EP1749242A1

EP1749242A1 - Optical module for a lens

Info

Publication number: EP1749242A1
Application number: EP05745591A
Authority: EP
Inventors: Jens Kugler; Franz Sorg; Yim-Bun Patrick Kwan
Original assignee: Carl Zeiss SMT GmbH
Current assignee: Carl Zeiss SMT GmbH
Priority date: 2004-05-24
Filing date: 2005-05-24
Publication date: 2007-02-07
Also published as: US20140268381A1; DE102004025832A1; KR101185648B1; JP4555861B2; US20180373007A1; KR20070023772A; US8711331B2; US20140254036A1; US20080198352A1; WO2005116773A1; US10197925B2; JP2008500569A; US9977228B2

Abstract

Disclosed is an optical module for a lens, especially a microlithographic apparatus, comprising a first holding device (2) with an inner circumference (2.1) that extends in a first circumferential direction (2.2), and at least one first supporting device (3.1) which is fastened to the inner circumference (2.1) of said first holding device (2) and is used for supporting a first optical element (5.1), an annular circumferential first assembly space (3. 18) being defined by displacing the first supporting device (3.1) once in a revolving manner along the first circumferential direction (2.2). At least one second supporting device (3.2) which is fixed to the inner circumference (2.1) of the first holding device (2) is provided for supporting a second optical element (5.2), an annular circumferential second assembly space (3.28) being defined by displacing the second supporting device (3.2) once in a revolving manner along the first circumferential direction (2.2). The first assembly space (3.18) intersects the second assembly space (3.28).

Description

Optics module for a lens

Background of the Invention

The present invention relates to an optical module for a lens. The invention can be used in connection with the microlithography used in the manufacture of microelectronic circuits. It therefore furthermore relates to a lens barrel which is particularly suitable for use in a microlithography device, and to a microlithography device comprising such a lens barrel.

Particularly in the field of microlithography, it is necessary to position the optical elements of the lens barrel, that is to say, for example, the lenses, with one another in space with the highest possible precision in order to achieve a correspondingly high imaging quality. The high accuracy requirements are not least a result of the constant need to increase the resolution of the optical systems used in the manufacture of microelectronic circuits in order to promote the miniaturization of the microelectronic circuits to be produced.

With the increased resolution, the requirements for the positioning accuracy of the optical elements used increase. This must be maintained as far as possible in the installed state over the entire operating time in order to avoid imaging errors. Furthermore, there is a need in this connection to achieve the most favorable dynamic behavior of the optical system used with the highest possible natural frequencies.

Objective tubes composed of several optical modules are used for a large number of optical applications, but especially in the field of microlithography mentioned above. The individual optical modules generally include an optical element, such as a lens, etc., which is supported on the inner circumference of a holder via one or more support devices. Depending on the conditions of the optics, d. H. among other things, the optical properties of the lens to be achieved, it is often necessary to position several optical elements close to each other.

BESTATIGUNGSKOPIE In the case of lenses with one lens per optical module, as are known, for example, from EP 1 168028 A1, the lenses are arranged in a closely spaced manner by arranging the support devices with the lenses located thereon nested in one another. On the one hand, this leads to comparatively long lens tubes. This is due to the fact that the holder of each optical module must have a certain extent in the direction of the optical axis of the lens barrel in order to have sufficient strength and rigidity. Furthermore, the distance specification for the lenses together with the axial extension of the shark tea may require very long support devices. These are disadvantageous in particular from the point of view of rigidity, since this is accompanied by an undesirably low rigidity and consequently undesirably low natural frequencies.

Document US 2002/0163741 A1 proposes a design of the optical modules stacked one above the other, in which a recess is provided in the respective holder for receiving part of the support devices of the optical module below. A reduction in the length of the support devices can be achieved with this. However, the cutouts again weaken and reduce the rigidity of the respective holder, which may have to be compensated for in a complex manner. On the other hand, this solution is only suitable for certain designs of the support devices.

The present invention is therefore based on the object of providing an optical module of the type mentioned at the outset which does not have the disadvantages mentioned above, or at least to a lesser extent, and in particular ensures a space-saving, rigid arrangement.

Brief summary of the invention

The present invention solves this problem with the features of claim 1.

The present invention is based on the finding that a space-saving, rigid arrangement can be achieved, in particular when a plurality of optical elements are arranged close to one another, if at least two optical elements are supported on the first holding device via at least one associated first or second supporting device. The support means each define one in the circumferential direction the holding device encircling the first or second space. They are arranged so that the first installation space intersects the second installation space.

This interlocking or interlocking arrangement of the support devices makes it possible to keep the dimensions of the common holding device short for both in the direction of their central axis. If necessary, this dimension can even be smaller than when a single optical element is supported by a comparable holding device, since the connection of further support devices may even contribute to increasing the rigidity of the optical module.

With this compact arrangement, the support devices can also be kept as short as possible. This has an advantageous effect on the mass and the rigidity of the support devices and thus on the natural frequencies of the arrangement.

In other words, in comparison to the known optical modules, it is possible to achieve a significant reduction in the required installation space and thus the mass of the optical module with the same rigidity of the arrangement, which results in an advantageous increase in the natural frequency.

An object of the present invention is therefore an optical module for a lens, in particular for a microlithography device, which has a first holding device with an inner circumference, which extends in a first circumferential direction, and at least one first supporting device fastened to the inner circumference of the first holding device of a first optical element. In this case, a ring-shaped circumferential first construction space is defined by a one-time circumferential displacement of the first support device along the first circumferential direction. Furthermore, at least one second support device, which is fastened to the inner circumference of the first holding device, is provided for supporting a second optical element. A one-time circumferential displacement of the second support device along the first circumferential direction defines a second construction space encircling the ring. The first installation space intersects the second installation space.

Another object of the present invention is a lens barrel, in particular for a microlithography device, with an optical module according to the invention.

Finally, the present invention further relates to a microlithography device for transferring a pattern formed on a mask to a substrate with an optical projection system which comprises a lens barrel according to the invention.

Further preferred refinements of the invention result from the subclaims or the following description of a preferred exemplary embodiment, which refers to the attached drawings.

Brief description of the drawings

Figure 1 is a schematic sectional view of a preferred embodiment of the optical module according to the invention;

Figure 2 is a schematic top view of the optics module of Figure 1;

FIG. 3 is a schematic illustration of a preferred embodiment of the microlithography device according to the invention with a lens barrel according to the invention;

FIG. 4 is a schematic sectional illustration of a further preferred embodiment of the optical module according to the invention;

Figure 5 is a schematic top view of the optics module of Figure 4;

FIG. 6 is a schematic sectional illustration of a further preferred embodiment of the optical module according to the invention;

FIG. 7 is a schematic top view of the optics module from FIG. 6.

Detailed description of the invention

First embodiment

1 and 2, a first preferred embodiment of the optical module 1 according to the invention for an objective for microlithography is first described described. Figure 1 shows a schematic sectional view of the optics module 1, while Figure 2 shows a schematic plan view of the optics module 1 in the direction of the module axis 1.1 of the optics module 1. FIG. 1 is a section along section line II from FIG. 2.

The optical module 1 comprises a first holding device in the form of an annular holder 2, which is often also referred to as a flange. This holder 2 has an inner circumference 2.1, which extends in a first circumferential direction 2.2. At the end of the inner circumference 2.2 of the holder 2, three first support devices in the form of — in a greatly simplified manner — first bipods 3.1 are fastened. The other end of the first bipods 3.1 is connected to a first holder device in the form of a first holder 4.1. This first version 4.1 in turn carries a first optical element in the form of a lens 5.1. Accordingly, the first bipods 3.1 support the first lens 5.1 via the first frame 4.1 on the first holder 2. In other words, the first lens 5.1 is thus attached to the first holder 2 via the first mount 4.1 and the first bipods 3.1.

The first bipods 3.1 each have a first leg 3.11 and a second leg 3.12. These are arranged inclined to one another in their common plane, so that the respective bipod 3.1 has a central axis 3.13. The first bipods 3.1 are also distributed uniformly on the first circumference 2.1 of the holder 2, so that an angle of 120 ° is included between their first center axes 3.13 in the first plane parallel to the plane of the drawing in FIG. 2, in which the circumferential direction 2.2 lies.

The first bipods 3.1 together form a so-called parallel kinematics in the manner of a hexapod, via which the first mount 4.1 and thus the first lens 5.1 are positioned in space with respect to the holder 2. The first legs 3.11 and the second legs 3.12 are each fastened to the holder 2 via a flexible joint 3.14, 3.15 and 3.16, which is movable in the manner of a ball joint. Each first bipod 3.1 therefore fixes two spatial degrees of freedom, so that a statically determined mounting of the first lenses 5.1 on the holder 2 is realized in the form of an isostatic mounting.

While the flexible joint 3.14 on the socket is fixed directly to the first holder 4.1, the two flexible joints 3.15 and 3.16 on the holder side are fastened to a first connecting element 3.17. The first connection element 3.17 is again detachable on a first contact element in the form of a first paragraph 2.3 on the inner circumference 2.1 of the shark ters 2 attached. The first paragraphs 2.3 are all in a first connection plane that runs perpendicular to the module axis 1.1. Any attachment, for example a clamp connection or a screw connection, can be provided for attaching the first connection element 3.17 to the holder 2 and the bipods 3.1 to the holder.

The first paragraph 2.3 extends in the circumferential direction over approximately the same angular range as the first connection element 3.17. Thanks to the detachable connection between the respective connection element 3.17 and the respective first paragraph 2.3, it is possible to rotate the lens 5.1 about the module axis 1.1 and to compensate for imaging errors. It is also possible in this way to remove the lens 5.1 from the holder 2 and, if necessary, to subject it to further processing, for example using an ion beam. This may make an adjustment around the module axis 1.1 unnecessary.

In order to be able to position the first lens 5.1 with respect to the holder 2, the first legs 3.11 and second legs 3.12 can be changed in length. Additionally or alternatively, the position or the distance of at least one movable part of the respective first leg 3.11 or 3.12 with respect to the holder 2 can be adjusted. Finally, the axial distance between the first connection element 3.17 and the first step 2.3 can be adjusted in the direction of the module axis 1.1. In any case, these adjustments can be made via passive elements (e.g. set screws etc.) as well as via controllable active elements (e.g. piezo elements etc.). It goes without saying, however, that the support devices in other variants of the invention may also at least partially be non-adjustable.

The first lens 5.1 is fixed in the first version 4.1 in any suitable manner in a form-fitting and / or frictional and / or material-locking manner. For example, it can be glued, clamped, etc. The first version 4.1 forms a precisely defined interface between the first lens 5.1 and the first bipods 3.1. However, it goes without saying that in other variants of the invention it can also be provided that the first bipods are attached to the lens without the intermediary of a frame or the like.

As can also be seen from FIGS. 1 and 2, the optics module 1 further comprises three second support devices in the form of second bipods 3.2, which are also shown in a very simplified form. Like the first bipods 3.1, these are each attached at one end to the inner circumference 2.1 of the holder 3 via a second connection element 3.27. The second connection element 3.27 is in turn detachable on a second paragraph 2.4 inner periphery 2.1 of the holder 2 attached. The second paragraphs 2.4 are all in a second connection plane, which also runs perpendicular to the module axis 1.1. The second connection level lies at a first distance below the first connection level.

The other end of the second bipods 3.2 is connected to a second mounting device in the form of a second mounting 4.2. This second frame 4.2 in turn carries a second optical element in the form of a second lens 5.2. Accordingly, the second bipods 3.2 support the second lens 5.2 on the second holder 4.2 on the first holder 2. In other words, the second lens 5.2 is thus attached to the first holder 2 via the second mount 4.2 and the second bipods 3.2.

The second bipods 3.2 are constructed like the first bipods 3.1 and attached to the holder 2 or the second frame 4.2, so that reference is made to the above statements in this regard. In particular, the second bipods 3.2 likewise form a so-called parallel kinematics in the manner of a hexapod, by means of which the second frame 4.2 and thus the second lens 5.2 can be actively positioned in space with respect to the holder 2.

Finally, the optical module 1 further comprises three third support devices in the form of third bipods 3.3, which are also shown in a very simplified form. Like the first bipods 3.1, these are attached at one end to the inner circumference 2.1 of the holder 3 via a third connecting element 3.37. The respective third connection element 3.37 is detachably fastened on a third shoulder 2.5 on the inner circumference 2.1 of the holder 2. The third paragraphs 2.5, like the first paragraphs 2.3, are all in the first connection plane, which runs perpendicular to the module axis 1.1.

At their other end, the third bipods 3.3 are connected to a third socket device in the form of a third socket 4.3. This third version 4.3 in turn carries a third optical element in the form of a third lens 5.3. Accordingly, the third bipods 3.3 support the third lens 5.3 on the third holder 4.3 on the first holder 2. In other words, the third lens 5.2 is thus attached to the first holder 2 via the third frame 4.3 and the third bipods 3.3.

The third bipods 3.3 are constructed like the first bipods 3.1 and attached to the holder 2 or the third version 4.3, so that reference is also made to the above statements in this regard. In particular, the third bipods 3.3 likewise form a so-called parallel kinematics in the manner of a hexapod, via which the third version 4.3 and so that the third lens 5.3 can be actively positioned in space with respect to the holder 2.

The first, second and third bipods 3.1, 3.2, 3.3 are arranged in the circumferential direction 2.2 evenly distributed on the inner circumference 2.1 of the holder 2. With a total number of S = 9 bipods, the center axes of adjacent bipods 3.1, 3.2, 3.3 are each at an angle according to the following equation

360 ° 360 ° _Λno = = = 40 ° 0)

arranged rotated in the first circumferential direction 2.2 with respect to the module axis 1.1.

It goes without saying, however, that the support devices in other variants of the present invention cannot be distributed evenly over the circumference of the holding device. In particular if the number of support devices for the respective optical element differs from one another, less uniform distributions of the support devices can be provided or required.

The legs 3.11 and 3.12 of the first bipods 3.1 each extend both in the direction of the module axis 1.1 and radially to the latter. A one-time circumferential displacement of one of the first bipods 3.1 along the first circumferential direction 2.2 encircling the inner circumference 2.1 of the holder 2 therefore defines an annular circumferential first construction space, as is indicated in FIG. 1 by the contour 3.18. The first installation space has a shape in the manner of the shell of a truncated cone. In the present example with a circular holder, the first installation space 3.18 is defined in other words by the toroidal body, which arises when one of the first bipods 3.1 is rotated about the module axis 1.1.

The legs 3.21 and 3.22 of the second bipods 3.2 each extend both slightly in the direction of the module axis 1.1 and mainly radially to the latter. A one-time circumferential displacement of one of the second bipods 3.2 along the first circumferential direction 2.2 on the inner circumference 2.1 of the holder 2 likewise defines a second circumferential construction space, as is indicated in FIG. 1 by the contour 3.28. The second installation space 3.28 also has a shape in the manner of the shell of a very flat truncated cone. In the present example with a circular holder, the second installation space 3.28 is also defined in other words by the toroidal body which arises when one of the second bipods 3.2 is rotated about the module axis 1.1. The legs 3.31 and 3.32 of the third bipods 3.3 each extend both slightly in the direction of the module axis 1.1 and mainly radially to the latter. By moving one of the third bipods 3.2 along the first circumferential direction 2.2 once around the inner circumference 2.1 of the holder 2, a third installation space, which is also circumferential, is defined, as is indicated in FIG. 1 by the contour 3.38. The third installation space 3.38 also has a shape in the manner of the jacket of a very flat truncated cone. In the present example with a circular holder, the third installation space 3.38 is also defined in other words by the toroidal body, which arises when one of the third bipods 3.3 is rotated about the module axis 1.1.

The first bipods 3.1 and the second bipods 3.2 are toothed or interleaved so that the first installation space 3.18 and the second installation space 3.28 intersect. The two installation spaces 3.18 and 3.28 penetrate one another in a first penetration area 6.1. In the view in FIG. 2, the first penetration area 6.1 has an annular contour. The first penetration area 6.1 lies radially with respect to the module axis 1.1 approximately in the middle between the holder 2 and the sockets 4.1 and 4.2.

The first bipods 3.1 and the third bipods 3.3 are toothed or interleaved so that the first installation space 3.18 and the third installation space 3.38 intersect one another in the region of the connection elements 3.17 and 3.37, respectively. They intersect in a first cutting area 6.2. In the view of FIG. 2, this also has an annular contour.

This design with the penetrating or intersecting installation spaces 3.18 and 3.28 and 3.38 makes it possible to keep the height dimension of the holder 2 short in the direction of the module axis 1.1, although the holder 2 holds several lenses 5.1 to 5.3. This allows space and weight to be reduced. If necessary, the height dimension can even be smaller than when holding a single optical element by means of a comparable holding device, since the connection of several support devices may even contribute to increasing the rigidity of the optical module.

With this compact arrangement, the bipods can also be kept as short as possible. This has an advantageous effect on the mass and the rigidity of the support devices and thus on the natural frequencies of the arrangement. In other words, it is with the design of the optical module 1 according to the invention in comparison to known ones Optical modules possible to achieve a significant reduction in the required installation space and thus the mass of the optical module 1 with the same rigidity of the arrangement, which results in an advantageous increase in the natural frequency of the entire arrangement.

The arrangement of the first and third paragraphs 2.3 and 2.5 in a common plane not only reduces the space required. Rather, this also simplifies the manufacture of the holder, since it can be produced, for example, from a single circumferential ring shoulder on the inner circumference 2.1.

The above-described uniform distribution of the bipods 3.1, 3.2, 3.3 on the inner circumference 2.1 of the holder 2, together with their attachment to the shoulders 2.3, 2.4 and 2.5, which only extend to a limited extent in the circumferential direction 2.2, ensures that the lenses 5.1, 5.2 and 5.3 can be installed individually. It is also possible to assemble or disassemble the lower, first lens 5.1 and the upper, third lens 5.3 independently of one another, without one of the other lenses having to be loosened or even removed. Only for the assembly of the middle, second lens 5.2, of course, it is necessary to remove the first lens 5.1 or the third lens 5.3.

However, it goes without saying here that the separate mounting of the optical elements in other variants of the invention can also be ensured in any other way by appropriate design and arrangement of the connection areas between the support devices and the holding device.

It goes without saying that the support device in other variants of the present invention can also be designed differently or can be provided in a different number per optical element. In particular, with a corresponding design, it may be sufficient that only one support device is provided for each optical element. This can then optionally extend over a correspondingly limited circumferential section in order to ensure the toothed or entangled arrangement with the overlap of the installation spaces. Alternatively, such individual support devices can also extend over the entire circumference of the holding device. Corresponding openings must then be provided for the other support device or the other support devices in order to ensure the toothed or entangled arrangement with the overlap of the installation spaces.

FIG. 3 shows a schematic illustration of a preferred embodiment of the microlithography device 7 according to the invention. The microlithography device 7 comprises an optical projection system 8 with an illumination system 9, a mask 10 and a lens barrel 11 with an optical lens axis 11.1. The illumination system 9 illuminates a mask 10. On the mask 10 there is a pattern which is projected onto a substrate 12, for example a wafer, via the lens barrel 11.

The lens barrel 11 comprises a series of tube modules 11.2 with ref ractive, reflective and / or diffractive optical elements such as lenses, mirrors, gratings or the like. The tube module 11.2 comprises the optics module 1 from FIGS. 1 and 2. The optics module 1 is fastened to a support structure 11.21 of the tube module 11.2.

Second example of execution

FIGS. 4 and 5 show schematic representations of a further, second preferred embodiment of the optical module 101 according to the invention for an objective for microlithography. Figure 4 is a section along the section line IV-IV of Figure 5. This embodiment does not differ in its basic mode of operation and its basic structure from that of Figures 1 and 2, so that the differences are mainly dealt with here.

The optics module 101 comprises a first holding device in the form of an annular holder 102. This holder 102 has an inner circumference 102.1 which extends in a first circumferential direction 102.2. On the inner circumference 102.2 of the holder 102, three first support devices in the form of — in a greatly simplified illustration — first bipods 103.1 are fastened at one end. The other end of the first bipods 103.1 is connected to a first holder device in the form of a first holder 104.1. This first frame 104.1 in turn carries a first optical element in the form of a lens 105.1.

The first bipods 103.1 each have a first leg 103.11 and a second leg 103.12. These are arranged inclined to one another in their common plane, so that the respective bipod 103.1 has a central axis 103.13. The first bipods 103.1 are evenly distributed on the first circumference 102.1 of the holder 102, so that an angle of 120 ° is included between their first center axes 103.13 in the first plane parallel to the plane of the drawing in FIG. 5, in which the circumferential direction 102.2 lies. The first bipods 103.1 are constructed like the first bipods 103.1 from FIGS. 1 and 2 and attached to the holder 102 or the first frame 104.1. In particular, the first bipods 103.1 are in turn detachably fastened via first connection elements 103.17 to a first contact element in the form of a first shoulder 102.3 on the inner circumference 102.1 of the holder 102. The first paragraphs 102.3 are all in a first connection plane that runs perpendicular to the module axis 101.1.

Like the first bipods 103.1 from FIGS. 1 and 2, the first bipods 103.1 together form a parallel kinematics in the manner of a hexapod, via which the first mount 104.1 and thus the first lens 105.1 can be actively positioned in space with respect to the holder 102 and is isostatically mounted.

As can also be seen in FIGS. 4 and 5, the optical module 101 further comprises three second support devices in the form of second bipods 103.2, which are also shown in a very simplified form. Like the first bipods 103.1, these are each attached at one end to the inner circumference 102.1 of the holder 103 via a second connection element 103.27. The second connection element 103.27 is in turn detachably fastened on a second shoulder 102.4 on the inner circumference 102.1 of the holder 102. The second paragraphs 102.4 are also on the first connection level.

The other end of the second bipods 103.2 is connected to a second mounting device in the form of a second mounting 104.2. This second frame 104.2 in turn carries a second optical element in the form of a second lens 105.2. The second bipods 103.2 are constructed like the first bipods 103.1 and fastened to the holder 102 or the second frame 104.2, so that reference is made to the above statements in this regard. In particular, the second bipods 103.2 likewise form a so-called parallel kinematics in the manner of a hexapod, by means of which the second mount 104.2 and thus the second lens 105.2 can be actively positioned in space with respect to the holder 102.

Furthermore, the second bipods 103.2 are evenly distributed on the first circumference 102.1 of the holder 102, so that an angle of 120 ° is included between their second center axes 103.23 in the first plane parallel to the plane of the drawing in FIG. 5, in which the circumferential direction 102.2 lies.

The first and second bipods 103.1, 103.2 are furthermore distributed in the circumferential direction 102.2 on the inner circumference 102.1 of the holder 102 such that the center axes Adjacent bipods 103.1, 103.2 are each rotated in the first circumferential direction 102.2 by an angle α = 40 ° with respect to the module axis 101.1.

The legs 103.11 and 103.12 of the first bipods 103.1 each extend both in the direction of the module axis 101.1 and radially to the latter. A one-time circumferential displacement of one of the first bipods 103.1 along the first circumferential direction 102.2 on the inner circumference 102.1 of the holder 102 therefore defines an annular circumferential first construction space, as is indicated in FIG. 4 by the contour 103.18. The first installation space has a shape in the manner of the shell of a truncated cone. In the present example with a circular holder, the first installation space 103.18 is in other words defined by the toroidal body which arises when one of the first bipods 103.1 is rotated about the module axis 101.1.

The legs 103.21 and 103.22 of the second bipods 103.2 each extend slightly in the direction of the module axis 101.1 as well as radially to the latter. A one-time circumferential displacement of one of the second bipods 103.2 along the first circumferential direction 102.2 on the inner circumference 102.1 of the holder 102 also defines a second circumferential space in the manner of a ring, as is indicated in FIG. 4 by the contour 103.28. The second installation space 103.28 also has a shape in the manner of the shell of a truncated cone. In the present example with a circular holder, the second installation space 103.28 is also defined in other words by the toroidal body which arises when one of the second bipods 103.2 is rotated about the module axis 101.1.

Apart from the number of lenses carried by the optics module 101, the main difference from the embodiment from FIGS. 1 and 2 is that the first bipods 103.1 and the second bipods 103.2 are aligned such that the first lens 105.1 is held above the first connection level while the second lens 105.2 is held below the first connection level.

The first bipods 103.1 and the second bipods 103.2 are furthermore toothed or interleaved such that the first installation space 103.18 and the second installation space 103.28 intersect with one another. In the view in FIG. 5, the first cutting area 106.1 has an annular contour.

This design with the intersecting installation spaces 103.18 and 103.28 makes it possible to keep the height dimension of the holder 102 short in the direction of the module axis 101.1, although several lenses 105.1 and 105.2 are held by the holder 102. As a result, the reduction in installation space and weight as well as an increase in the natural frequency of the entire arrangement, which has already been explained in detail above, can be achieved. By arranging the lenses 105.1 and 105.2 above or below the first connection level, a very compact arrangement with very short bipods 103.1 and 103.2 can be achieved in particular.

The arrangement of the first and second paragraphs 102.3 and 102.4 in a common plane in turn not only reduces the space required. Rather, this also simplifies the manufacture of the socket 102, since it can be produced, for example, from a single circumferential ring shoulder on the inner circumference 102.1.

The optical module 101 can be used in the place of any optical module, for example in the place of the optical module 1, in the microlithography device from FIG. 3.

Third embodiment

FIGS. 6 and 7 show schematic representations of a third preferred embodiment of the optical module 201 according to the invention for an objective for microlithography. Figure 6 is a section along the section line VI-VI from Figure 7. This embodiment does not differ in its basic mode of operation and its basic structure from that of Figures 1 and 2, so that the differences are mainly dealt with here.

The optical module 201 comprises a first holding device in the form of an annular holder 202. This holder 202 has an inner circumference 202.1 which extends in a first circumferential direction 202.2. On the inner circumference 202.2 of the holder 202, three first support devices in the form of active first bipods 203.1, shown in a highly simplified manner, are attached at one end. The other end of the first bipods 203.1 is directly connected to a first optical element in the form of a mirror 205.1.

The first bipods 203.1 each have a first leg 203.11 and a second leg 203.12. These are arranged inclined to one another in their common plane, so that the respective bipod 203.1 has a first center plane 203.13. The first bipods 203.1 are evenly distributed on the first circumference 202.1 of the holder 202, so that between their first center planes 203.13, which correspond to the plane of the drawing in FIG. 7 run perpendicularly, in the first plane parallel to the plane of the drawing in FIG. 7, in which the circumferential direction 202.2 lies, an angle of 120 ° is included in each case.

As mentioned, the respective first bipod 203.1 is immediate, i. H. without an intermediate socket or the like, connected to the first mirror 205.1. For this purpose, the first mirror 205.1 has three radial projections 205.11, to which the legs 203.11 and 203.12 of the respective first bipod 203.1 are attached.

In principle, the first bipods 203.1 are constructed like the first bipods 203.1 from FIGS. 1 and 2 and attached to the holder 202 or the first mirror 205.1. In particular, the first bipods 203.1 are in turn detachably attached to the inner circumference 202.1 of the holder 202 via first connection elements 203.17. The first connection elements 203.17 are all located in a first connection plane that runs perpendicular to the module axis 201.1. The first connection elements 203.17 can be connected to the holder 202, for example, via screw connections, clamp connections or the like acting in the radial direction of the holder 202.

Like the first bipods 3.1 from FIGS. 1 and 2, the first bipods 203.1 together form a parallel kinematics in the manner of a hexapod, by means of which the first mirror 205.1 can be actively positioned in space with respect to the holder 202 and is isostatically mounted.

As can also be seen from FIGS. 6 and 7, the optical module 201 further comprises three second support devices in the form of active second bipods 203.2, which are also shown in a highly simplified form. Like the first bipods 203.1, these are each attached at one end to the inner circumference 202.1 of the holder 203 via a second connection element 203.27. The second connection elements 203.27 can in turn be releasably connected to the holder 202, for example, via screw connections, clamping connections or the like acting in the radial direction of the holder 202. The second connection elements 203.27 are all on a second connection level.

At their other end, the second bipods 203.2 are connected directly, ie without an intermediate socket or the like, to a second optical element in the form of a second mirror 205.2. For this purpose, the second mirror 205.2 also has three radial projections 205.21, to which the legs 203.21 and 203.22 of the respective second bipod 203.2 are attached. The second bipods 203.2 are constructed like the first bipods 203.1 and fastened to the holder 202 or the second mirror 205.2, so that reference is made to the above statements in this regard. In particular, the second bipods 203.2 likewise form a so-called parallel kinematics in the manner of a hexapod, by means of which the second mirror 205.2 can be actively positioned in space with respect to the holder 202.

Furthermore, the second bipods 203.2 are evenly distributed on the first circumference 202.1 of the holder 202, so that between their second center planes 203.23, which are perpendicular to the plane of the drawing in FIG. 7, in the first plane parallel to the plane of the drawing in FIG. 7, in which the circumferential direction 202.2 lies , an angle of 120 ° is included.

The first and second bipods 203.1, 203.2 are furthermore distributed uniformly in the circumferential direction 202.2 on the inner circumference 202.1 of the holder 202, so that the center planes of adjacent bipods 203.1, 203.2 according to the above equation (1) are each at an angle a = 60 ° with respect to the Module axis 201.1 are arranged rotated in the first circumferential direction 202.2.

The legs 203.11 and 203.12 of the first bipods 203.1 each extend both in the direction of the module axis 201.1 and tangentially to the first circumferential direction 202.2. A one-time circumferential displacement of one of the first bipods 203.1 along the first circumferential direction 202.2 on the inner circumference 202.1 of the holder 202 therefore defines a circumferential first construction space, as is indicated in FIG. 6 by the contour 203.18. The first installation space has a shape in the manner of the jacket of a cylinder. In the present example with an annular holder, the first installation space 203.18 is in other words defined by the toroidal body, which is created when one of the first bipods 203.1 is rotated about the module axis 201.1.

The legs 203.21 and 203.22 of the second bipods 203.2 each extend both slightly in the direction of the module axis 201.1 and tangentially to the first circumferential direction 202.2. A one-time circumferential displacement of one of the second bipods 203.2 along the first circumferential direction 202.2 on the inner circumference 202.1 of the holder 202 likewise defines a second circumferential space, as is indicated in FIG. 6 by the contour 203.28. The second installation space 203.28 also has a shape in the manner of the jacket of a cylinder. In the present example with an annular holder, the second installation space 203.28 is in other words through the toroidal body defined, which arises when one of the second bipods 203.2 is rotated about the module axis 201.1.

Apart from the number of mirrors carried by the optics module 201, a difference from the embodiment from FIGS. 1 and 2 is that the first bipods 203.1 and the second bipods 203.2 are oriented such that the first mirror 205.1 is held below the first connection level, while the second mirror 205.2 is held above the second connection level, which in turn lies below the first connection level.

Another difference is that the first bipods 203.1 and the second bipods 203.2 are aligned in such a way that a cylindrical jacket-shaped first installation space 203.18 and a cylindrical jacket-shaped second installation space 203.28 of essentially the same diameter are defined. The first bipods 203.1 and the second bipods 203.2 are interlocked or arranged so that the first installation space 203.18 and the second installation space 203.28 intersect or penetrate one another. The first cutting area 206.1 also has a cylindrical jacket-shaped contour. In other words, the first installation space 203.18 and the second installation space 203.28 penetrate one another in such a way that they essentially overlap one another over a long distance. In this way, a particularly space-saving support structure is realized, which also enables the installation of optical elements of large diameter in a lens barrel with a predefined inner diameter.

This design with the penetrating installation spaces 203.18 and 203.28 makes it possible to keep the height dimension of the holder 202 short in the direction of the module axis 201.1, although several mirrors 205.1 and 205.2 are held by the holder 202. In this way, a space and weight reduction as well as an increase in the natural frequency of the entire arrangement can be achieved, which has already been explained in detail above. By arranging the mirrors 205.1 and 205.2 above or below the assigned connection level, a very compact arrangement with very short bipods 203.1 and 203.2 can be achieved in particular.

The first mirror 205.1 has a reflecting first surface 205.12 and a first opening 205.13. The same applies to the second mirror 205.1, which has a reflecting second surface 205.22 and a second opening 205.23. The mirrors 205.1 and 205.2 are held in such a way that their reflecting surfaces 205.12 and 205.22 face each other. The openings 205.13 and 205.23 represent It is certain that the useful light can first reach the space between the reflecting surfaces 205.12 and 205.22 through the first opening 205.13, is directed from the reflecting first surface 205.12 to the second reflecting surfaces 205.22 and from there through the second opening 205.23 can leave between the reflecting surfaces 205.12 and 205.22. This makes it possible to implement a very compact catadioptric arrangement in the smallest of spaces.

Similar to the second exemplary embodiment, the optics module 201 can be used in the microlithography device from FIG. 3 instead of any optics module, in particular instead of the optics module 1.

The present invention has been described above solely on the basis of examples in which optical elements of the same type are held in a single optical module. However, it goes without saying that the present invention can also be used for any combination of optical elements of different types which are held in a single optical module.

The present invention has also been described above exclusively using examples from the field of objectives for microlithography. However, it is understood that the present invention can also be used for any other objective.

Claims

claims

1. Optics module for a lens, in particular for a microlithography device, comprising - a first holding device (2; 102; 202) with an inner circumference (2.1; 102.1; 202.1) which extends in a first circumferential direction (2.2; 102.2; 202.2) , - at least one first support device (3.1; 103.1; 203.1) attached to the inner circumference (2.1; 102.1; 202.1) of the first holding device (2; 102; 202) for supporting a first optical element (5.1; 105.1; 205.1), - whereby a one-time circumferential displacement of the first support device (3.1; 103.1; 203.1) along the first circumferential direction (2.2; 102.2; 202.2) defines a circumferential first construction space (3.18; 103.18; 203.18), characterized in that - at least one on the inner circumference (2.1; 102.1; 202.1) of the first holding device (2; 102; 202) attached second support device (3.2; 103.2; 203.2) is provided for supporting a second optical element (5.2; 105.2; 205.2) - by one-time circumferential displacement of the second support device (3.2; 103.2; 203.2) along the first circumferential direction (2.2; 102.2; 202.2) a second construction space (3.28; 103.28; 203.28) is defined, and - the first construction space (3.18; 103.18; 203.18) the second construction space (3.28; 103.28; 203.28) cuts.

2. Optics module according to claim 1, characterized in that the first installation space (3.18; 203.18) penetrates the second installation space (3.28; 203.28).

3. Optics module according to claim 1 or 2, characterized in that the first circumferential direction (2.2; 102.2; 202.2) lies in a first plane and - the first support device (3.1; 103.1) and / or the second support device (3.2; 103.2) extends at least in a first direction that runs perpendicular to the first circumferential direction (2.2; 102.2) in the first plane, and / or - The first support device (203.1) and / or the second support device (203.2) extends at least in a second direction that is perpendicular to the first plane.

4. Optical module according to one of the preceding claims, characterized in that - at least one on the inner circumference (2.1) of the first holding device (2) attached third support device (3.3) for supporting a third optical element (5.3) is provided, - by one time circumferential displacement of the third support device (3.3) along the first circumferential direction (2.2), a third construction space (3.38) running around in a ring-like manner is defined, and - the third construction space (3.38) intersects the first construction space (3.18) and / or the second construction space, in particular the one penetrates the first space and / or the second space.

5. Optics module according to one of the preceding claims, characterized in that a support device (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) compared to an adjacent support device (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) in the first circumferential direction (2.2; 102.2; 202.2) is arranged displaced.

6. Optics module according to one of the preceding claims, characterized in that a total number S of support devices (3.1, 3.2, 3.3; 203.1, 203.2) are attached to the inner circumference (2.1; 202.1) of the first holding device (2; 202) and one Support device (3.1, 3.2, 3.3; 203.1, 203.2) relative to an adjacent support device (3.1, 3.2, 3.3; 203.1, 203.2) by an angle of 360 ° = S with respect to a central axis (1.1; 201.1) of the holding device in the first circumferential direction (2.2 ; 20.2) is arranged displaced, the central axis (1.1; 201.1) extending perpendicular to a first plane in which the first circumferential direction (2.2; 202.2) lies.

7. Optical module according to one of the preceding claims, characterized in that at least one support device (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) is detachably attached to the first holding device (2; 102; 202).

8. Optics module according to claim 7, characterized in that the at least one support device (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) at least one connection element (3.17, 3.27, 3.37; 103.17, 103.27; 203.17, 203.27) for connection the support device (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) on the first holding device (2; 102; 202), in particular on a contact element (2.3, 2.4, 2.5; 102.3, 102.4) of the first holding device (2; 102).

9. Optical module according to one of the preceding claims, characterized in that - the first support device (103.1) is connected to a first contact element (102.3) of the first holding device (102), - the second support device (103.2) is connected to a second contact element (102.4) of the first holding device (102), wherein - the first contact element (102.3) and the second contact element (102.4) are arranged essentially in a common second plane which runs parallel to a first plane in which the first circumferential direction (102.2) lies.

10. Optics module according to one of the preceding claims, characterized in that at least one support device (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) is adjustable, in particular actively adjustable, attached to the first holding device (2; 102; 202) ,

11. Optics module according to one of the preceding claims, characterized in that at least one support device (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) for adjusting, in particular for actively adjusting, the position of the optical element (5.1, 5.2 , 5.3; 105.1, 105.2) is formed.

12. Optics module according to one of the preceding claims, characterized in that for at least one optical element (5.1, 5.2, 5.3; 105.1, 105.2; 205.1, 205.2) a number of support devices (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) are fastened to the first holding device (2; 102; 202), which for statically determined support, in particular for isostatic support, this at least one optical element (5.1, 5.2, 5.3; 105.1, 105.2; 205.1, 205.2) are formed.

13. Optics module according to one of the preceding claims, characterized in that at least one support device (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) is designed in the manner of a bipod.

14. Optics module according to one of the preceding claims, characterized in that for at least one optical element (5.1, 5.2, 5.3; 105.1, 105.2) a mounting device (4.1, 4.2, 4.3; 104.1, 104.2) is provided, which with that of the first Holding device (2; 102) facing away from the at least one support device (3.1, 3.2, 3.3; 103.1, 103.2) for this optical element (5.1, 5.2, 5.3; 105.1, 105.2), in particular detachably, is connected.

15. Optical module according to one of the preceding claims, characterized in that at least one optical element (5.1, 5.2, 5.3; 105.1, 105.2; 205.1, 205.2) is provided, which via at least one of the support devices (3.1, 3.2, 3.3; 103.1, 103.2; 203.1, 203.2) is supported on the holding device (2; 102; 202).

16. Optical module according to claim 15, characterized in that the at least one optical element (205.1, 205.2) directly with the end of the at least one support device (203.1, 203.2) facing away from the first holding device (202) for this optical element (205.1, 205.2) , in particular releasably, is connected.

17. Optical module according to claim 15 or 16, characterized in that the at least one optical element is a reflective element (205.1, 205.2), in particular a mirror.

18. Optics module according to one of the preceding claims, characterized in that - a reflective first optical element (205.1), in particular a mirror, is supported by the at least one first support device (203.1) and - a reflective second optical element (205.1), in particular a mirror by which at least one second support device (203.2) is supported

19. Optical module according to claim 18, characterized in that - the first optical element (205.1) has a reflective first surface (205.12) and the second optical element (205.1) has a reflective second surface (205.22), - the first optical element (205.1 ) and the second optical element (205.1) are arranged directly adjacent to one another and - the reflecting first surface (205.12) faces the reflecting second surface (205.22).

20. Optics module according to one of claims 15 to 17, characterized in that the at least one optical element (205.1, 205.2) has a projection (205.17, 205.27) which, with the end of the support device (203.1, facing away from the first holding device (202), 203.2) for this optical element (205.1, 205.2), in particular detachably, is connected.

21. Lens barrel, in particular for a microlithography device, with an optical module (1; 101; 201) according to one of the preceding claims.

22. The lens barrel according to claim 21, characterized in that a support structure (11.3) is provided, on which the optics module (1; 101; 201) is attached.

23. A microlithography device for transferring a pattern formed on a mask (10) onto a substrate (12) with an optical projection system (8) which comprises a lens barrel (11) according to claim 21 or 22.

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