EP1947765A4 - Lamb wave device - Google Patents

Lamb wave device

Info

Publication number
EP1947765A4
EP1947765A4 EP06811192A EP06811192A EP1947765A4 EP 1947765 A4 EP1947765 A4 EP 1947765A4 EP 06811192 A EP06811192 A EP 06811192A EP 06811192 A EP06811192 A EP 06811192A EP 1947765 A4 EP1947765 A4 EP 1947765A4
Authority
EP
European Patent Office
Prior art keywords
wave device
lamb wave
lamb
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06811192A
Other languages
German (de)
French (fr)
Other versions
EP1947765A1 (en
EP1947765B1 (en
Inventor
Takashi Ogami
Kansho Yamamoto
Michio Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of EP1947765A1 publication Critical patent/EP1947765A1/en
Publication of EP1947765A4 publication Critical patent/EP1947765A4/en
Application granted granted Critical
Publication of EP1947765B1 publication Critical patent/EP1947765B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
EP20060811192 2005-10-19 2006-10-04 Lamb wave device Active EP1947765B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005304218 2005-10-19
PCT/JP2006/319852 WO2007046236A1 (en) 2005-10-19 2006-10-04 Lamb wave device

Publications (3)

Publication Number Publication Date
EP1947765A1 EP1947765A1 (en) 2008-07-23
EP1947765A4 true EP1947765A4 (en) 2009-09-02
EP1947765B1 EP1947765B1 (en) 2012-04-11

Family

ID=37962332

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20060811192 Active EP1947765B1 (en) 2005-10-19 2006-10-04 Lamb wave device

Country Status (6)

Country Link
US (1) US7535152B2 (en)
EP (1) EP1947765B1 (en)
JP (1) JP4613960B2 (en)
KR (1) KR100904368B1 (en)
CN (1) CN101292423B (en)
WO (1) WO2007046236A1 (en)

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KOICHI MIZUTANI; KOHJI TODA: "Analysis of Lamb Wave Propagation Characteristics in Rotated Y-Cut X-Propagation LiNbO3", ELECTRONICS AND COMMUNICATIONS IN JAPAN, vol. 69, no. 4, April 1986 (1986-04-01), USA, pages 47 - 55, XP002537663 *
See also references of WO2007046236A1 *
YU JIN; SHRINIVAS G. JOSHI: "Characteristics of Ultrasonic Lamb Waves in 128° Rotated Y-Cut Lithium Niobate", IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, vol. 41, no. 2, March 1994 (1994-03-01), USA, pages 279 - 283, XP002537665 *

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US20080179989A1 (en) 2008-07-31
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JPWO2007046236A1 (en) 2009-04-23
WO2007046236A1 (en) 2007-04-26
KR20080063310A (en) 2008-07-03
US7535152B2 (en) 2009-05-19
CN101292423B (en) 2010-08-25
EP1947765A1 (en) 2008-07-23
EP1947765B1 (en) 2012-04-11
KR100904368B1 (en) 2009-06-23

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