EP1746631B1 - Microengineered nanospray electrode system - Google Patents

Microengineered nanospray electrode system Download PDF

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Publication number
EP1746631B1
EP1746631B1 EP06117211.0A EP06117211A EP1746631B1 EP 1746631 B1 EP1746631 B1 EP 1746631B1 EP 06117211 A EP06117211 A EP 06117211A EP 1746631 B1 EP1746631 B1 EP 1746631B1
Authority
EP
European Patent Office
Prior art keywords
capillary
substrate
electrode
nanospray
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP06117211.0A
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German (de)
English (en)
French (fr)
Other versions
EP1746631A2 (en
EP1746631A3 (en
Inventor
Richard Syms
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microsaic Systems PLC
Original Assignee
Microsaic Systems PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB0514843.2A external-priority patent/GB0514843D0/en
Application filed by Microsaic Systems PLC filed Critical Microsaic Systems PLC
Publication of EP1746631A2 publication Critical patent/EP1746631A2/en
Publication of EP1746631A3 publication Critical patent/EP1746631A3/en
Application granted granted Critical
Publication of EP1746631B1 publication Critical patent/EP1746631B1/en
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/165—Electrospray ionisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers

Definitions

  • This invention relates to mass spectrometry, and in particular to the use of mass spectrometry in conjunction with liquid chromatography or capillary electrophoresis.
  • the invention particularly relates to a system and method that is implemented in a microengineered configuration.
  • the spray is passed from atmospheric pressure via a chamber held at an intermediate pressure.
  • Several vacuum interfaces that use differential pumping to match flow rates to achievable pressures have been developed [Duffin 1992].
  • the ion optics normally consist of input and output orifices such as capillaries, capillary arrays and skimmer electrodes, and occasionally also a quadrupole lens operating as an ion guide in all-pass mode. These components are used to maximise the ratio of coupled ions to neutrals, which would otherwise swamp the chamber.
  • US 5,386,115 discloses a solid state mass spectrograph that includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate.
  • WO 2005/019804 A2 discloses a microfluidic chip formed with multiple fluid channels terminating at a tapered electrospray ionization tip for mass spectrometric analysis.
  • the fluid channels may be formed onto a channel plate that are in fluid communication with corresponding reservoirs.
  • the electrospray tip can be formed along a defined distal portion of the channel plate that can include a single or multiple tapered surfaces.
  • the fluid channels may terminate at an open-tip region of the electrospray tip.
  • a covering plate may substantially enclose most portions of the fluid channels formed on the channel plate except for the open-tip region.
  • Another aspect of the invention provides methods for conducting mass spectrometric analysis of multiple samples flowing through individual fluid channels in a single micro fluidic chip that is formed with a tapered electrospray tip having an open-tip region.
  • MEMS technology could be used to provide nanospray devices.
  • the device must typically operate with high voltages, in a wet environment, so that electrical isolation and drainage are both required.
  • the substrate material most commonly used in MEMS, silicon is therefore not appropriate; however, other insulating materials such as glasses are difficult to micromachine.
  • an electrode containing an axially aligned orifice is typically required.
  • electrostatic deflection or focusing is required.
  • further electrodes containing aligned orifices are needed. If the ion path is itself in the plane of a substrate, such orifices are extremely difficult to form by in plane patterning alone.
  • FIG. 1 illustrates the concept of a microengineered nanospray electrode system.
  • a mass spectrometer 101 is provided in a high-vacuum enclosure 102 pumped (for example) by a turbomolecular pump 103. Ions are channelled into this chamber via a further chamber 104 held at an intermediate pressure and pumped (again, for example) by a rotary pump 105.
  • the inlet to the vacuum system is assumed to be a capillary 106.
  • the filter element of the mass spectrometer could be an ion trap, a quadrupole, a magnetic sector, a crossed-field or a time of flight device.
  • the intermediate vacuum chamber could contain a range of components including further capillaries and skimmer electrodes.
  • the overall input to the system is provided by a nanospray capillary 107.
  • Alignment between the nanospray capillary 107 and the capillary input to the mass spectrometer 106 is provided by a microengineered chip 108.
  • the chip contains a first set of mechanical alignment features 109 for the nanospray capillary and a second set of alignment features 110 for the capillary input to the mass spectrometer.
  • the chip also contains a set of electrodes 111 set up perpendicular to the ion path, which may (for example, but not exclusively) consist of diaphragm electrodes. Other features may be integrated on the chip, including holes for drainage and gas inlet.
  • the second substrate again consists of a base 208 formed in insulating material, and carrying a further set of electrodes corresponding to a further part of the features 111 in Figure 1 and consisting of grooves 209 etched into upright plates of conducting or semiconducting material 210.
  • the partial electrode sets combine to form complete diaphragm electrodes with closed pupils 211.
  • Figure 8 shows a mode of thermal operation.
  • a current I is passed through one or more of the electrodes 801 to provide local heating, which may preferentially evaporate more volatile components in the spray such as a carrier solvent, thus enriching the analyte ion stream.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
EP06117211.0A 2005-07-20 2006-07-14 Microengineered nanospray electrode system Active EP1746631B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0514843.2A GB0514843D0 (en) 2005-07-20 2005-07-20 Microengineered nanospray electrode system
GB0519439A GB2428514B (en) 2005-07-20 2005-09-23 Microengineered nanospray electrode system

Publications (3)

Publication Number Publication Date
EP1746631A2 EP1746631A2 (en) 2007-01-24
EP1746631A3 EP1746631A3 (en) 2009-02-25
EP1746631B1 true EP1746631B1 (en) 2013-06-19

Family

ID=37305854

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06117211.0A Active EP1746631B1 (en) 2005-07-20 2006-07-14 Microengineered nanospray electrode system

Country Status (3)

Country Link
EP (1) EP1746631B1 (https=)
JP (1) JP5265095B2 (https=)
CA (1) CA2552086C (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1959476A1 (de) * 2007-02-19 2008-08-20 Technische Universität Hamburg-Harburg Massenspektrometer
US8242441B2 (en) * 2009-12-18 2012-08-14 Thermo Finnigan Llc Apparatus and methods for pneumatically-assisted electrospray emitter array
GB2527803B (en) * 2014-07-02 2018-02-07 Microsaic Systems Plc A method and system for monitoring biomolecule separations by mass spectrometry
JP7308218B2 (ja) * 2018-03-02 2023-07-13 ディーエイチ テクノロジーズ デベロップメント プライベート リミテッド 統合された低費用のカーテン板、オリフィスｐｃｂ、およびイオンレンズアセンブリ
WO2022251460A1 (en) * 2021-05-28 2022-12-01 Restek Corporation Taylor cone emitter devices and taylor cone analysis systems

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005019804A2 (en) * 2003-08-26 2005-03-03 Predicant Biosciences, Inc. Microfluidic chip with enhanced tip for stable electrospray ionization

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5386115A (en) 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
EP1876442A3 (en) * 1998-09-17 2008-03-05 Advion BioSciences, Inc. Integrated monolithic microfabricated liquid chromatography system and method
US6633031B1 (en) * 1999-03-02 2003-10-14 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method
US6396057B1 (en) * 2000-04-18 2002-05-28 Waters Investments Limited Electrospray and other LC/MS interfaces
JP2002190272A (ja) * 2000-12-21 2002-07-05 Jeol Ltd エレクトロスプレー・イオン源
GB2391694B (en) * 2002-08-01 2006-03-01 Microsaic Systems Ltd Monolithic micro-engineered mass spectrometer
GB2422951B (en) * 2005-02-07 2010-07-28 Microsaic Systems Ltd Integrated analytical device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005019804A2 (en) * 2003-08-26 2005-03-03 Predicant Biosciences, Inc. Microfluidic chip with enhanced tip for stable electrospray ionization

Also Published As

Publication number Publication date
JP5265095B2 (ja) 2013-08-14
JP2007027131A (ja) 2007-02-01
EP1746631A2 (en) 2007-01-24
CA2552086A1 (en) 2007-01-20
EP1746631A3 (en) 2009-02-25
CA2552086C (en) 2014-09-09

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