EP1647522A3 - Nanoelectromechanical transistors and switch systems - Google Patents

Nanoelectromechanical transistors and switch systems Download PDF

Info

Publication number
EP1647522A3
EP1647522A3 EP06000094A EP06000094A EP1647522A3 EP 1647522 A3 EP1647522 A3 EP 1647522A3 EP 06000094 A EP06000094 A EP 06000094A EP 06000094 A EP06000094 A EP 06000094A EP 1647522 A3 EP1647522 A3 EP 1647522A3
Authority
EP
European Patent Office
Prior art keywords
nanotube
free
voltage source
electric charge
nemss
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06000094A
Other languages
German (de)
French (fr)
Other versions
EP1647522A2 (en
Inventor
Joseph F. Pinkerton
John C. Harlan
Jeffrey D. Mullen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ambient Systems Inc
Original Assignee
Ambient Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ambient Systems Inc filed Critical Ambient Systems Inc
Publication of EP1647522A2 publication Critical patent/EP1647522A2/en
Publication of EP1647522A3 publication Critical patent/EP1647522A3/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/02—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using elements whose operation depends upon chemical change
    • G11C13/025—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using elements whose operation depends upon chemical change using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0094—Switches making use of nanoelectromechanical systems [NEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/014—Switches characterised by the shape having a cantilever fixed on one side connected to one or more dimples
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/10—Resistive cells; Technology aspects
    • G11C2213/16—Memory cell being a nanotube, e.g. suspended nanotube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/02—Contacts characterised by the material thereof
    • H01H1/021—Composite material
    • H01H1/027—Composite material containing carbon particles or fibres
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/724—Devices having flexible or movable element
    • Y10S977/732—Nanocantilever

Abstract

Nanoelecttomechanical switch systems (NEMSS) that are structured around the mechanical manipulation of nanotubes are provided. Such NEMSS can realize the functionality of, for example, automatic switches, adjustable diodes, amplifiers, inverters, variable resistors, pulse position modulators (PPMs), and transistors. In one embodiment, a nanotube is anchored at one end to a base member. The nanotube is also coupled to a voltage source This voltage source creates an electric charge at the tip of the free-moving-end of the nanotube that is representative of the polarity and intensity of the voltage source. The free-moving end of this nanotnbe can be electrically controlled by applying an electric charge to a nearby charge member layer that is either of the same (repelling) or opposite (attracting) polarity of the nanotube. A contact layer is then placed in the proximity of the free-moving end of the nanotube such that when a particular electric charge is placed on the nanotube, the nanotube electrically couples the contact layer.
EP06000094A 2003-06-02 2003-12-18 Nanoelectromechanical transistors and switch systems Withdrawn EP1647522A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/453,783 US20040238907A1 (en) 2003-06-02 2003-06-02 Nanoelectromechanical transistors and switch systems
EP03817176A EP1628907A1 (en) 2003-06-02 2003-12-18 Nanoelectromechanical transistors and switch systems

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP03817176A Division EP1628907A1 (en) 2003-06-02 2003-12-18 Nanoelectromechanical transistors and switch systems

Publications (2)

Publication Number Publication Date
EP1647522A2 EP1647522A2 (en) 2006-04-19
EP1647522A3 true EP1647522A3 (en) 2008-07-02

Family

ID=33452131

Family Applications (2)

Application Number Title Priority Date Filing Date
EP03817176A Withdrawn EP1628907A1 (en) 2003-06-02 2003-12-18 Nanoelectromechanical transistors and switch systems
EP06000094A Withdrawn EP1647522A3 (en) 2003-06-02 2003-12-18 Nanoelectromechanical transistors and switch systems

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP03817176A Withdrawn EP1628907A1 (en) 2003-06-02 2003-12-18 Nanoelectromechanical transistors and switch systems

Country Status (5)

Country Link
US (2) US20040238907A1 (en)
EP (2) EP1628907A1 (en)
JP (1) JP2006526871A (en)
AU (1) AU2003297422A1 (en)
WO (1) WO2004108586A1 (en)

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