EP2130000A1 - Rotation angle sensor or length sensor - Google Patents

Rotation angle sensor or length sensor

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Publication number
EP2130000A1
EP2130000A1 EP08735569A EP08735569A EP2130000A1 EP 2130000 A1 EP2130000 A1 EP 2130000A1 EP 08735569 A EP08735569 A EP 08735569A EP 08735569 A EP08735569 A EP 08735569A EP 2130000 A1 EP2130000 A1 EP 2130000A1
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EP
European Patent Office
Prior art keywords
sensor according
angle
length
actuating element
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08735569A
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German (de)
French (fr)
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EP2130000B1 (en
Inventor
Michael Schreiber
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ZF Friedrichshafen AG
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ZF Friedrichshafen AG
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core

Definitions

  • the invention relates to a rotation angle sensor with two or more oscillators according to claim 1 and to a length sensor with two or more oscillators according to claim 21.
  • a proximity sensor which operates with so-called strip lines.
  • a stripline is a particular class of electrical waveguides consisting of one or more thin conductive strips deposited on a dielectric.
  • Strip conductor structures can, for. B. consist of arranged in a plane strip of conductors. They are often isolated in or over a metallic surface. Their field of application is high-frequency technology and there the field of microwaves. They provide defined impedances in circuits for propagation, coupling and filtering of high signal frequencies.
  • Stripline is used, sometimes the English term Microstrip, which, however, designates a special design.
  • Strip conductors only strip conductors on printed circuits (printed circuit boards), which are dimensioned as waveguides and are thus operated, are referred to as strip conductors.
  • the electric and magnetic fields are almost exclusively perpendicular to the propagation direction, as in coaxial lines or
  • strip lines are used only for short distances within assemblies.
  • Length sensor with two or more oscillators Accordingly, too only the distance of this actuator from the oscillator in the prior art evaluated, not a relative movement over an arc or over a line of several oscillators.
  • the known single stripline is either linear (Fig. 5/6) or spiral shaped (Fig.7 / 8).
  • the object of the invention is to make available the technique of the known proximity switch for angle and length sensors.
  • the solution including the mentioned technical prerequisites (plurality of oscillators), is to form the strip lines of the sensor elements in such a way that one actuating element covers more than one oscillator or that several actuating elements cover more than one oscillator.
  • This solution is defined in the main claim 1 for a rotation angle sensor and in the secondary claim 21 for a length sensor. Further technical features and embodiments emerge from the respective subclaims.
  • the ensemble of strip lines can be nested in one another arcuately; If the associated actuator has a slender rod shape, it covers two to three sensor elements in each position.
  • the structure of the strip lines may also be undiluted while the actuator is crescent-shaped bent or obliquely. Even then, two or three sensor elements are covered in each measuring position. A comparable effect is achieved when two mechanically coupled actuators cover more than one oscillator.
  • Figure 1 shows an embodiment of a rotation angle sensor with four arcuately nested strip conductor structures and with two straight, approximately radially lying actuators
  • Figure 2 is a circuit diagram of a known stripline (microstrip), which has three terminals and is tunable by means of a capacitor in its frequency range;
  • Figure 3 shows a linear, overlapping arrangement of strip lines, overlapping with respect to a straight actuator
  • Fig. 5 is a linear (linear) arrangement of strip lines with two coupled actuators according to the invention.
  • the contactless determination of a precise angle of rotation (or in other arrangements, a torque) with circularly arranged stripline oscillators is, for example, from the U-shaped arranged stripline oscillator according to Figure 2 or from the line structure or from the spiral structure according to the prior art DE 690 13 170 T2 assumed.
  • the stripline is usually made by machining the top metallization (etching or milling) of the carrier.
  • etching or milling In order to be able to detect a rotation angle over 360 degrees with the aid of the known oscillator geometries, one must arrange several of these microstrips in a circle.
  • the disadvantage is that the desired rotation angle measurement can not be carried out without interruption with consistently high accuracy.
  • the known strip lines are distorted in the form of a circle segment and in some Meaning - namely based on the actuator - arranged overlapping.
  • Figure 1 can be seen four individual strip lines based on the black borders; however, other amounts of stripline may be used.
  • the strip lines can be galvanically isolated from each other; but they can also consist of a copper surface (high-frequency principle). In both variants, the function would remain the same; only the frequencies would change.
  • FIG. 1 An actuation takes place in FIG. 1, for example, by a metal rod, which is guided via the oscillators.
  • Each strip line S1 to S4 denotes the corresponding connection point for the oscillator circuit.
  • the connection points S1 to S4 can also be applied to save space on the back of the board.
  • the output points of the oscillator signal are denoted by A1 to A4.
  • the strip lines can also be twisted in the opposite direction or arranged mirror-inverted.
  • the connection points S1 to S4 for the oscillator circuits and the output points A1 to A4 of the oscillator signals are then likewise to be adapted accordingly.
  • the strip lines are shaped in such a way that the one actuating element (or else several actuating elements) always covers (or covers) more than one oscillator. Thanks to this overlap, a complete registration of the position is possible. With only two coils theoretically already a complete revolution can be detected completely. If a torque detection takes place in addition to the rotation angle detection, the number of oscillators can be increased accordingly.
  • damping elements B1 and B2 of the strip lines eg metal plates, ferrites, etc.
  • a metal bar is preferably used.
  • the invention favors the equalization of the temperature compensation of temporal temperature differences, ie a fluctuation compensation, which takes place in the digital evaluation.
  • the sensor arrangement according to FIG. 1 therefore contributes to a temperature-stable system.
  • Another advantage is that the electromagnetic compatibility (EMC) is much less critical than in known rotation angle sensors, since the shielding is facilitated by the high frequencies and disturbances are averaged out by an evaluation step of the integration (because of the frequency measurement method). In contrast to known rotation angle sensors, active components are saved.
  • FIG. 3 shows a linear arrangement of strip lines which can be thought of as a rectification of the arcuate arrangement shown in FIG. Accordingly, it is a length sensor that detects the position of the rectilinear actuator.
  • the actuating element covers more than one oscillating stripline because of the "overlapping" inclined position of the strip lines.
  • FIG. 4 and FIG. 5 show arrangements (again arcuate for angle measurement and straightforward for length measurement), which differ from the corresponding structures according to FIG. 1 and FIG. 3 by another realization of the overlap.
  • the stripline oscillators are not crescent-shaped and obliquely nested relative to each other with respect to a radial or transverse actuator.
  • the principle according to the invention is realized, according to which more than one stripline oscillator is covered in each point of the measuring range.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

Disclosed is a rotation angle sensor or length sensor comprising two or more oscillators as well as striplines as sensor elements on a dielectric support. The oscillators are placed in a row in the shape of an arch for measuring angles or in a rectilinear manner for measuring positions. One or more actuators, e.g. eddy current actuators, are guided along the arch or the line in a relative movement. The striplines are formed such that the one or more actuators (B1, B2) cover more than one oscillator.

Description

Cherry GmbH 28. März 2008 Cherry GmbH March 28, 2008
C83050PCT F/LE/Sh/sdC83050PCT F / LE / Sh / sd
Drehwinkelsensor oder LängensensorAngle of rotation sensor or length sensor
Die Erfindung bezieht sich auf einen Drehwinkelsensor mit zwei oder mehr Oszillatoren gemäß Patentanspruch 1 sowie auf einen Längensensor mit zwei oder mehr Oszillatoren gemäß Anspruch 21.The invention relates to a rotation angle sensor with two or more oscillators according to claim 1 and to a length sensor with two or more oscillators according to claim 21.
Aus dem Stand der Technik DE 690 13 170 T2 ist ein Näherungssensor bekannt, der mit sogenannten Streifenleitungen arbeitet. Als Streifenleitung wird eine bestimmte Klasse von elektrischen Wellenleitern bezeichnet, die aus einem oder mehreren dünnen leitfähigen Streifen bestehen, die auf einem Dielektrikum aufgebracht sind. Streifenleiterstrukturen können z. B. aus in einer Ebene angeordneten Leitungsstreifen bestehen. Sie sind oft isoliert in oder über einer metallischen Fläche angeordnet. Ihr Einsatzgebiet ist die Hochfrequenztechnik und dort der Bereich der Mikrowellen. Sie stellen definierte Impedanzen in Schaltungen zur Fortleitung, Kopplung und Filterung hoher Signalfrequenzen bereit.From the prior art DE 690 13 170 T2, a proximity sensor is known which operates with so-called strip lines. A stripline is a particular class of electrical waveguides consisting of one or more thin conductive strips deposited on a dielectric. Strip conductor structures can, for. B. consist of arranged in a plane strip of conductors. They are often isolated in or over a metallic surface. Their field of application is high-frequency technology and there the field of microwaves. They provide defined impedances in circuits for propagation, coupling and filtering of high signal frequencies.
Häufig wird hierfür der englische Ausdruck Stripline verwendet, manchmal auch der englische Ausdruck Microstrip, der jedoch eine besondere Bauform bezeichnet. Als Streifenleitungen werden jedenfalls nur solche Leiterbahnen auf gedruckten Schaltungen (Leiterplatten) bezeichnet, die als Wellenleiter dimensioniert sind und so betrieben werden. Die elektrischen und magnetischen Felder verlaufen fast ausschließlich senkrecht zur Ausbreitungsrichtung, wie dies auch in Koaxialleitungen oderFrequently, the English term Stripline is used, sometimes the English term Microstrip, which, however, designates a special design. In any case, only strip conductors on printed circuits (printed circuit boards), which are dimensioned as waveguides and are thus operated, are referred to as strip conductors. The electric and magnetic fields are almost exclusively perpendicular to the propagation direction, as in coaxial lines or
Zweidrahtleitungen der Fall ist. Streifenleitungen werden demgegenüber jedoch nur für kurze Entfernungen innerhalb von Baugruppen eingesetzt.Two-wire lines is the case. In contrast, strip lines are used only for short distances within assemblies.
Von dieser Technik macht der Näherungssensor gemäß der Druckschrift DE 690 13 170 T2 Gebrauch. Offenbart ist ein Näherungssensor mit genau einemFrom this technique makes the proximity sensor according to the publication DE 690 13 170 T2 use. Disclosed is a proximity sensor with exactly one
Oszillator und genau einem Betätigungselement, nicht ein Drehwinkel- oderOscillator and exactly one actuator, not a rotation angle or
Längensensor mit zwei oder mehr Oszillatoren. Dementsprechend wird auch nur der Abstand dieses Betätigungselements von dem Oszillator im Stand der Technik ausgewertet, nicht etwa eine Relativbewegung über einen Bogen oder über eine Linie von mehreren Oszillatoren. Die bekannte einzelne Streifenleitung ist entweder linienartig (Fig. 5/6) oder spiralartig geformt (Fig.7/8). Die Aufgabe der Erfindung besteht darin, die Technik des bekannten Näherungsschalters für Drehwinkel- und Längensensoren nutzbar zu machen.Length sensor with two or more oscillators. Accordingly, too only the distance of this actuator from the oscillator in the prior art evaluated, not a relative movement over an arc or over a line of several oscillators. The known single stripline is either linear (Fig. 5/6) or spiral shaped (Fig.7 / 8). The object of the invention is to make available the technique of the known proximity switch for angle and length sensors.
Die Lösung besteht unter Einschluss der genannten technischen Voraussetzungen (Mehrzahl von Oszillatoren) darin, die Streifenleitungen der Sensorelemente derart zu formen, dass ein Betätigungselement mehr als einen Oszillator überdeckt bzw. dass mehrere Betätigungselemente mehr als einen Oszillator überdecken. Diese Lösung ist im Hauptanspruch 1 für einen Drehwinkelsensor und im Nebenanspruch 21 für einen Längensensor definiert. Weitere technische Merkmale und Ausgestaltungen ergeben sich aus den jeweiligen Unteransprüchen.The solution, including the mentioned technical prerequisites (plurality of oscillators), is to form the strip lines of the sensor elements in such a way that one actuating element covers more than one oscillator or that several actuating elements cover more than one oscillator. This solution is defined in the main claim 1 for a rotation angle sensor and in the secondary claim 21 for a length sensor. Further technical features and embodiments emerge from the respective subclaims.
Insbesondere kann das Ensemble von Streifenleitungen bogenförmig ineinander geschachtelt sein; wenn das dazugehörige Betätigungselement eine schlanke Stangenform aufweist, so überdeckt es in jeder Position zwei bis drei Sensorelemente. Analog dazu kann die Struktur der Streifenleitungen auch unverdreht sein, während das Betätigungselement sichelförmig verbogen ist oder schräg liegt. Auch dann werden in jeder Messposition zwei oder drei Sensorelemente überdeckt. Ein vergleichbarer Effekt wird erreicht, wenn zwei mechanisch gekoppelte Betätigungselemente mehr als einen Oszillator überdecken.In particular, the ensemble of strip lines can be nested in one another arcuately; If the associated actuator has a slender rod shape, it covers two to three sensor elements in each position. Similarly, the structure of the strip lines may also be undiluted while the actuator is crescent-shaped bent or obliquely. Even then, two or three sensor elements are covered in each measuring position. A comparable effect is achieved when two mechanically coupled actuators cover more than one oscillator.
Weitere Merkmale und Vorteile der Erfindung ergeben sich aus der anschließenden Figurenbeschreibung. Dabei zeigtFurther features and advantages of the invention will become apparent from the following description of the figures. It shows
Figur 1 ein Ausführungsbeispiel eines Drehwinkelsensors mit vier bogenförmig ineinander geschachtelten Streifenleiterstrukturen und mit zwei geraden, in etwa radial liegenden Betätigungselementen; Figur 2 ein Schaltbild einer bekannten Streifenleitung (Microstrip), die drei Anschlüsse aufweist und mit Hilfe eines Kondensators in ihrem Frequenzbereich abstimmbar ist;Figure 1 shows an embodiment of a rotation angle sensor with four arcuately nested strip conductor structures and with two straight, approximately radially lying actuators; Figure 2 is a circuit diagram of a known stripline (microstrip), which has three terminals and is tunable by means of a capacitor in its frequency range;
Figur 3 eine lineare, überlappende Anordnung von Streifenleitungen, überlappend bezogen auf ein gerades Betätigungselement;Figure 3 shows a linear, overlapping arrangement of strip lines, overlapping with respect to a straight actuator;
Fig.4 eine kreisbogenförmige Anordnung von Streifenleitungen mit zwei gekoppelten Betätigungselementen nach der Erfindung; und4 shows a circular arc-shaped arrangement of strip lines with two coupled actuators according to the invention; and
Fig. 5 eine geradlinige (lineare) Anordnung von Streifenleitungen mit zwei gekoppelten Betätigungselementen nach der Erfindung.Fig. 5 is a linear (linear) arrangement of strip lines with two coupled actuators according to the invention.
In dem Ausführungsbeispiel nach Figur 1 erfolgt die berührungslose Ermittlung eines exakten Drehwinkels (oder in anderen Anordnungen auch eines Drehmoments) mit kreisförmig angeordneten Stripline-Oszillatoren. Hierbei ist bspw. von dem U-förmig angeordneten Stripline-Oszillator gemäß Figur 2 oder von der Linienstruktur oder von der Spiralstruktur gemäß dem Stand der Technik DE 690 13 170 T2 auszugehen. Die Streifenleitung wird gewöhnlich durch Bearbeitung der oberen Metallisierung (Ätzen oder Fräsen) des Trägers angefertigt. Um mit Hilfe der bekannten Oszillatorgeometrien einen Drehwinkel über 360 Grad erfassen zu können, muss man mehrere dieser Microstrips kreisförmig anordnen. Wenn man jedoch keine besonderen Vorkehrungen trifft, so ergibt sich als Nachteil, dass die gewünschte Drehwinkelmessung nicht unterbrechungsfrei mit gleichbleibend hoher Genauigkeit erfolgen kann. Bei der in Figur 1 gezeigten Lösung ist es hingegen nicht nur möglich, den Drehwinkel dynamisch mit hoher Winkelauflösung zu messen, sondern es ist auch möglich, mit relativ geringem weiterem Aufwand zusätzlich das Drehmoment zu erfassen. Die berührungslose Ermittlung des Drehwinkels erfolgt dank der Oszillatoren, die mit hohen Frequenzen schwingen (GHz-Bereich), mit einer Winkelauflösung von bspw. 0,01 Grad über einen Radius von wenigen Zentimetern.In the embodiment of Figure 1, the contactless determination of a precise angle of rotation (or in other arrangements, a torque) with circularly arranged stripline oscillators. This is, for example, from the U-shaped arranged stripline oscillator according to Figure 2 or from the line structure or from the spiral structure according to the prior art DE 690 13 170 T2 assumed. The stripline is usually made by machining the top metallization (etching or milling) of the carrier. In order to be able to detect a rotation angle over 360 degrees with the aid of the known oscillator geometries, one must arrange several of these microstrips in a circle. However, if no special precautions are taken, the disadvantage is that the desired rotation angle measurement can not be carried out without interruption with consistently high accuracy. In the solution shown in Figure 1, however, it is not only possible to measure the angle of rotation dynamically with high angular resolution, but it is also possible to additionally detect the torque with relatively little further effort. The contactless determination of the angle of rotation takes place thanks to the oscillators, which oscillate at high frequencies (GHz range), with an angular resolution of, for example, 0.01 degrees over a radius of a few centimeters.
Ausgehend von dem angeführten Stand der Technik werden die bekannten Streifenleitungen in Form eines Kreissegmentes verzerrt und in gewissem Sinne - nämlich bezogen auf das Betätigungselement - überlappend angeordnet. In Figur 1 kann man vier einzelne Streifenleitungen anhand der schwarzen Umrandungen erkennen; es können jedoch auch andere Mengen von Streifenleitungen verwendet werden. Die Streifenleitungen können galvanisch voneinander getrennt sein; sie können aber auch aus einer Kupferfläche bestehen (Hochfrequenzprinzip). Bei beiden Varianten würde die Funktion die gleiche bleiben; lediglich die Frequenzen würden sich ändern.Based on the cited prior art, the known strip lines are distorted in the form of a circle segment and in some Meaning - namely based on the actuator - arranged overlapping. In Figure 1 can be seen four individual strip lines based on the black borders; however, other amounts of stripline may be used. The strip lines can be galvanically isolated from each other; but they can also consist of a copper surface (high-frequency principle). In both variants, the function would remain the same; only the frequencies would change.
Eine Betätigung erfolgt in Figur 1 bspw. durch eine Metallstange, welche über die Oszillatoren geführt wird. An jeder Streifenleitung bezeichnet S1 bis S4 den entsprechenden Anschlusspunkt für die Oszillatorschaltung. Die Anschlusspunkte S1 bis S4 können auch platzsparend auf der Rückseite der Platine aufgebracht werden. Des Weiteren werden die Auskopplungspunkte des Oszillatorsignals mit A1 bis A4 bezeichnet. Entsprechend der überlappenden Verdrehung, die der Figur 1 zu entnehmen ist, können die Streifenleitungen auch in entgegengesetzter Richtung verdreht sein bzw. spiegelverkehrt angeordnet sein. Es sind dann ebenfalls die Anschlusspunkte S1 bis S4 für die Oszillatorschaltungen und die Auskopplungspunkte A1 bis A4 der Oszillatorsignale entsprechend anzupassen.An actuation takes place in FIG. 1, for example, by a metal rod, which is guided via the oscillators. At each strip line S1 to S4 denotes the corresponding connection point for the oscillator circuit. The connection points S1 to S4 can also be applied to save space on the back of the board. Furthermore, the output points of the oscillator signal are denoted by A1 to A4. According to the overlapping rotation, which can be seen in FIG. 1, the strip lines can also be twisted in the opposite direction or arranged mirror-inverted. The connection points S1 to S4 for the oscillator circuits and the output points A1 to A4 of the oscillator signals are then likewise to be adapted accordingly.
Anhand der Figur 1 ist zu erkennen, wie die oben beschriebene Überlappung zu verstehen ist. Die Streifenleitungen sind derart geformt, dass das eine Betätigungselement (oder auch mehrere Betätigungselemente) stets mehr als einen Oszillator überdeckt (oder überdecken). Dank dieser Überlappung ist eine lückenlose Erfassung der Position möglich. Mit nur zwei Spulen kann theoretisch bereits eine ganze Umdrehung lückenlos erfasst werden. Sollte zusätzlich zur Drehwinkelerfassung eine Drehmomentenerfassung stattfinden, kann die Zahl der Oszillatoren dementsprechend erhöht werden.It can be seen with reference to FIG. 1 how the overlap described above is to be understood. The strip lines are shaped in such a way that the one actuating element (or else several actuating elements) always covers (or covers) more than one oscillator. Thanks to this overlap, a complete registration of the position is possible. With only two coils theoretically already a complete revolution can be detected completely. If a torque detection takes place in addition to the rotation angle detection, the number of oscillators can be increased accordingly.
Als Bedämpfungselemente B1 und B2 der Streifenleitungen können verschiedene Materialien und Geometrien dienen (z. B. Metallplättchen, Ferrite etc.); jedoch wird bevorzugt eine Metallstange verwendet.Various materials and geometries can serve as damping elements B1 and B2 of the strip lines (eg metal plates, ferrites, etc.); however, a metal bar is preferably used.
Durch die hohen Frequenzen der Oszillatoren wird trotz kurzer Messzeit eine sehr hohe Dynamik erreicht. Um die Auswertung der Signale zu erleichtern, ist eine Frequenzverschiebung (z. B. durch einen Multiplizierer) in ein niedrigeres Frequenzband empfehlenswert. Anschließend kann die Auswertung der berührungslos gemessenen Signale z. B. mit Hilfe digitaler Technik erfolgen.Due to the high frequencies of the oscillators, a very high dynamic is achieved despite a short measuring time. To facilitate the evaluation of the signals is a frequency shift (eg by a multiplier) to a lower frequency band is recommended. Subsequently, the evaluation of the contactless measured signals z. B. be done using digital technology.
Die Erfindung begünstigt durch Gleichverteilung der Temperatur die Kompensation von zeitlichen Temperaturunterschieden, also eine Schwankungskompensation, die in der digitalen Auswertung erfolgt. Die Sensoranordnung gemäß Figur 1 trägt deshalb zu einem temperaturstabilen System bei. Als weiterer Vorteil ist zu erwähnen, dass die elektromagnetische Verträglichkeit (EMV) wesentlich unkritischer ist als bei bekannten Drehwinkelsensoren, da durch die hohen Frequenzen die Abschirmung erleichtert wird und durch einen Auswertungsschritt der Integration (wegen des Frequenzmessverfahrens) Störungen herausgemittelt werden. Im Gegensatz zu bekannten Drehwinkelsensoren werden aktive Bauteile eingespart.The invention favors the equalization of the temperature compensation of temporal temperature differences, ie a fluctuation compensation, which takes place in the digital evaluation. The sensor arrangement according to FIG. 1 therefore contributes to a temperature-stable system. Another advantage is that the electromagnetic compatibility (EMC) is much less critical than in known rotation angle sensors, since the shielding is facilitated by the high frequencies and disturbances are averaged out by an evaluation step of the integration (because of the frequency measurement method). In contrast to known rotation angle sensors, active components are saved.
In Figur 3 ist eine lineare Aufreihung von Streifenleitungen dargestellt, die als Rektifikation der in Figur 1 dargestellten bogenförmigen Aufreihung gedacht werden kann. Dementsprechend handelt es sich um einen Längensensor, der die Position des geradlinigen Betätigungselements feststellt. Im Messbereich der Anordnung überdeckt das Betätigungselement - wegen der „überlappenden" Schrägstellung der Streifenleitungen - mehr als eine oszillierende Streifenleitung. Im übrigen gelten die Ausführungen zu Figur 1 und Figur 2.FIG. 3 shows a linear arrangement of strip lines which can be thought of as a rectification of the arcuate arrangement shown in FIG. Accordingly, it is a length sensor that detects the position of the rectilinear actuator. In the measuring range of the arrangement, the actuating element covers more than one oscillating stripline because of the "overlapping" inclined position of the strip lines.
Die Figur 4 und die Figur 5 zeigen Anordnungen (wiederum bogenförmig für Winkelmessung und geradlinig für Längenmessung), die sich von den entsprechenden Strukturen gemäß Figur 1 und Figur 3 durch eine andere Realisierung der Überlappung unterscheiden. In den Strukturen der Figur 4 und der Figur 5 sind die Streifenleitungs-Oszillatoren nicht sichelförmig und schräg ineinander geschachtelt, bezogen auf ein radiales oder transversales Betätigungselement. Viel mehr sind zwei radiale Betätigungselemente (Figur 4) oder zwei transversale Betätigungselemente (Figur 5) mechanisch miteinander gekoppelt. Entweder befinden sich die zwei Betätigungselemente auf einem gemeinsamen Träger oder es werden zwei einzeln getragene Betätigungselemente eingesetzt, die immer in einem vorbestimmten, festen Abstand zueinander verfahren werden. Auch durch eine solche Anordnung ist das erfindungsgemäße Prinzip verwirklicht, demzufolge in jedem Punkt des Messbereichs mehr als ein Stripline-Oszillator überdeckt wird. FIG. 4 and FIG. 5 show arrangements (again arcuate for angle measurement and straightforward for length measurement), which differ from the corresponding structures according to FIG. 1 and FIG. 3 by another realization of the overlap. In the structures of Figure 4 and Figure 5, the stripline oscillators are not crescent-shaped and obliquely nested relative to each other with respect to a radial or transverse actuator. Much more are two radial actuators (Figure 4) or two transverse actuators (Figure 5) mechanically coupled together. Either the two actuators are on a common carrier or there are two individually worn Actuators used, which are always moved in a predetermined, fixed distance from each other. Also by such an arrangement, the principle according to the invention is realized, according to which more than one stripline oscillator is covered in each point of the measuring range.

Claims

Patentansprüche claims
1. Drehwinkelsensor mit zwei oder mehr Oszillatoren, der als Sensorelemente jeweils Streifenleitungen auf einem dielektrischen Träger aufweist, wobei die Oszillatoren entsprechend der Winkelmessung bogenförmig aufgereiht sind, wobei ein oder mehrere Betätigungselemente, beispielsweise Wirbelstrom-Betätigungselemente, in einer Relativbewegung über den Bogen geführt werden, und wobei die Streifenleitungen derart geformt sind, dass das eine oder die mehreren Betätigungselemente (B1 , B2) mehr als einen Oszillator überdecken.1. rotation angle sensor with two or more oscillators, each having strip lines on a dielectric support as sensor elements, wherein the oscillators are aligned in an arcuate manner according to the angle measurement, wherein one or more actuators, such as eddy current actuators are guided in a relative movement over the sheet, and wherein the strip lines are shaped such that the one or more actuators (B1, B2) cover more than one oscillator.
2. Drehwinkelsensor nach Anspruch 1 , dadurch gekennzeichnet, dass die2. Angle of rotation sensor according to claim 1, characterized in that the
Streifenleitungen sogenannte Microstrips sind.Strip lines are so-called microstrips.
3. Drehwinkelsensor nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass der dielektrische Träger eine Leiterplatte ist.3. Angle of rotation sensor according to claim 1 or 2, characterized in that the dielectric support is a printed circuit board.
4. Drehwinkelsensor nach Anspruch 3, dadurch gekennzeichnet, dass die Leiterplatte auf der Unterseite vollständig metallisiert ist.4. Angle of rotation sensor according to claim 3, characterized in that the printed circuit board is completely metallized on the underside.
5. Drehwinkelsensor nach Anspruch 1 bis 4, dadurch gekennzeichnet, dass Ausgangssignale der Oszillatoren eine Frequenz im Bereich von5. Angle of rotation sensor according to claim 1 to 4, characterized in that output signals of the oscillators have a frequency in the range of
300 bis 1 000 MHz aufweisen.300 to 1,000 MHz.
6. Drehwinkelsensor nach Anspruch 1 bis 5, dadurch gekennzeichnet, dass jedes Streifenleitungs-Sensorelement drei elektrische Anschlüsse aufweist, nämlich einen Masseanschluss, einen Anschluss für einen Kondensator zur Frequenzabstimmung und einen Anschluss für ein Ausgangssignal.6. rotation angle sensor according to claim 1 to 5, characterized in that each stripline sensor element has three electrical connections, namely a ground terminal, a connection for a Capacitor for frequency tuning and a connection for an output signal.
7. Drehwinkelsensor nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass das überdeckende Betätigungselement elektrisch leitfähig ist.7. Angle of rotation sensor according to one of claims 1 to 6, characterized in that the overlapping actuating element is electrically conductive.
8. Drehwinkelsensor nach Anspruch 7, dadurch gekennzeichnet, dass das leitfähige Betätigungselement die induktive Komponente des überdeckten Oszillators durch Wirbelstromdämpfung beeinflusst.8. Angle of rotation sensor according to claim 7, characterized in that the conductive actuating element influences the inductive component of the covered oscillator by eddy current damping.
9. Drehwinkelsensor nach Anspruch 7 oder 8, dadurch gekennzeichnet, dass das leitfähige Betätigungselement die kapazitive Komponente des überdeckten Oszillators beeinflusst.9. rotation angle sensor according to claim 7 or 8, characterized in that the conductive actuating element affects the capacitive component of the covered oscillator.
10. Drehwinkelsensor nach Anspruch 1 bis 6, dadurch gekennzeichnet, dass das überdeckende Betätigungselement ferromagnetische Eigenschaften aufweist.10. Angle of rotation sensor according to claim 1 to 6, characterized in that the overlapping actuating element has ferromagnetic properties.
1 1. Drehwinkelsensor nach Anspruch 1 bis 6, dadurch gekennzeichnet, dass das überdeckende Betätigungselement paramagnetische Eigenschaften aufweist.1 1. Angle of rotation sensor according to claim 1 to 6, characterized in that the overlapping actuator has paramagnetic properties.
12. Drehwinkelsensor nach Anspruch 1 bis 6, dadurch gekennzeichnet, dass das überdeckende Betätigungselement diamagnetische12. Angle of rotation sensor according to claim 1 to 6, characterized in that the overlapping actuator diamagnetic
Eigenschaften aufweist.Features.
13. Drehwinkelsensor nach einem der Ansprüche 1 bis 12, dadurch gekennzeichnet, dass die Streifenleitungen schräg zur Richtung der Relativbewegung liegen.13. Angle of rotation sensor according to one of claims 1 to 12, characterized in that the strip lines are inclined to the direction of relative movement.
14. Drehwinkelsensor nach Anspruch 13, dadurch gekennzeichnet, dass die Streifenleitungen bogenförmig geformt sind. 14. Angle of rotation sensor according to claim 13, characterized in that the strip lines are arc-shaped.
15. Drehwinkelsensor nach Anspruch 14, dadurch gekennzeichnet, dass die Streifenleitungen bogenförmig ineinander geschachtelt sind.15. Angle of rotation sensor according to claim 14, characterized in that the strip lines are nested in an arcuate manner.
16. Drehwinkelsensor nach einem der bisherigen Ansprüche 1 bis 15, dadurch gekennzeichnet, dass das Betätigungselement eine gerade16. Angle of rotation sensor according to one of the preceding claims 1 to 15, characterized in that the actuating element is a straight
Metallstange ist.Metal bar is.
17. Drehwinkelsensor nach einem der bisherigen Ansprüche 1-15, dadurch gekennzeichnet, dass zwei Betätigungselemente zwei gerade, miteinander mechanisch gekoppelte Metallstangen sind.17. Angle of rotation sensor according to one of the preceding claims 1-15, characterized in that two actuating elements are two straight, mechanically coupled to each other metal rods.
18. Drehwinkelsensor nach Anspruch 1 bis 15, dadurch gekennzeichnet, dass das Betätigungselement eine gebogene Metallstange ist.18. Angle of rotation sensor according to claim 1 to 15, characterized in that the actuating element is a bent metal rod.
19. Drehwinkelsensor nach Anspruch 1 bis 15, dadurch gekennzeichnet, dass das Betätigungselement eine sichelförmig gebogene Fläche ist.19. Angle of rotation sensor according to claim 1 to 15, characterized in that the actuating element is a sickle-shaped curved surface.
20. Drehwinkelsensor nach einem der Ansprüche 1 bis 19, dadurch gekennzeichnet, dass zwei axial beabstandete Drehwinkelsensoren als Drehmomentensensor verwendet werden.20. Angle of rotation sensor according to one of claims 1 to 19, characterized in that two axially spaced rotation angle sensors are used as a torque sensor.
21. Längensensor mit zwei oder mehr Oszillatoren, der als Sensorelemente jeweils Streifenleitungen auf einem dielektrischen Träger aufweist, wobei die Oszillatoren entsprechend der Längenmessung linienförmig aufgereiht sind, wobei ein oder mehrere Betätigungselemente, bspw. Wirbelstrom- Betätigungselemente, in einer Relativbewegung über die Sensorlinie geführt werden, und wobei die Streifenleitungen derart geformt sind, dass das eine oder die mehreren Betätigungselemente (B1 , B2) mehr als einen Oszillator überdecken.21. Length sensor with two or more oscillators, each having strip lines on a dielectric support as sensor elements, wherein the oscillators are lined up according to the linear measurement line, wherein one or more actuators, eg. Eddy current actuators are guided in a relative movement over the sensor line and wherein the strip lines are shaped such that the one or more actuators (B1, B2) cover more than one oscillator.
22. Längensensor nach Anspruch 21 , dadurch gekennzeichnet, dass die Streifenleitungen schräg zur Richtung der Relativbewegung liegen. 22. A length sensor according to claim 21, characterized in that the strip lines are inclined to the direction of the relative movement.
23. Längensensor nach Anspruch 21 oder 22, dadurch gekennzeichnet, dass die Streifenleitungen bogenförmig geformt sind.23. A length sensor according to claim 21 or 22, characterized in that the strip lines are arc-shaped.
24. Längensensor nach Anspruch 23, dadurch gekennzeichnet, dass die24. Length sensor according to claim 23, characterized in that the
Streifenleitungen bogenförmig ineinander geschachtelt sind.Strip lines arcuately nested in each other.
25. Längensensor nach Anspruch 21 bis 24, dadurch gekennzeichnet, dass das Betätigungselement eine gerade Metallstange ist.25. Length sensor according to claim 21 to 24, characterized in that the actuating element is a straight metal rod.
26. Längensensor nach einem der Ansprüche 21-24, dadurch gekennzeichnet, dass zwei Betätigungselemente zwei gerade, miteinander mechanisch gekoppelte Metallstangen sind.26. A length sensor according to any one of claims 21-24, characterized in that two actuating elements are two straight, mechanically coupled to each other metal rods.
27. Längensensor nach Anspruch 21 bis 24, dadurch gekennzeichnet, dass das Betätigungselement eine gebogene Metallstange ist.27. Length sensor according to claim 21 to 24, characterized in that the actuating element is a bent metal rod.
28. Längensensor nach Anspruch 21 bis 24, dadurch gekennzeichnet, dass das Betätigungselement eine sichelförmig gebogene Fläche ist.28. Length sensor according to claim 21 to 24, characterized in that the actuating element is a sickle-shaped curved surface.
29. Längensensor nach Anspruch 21 bis 28, dadurch gekennzeichnet, dass die Streifenleitungen sogenannte Microstrips sind.29. Length sensor according to claim 21 to 28, characterized in that the strip lines are so-called microstrips.
30. Längensensor nach Anspruch 21 bis 29, dadurch gekennzeichnet, dass der dielektrische Träger eine Leiterplatte ist.30. A length sensor according to claim 21 to 29, characterized in that the dielectric support is a printed circuit board.
31. Längensensor nach Anspruch 30, dadurch gekennzeichnet, dass die Leiterplatte auf der Unterseite vollständig metallisiert ist.31. A length sensor according to claim 30, characterized in that the circuit board is completely metallized on the bottom.
32. Längensensor nach Anspruch 21 bis 31 , dadurch gekennzeichnet, dass Ausgangssignale der Oszillatoren eine Frequenz im Bereich von 300 bis 1 000 MHz aufweisen.32. Length sensor according to claim 21 to 31, characterized in that output signals of the oscillators have a frequency in the range of 300 to 1000 MHz.
33. Längensensor nach Anspruch 21 bis 32, dadurch gekennzeichnet, dass jedes Streifenleitungs-Sensorelement drei elektrische Anschlüsse aufweist, nämlich einen Masseanschluss, einen Anschluss für einen Kondensator zur Frequenzabstimmung und einen Anschluss für ein Ausgangssignal.33. Length sensor according to claim 21 to 32, characterized in that each stripline sensor element has three electrical connections namely, a ground terminal, a terminal for a capacitor for frequency tuning, and a terminal for an output signal.
34. Längensensor nach einem der Ansprüche 21 bis 33, dadurch gekennzeichnet, dass das überdeckende Betätigungselement elektrisch leitfähig ist.34. Length sensor according to one of claims 21 to 33, characterized in that the overlapping actuating element is electrically conductive.
35. Längensensor nach Anspruch 34, dadurch gekennzeichnet, dass das leitfähige Betätigungselement die induktive Komponente des überdeckten Oszillators durch Wirbelstromdämpfung beeinflusst.35. Length sensor according to claim 34, characterized in that the conductive actuating element influences the inductive component of the covered oscillator by eddy current damping.
36. Längensensor nach Anspruch 34 oder 35, dadurch gekennzeichnet, dass das leitfähige Betätigungselement die kapazitive Komponente des überdeckten Oszillators beeinflusst.36. Length sensor according to claim 34 or 35, characterized in that the conductive actuating element influences the capacitive component of the covered oscillator.
37. Längensensor nach Anspruch 21 bis 33, dadurch gekennzeichnet, dass das überdeckende Betätigungselement ferromagnetische Eigenschaften aufweist.37. Length sensor according to claim 21 to 33, characterized in that the overlapping actuating element has ferromagnetic properties.
38. Längensensor nach Anspruch 21 bis 33, dadurch gekennzeichnet, dass das überdeckende Betätigungselement paramagnetische Eigenschaften aufweist.38. Length sensor according to claim 21 to 33, characterized in that the overlapping actuator has paramagnetic properties.
39. Längensensor nach Anspruch 21 bis 33, dadurch gekennzeichnet, dass das überdeckende Betätigungselement diamagnetische Eigenschaften aufweist.39. Length sensor according to claim 21 to 33, characterized in that the overlapping actuator has diamagnetic properties.
40. Längensensor nach Anspruch 21 bis 39, dadurch gekennzeichnet, dass zwei beabstandete Längensensoren eine Positionsdifferenz messen. 40. Length sensor according to claim 21 to 39, characterized in that two spaced-length sensors measure a position difference.
EP08735569.9A 2007-03-29 2008-03-28 Rotation angle sensor or length sensor Not-in-force EP2130000B1 (en)

Applications Claiming Priority (2)

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DE102007015195A DE102007015195A1 (en) 2007-03-29 2007-03-29 Angle of rotation sensor or length sensor
PCT/EP2008/053736 WO2008119758A1 (en) 2007-03-29 2008-03-28 Rotation angle sensor or length sensor

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EP2130000A1 true EP2130000A1 (en) 2009-12-09
EP2130000B1 EP2130000B1 (en) 2014-01-15

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EP (1) EP2130000B1 (en)
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US8581601B2 (en) 2013-11-12
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WO2008119758A1 (en) 2008-10-09
WO2008119758B1 (en) 2008-11-20

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