EP1726354A4 - Separation membrane - Google Patents

Separation membrane

Info

Publication number
EP1726354A4
EP1726354A4 EP05720771A EP05720771A EP1726354A4 EP 1726354 A4 EP1726354 A4 EP 1726354A4 EP 05720771 A EP05720771 A EP 05720771A EP 05720771 A EP05720771 A EP 05720771A EP 1726354 A4 EP1726354 A4 EP 1726354A4
Authority
EP
European Patent Office
Prior art keywords
separation membrane
membrane
separation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05720771A
Other languages
German (de)
French (fr)
Other versions
EP1726354A1 (en
Inventor
M Aizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Bussan Nanotech Research Institute Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34975374&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1726354(A4) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Bussan Nanotech Research Institute Inc filed Critical Bussan Nanotech Research Institute Inc
Publication of EP1726354A1 publication Critical patent/EP1726354A1/en
Publication of EP1726354A4 publication Critical patent/EP1726354A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/10—Supported membranes; Membrane supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0051—Inorganic membrane manufacture by controlled crystallisation, e,.g. hydrothermal growth
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/10—Supported membranes; Membrane supports
    • B01D69/108—Inorganic support material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/1213—Laminated layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/1216—Three or more layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/024—Oxides
    • B01D71/025—Aluminium oxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/028—Molecular sieves
    • B01D71/0281—Zeolites
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/6261—Milling
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62625—Wet mixtures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/007—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore distribution, e.g. inhomogeneous distribution of pores
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/12—Specific ratios of components used
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0283—Pore size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/04—Characteristic thickness
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00612—Uses not provided for elsewhere in C04B2111/00 as one or more layers of a layered structure
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00793—Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
    • C04B2111/00801—Membranes; Diaphragms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C04B2235/6021—Extrusion moulding
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/94—Products characterised by their shape

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Geology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
EP05720771A 2004-03-17 2005-03-15 Separation membrane Withdrawn EP1726354A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004076027 2004-03-17
JP2004076059 2004-03-17
PCT/JP2005/004514 WO2005087356A1 (en) 2004-03-17 2005-03-15 Separation membrane

Publications (2)

Publication Number Publication Date
EP1726354A1 EP1726354A1 (en) 2006-11-29
EP1726354A4 true EP1726354A4 (en) 2008-04-02

Family

ID=34975374

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05720771A Withdrawn EP1726354A4 (en) 2004-03-17 2005-03-15 Separation membrane

Country Status (7)

Country Link
US (2) US20070138083A1 (en)
EP (1) EP1726354A4 (en)
JP (1) JP3868479B2 (en)
KR (1) KR100814571B1 (en)
CN (2) CN1929901B (en)
BR (1) BRPI0508601A (en)
WO (1) WO2005087356A1 (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007185639A (en) * 2006-01-16 2007-07-26 Bussan Nanotech Research Institute Inc Method for manufacturing zeolite separation membrane
IL175270A0 (en) 2006-04-26 2006-09-05 Acktar Ltd Composite inorganic membrane for separation in fluid systems
US20090000475A1 (en) * 2007-06-29 2009-01-01 Curtis Robert Fekety Zeolite membrane structures and methods of making zeolite membrane structures
KR100966306B1 (en) * 2008-05-19 2010-06-28 김판채 Membrane and Media of metalIII orthophosphates for extraction of bioethanol of high purity and Preparation method of the same and bioethanol of high purity
WO2010098473A1 (en) * 2009-02-27 2010-09-02 三菱化学株式会社 Inorganic porous support-zeolite membrane complex, method for producing same and separation method using same
US8541633B2 (en) 2010-02-02 2013-09-24 Celanese International Corporation Processes for producing anhydrous ethanol compositions
US8668750B2 (en) 2010-02-02 2014-03-11 Celanese International Corporation Denatured fuel ethanol compositions for blending with gasoline or diesel fuel for use as motor fuels
US8222466B2 (en) 2010-02-02 2012-07-17 Celanese International Corporation Process for producing a water stream from ethanol production
US8680342B2 (en) 2010-05-07 2014-03-25 Celanese International Corporation Process for recovering alcohol produced by hydrogenating an acetic acid feed stream comprising water
US8846986B2 (en) 2011-04-26 2014-09-30 Celanese International Corporation Water separation from crude alcohol product
US8846988B2 (en) 2010-07-09 2014-09-30 Celanese International Corporation Liquid esterification for the production of alcohols
US9150474B2 (en) 2010-07-09 2015-10-06 Celanese International Corporation Reduction of acid within column through esterification during the production of alcohols
JP2012050930A (en) * 2010-09-01 2012-03-15 Hitachi Zosen Corp Zeolite separation membrane and method for producing the same
US9000233B2 (en) 2011-04-26 2015-04-07 Celanese International Corporation Process to recover alcohol with secondary reactors for hydrolysis of acetal
US8907141B2 (en) 2011-04-26 2014-12-09 Celanese International Corporation Process to recover alcohol with secondary reactors for esterification of acid
US8748675B2 (en) 2011-06-16 2014-06-10 Celanese International Corporation Extractive distillation of crude alcohol product
US8704012B2 (en) 2011-06-16 2014-04-22 Celanese International Corporation Distillation of crude alcohol product using entrainer
CN102351520B (en) * 2011-07-04 2012-12-26 中国地质大学（武汉） Method for preparing white ceramic by use of natural zeolite
US9000237B2 (en) 2012-12-20 2015-04-07 Celanese International Corporation Ethanol refining process using intermediate reboiler
US8926718B2 (en) 2013-03-15 2015-01-06 Celanese International Corporation Thermochemically produced ethanol compositions
KR102140264B1 (en) * 2013-12-20 2020-07-31 주식회사 엘지화학 Hollow fiber membrane
EP3124097B1 (en) 2014-03-28 2021-03-24 NGK Insulators, Ltd. Method for producing monolithic separation membrane structure
CN104307390A (en) * 2014-11-05 2015-01-28 华玉叶 Composite membrane
JP6511307B2 (en) * 2015-03-18 2019-05-15 学校法人早稲田大学 Zeolite separation membrane and separation module
AU2018397926A1 (en) * 2017-12-26 2020-06-25 Toray Industries, Inc. Gas separation membrane, gas separation membrane element, and gas separation method
DE112018006869T5 (en) * 2018-01-16 2020-10-15 Ngk Insulators, Ltd. Zeolite membrane complex and process for the production of a zeolite membrane complex
CN111699032B (en) * 2018-02-15 2022-07-08 日本碍子株式会社 Gas separation device, gas separation method, and gas separation membrane
CN111902202B (en) * 2018-03-30 2022-11-04 日本碍子株式会社 Ceramic support, zeolite membrane composite, method for producing zeolite membrane composite, and separation method
CN115976468A (en) * 2022-12-22 2023-04-18 深圳怡诚新材料有限公司 Super-hydrophilic film layer and preparation method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0659469A2 (en) * 1993-12-27 1995-06-28 MITSUI ENGINEERING & SHIPBUILDING CO., LTD Membrane for liquid mixture separation
US5871650A (en) * 1994-07-08 1999-02-16 Exxon Research And Engineering Company Supported zeolite membranes with controlled crystal width and preferred orientation grown on a growth enhancing layer
WO2000038910A1 (en) * 1998-12-30 2000-07-06 Corning Incorporated Zeolite membrane and a process for the production thereof
WO2002066141A2 (en) * 2001-02-17 2002-08-29 Aaflowsystems Gmbh & Co. Kg Filter body

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2501825B2 (en) * 1987-05-26 1996-05-29 出光興産株式会社 Method for producing membranous synthetic zeolite
US5221484A (en) * 1991-01-10 1993-06-22 Ceramem Separations Limited Partnership Catalytic filtration device and method
US5198007A (en) * 1991-12-05 1993-03-30 The Dow Chemical Company Filter including a porous discriminating layer on a fused single crystal acicular ceramic support, and method for making the same
GB9413863D0 (en) * 1994-07-08 1994-08-24 Exxon Chemical Patents Inc Molecular sieves and processes for their manufacture
EP1118378A1 (en) * 1998-08-28 2001-07-25 Toray Industries, Inc. Transmittable film, electrolytic capacitor, method for preparing zeolite film, mfi type zeolite film, and method for separation
JP2001062265A (en) * 1999-08-27 2001-03-13 Kyocera Corp Gas separation filter and its production
JP4693267B2 (en) * 2001-03-30 2011-06-01 京セラ株式会社 Inorganic porous material for gas separation filter, gas separation filter and method for producing the same
JP2002293656A (en) 2001-03-30 2002-10-09 Kyocera Corp Porous composite and its manufacturing method
JP4721575B2 (en) * 2001-08-29 2011-07-13 京セラ株式会社 Exposure equipment
JP2003071258A (en) * 2001-09-05 2003-03-11 Toshiba Ceramics Co Ltd Porous base plate
CN1262339C (en) * 2004-03-25 2006-07-05 复旦大学 New type nano SiO2 separation membrane and preparation method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0659469A2 (en) * 1993-12-27 1995-06-28 MITSUI ENGINEERING & SHIPBUILDING CO., LTD Membrane for liquid mixture separation
US5871650A (en) * 1994-07-08 1999-02-16 Exxon Research And Engineering Company Supported zeolite membranes with controlled crystal width and preferred orientation grown on a growth enhancing layer
WO2000038910A1 (en) * 1998-12-30 2000-07-06 Corning Incorporated Zeolite membrane and a process for the production thereof
WO2002066141A2 (en) * 2001-02-17 2002-08-29 Aaflowsystems Gmbh & Co. Kg Filter body

Also Published As

Publication number Publication date
WO2005087356A1 (en) 2005-09-22
JPWO2005087356A1 (en) 2007-08-09
US20110253619A1 (en) 2011-10-20
KR100814571B1 (en) 2008-03-17
BRPI0508601A (en) 2007-07-31
EP1726354A1 (en) 2006-11-29
CN1929901A (en) 2007-03-14
CN1929901B (en) 2011-06-22
KR20060122957A (en) 2006-11-30
US20070138083A1 (en) 2007-06-21
JP3868479B2 (en) 2007-01-17
CN101502760A (en) 2009-08-12

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