EP2115444A4 - Test gas leak detection using a composite membrane - Google Patents

Test gas leak detection using a composite membrane

Info

Publication number
EP2115444A4
EP2115444A4 EP08726177.2A EP08726177A EP2115444A4 EP 2115444 A4 EP2115444 A4 EP 2115444A4 EP 08726177 A EP08726177 A EP 08726177A EP 2115444 A4 EP2115444 A4 EP 2115444A4
Authority
EP
European Patent Office
Prior art keywords
composite membrane
leak detection
gas leak
test gas
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08726177.2A
Other languages
German (de)
French (fr)
Other versions
EP2115444B1 (en
EP2115444A1 (en
Inventor
Anthony G Liepert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of EP2115444A1 publication Critical patent/EP2115444A1/en
Publication of EP2115444A4 publication Critical patent/EP2115444A4/en
Application granted granted Critical
Publication of EP2115444B1 publication Critical patent/EP2115444B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/007Leak detector calibration, standard leaks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/207Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
EP08726177.2A 2007-02-28 2008-02-27 Test gas leak detection using a composite membrane Active EP2115444B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/711,993 US20080202210A1 (en) 2007-02-28 2007-02-28 Test gas leak detection using a composite membrane
PCT/US2008/002600 WO2008106173A1 (en) 2007-02-28 2008-02-27 Test gas leak detection using a composite membrane

Publications (3)

Publication Number Publication Date
EP2115444A1 EP2115444A1 (en) 2009-11-11
EP2115444A4 true EP2115444A4 (en) 2016-09-07
EP2115444B1 EP2115444B1 (en) 2018-06-20

Family

ID=39714372

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08726177.2A Active EP2115444B1 (en) 2007-02-28 2008-02-27 Test gas leak detection using a composite membrane

Country Status (6)

Country Link
US (2) US20080202210A1 (en)
EP (1) EP2115444B1 (en)
JP (1) JP2010520451A (en)
KR (1) KR20090125059A (en)
CN (1) CN101622531A (en)
WO (1) WO2008106173A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8627710B2 (en) * 2008-05-05 2014-01-14 Inficon Ab Gas probe for sampling gas molecules from a fluid and a system comprising the gas probe
DE102009009370A1 (en) * 2009-02-18 2010-08-19 Inficon Gmbh Method for functional testing of a leak detector
US20110290006A1 (en) 2010-05-28 2011-12-01 Charles Perkins Leak test probe for use in industrial facilities
CN103091052B (en) * 2011-11-04 2015-07-08 北京卫星环境工程研究所 Normal temperature vacuum leak-detection system used for spacecraft part assembly
FR2993659B1 (en) * 2012-07-23 2014-08-08 Adixen Vacuum Products DETECTION METHOD AND PLANT FOR THE SEALING OF SEALED PRODUCT PACKAGES
EP2924411B1 (en) * 2012-11-21 2017-12-27 National Institute of Advanced Industrial Science and Technology Reference leak generating device and ultra-fine leak testing device using same
DE102013209438A1 (en) * 2013-05-22 2014-11-27 Inficon Gmbh Sniffer leak detector with nanoporous membrane
WO2016161513A1 (en) * 2015-04-07 2016-10-13 University Of New Brunswick System and method for monitoring hydrogen flux
US10309574B2 (en) 2016-03-28 2019-06-04 Hyperloop Technologies, Inc. Systems and methods for leak detection and sealing
DE102017217374A1 (en) * 2017-09-29 2019-04-04 Inficon Gmbh Apparatus and method for distinguishing a leaking from a leak test gas of interfering gas
EP3560577A1 (en) 2018-04-25 2019-10-30 Gambro Lundia AB Apparatus and method for testing integrity of an ultrafilter membrane
CN108871700B (en) * 2018-06-15 2021-03-09 青岛造船厂有限公司 Ship stern shaft seal inspection device
DE102020116660A1 (en) 2020-06-24 2021-12-30 Inficon Gmbh Method for temperature-dependent gas detection with a gas-selective membrane
CN113898570B (en) * 2021-12-08 2022-02-08 常州萨柏美格医用气体设备有限公司 Gas flow process detection device and method, air compressor unit and detection method
CN115931243B (en) * 2022-11-29 2023-09-15 北京中科科仪股份有限公司 Leak detection method, device, equipment and medium based on helium mass spectrometer leak detector

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919865A (en) * 1987-11-05 1990-04-24 Union Carbide Industrial Gases Technology Corporation Composite membranes of poly (methyl methacrylate) blends, their manufacture and their use
WO2006051888A1 (en) * 2004-11-15 2006-05-18 Toray Industries, Inc. Composite semipermeable membrane, production process thereof, and element, fluid separation equipment and treatment method for boron-containing water using the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3591827A (en) * 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US3690151A (en) * 1968-07-25 1972-09-12 Norton Co Leak detector
US3828527A (en) * 1972-09-28 1974-08-13 Varian Associates Leak detection apparatus and inlet interface
JPS56126733A (en) * 1980-03-10 1981-10-05 Nippon Sanso Kk Detecting method for leakage of helium
US4735084A (en) * 1985-10-01 1988-04-05 Varian Associates, Inc. Method and apparatus for gross leak detection
IT1256824B (en) * 1992-05-14 1995-12-21 Varian Spa PERFECTED HELIUM DETECTOR UNIT.
DE4326265A1 (en) * 1993-08-05 1995-02-09 Leybold Ag Test gas detector, preferably for leak detection devices, and method for operating a test gas detector of this type
DE60031245D1 (en) * 1999-02-02 2006-11-23 Virginia Tech Intell Prop SILICON-BASED DIAPHRAGNETICALLY SELECTED AGAINST HYDROGEN
WO2005001410A1 (en) * 2003-06-11 2005-01-06 Varian, Inc. Methods and apparatus for leak detection by the accumulation method
JP4431145B2 (en) * 2003-06-11 2010-03-10 バリアン・インコーポレイテッド Large scale leak test method and apparatus
DE102005021909A1 (en) * 2005-05-12 2006-11-16 Inficon Gmbh Sniffer leak detector with quartz window sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919865A (en) * 1987-11-05 1990-04-24 Union Carbide Industrial Gases Technology Corporation Composite membranes of poly (methyl methacrylate) blends, their manufacture and their use
WO2006051888A1 (en) * 2004-11-15 2006-05-18 Toray Industries, Inc. Composite semipermeable membrane, production process thereof, and element, fluid separation equipment and treatment method for boron-containing water using the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2008106173A1 *

Also Published As

Publication number Publication date
WO2008106173A1 (en) 2008-09-04
KR20090125059A (en) 2009-12-03
CN101622531A (en) 2010-01-06
US7779528B2 (en) 2010-08-24
US20080313881A1 (en) 2008-12-25
WO2008106173B1 (en) 2008-11-06
US20080202210A1 (en) 2008-08-28
EP2115444B1 (en) 2018-06-20
JP2010520451A (en) 2010-06-10
EP2115444A1 (en) 2009-11-11

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