EP1903530A3 - Agencement doté d'un appareil sous vide et son procédé de fonctionnement - Google Patents

Agencement doté d'un appareil sous vide et son procédé de fonctionnement Download PDF

Info

Publication number
EP1903530A3
EP1903530A3 EP07017431.3A EP07017431A EP1903530A3 EP 1903530 A3 EP1903530 A3 EP 1903530A3 EP 07017431 A EP07017431 A EP 07017431A EP 1903530 A3 EP1903530 A3 EP 1903530A3
Authority
EP
European Patent Office
Prior art keywords
vacuum device
data exchange
bus system
assembly
control unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07017431.3A
Other languages
German (de)
English (en)
Other versions
EP1903530A2 (fr
EP1903530B1 (fr
Inventor
Jochen BÖTTCHER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1903530A2 publication Critical patent/EP1903530A2/fr
Publication of EP1903530A3 publication Critical patent/EP1903530A3/fr
Application granted granted Critical
Publication of EP1903530B1 publication Critical patent/EP1903530B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
    • G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C19/00—Electric signal transmission systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/40—Use of a multiplicity of similar components

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Hardware Redundancy (AREA)
EP07017431.3A 2006-09-23 2007-09-06 Agencement doté d'un appareil sous vide et son procédé de fonctionnement Active EP1903530B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006045022A DE102006045022A1 (de) 2006-09-23 2006-09-23 Anordnung mit Vakuumgerät und Verfahren zu derem Betrieb

Publications (3)

Publication Number Publication Date
EP1903530A2 EP1903530A2 (fr) 2008-03-26
EP1903530A3 true EP1903530A3 (fr) 2014-09-17
EP1903530B1 EP1903530B1 (fr) 2020-07-22

Family

ID=38969547

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07017431.3A Active EP1903530B1 (fr) 2006-09-23 2007-09-06 Agencement doté d'un appareil sous vide et son procédé de fonctionnement

Country Status (2)

Country Link
EP (1) EP1903530B1 (fr)
DE (1) DE102006045022A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013106474B4 (de) * 2013-06-20 2024-10-10 Pfeiffer Vacuum Gmbh Anordnung mit einem Vakuumgerät sowie Verfahren zur Erfassung von in einer Kommunikationsleitung zwischen einem Vakuumgerät und einer zentralen Steuereinrichtung kommunizierten Daten
EP3620663B1 (fr) * 2018-09-06 2021-02-17 Pfeiffer Vacuum Gmbh Dispositif à vide
EP3626973B1 (fr) * 2019-08-12 2022-08-03 Pfeiffer Vacuum Gmbh Système à vide et procédé d'identification de modules électroniques dans un tel système à vide
EP3620661B1 (fr) * 2019-08-30 2021-10-06 Pfeiffer Vacuum Gmbh Dispositif de raccordement, système et procédé de fonctionnement d'un dispositif de raccordement
EP3951738B1 (fr) * 2021-12-13 2023-12-13 Pfeiffer Vacuum Technology AG Appareil et procédé pour la communication avec un dispositif à vide

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0809164A1 (fr) * 1996-05-21 1997-11-26 Ebara Corporation Système de contrÔle pour contrÔler plusieurs pompes à vide
US5793963A (en) * 1994-10-24 1998-08-11 Fisher Rosemount Systems, Inc. Apparatus for providing non-redundant secondary access to field devices in a distributed control system
US6272400B1 (en) * 1998-07-13 2001-08-07 Helix Technology Corporation Vacuum network controller
US20030014160A1 (en) * 2001-07-13 2003-01-16 Helix Technology Corporation Vacuum system central control information server

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1148620C (zh) * 1994-10-24 2004-05-05 费舍-柔斯芒特系统股份有限公司 访问分布式控制系统中现场设备的装置
DE10114127A1 (de) * 2001-03-22 2002-09-26 Abb Patent Gmbh Verfahren zur Kommunikation mit einem Feldgerät

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5793963A (en) * 1994-10-24 1998-08-11 Fisher Rosemount Systems, Inc. Apparatus for providing non-redundant secondary access to field devices in a distributed control system
EP0809164A1 (fr) * 1996-05-21 1997-11-26 Ebara Corporation Système de contrÔle pour contrÔler plusieurs pompes à vide
US6272400B1 (en) * 1998-07-13 2001-08-07 Helix Technology Corporation Vacuum network controller
US20030014160A1 (en) * 2001-07-13 2003-01-16 Helix Technology Corporation Vacuum system central control information server

Also Published As

Publication number Publication date
EP1903530A2 (fr) 2008-03-26
EP1903530B1 (fr) 2020-07-22
DE102006045022A1 (de) 2008-03-27

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