EP2081036A3 - Testing apparatus - Google Patents

Testing apparatus Download PDF

Info

Publication number
EP2081036A3
EP2081036A3 EP09004194A EP09004194A EP2081036A3 EP 2081036 A3 EP2081036 A3 EP 2081036A3 EP 09004194 A EP09004194 A EP 09004194A EP 09004194 A EP09004194 A EP 09004194A EP 2081036 A3 EP2081036 A3 EP 2081036A3
Authority
EP
European Patent Office
Prior art keywords
dut
comparison result
outputting
sample voltage
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09004194A
Other languages
German (de)
French (fr)
Other versions
EP2081036A2 (en
EP2081036A8 (en
Inventor
Yoshiharu Umemura
Toshiyuki Okayasu
Toshiaki Awaji
Masahiro Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of EP2081036A2 publication Critical patent/EP2081036A2/en
Publication of EP2081036A3 publication Critical patent/EP2081036A3/en
Publication of EP2081036A8 publication Critical patent/EP2081036A8/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
    • G01R31/31932—Comparators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
    • G01R31/3191—Calibration

Abstract

Apparatus for testing a semiconductor device under test (DUT) is provided, which comprises a driver applying a test signal to DUT; a sampler sampling an output signal outputted from DUT at a timing indicated by a strobe signal applied thereto and outputting a sample voltage; a comparator comparing the sample voltage with a reference voltage and outputting a comparison result indicating whether the sample voltage is higher than the reference voltage; a logical comparator detecting the comparison result at the timing indicated by the strobe signal and determining the quality of DUT by comparing the thus detected comparison result with an expected value.
EP09004194A 2003-09-09 2004-09-08 Testing apparatus Withdrawn EP2081036A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003316484 2003-09-09
EP04787748A EP1669768B1 (en) 2003-09-09 2004-09-08 Calibration comparator circuit

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP04787748.5 Division 2004-09-08
EP04787748A Division EP1669768B1 (en) 2003-09-09 2004-09-08 Calibration comparator circuit

Publications (3)

Publication Number Publication Date
EP2081036A2 EP2081036A2 (en) 2009-07-22
EP2081036A3 true EP2081036A3 (en) 2010-06-09
EP2081036A8 EP2081036A8 (en) 2010-06-23

Family

ID=34308456

Family Applications (3)

Application Number Title Priority Date Filing Date
EP04787748A Expired - Fee Related EP1669768B1 (en) 2003-09-09 2004-09-08 Calibration comparator circuit
EP09004194A Withdrawn EP2081036A3 (en) 2003-09-09 2004-09-08 Testing apparatus
EP08014756A Withdrawn EP1990644A3 (en) 2003-09-09 2004-09-08 Calibration apparatus, testing apparatus, and calibration method

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP04787748A Expired - Fee Related EP1669768B1 (en) 2003-09-09 2004-09-08 Calibration comparator circuit

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP08014756A Withdrawn EP1990644A3 (en) 2003-09-09 2004-09-08 Calibration apparatus, testing apparatus, and calibration method

Country Status (8)

Country Link
US (1) US7389190B2 (en)
EP (3) EP1669768B1 (en)
JP (1) JP4313799B2 (en)
KR (1) KR100767739B1 (en)
CN (1) CN100529783C (en)
DE (1) DE602004024903D1 (en)
TW (1) TWI284210B (en)
WO (1) WO2005026759A1 (en)

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WO2006092173A1 (en) * 2005-03-02 2006-09-08 Agilent Technologies, Inc. Analog signal test using a-priori information
US7281181B2 (en) * 2005-06-27 2007-10-09 Verigy (Singapore) Pte. Ltd. Systems, methods and computer programs for calibrating an automated circuit test system
US7698589B2 (en) * 2006-03-21 2010-04-13 Mediatek Inc. Memory controller and device with data strobe calibration
US7480581B2 (en) * 2006-06-27 2009-01-20 Teradyne, Inc. Calibrating a testing device
JP2008102060A (en) * 2006-10-20 2008-05-01 Yokogawa Electric Corp Timing calibration circuit and timing calibration method of semiconductor testing device
US7511645B1 (en) * 2007-03-27 2009-03-31 National Semiconductor Corporation Apparatus and method for auto-zeroing a sampled comparator
US8456170B2 (en) 2008-05-09 2013-06-04 Advantest Corporation Test apparatus for digital modulated signal
CN101339052B (en) * 2008-08-11 2010-06-09 山东力创科技有限公司 Sampling device for comparing amplitude and frequency variation difference
TWI381175B (en) * 2008-10-15 2013-01-01 Inventec Corp Device for measuring an electric component and method therefor is related to the method for measuring the electric component
WO2012125719A2 (en) 2011-03-14 2012-09-20 Rambus Inc. Methods and apparatus for testing inaccessible interface circuits in a semiconductor device
US8692538B2 (en) * 2011-06-09 2014-04-08 Teradyne, Inc. Test equipment calibration
US9071243B2 (en) 2011-06-30 2015-06-30 Silicon Image, Inc. Single ended configurable multi-mode driver
US8760188B2 (en) * 2011-06-30 2014-06-24 Silicon Image, Inc. Configurable multi-dimensional driver and receiver
CN103078723B (en) * 2012-12-31 2015-08-19 华为技术有限公司 The calibration steps of the multiplexer data delay that non-integral multiple and string maps and device
TWI562541B (en) * 2015-12-09 2016-12-11 Chroma Ate Inc Wave form generating apparatus capable of calibration and calibrating method thereof
US9813050B1 (en) * 2016-04-13 2017-11-07 Analog Devices, Inc. Comparator circuit with input attenuator
US10132846B2 (en) * 2016-06-14 2018-11-20 Analog Devices Global Method of and apparatus for learning the phase error or timing delays within a current transducer and power measurement apparatus including current transducer error correction
CN108089575B (en) * 2016-11-23 2021-08-10 苏州宝时得电动工具有限公司 Self-moving equipment positioning device and method
CN108427089B (en) * 2018-03-22 2020-07-24 中国南方电网有限责任公司超高压输电公司检修试验中心 Testing system and method of non-contact distributed ranging system
CN108562839A (en) * 2018-03-28 2018-09-21 鄂尔多斯市源盛光电有限责任公司 A kind of test circuit and its test method, test system
CN115803643A (en) 2021-04-28 2023-03-14 爱德万测试公司 Circuit and method for calibrating multiple automatic test equipment channels
CN114499486B (en) * 2021-09-06 2023-03-21 上海芯圣电子股份有限公司 Anti-noise touch key integrated circuit
CN114371761A (en) * 2021-12-13 2022-04-19 中电科思仪科技股份有限公司 Self-calibration circuit and method for voltage swing of output signal of arbitrary waveform generator

Citations (3)

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US4523143A (en) * 1982-06-18 1985-06-11 Fairchild Camera And Instrument Corporation Digital logic level comparator particularly for digital test systems
US5625580A (en) * 1989-05-31 1997-04-29 Synopsys, Inc. Hardware modeling system and method of use
US5646948A (en) * 1993-09-03 1997-07-08 Advantest Corporation Apparatus for concurrently testing a plurality of semiconductor memories in parallel

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US4641246A (en) * 1983-10-20 1987-02-03 Burr-Brown Corporation Sampling waveform digitizer for dynamic testing of high speed data conversion components
US4807147A (en) * 1983-10-20 1989-02-21 Burr-Brown Corporation Sampling wave-form digitizer for dynamic testing of high speed data conversion components
JPH0787011B2 (en) * 1987-10-21 1995-09-20 ティアツク株式会社 Secondary distortion removal circuit
JP2688941B2 (en) * 1988-08-29 1997-12-10 株式会社アドバンテスト Phase correction device
JP2517456Y2 (en) * 1990-04-20 1996-11-20 株式会社アドバンテスト Calibration tool for analog IC tester
JP2517456B2 (en) 1990-07-20 1996-07-24 三洋電機株式会社 Liquid supply device
US5194818A (en) * 1991-02-27 1993-03-16 National Semiconductor Corporation Risetime and falltime test system and method
JP3197325B2 (en) * 1992-03-12 2001-08-13 岩崎通信機株式会社 Semiconductor test equipment using optical signals
US5473666A (en) * 1992-09-11 1995-12-05 Reliance Comm/Tec Corporation Method and apparatus for digitally controlling gain in a talking path
US5717715A (en) * 1995-06-07 1998-02-10 Discovision Associates Signal processing apparatus and method
JP3508489B2 (en) 1997-07-29 2004-03-22 安藤電気株式会社 Calibration device for programmable comparator
JPH11237454A (en) 1998-02-20 1999-08-31 Advantest Corp Semiconductor testing device
KR19990084337A (en) 1998-05-04 1999-12-06 장정곤 Flicker meter output analysis method and apparatus
JP3569154B2 (en) * 1998-05-19 2004-09-22 株式会社アドバンテスト Semiconductor device test apparatus and calibration method thereof
US6242899B1 (en) * 1998-06-13 2001-06-05 Lecroy Corporation Waveform translator for DC to 75 GHz oscillography
JP2000314764A (en) * 1999-05-06 2000-11-14 Advantest Corp Timing calibration method for ic testing device, and short- circuit device used for the calibration method
JP2000352578A (en) 1999-06-09 2000-12-19 Advantest Corp Timing calibration method for ic test device and ic test device using this timing calibration method
WO2001013136A1 (en) * 1999-08-16 2001-02-22 Advantest Corporation Method for correcting timing for ic tester and ic tester having correcting function using the correcting method
US6281699B1 (en) * 2000-03-15 2001-08-28 Teradyne, Inc. Detector with common mode comparator for automatic test equipment
JP4291494B2 (en) * 2000-04-04 2009-07-08 株式会社アドバンテスト IC test equipment timing calibration equipment
CN100573176C (en) * 2001-06-07 2009-12-23 株式会社艾德温特斯特 The calibration steps of semiconductor test instruments
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Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4523143A (en) * 1982-06-18 1985-06-11 Fairchild Camera And Instrument Corporation Digital logic level comparator particularly for digital test systems
US5625580A (en) * 1989-05-31 1997-04-29 Synopsys, Inc. Hardware modeling system and method of use
US5646948A (en) * 1993-09-03 1997-07-08 Advantest Corporation Apparatus for concurrently testing a plurality of semiconductor memories in parallel

Also Published As

Publication number Publication date
TWI284210B (en) 2007-07-21
KR100767739B1 (en) 2007-10-17
US20060267637A1 (en) 2006-11-30
CN1846141A (en) 2006-10-11
US7389190B2 (en) 2008-06-17
TW200510744A (en) 2005-03-16
EP1990644A2 (en) 2008-11-12
EP1669768B1 (en) 2009-12-30
EP1669768A1 (en) 2006-06-14
EP2081036A2 (en) 2009-07-22
DE602004024903D1 (en) 2010-02-11
WO2005026759A1 (en) 2005-03-24
JP4313799B2 (en) 2009-08-12
EP1990644A3 (en) 2009-09-30
EP1669768A4 (en) 2008-01-16
KR20060060701A (en) 2006-06-05
JPWO2005026759A1 (en) 2007-11-08
EP2081036A8 (en) 2010-06-23
CN100529783C (en) 2009-08-19

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