EP1653567A1 - Connection modul for a connector allowing to connect simultaneously a huge number of electrical contacts - Google Patents

Abstract

First plug connection module (16) for simultaneous connection of several electrical contacts between a test signal generator (20) and a measuring chart (12)(sic) of a manually operated device (10) has element (34) rotating around axis (32) and an attachment coupled to it which receives a counter-piece (36) of a second plug connection module (18), which is displaced vertically to axis 32 on rotation of element (34). An independent claim is included for the second plug connection module.

Description

The invention relates to a first connector module of a connector for simultaneously connecting a plurality of electrical contacts between a test signal generator and a measurement card of a handling device that supplies the measurement card to be tested elements.

Furthermore, the invention relates to a second connector module of such a connector.

Test signal generators, measurement boards, and handling devices are used in testing wafers and integrated circuits. The test signal generators that are common also referred to as a "test head", are capable of providing a variety of different signals for testing. The test signal generator is connected to the measuring card, which in turn is periodically equipped by the handling device with components to be tested and optionally also processed signals that are exchanged between the test device and the elements to be tested. The components to be tested are often referred to as "devices under test", from which the designation of the measuring card is derived as a "DUT board". Handling devices are often referred to as "handler / wafer prober".

A typical test time for a whole series or batch of devices is on the order of a few hours to several days. The testing of a batch is usually followed by the examination of another batch, which requires a different signal conditioning and thus a different, new measuring card. To remove the old measuring card from the device network and to integrate the new measuring card, the connection between the test signal generator and the measuring card must be opened and closed.

For connecting test signal generator and measuring card to the handling device, the so-called direct docking is known in this context. This is a direct connection of the "testhead" with the help of a manipulator on the "handler". This solution is very expensive (typical cost 80000 euros per docking system) and needs because of the combination of test signal generator, manipulator and handling device a lot of space. In addition, the contacting reacts very sensitive to shocks against the handling device because of the direct connection.

Another known method for opening and closing the connector provides a cable connection with the above-mentioned connector modules instead of the direct docking. When connecting one of the connector modules is guided by guide rails which are attached to the other connector module. Because of the high test signal generator complexity, several hundred pairs of contacts are usually to be connected or disconnected in such connectors. The large number of contacts leads on the one hand to a high packing density of the contact arrangement in the Plug connection modules and on the other hand to a high, resulting from the sum of the resistances of each individual contact pairs total resistance, which must be overcome when connecting the connector modules. A typical value for the total resistance to be overcome is 500 Newton for a plug connection with several hundred contact pairs. Such forces are difficult to apply manually without tools and can also lead to damage to individual contacts even with small inaccuracies in the leadership. In order to avoid damage to the contacts, all contacts must contact each other at the same time as possible when plugging together, which requires precise guidance. The high pull-in forces and pull-out forces make it difficult to connect and disconnect manually. An exchange of defective contacts, which can be damaged due to the high forces with insufficiently precise guidance is very complicated and expensive, especially if the entire test device fails during the repair.

Against this background, the object of the invention is to provide plug-in modules that reduce the risk of damage to contacts. The plug connection modules should continue to be able to be assembled and disconnected manually, both quickly and easily and reliably. It goes without saying that the solution should also be cost-effective.

This object is achieved in a first connector module of the type mentioned above in that the first connector module has a rotatable about a rotation axis element and coupled to the rotatable member receptacle receiving a counterpart of a second connector module and upon rotation of the element relative to the first Plug connector translationally moves, wherein the translational displacement is perpendicular to the axis of rotation.

Furthermore, this object is achieved in a second connector module of the type mentioned in that the second connector module has a counterpart which is adapted to be received in a receptacle which is coupled to a rotatable about an axis of rotation element of a first connector module, and in a rotation of the element undergoes a translational displacement relative to the first connector element, wherein the translational displacement is perpendicular to the axis of rotation.

By these features, the object of the invention is completely solved.

The translational displacement takes place for connecting in one direction and for releasing in the other direction. The generation of the translational movement from a rotation with a rotation axis perpendicular to the translatory movement allows a translation of a small translation movement in the order of a few millimeters into a rotational movement over a larger rotation angle range. With the help of a lever arm, the closing and opening of the connection can then be done sensitively manually and despite the possibly high resistance. As a result, with simple designs, the advantages of manual handling can be maintained while reducing the risk of damage to contacts. In other words, the invention allows a waiver of the expensive and shock-sensitive manipulator solution without the previously associated with the use of manually connected and to be solved cable connections dangers of damage to plug contacts. Overall, a cost-effective construction of a measuring cell results in a fast setting up of the measurement setup, that is to say a fast contacting of test signal generator and measurement card to the handling device.

In the context of embodiments of the first connector module is preferred that the receptacle is integrated into the rotatable element and that the rotatable element has an eccentrically extending about a pivot point of the rotatable member path on which the counterpart is guided.

Such integration provides a very compact and stable solution. The high contact forces are overcome by a flat rising eccentric curve during rotation.

It is also preferable that the web has a spirally extending portion.

In cooperation with the other features, a spiral portion of a continuous rotary motion produces a continuous translational motion without discontinuities. The force required to overcome the resistance during opening and closing can therefore be metered in particularly sensitively.

Furthermore, it is preferred that the web is defined by a gate arranged at least partially within the volume of the rotatable element. Alternatively, it is preferable that the web is defined by a guide rail extending on the rotatable member.

Both alternatives are compact and stable solutions, with the slotted solution being flatter, while the guide rail may be easier to manufacture.

It is also preferable that the web has a metallic surface, resulting in an advantageously high wear resistance.

This advantage can be further increased by the fact that the web has a titanium nitride surface, since titanium nitride is known to be particularly resistant to wear.

It is also preferable that the rotatable element is made of metal.

Such a configuration is characterized by a high rigidity and strength.

A further preferred embodiment is characterized by a non-rotatably connected to the element lever for manually rotating the rotatable element.

The non-rotatably connected lever provides a predeterminable with the lever length translation, with which the manual operation of the rotatable member is converted into a translational movement of the contacts.

It is further preferred that the web at a predetermined relative position of the first Plug-in module and the second connector module has an edge, which run over at a certain angle of rotation of the lever of the counterpart, thereby generating a jerk in the movement of the counterpart.

The jerk provides a haptic feedback when reaching a predetermined lever position and thus a predetermined position of contacts. By the haptic signaling a manual operation of the device is facilitated and also all the elements involved are spared in real operation, since it is not necessary to actuate the device in each case until it reaches structurally determined stops.

With regard to embodiments of the second connector module is preferred that the counterpart has a storage that allows unwinding of the counterpart on the web.

By rolling the counterpart on the web, the wear of the web and the counterpart is further reduced.

Further advantages will become apparent from the description and the accompanying figures.

It is understood that the features mentioned above and those yet to be explained below can be used not only in the particular combination given, but also in other combinations or in isolation, without departing from the scope of the present invention.

drawings

Fig. 1

eine Gesamtansicht eines Messaufbaus aus Testsignalgenerator, Handhabungsvorrichtung mit Messkarte und Steckverbindungsmodulen;

Fig.2

eine Draufsicht auf das drehbare Element bei einer Aufnahme des Gegenstücks in einer ersten Drehwinkelposition;

Fig.3

eine Draufsicht auf das drehbare Element mit dem aufgenommenen Gegenstück in einer zweiten Drehwinkelposition,

Fig. 4

eine Vorderansicht des ersten Steckverbindungsmoduls; und

Fig. 5

eine Ausgestaltung des Gegenstücks des zweiten Steckverbindungsmoduls.

Embodiments of the invention are illustrated in the drawings and are explained in more detail in the following description. It shows, in schematic form:

Fig. 1

an overall view of a measurement structure of test signal generator, handling device with measuring card and connector modules;

Fig.2

a plan view of the rotatable element in a recording of the counterpart in a first rotational angular position;

Figure 3

a plan view of the rotatable member with the recorded counterpart in a second rotational angular position,

Fig. 4

a front view of the first connector module; and

Fig. 5

An embodiment of the counterpart of the second connector module.

FIG. 1 shows a handling device 10 to which a measurement card 12 is mounted. The handling device feeds the measurement card 12 elements to be tested, for example integrated circuits or wafers of semiconductor material, so that the measurement card 12 electrically contacts the elements to be tested. Via a cable 14 and plug-in connection modules 16 and 18, a test signal generator 20 exchanges electrical signals with the measuring card 12. In this case, the test signal generator 20 is able to provide a wide range of analog and digital signals with different signal shapes and frequencies in different voltage ranges. The measurement card 12 has a circuit which processes the signals from the test signal generator 20 for the circuit or wafer of semiconductor material to be tested. In order to enable individual signal processing for different types of integrated circuits, the measurement card 12 is replaceable.

To replace the measurement card 12 and the signal connection to the test signal generator 20 must be opened. Serve the plug connection modules 16 and 18, wherein a first connector module 16 is connected to the cable 14 and a second connector module 18 is connected to the measuring card 12. The first connector module 16 has a plurality of electrical contacts 22 which are complementary to a plurality of contacts of the second connector element 18. Due to the high tester complexity u. Approx. 500 plug contacts at the interface to the measuring card necessary. In order to avoid damage to the electrical contacts 22 in the first plug-in connection module 16 and also in the second plug-in connection module 18, all pairs of contacts must, as far as possible, make contact simultaneously during mating to get.

Because of the high packing density, this requires precise guidance when connecting the plug connection modules 16 and 18. To ensure this, the first plug connection module 16 has guide rails 24 and 26, which are guided during insertion of the plug connection modules 16 and 18 into receiving rails 28 and 30 of the measuring card 12 become. Because of the high pull-in forces and pull-out forces of, for example, approximately 500 N at approximately 500 contact pairs, a reliable mating of the plug-in connection modules 16 and 18 is difficult without aids.

For sensitively overcoming the high pull-in forces and pull-out forces, the first plug connection module 16 has an element 34 rotatable about an axis of rotation 32 and a receptacle coupled thereto, which receives a counterpart 36 which is firmly connected to the second plug connection module 18 via a feed plate 38. The recording is z. B. realized as eccentric about a pivot point of the rotatable member 34 running backdrop that leads the counterpart 36. Such a backdrop will be explained in more detail below with reference to Figure 2 and Figure 3. The guide is made so that the counterpart 36 is displaced translationally relative to the first connector module 16 upon rotation of the element 34. The displacement is perpendicular to the axis of rotation 32 in the feed direction or extension direction of the first connector module 16 relative to the second connector module 18. The rotatable member 34 is moved manually via the rotationally fixed to the element 34 connected lever 40.

FIG. 2 shows a top view of the rotatable element 34 in a first rotational angle position. To illustrate the function, in FIG. 2, as in FIG. 3, only the elements cooperating to produce the translational relative movement, namely a section of the lever 40 and the counterpart 36, are shown. The first rotational angle position is characterized in that an opening 42 of a recessed into the rotatable member 34 backdrop 44 to the second connector module 18 of Figure 1 shows and thus can receive the counterpart 36. The gate 44 thus forms an embodiment of the recording mentioned in connection with FIG. At a Rotation of the element 34 performs a path 46, the counterpart 36 steadily closer to a pivot point 48 zoom. For this purpose, the link 44 and with it the web 46 extends eccentrically about the pivot point 48. The eccentricity is generated for example by an at least partially spiral course of the link 44 with the web 46. As is apparent from the figure 2, a distance d _1 in the first rotational angular position is maximum.

FIG. 3 shows the rotatable element 34 after a rotation of the lever 40 into a second rotational angle position. The second rotational angular position shows that the counterpart 36 has been brought closer to the pivot point 48 along the rotating path 46, so that the distance d_1 from FIG. 2 has been reduced to a smaller value d_2 in FIG. By accompanying the reduction of the distance translational movement of the counterpart 36, the plug connection modules 16 and 18 are contracted from Figure 1, so that the rotational angle position of Figure 3 the mated state and the rotational angle position of Figure 2 the released state of the connector from the connector modules sixteenth and 18 corresponds.

For a long life, the rotatable member 34 is preferably made of metal. At least the track 46 should have a metallic surface, with a hardened metallic surface, such as a titanium-nitride surface, further increasing wear resistance. Within the scope of an embodiment, the track 46 of the link 44 has an edge 50 which, when reaching the second rotational angular position from FIG. 3, is run over by the counterpart 36. As a result, the resistance forces that can be felt on the lever 40 change briefly, so that passing over the edge 50 results in haptic signaling, which signals the reaching or leaving of the second rotational angular position.

Figure 4 shows a front view of the first connector module 16 with an embodiment of a guide the relative movement of the connector modules 16 and 18 when connecting or disconnecting the connector. In this case, like numerals, as in the other figures also, each same elements. In connection with the figures 1 to 3 already explained element are therefore not explained separately in connection with the figures 4 and 5 again.

The essential elements of Figure 4 are a guide surface 52 and the stub shaft 54, which cooperate as further guide elements with the intake plate 38 already shown in Figure 2. A correspondingly designed intake plate 38 is shown in FIG. The intake plate 38 is characterized by a slot 56 whose internal dimensions are precisely matched to the outer diameter of the stub shaft 54. The collection of the first connector module 16 in the second connector module 18 is done so as follows: First, the guide rails 24, 26 of the first connector module 16 are inserted into the receiving rails 28, 30 of the second connector module 16 and pushed so far until plug contacts, the z. B. are arranged in the first connector module 16, in socket contacts, which are arranged as complementary contacts in the second connector module 18, pre-centered.

The illustrated in Figure 5 fork guide the intake plate 38 then includes the stub shaft 54 and the counterpart 36 is inserted into the opening 42 of the rotatable member 34. The high Kontaktierkräfte when closing the connector from the connector modules 16 and 18 are overcome by a flat rising cam and the lever 40 by rotation of the element 34. In this case, as it were a Feinfiihrung the relative movement between the connector modules 16 and 18 when pulling into the (or expressions from the) contacting via the fork-shaped slot 56 in the intake plate 38 and the stub shaft 54 and by the sliding of the intake plate 38 over the surface 52nd

The counterpart 36 may have a bearing, which is realized in the simplest case by a sleeve 58 which is rotatably mounted on a fixedly connected to the intake plate 38 feeder pin 60.

Claims (11)

First plug connection module (16) of a plug connection for simultaneously connecting a plurality of electrical contacts (22) between a test signal generator (20) and a measuring card (12) of a handling device (10) which feeds elements to be tested to the measuring card (12), characterized in that the first connector module (16) has a member (34) rotatable about an axis of rotation (32) and a receptacle coupled to the rotatable member which receives a counterpart (36) of a second connector module (18) and upon rotation of the member (34) relative to the first connector module (16) moves translationally, wherein the translational displacement is perpendicular to the axis of rotation (32). The first connector module (16) according to claim 1, characterized in that the receptacle is integrated in the rotatable element (34) and that the rotatable element (34) has a track (46) extending eccentrically about a pivot point (48) of the rotatable element (34) ), on which the counterpart (36) is guided. The first connector module (16) according to claim 2, characterized in that the track (46) has a helically extending portion. The first connector module (16) according to claim 2 or 3, characterized in that the web (46) is defined by a guide (44) arranged at least partially within the volume of the rotatable element (34). First connector module (16) according to claim 4, characterized in that the web (46) has a metallic surface. The first connector module (16) according to claim 5, characterized in that the track (46) has a titanium nitride surface. First plug connection module (16) according to at least one of the preceding claims, characterized in that the rotatable element (34) consists of metal. First plug connection module (16) according to at least one of the preceding claims, characterized by a lever (40) connected in a rotationally fixed manner to the element (34) for manual rotation of the rotatable element (34). The first connector module (16) according to claim 8, characterized in that the web (46) at a predetermined relative position of the first connector module (16) and second connector module (18) has an edge (50) at a certain angle of rotation of the lever (40 ) is run over by the counterpart (38) and generates a jerk in the movement of the counterpart (38). Second plug-in module (18) of a plug connection for connecting a plurality of electrical contacts (22) between a test signal generator (20) and a measuring card (12) of a handling device (10) which feeds elements to be tested to the measuring card (12), characterized in that the second plug connection module (18) has a counterpart (38) which is designed to be received in a receptacle which is coupled to a rotation axis (32) rotatable element (34) of a first plug connection module (16), in a Rotation of the element (34) undergoes a translatory displacement relative to the first connector element (16), wherein the translational displacement is perpendicular to the axis of rotation (32). Second plug-in module (18) according to claim 10, characterized in that the counterpart (38) has a bearing (58, 60) which allows unwinding of the counterpart (38) on the web (46).

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