricants at the periphery of the deflector 27. According to a very advantageous aspect of the invention, the conductance of the through conduit 19 is greater than the conductance of the peripheral passage of the fluid formed between the circumferential surface 33 of the centrifuge element 17 and the inner wall 35 of the stator 3.
Avec cet agencement, l'écoulement du fluide est privilégié à travers la conduite traversante 19 de l'élément centrifugeur 17 plutôt qu'en périphérie de celui-ci, lorsque la pression du côté du palier 5 est plus élevée.With this arrangement, the flow of the fluid is preferred through the through conduit 19 of the centrifuge element 17 rather than the periphery thereof, when the pressure on the bearing side 5 is higher.
Ainsi, le fluide est bien filtré par l'élément centrifugeur 17 et le différentiel de pression de part et d'autre de celui-ci est limité, l'écoulement par le passage périphérique étant très réduit au vu de la conductance élevée.Thus, the fluid is well filtered by the centrifugal element 17 and the pressure differential on either side of it is limited, the flow through the peripheral passage being very small in view of the high conductance.
Pour le cas inverse, c'est-à-dire lorsque la pression est plus élevée du côté de l'étage de pompage, on prévoit que le dispositif d'étanchéité 9 comporte un clapet 37 anti-retour en vis-à-vis de l'orifice 39 de la conduite traversante 19, situé du côté de l'étage de pompage 7.In the opposite case, that is to say when the pressure is higher on the side of the pumping stage, it is expected that the sealing device 9 comprises a non-return valve 37 vis-a-vis the orifice 39 of the through pipe 19, situated on the side of the pumping stage 7.
La position du clapet 37 permet d'orienter le chemin privilégié du fluide en fonction du différentiel de pression.The position of the valve 37 makes it possible to orient the preferred path of the fluid as a function of the pressure differential.
Lorsqu'il est éloigné de l'orifice 39, le fluide s'écoule de façon privilégiée par la conduite traversante 19 étant donné qu'elle possède la conductance la plus grande.When moved away from the orifice 39, the fluid preferably flows through the through conduit 19 since it has the largest conductance.
Lorsqu'il est plaqué contre l'orifice 39, le fluide s'écoule de façon privilégiée par le passage périphérique de l'élément centrifugeur 17.When pressed against the orifice 39, the fluid preferably flows through the peripheral passage of the centrifugal element 17.
L'ouverture et la fermeture de la conduite 19 par le clapet 37 est naturellement commandé par la différence de pression de part et d'autre de celui-ci. Le clapet 37 est placé sur l'arbre 11 de manière à être en position éloignée de l'orifice 39 lorsque la pression du côté du palier 5 est supérieure à la pression de l'étage de pompage 7.The opening and closing of the pipe 19 by the valve 37 is naturally controlled by the pressure difference on either side thereof. The valve 37 is placed on the shaft 11 so as to be in a position remote from the orifice 39 when the pressure on the bearing side 5 is greater than the pressure of the pumping stage 7.
Par cet astucieux moyen, le dispositif d'étanchéité 9 est optimisé car les mouvements turbulents du gaz et des lubrifiants à l'intérieur de la conduite traversante 19 sont évités, l'écoulement à travers la conduite traversante 19 n'ayant lieu que dans un seul sens. Les pressions de part et d'autre du dispositif d'étanchéité 9 peuvent donc s'équilibrer de façon automatique par deux passages distincts selon que le fluide est chargé ou non de lubrifiants.By this clever means, the sealing device 9 is optimized because the turbulent movements of gas and lubricants inside the through pipe 19 are avoided, the flow through the through pipe 19 occurring only in a only sense. The pressures on either side of the sealing device 9 can therefore be automatically equilibrated by two separate passages depending on whether the fluid is loaded with lubricants or not.
On peut prévoir de réaliser le clapet anti-retour 37 par un simple disque monté en coulissement axial sur l'arbre 11, par exemple un disque métallique, la course du clapet 37 étant défini par l'élément centrifugeur 17 et une butée 41 fixée à l'arbre 11. Le rayon du clapet 37 est prévu suffisamment grand pour être apte à obstruer les orifices 39 des conduites traversantes 19 débouchant du côté de l'étage de pompage 7.Provision can be made to make the nonreturn valve 37 by a simple disc mounted in axial sliding on the shaft 11, for example a metal disc, the travel of the valve 37 being defined by the centrifugal element 17 and a stop 41 fixed to the tree 11. The radius of the valve 37 is provided sufficiently large to be able to obstruct the orifices 39 of the through pipes 19 opening on the side of the pumping stage 7.
Le clapet 37 est ainsi poussé par l'écoulement fluidique vers l'étage de pompage 7 et retenu par la butée 41 (voir figure 1) lorsque la pression du palier 5 est supérieure à la pression de l'étage de pompage 7, libérant ainsi le passage à travers la conduite traversante 19 de l'élément centrifugeur 17.The valve 37 is thus pushed by the fluid flow towards the pumping stage 7 and retained by the stop 41 (see FIG. 1) when the pressure of the bearing 5 is greater than the pressure of the pumping stage 7, thus releasing the passage through the through conduit 19 of the centrifuge element 17.
Inversement, le clapet 37 est attiré vers l'élément centrifugeur 17 par l'écoulement fluidique lorsque la pression du palier 5 est inférieure à la pression de l'étage de pompage 7, obstruant le passage du fluide dans la conduite traversante 19. De cette manière, on obtient un équilibrage des pressions de part et d'autre du dispositif d'étanchéité 9 et de plus, la circulation du gaz propre dans le passage périphérique permet d'entraîner des résidus de lubrifiants qui auraient pu y avoir été piégés.Conversely, the valve 37 is attracted to the centrifugal element 17 by the fluid flow when the pressure of the bearing 5 is lower than the pressure of the pumping stage 7, obstructing the passage of the fluid in the through pipe 19. Of this In this way, a balancing of the pressures on either side of the sealing device 9 is achieved and, moreover, the circulation of the clean gas in the peripheral passage makes it possible to entrain residues of lubricants that could have been trapped therein.
En effet, la faible conductance du passage périphérique des gaz accélère ceux-ci, entraînant les résidus vers la rainure 29 du stator 3. De préférence, le passage périphérique du fluide est formé par un joint labyrinthe 43.Indeed, the low conductance of the peripheral passage of the gases accelerates them, causing the residues to the groove 29 of the stator 3. Preferably, the peripheral passage of the fluid is formed by a labyrinth seal 43.
Le joint labyrinthe 43 comporte une succession de chicanes limitant la conductance du passage entre le stator 3 et l'élément centrifuge 17.The labyrinth seal 43 comprises a series of baffles limiting the conductance of the passage between the stator 3 and the centrifugal element 17.
Traditionnellement, les chicanes sont formées par des rainures et des gorges correspondantes portées respectivement par le stator et l'élément rotatif et centrées en vis-à-vis sans contact pour éviter le frottement important aux vitesses de rotation élevées de l'élément rotatif.Traditionally, the baffles are formed by corresponding grooves and grooves respectively carried by the stator and the rotary member and centered vis-à-vis non-contact to prevent significant friction at high rotational speeds of the rotary member.
Dans la présente invention, le passage périphérique est ainsi réalisé entre la surface circonférentielle 33 de l'élément centrifugeur 17 et le stator 3 de la pompe 1, ce qui permet d'éviter les frottements à la vitesse de rotation élevée de l'élément centrifugeur 17.In the present invention, the peripheral passage is thus formed between the circumferential surface 33 of the centrifugal element 17 and the stator 3 of the pump 1, which makes it possible to avoid friction at the high rotational speed of the centrifugal element. 17.
Toutefois, les joints labyrinthes classiques présentent le désavantage d'être difficile à assembler.However, conventional labyrinth seals have the disadvantage of being difficult to assemble.
En effet, pour l'assemblage de ces joints, il est nécessaire de prévoir un stator en deux parties que l'on assemble et centre autour du rotor portant les gorges correspondantes.Indeed, for the assembly of these joints, it is necessary to provide a stator in two parts that are assembled and centered around the rotor carrying the corresponding grooves.
Pour palier à cela, l'invention prévoit avantageusement et indépendamment de la conduite 19, un joint labyrinthe 43 caractérisé en ce qu'il comporte plusieurs bagues 45 montées dans le stator 3 et en ce que la surface circonférentielle 33 de l'élément centrifugeur 17 possède plusieurs gorges 47 correspondantes.To overcome this, the invention advantageously provides and independently of the pipe 19, a labyrinth seal 43 characterized in that it comprises a plurality of rings 45 mounted in the stator 3 and in that the circumferential surface 33 of the centrifuge element 17 has several corresponding grooves 47.
Les bagues 45 sont des éléments distincts du stator 3 et sont prévues ouvertes et élastiques afin de pouvoir être montées dans le stator 3.The rings 45 are distinct elements of the stator 3 and are open and resilient in order to be mounted in the stator 3.
Cet agencement facilite l'assemblage. En effet, le diamètre externe de chaque bague 45 au repos est supérieur au diamètre de la paroi interne 35 du stator 3 de sorte qu'après insertion des bagues 45 dans le stator 3, celles-ci sont plaquées contre la paroi interne 35 du stator 3 par la force élastique de la bague 45.This arrangement facilitates assembly. Indeed, the outer diameter of each ring 45 at rest is greater than the diameter of the inner wall 35 of the stator 3 so that after insertion of the rings 45 into the stator 3, they are pressed against the inner wall 35 of the stator 3 by the elastic force of the ring 45.
A l'assemblage et dans un premier temps, les bagues 45 ouvertes sont glissées dans les gorges 47 de l'élément centrifugeur 17.At assembly and initially, the open rings 45 are slid into the grooves 47 of the centrifugal element 17.
Dans un deuxième temps, un tube auxiliaire de montage est disposé autour de l'élément centrifugeur 17 portant les bagues 45, de sorte que les bagues 45 soient comprimées, les extrémités de chaque bague 45 se rejoignant.In a second step, an auxiliary mounting tube is disposed around the centrifugal element 17 carrying the rings 45, so that the rings 45 are compressed, the ends of each ring 45 joining.
Puis, le tube comportant les bagues 45 et l'élément centrifugeur 17, est glissé à l'intérieur du stator 3.Then, the tube comprising the rings 45 and the centrifugal element 17 is slid inside the stator 3.
Enfin, le tube est retiré laissant les bagues 45 libérées se décomprimer dans le stator 3.Finally, the tube is removed leaving the freed rings 45 to decompress in the stator 3.
L'élasticité des bagues 45 est choisie de sorte que celles-ci restent maintenues fixées solidement au stator 3.The elasticity of the rings 45 is chosen so that they remain firmly fixed to the stator 3.
On obtient ainsi un joint labyrinthe 43 entre le stator 3 et l'élément centrifugeur 17 dont les gorges 47 et les rainures 45 sont faciles à fabriquer, centrer et à assembler.A labyrinth seal 43 is thus obtained between the stator 3 and the centrifugal element 17 whose grooves 47 and grooves 45 are easy to fabricate, center and assemble.
Bien entendu, ce type de joint labyrinthe 43 s'applique aussi bien à l'élément centrifugeur 17 de la présente invention qu'à n'importe quel élément rotatif tournant dans un stator, tel qu'un rotor ou un arbre rotatif.Of course, this type of labyrinth seal 43 applies to both the centrifugal element 17 of the present invention and any rotary element rotating in a stator, such as a rotor or a rotating shaft.
En fonctionnement de la pompe à vide telle que précédemment décrite, lorsque la pression du palier 5 est supérieure à la pression de l'étage de pompage 7, le fluide emprunte le trajet schématisé par la flèche 49 sur la figure 1.In operation of the vacuum pump as previously described, when the pressure of the bearing 5 is greater than the pressure of the pumping stage 7, the fluid takes the path shown schematically by the arrow 49 in FIG.
Dans un premier temps, l'écoulement du fluide provenant du palier 5 est dévié par le déflecteur 27, séparant de manière grossière les particules et liquides lubrifiants.At first, the flow of fluid from the bearing 5 is deflected by the deflector 27, separating coarsely the particles and lubricating liquids.
Simultanément, le clapet 37 est poussé vers l'étage de pompage 7 libérant ainsi l'accès de la conduite traversante 19 de sorte qu'une majorité du fluide circule à travers l'élément centrifugeur 17.At the same time, the valve 37 is pushed towards the pumping stage 7 thus freeing access to the through conduit 19 so that a majority of the fluid flows through the centrifuge element 17.
Le gaz est ainsi séparé des fluides lubrifiants par centrifugation.The gas is thus separated from the lubricating fluids by centrifugation.
Ceux-ci sont ensuite expulsés de la conduite traversante 19 par l'effet de la force centrifuge.These are then expelled from the through pipe 19 by the effect of the centrifugal force.
Puis, si la pression du palier 5 devient inférieure à la pression de l'étage de pompage 7, le fluide emprunte le passage périphérique dont le trajet est schématisé par les flèches 51 de la figure 3.Then, if the pressure of the bearing 5 becomes lower than the pressure of the pumping stage 7, the fluid takes the peripheral passage whose path is shown schematically by the arrows 51 of Figure 3.
Le clapet 37 est attiré vers l'élément centrifugeur 17, obstruant le passage du fluide dans la conduite traversante 19, de sorte qu'une majorité du fluide circule à travers le passage périphérique, entraînant les résidus de lubrifiants. Comme évoqué plus haut, on peut envisager d'autres modes de réalisation de la conduite traversante 19.The valve 37 is attracted to the centrifuge element 17, obstructing the passage of fluid in the through conduit 19, so that a majority of the fluid flows through the peripheral passage, causing the lubricant residues. As mentioned above, it is possible to envisage other embodiments of the through-pipe 19.
Par exemple, le rétrécissement 53 de la conduite traversante 19 peut être formé par un étranglement de la conduite 19 (non représenté).For example, the constriction 53 of the through conduit 19 may be formed by a constriction of the conduit 19 (not shown).
Les figures 4 et 5 illustrent d'autres modes de réalisation avantageux de l'invention dans lesquels le diamètre de l'orifice 39 de la conduite traversante 19 est plus important du côté du palier 5 que du côté de l'étage de pompage sec 7.Figures 4 and 5 illustrate other advantageous embodiments of the invention in which the diameter of the orifice 39 of the through pipe 19 is greater on the bearing side 5 than on the side of the dry pumping stage 7 .
Sur la figure 4, la conduite traversante 19 présente une section se rétrécissant en formant une marche dont la portion de diamètre réduit débouche du côté de l'étage de pompage sec 7. Cette variante présente l'avantage d'être simple de réalisation.In Figure 4, the through pipe 19 has a narrowing section forming a step whose reduced diameter portion opens on the side of the dry pumping stage 7. This variant has the advantage of being simple.
En effet, une telle conduite 19 peut être obtenue par exemple par un perçage à l'aide d'un forêt étage.Indeed, such a pipe 19 can be obtained for example by drilling with a forest floor.
Alternativement et illustré par la figure 5, la conduite traversante 19 présente une forme en tronc de cône dont le sommet est situé du coté de l'étage de pompage sec 7. Le rétrécissement 53, partiel ou continu de la conduite traversante 19 permet de freiner les résidus de lubrifiants projetés sur les faces latérales internes 21 de la conduite 19.Alternatively and illustrated in FIG. 5, the through pipe 19 has a truncated cone shape whose apex is situated on the side of the dry pumping stage 7. The constriction 53, partial or continuous, of the through pipe 19 makes it possible to brake the lubricant residues projected on the internal lateral faces 21 of the pipe 19.
Ceux-ci vont alors longer la face interne 21 de la conduite 19 jusqu'à retourner vers le palier 5.These will then go along the inner face 21 of the pipe 19 until returning to the bearing 5.
Lorsque ces résidus parviennent au niveau du déflecteur 27, ils sont entraînés dans la rainure 29 du stator 3 et guidés vers le canal communiquant avec le carter d'huile.When these residues reach the deflector 27, they are driven into the groove 29 of the stator 3 and guided to the channel communicating with the oil sump.
Selon une autre variante, la conduite traversante 19 présente la forme d'un tube (figure 6). On comprend ainsi qu'une pompe à vide 1 comportant au moins un dispositif d'étanchéité 9 aux fluides lubrifiants comportant un élément centrifugeur 17 monté solidairement en rotation sur l'arbre 11 et comportant au moins une conduite traversante 19, permet d'assurer une étanchéité aux lubrifiants sans pièces en frottement et donc sans usure, nécessitant peu de maintenance. According to another variant, the through pipe 19 has the shape of a tube (Figure 6). It is thus clear that a vacuum pump 1 comprising at least one sealing device 9 for lubricating fluids comprising a centrifugal element 17 mounted to rotate integrally with the shaft 11 and comprising at least one through conduit 19, makes it possible to provide a Lubricant tightness without friction parts and therefore without wear, requiring little maintenance.

Claims

REVENDICATIONS
1. Pompe à vide de type sèche comportant au moins un arbre rotatif (11) supporté par au moins un palier lubrifié (5) et au moins un dispositif d'étanchéité (9) aux fluides lubrifiants susceptibles de provenir dudit palier (5) pour l'étanchéité au niveau du passage d'arbre, le dispositif d'étanchéité (9) étant monté entre le palier lubrifié (5) et un étage de pompage secDry-type vacuum pump comprising at least one rotating shaft (11) supported by at least one lubricated bearing (5) and at least one sealing device (9) for lubricating fluids which may originate from said bearing (5) for sealing at the shaft passage, the sealing device (9) being mounted between the lubricated bearing (5) and a dry pumping stage
(7), caractérisée en ce que ledit dispositif d'étanchéité (9) comporte un élément centrifugeur (17) monté solidairement en rotation sur ledit arbre (11) et comportant au moins une conduite traversante (19) apte à séparer les fluides lubrifiants du fluide susceptible de circuler depuis ledit palier (5) vers l'étage de pompage sec (7).(7), characterized in that said sealing device (9) comprises a centrifugal element (17) integrally rotatably mounted on said shaft (11) and comprising at least one through conduit (19) capable of separating the lubricating fluids from the fluid capable of flowing from said bearing (5) to the dry pumping stage (7).
2. Pompe à vide selon la revendication 1, caractérisée en ce que l'élément centrifugeur (17) comporte en outre un corps filtrant placé dans la conduite traversante (19).2. Vacuum pump according to claim 1, characterized in that the centrifugal element (17) further comprises a filter body placed in the through conduit (19).
3. Pompe à vide selon la revendication 2, caractérisée en ce que le corps filtrant est un matériau fibreux.3. Vacuum pump according to claim 2, characterized in that the filter body is a fibrous material.
4. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la conduite traversante (19) est située plus près de l'arbre rotatif (11) que de la surface circonférentielle (33) de l'élément centrifugeur (17).Vacuum pump according to one of the preceding claims, characterized in that the through-pipe (19) is situated closer to the rotary shaft (11) than to the circumferential surface (33) of the centrifugal element ( 17).
5. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce qu'une partie de la conduite traversante (19) présente un rétrécissement (53).5. Vacuum pump according to any one of the preceding claims, characterized in that a portion of the through conduit (19) has a constriction (53).
6. Pompe à vide selon la revendication 5, caractérisée en ce que le diamètre de l'orifice (39) de la conduite traversante (19) est plus important du côté du palier (5) que du côté de l'étage de pompage sec (7).6. Vacuum pump according to claim 5, characterized in that the diameter of the orifice (39) of the through pipe (19) is greater on the bearing side (5) than on the side of the dry pumping stage. (7).
7. Pompe à vide selon la revendication 6, caractérisée en ce que la conduite traversante (19) présente une forme en tronc de cône dont le sommet est situé du coté de l'étage de pompage sec (7).7. Vacuum pump according to claim 6, characterized in that the through conduit (19) has a frustoconical shape whose apex is located on the side of the dry pumping stage (7).
8. Pompe à vide selon la revendication 6, caractérisée en ce que la conduite traversante (19) est formée par un évidement de l'élément centrifugeur (17) en forme de tronc de cône dont l'axe de révolution est confondu avec l'axe de rotation (14) de l'élément centrifugeur (17) et dont le sommet communique avec un nombre prédéfini d'orifices (39) du côté de l'étage de pompage (7).8. Vacuum pump according to claim 6, characterized in that the through pipe (19) is formed by a recess of the centrifugal element (17) in the form of a truncated cone whose axis of revolution coincides with the axis of rotation (14) of the centrifuge element (17) and whose top communicates with a predefined number of orifices (39) on the side of the pumping stage (7).
9. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la conductance de la conduite traversante (19) est supérieure à la conductance d'un passage périphérique du fluide formé entre la surface circonférentielle (33) de l'élément centrifugeur (17) et la paroi interne (35) du stator (3).9. Vacuum pump according to any one of the preceding claims, characterized in that the conductance of the through pipe (19) is greater than the conductance of a peripheral passage of the fluid formed between the circumferential surface (33) of the centrifugal element (17) and the inner wall (35) of the stator (3).
10. Pompe à vide selon la revendication 9, caractérisée en ce que le dispositif d'étanchéité (9) comporte un clapet anti-retour (37) placé en vis-à-vis de l'orifice (39) de la conduite traversante (19) situé du côté de l'étage de pompage (7).Vacuum pump according to Claim 9, characterized in that the sealing device (9) comprises a non-return valve (37) placed opposite the orifice (39) of the through-pipe ( 19) located on the side of the pumping stage (7).
11. Pompe à vide selon la revendication 10, caractérisée en ce que le clapet anti-retour (37) est formé par un disque monté en coulissement sur l'arbre rotatif (11).Vacuum pump according to Claim 10, characterized in that the non-return valve (37) is formed by a disc slidably mounted on the rotary shaft (11).
12. Pompe à vide selon l'une quelconque des revendications 9 à 11, caractérisée en ce que le passage périphérique comporte un joint labyrinthe (43).12. Vacuum pump according to any one of claims 9 to 11, characterized in that the peripheral passage comprises a labyrinth seal (43).
13. Pompe à vide selon la revendication 12, caractérisée en ce que le joint labyrinthe (43) comporte plusieurs bagues (45) montées dans le stator (3) et en ce que la surface circonférentielle (33) de l'élément centrifugeur (17) possède plusieurs gorges correspondantes (47).13. Vacuum pump according to claim 12, characterized in that the labyrinth seal (43) comprises a plurality of rings (45) mounted in the stator (3) and in that the circumferential surface (33) of the centrifugal element (17) ) has a plurality of corresponding grooves (47).
14. Pompe à vide selon la revendication 13, caractérisée en ce que chaque bague (45) est ouverte et élastique pour pouvoir être montée dans le stator (3).14. Vacuum pump according to claim 13, characterized in that each ring (45) is open and resilient to be mounted in the stator (3).
15. Pompe à vide selon la revendication 14, caractérisée en ce que le diamètre externe de chaque bague (45) au repos est supérieur au diamètre de la paroi interne (35) du stator (3) de sorte qu'après insertion des bagues (45) dans le stator (3), celles-ci sont plaquées contre la paroi interne (35) du stator (3) par la force élastique de la bague (45).Vacuum pump according to claim 14, characterized in that the outer diameter of each ring (45) at rest is greater than the diameter of the inner wall (35) of the stator (3) so that after insertion of the rings ( 45) in the stator (3), they are pressed against the inner wall (35) of the stator (3) by the elastic force of the ring (45).
16. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que le dispositif d'étanchéité (9) comporte en outre un déflecteur (27) monté sur l'arbre rotatif (11) entre ledit palier (5) et l'élément centrifugeur (17).Vacuum pump according to one of the preceding claims, characterized in that the sealing device (9) further comprises a deflector (27) mounted on the rotary shaft (11) between said bearing (5) and the centrifugal element (17).
17. Élément centrifugeur de dispositif d'étanchéité aux fluides lubrifiés destiné à être monté solidairement en rotation sur un arbre rotatif (11) de pompe à vide de type sèche (1), entre un palier lubrifié (5) et un étage de pompage sec (7), caractérisé en ce qu'il comporte au moins une conduite traversante (19) à travers laquelle un fluide est apte à circuler depuis ledit palier (5) vers l'étage de pompage sec (7) pour séparer les fluides lubrifiants du fluide. 17. Lubricant fluid sealing device centrifugal element to be integrally rotatably mounted on a dry-type vacuum pump rotary shaft (1), between a lubricated bearing (5) and a dry pumping stage (7), characterized in that it comprises at least one through conduit (19) through which a fluid is able to flow from said bearing (5) to the stage dry pump (7) for separating the lubricating fluids from the fluid.
EP08761080.4A 2007-08-23 2008-06-16 Dry-type vacuum pump comprising a device for sealing against lubricating fluids, and centrifuging element equipping such a device Active EP2183508B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0757146A FR2920207B1 (en) 2007-08-23 2007-08-23 DRY TYPE VACUUM PUMP COMPRISING A LUBRICATING FLUID SEALING DEVICE AND CENTRIFUGER ELEMENTS PROVIDING SUCH A DEVICE
PCT/EP2008/057574 WO2009024370A1 (en) 2007-08-23 2008-06-16 Dry-type vacuum pump comprising a device for sealing against lubricating fluids, and centrifuging element equipping such a device

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EP2183508A1 true EP2183508A1 (en) 2010-05-12
EP2183508B1 EP2183508B1 (en) 2017-08-02

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US (1) US8465269B2 (en)
EP (1) EP2183508B1 (en)
JP (1) JP5037688B2 (en)
KR (1) KR101227220B1 (en)
CN (1) CN101784824B (en)
FR (1) FR2920207B1 (en)
WO (1) WO2009024370A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI510715B (en) * 2009-09-25 2015-12-01 Ulvac Inc Vacuum dry pump
FR2962173B1 (en) * 2010-06-30 2012-08-03 Alcatel Lucent DRY TYPE VACUUM PUMP
JP5631155B2 (en) 2010-10-27 2014-11-26 三菱重工業株式会社 Shaft seal mechanism and rotary machine equipped with the same
WO2014041680A1 (en) * 2012-09-14 2014-03-20 株式会社前川製作所 Oil-cooled screw compressor system and oil-cooled screw compressor
CN105650282B (en) * 2014-11-12 2017-09-15 中国科学院沈阳科学仪器股份有限公司 One kind centrifugation non-contacting sealing structure
CN105736704A (en) * 2014-12-11 2016-07-06 舍弗勒技术有限两合公司 Lip-shaped oil seal and bearing
CN105065276A (en) * 2015-07-22 2015-11-18 宋东方 Combined type sealing device of dry screw vacuum pump
DE202016106107U1 (en) 2016-10-31 2018-02-01 Hugo Vogelsang Maschinenbau Gmbh Rotary lobe pump with sealing chamber seal
EP3536962B1 (en) * 2018-03-07 2021-06-02 Entecnia Consulting, S.L.U. Rotary-vane vacuum pump and outlet assembly thereof
FR3078748B1 (en) * 2018-03-07 2020-03-27 Pfeiffer Vacuum DRY TYPE VACUUM PUMP
CN113175480B (en) * 2021-05-18 2023-01-06 杰锋汽车动力系统股份有限公司 Hydrogen circulating pump bearing structure

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3601307A (en) * 1970-03-19 1971-08-24 Pennwalt Corp Centrifuge with spindle-sealing means
NO138608C (en) * 1973-07-05 1978-10-04 Thune Eureka As SUBMISSIBLE BAG PUMP.
FR2320458A1 (en) * 1975-08-08 1977-03-04 Europ Turb Vapeur High temp. shaft seal cooling system - has air circulated through annular spaces formed by shaft and two sleeves, and around outside of seal
DE2700226C2 (en) * 1977-01-05 1985-04-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Rotary piston blower or vacuum pump
US4386786A (en) * 1982-02-08 1983-06-07 Merck & Co., Inc. Adjustable pump seal with tapered conical members
DE3231171C1 (en) * 1982-08-21 1983-05-19 M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 4200 Oberhausen Sealing liquid seal
JPS61291795A (en) * 1985-06-19 1986-12-22 Hitachi Ltd Shaft sealing device for rough suction vacuum pump
JPH03185285A (en) * 1989-12-15 1991-08-13 Mitsubishi Oil Co Ltd Rotary liquid transfer pump equipped with function of removing gas
DE4211809A1 (en) * 1992-04-08 1993-10-14 Klein Schanzlin & Becker Ag Floating ring seal
ES2109592T3 (en) * 1993-07-14 1998-01-16 Atlas Copco Airpower Nv TRANSMISSION WITH ROTATING BEARING AND WATERPROOF SEAL.
US6325382B1 (en) * 1999-05-21 2001-12-04 Nippon Pillar Packing Co., Ltd. Non-contact type mechanical seal
DE10011063A1 (en) * 2000-03-07 2001-09-27 Daimler Chrysler Ag Labyrinth seal for shaft of electric motor is made up of two sections, outer section having annular components which form conical seal gaps with surface of other component
DE10113593A1 (en) * 2001-03-20 2002-09-26 Sms Demag Ag Seal for bearing for roller comprises bush fitted on roller shaft which cooperates with flexible sealing rings to form sealing labyrinth with C-profile ring attached to roller face
JP4617615B2 (en) 2001-07-05 2011-01-26 株式会社豊田自動織機 Oil leakage prevention structure in vacuum pump
CN2665413Y (en) * 2003-11-29 2004-12-22 潍柴动力股份有限公司 Sealing arrangement for hydraulic oil pump drive shaft
DE202004019718U1 (en) * 2004-12-21 2005-03-03 Burgmann Industries Gmbh & Co. Kg Assembly of shaft and rotating mechanical seal, especially for refrigerant compressor, has passage for feed of flow medium provided in shaft and opens out into cavity defined by drive collar housing
DE102005015212A1 (en) * 2005-04-02 2006-10-05 Leybold Vacuum Gmbh Shaft sealing for e.g. rotary screw pump, has seal gap connected with locking gas chamber, and discharge opening connected with gas chamber and suction chamber, where seal gap is arranged between inner and outer sealing rings
DE602006013011D1 (en) * 2005-09-21 2010-04-29 High Technology Invest Bv BEARING SEALING ASSEMBLY WITH LABYRINTH SEALING AND SCREW SEALING COMBINATION
DE102007060890A1 (en) * 2007-12-14 2009-06-18 Rolls-Royce Deutschland Ltd & Co Kg Sealing at least one shaft with at least one hydraulic seal
DE102010064422B3 (en) * 2009-03-03 2012-11-22 Sew-Eurodrive Gmbh & Co. Kg Arrangement for non-contact sealing of a rotatably mounted shaft to a housing and gearbox

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009024370A1 *

Also Published As

Publication number Publication date
CN101784824A (en) 2010-07-21
FR2920207B1 (en) 2009-10-09
CN101784824B (en) 2013-07-03
US20100189583A1 (en) 2010-07-29
JP2010537109A (en) 2010-12-02
FR2920207A1 (en) 2009-02-27
EP2183508B1 (en) 2017-08-02
WO2009024370A1 (en) 2009-02-26
KR101227220B1 (en) 2013-01-28
US8465269B2 (en) 2013-06-18
KR20100036374A (en) 2010-04-07
JP5037688B2 (en) 2012-10-03

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