EP1636844A2 - Structured semiconductor element for reducing charging effects - Google Patents

Structured semiconductor element for reducing charging effects

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Publication number
EP1636844A2
EP1636844A2 EP04741625A EP04741625A EP1636844A2 EP 1636844 A2 EP1636844 A2 EP 1636844A2 EP 04741625 A EP04741625 A EP 04741625A EP 04741625 A EP04741625 A EP 04741625A EP 1636844 A2 EP1636844 A2 EP 1636844A2
Authority
EP
European Patent Office
Prior art keywords
semiconductor circuit
circuit element
element according
semiconductor
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP04741625A
Other languages
German (de)
French (fr)
Inventor
Rolf-Peter Vollertsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of EP1636844A2 publication Critical patent/EP1636844A2/en
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/62—Protection against overvoltage, e.g. fuses, shunts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001—Internal layers
    • H01L2224/05075—Plural internal layers
    • H01L2224/0508—Plural internal layers being stacked
    • H01L2224/05085—Plural internal layers being stacked with additional elements, e.g. vias arrays, interposed between the stacked layers
    • H01L2224/05089—Disposition of the additional element
    • H01L2224/05093—Disposition of the additional element of a plurality of vias
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001—Internal layers
    • H01L2224/05075—Plural internal layers
    • H01L2224/0508—Plural internal layers being stacked
    • H01L2224/05085—Plural internal layers being stacked with additional elements, e.g. vias arrays, interposed between the stacked layers
    • H01L2224/05089—Disposition of the additional element
    • H01L2224/05093—Disposition of the additional element of a plurality of vias
    • H01L2224/05096—Uniform arrangement, i.e. array
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/05599—Material
    • H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/05624—Aluminium [Al] as principal constituent
    • H—ELECTRICITY
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    • H01L2924/01005—Boron [B]
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    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
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    • H01L2924/01013—Aluminum [Al]
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    • H01L2924/01014—Silicon [Si]
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    • H01L2924/0102—Calcium [Ca]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01032—Germanium [Ge]
    • H—ELECTRICITY
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    • H01L2924/01033—Arsenic [As]
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    • H—ELECTRICITY
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    • H01L2924/01068—Erbium [Er]
    • H—ELECTRICITY
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    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901—Structure
    • H01L2924/1904—Component type
    • H01L2924/19043—Component type being a resistor
    • H—ELECTRICITY
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    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/30105—Capacitance

Definitions

  • the present invention relates to a semiconductor circuit element for reducing undesired charging effects, in particular a connection element of test structures for semiconductor circuits.
  • Test structures are required for a technological process control for the measurement and evaluation of technological and electrical parameters at certain technological times.
  • the DD 290 290 A5 is listed as an example. It describes how, in the manufacture of DRAM memory circuits, the quality of the gate oxides by measuring breakdown voltage strength and the quality of poly-Si or AI interconnects with regard to the frequency of interruptions or short-circuits as a random sample in the manufacturing process is to be checked. There it is also described that, by using special templates in the technological section of the conductor pattern structuring on one or more wafers instead of the circuits, test structures are to be produced which have been treated identically in all processing steps and therefore contain no further influencing variables.
  • test structure for integrated circuits which is used for insulation control in integrated circuits, and in which electrically conductive connections between isolation areas and substrate doping and the electrical isolation between isolated isolation areas can be determined during and after completion of the wafer processing , In order to be able to access the test structures, they must be electrically connected to evaluation circuits. Connection elements are required for this. Such connection elements are known as so-called pads.
  • pads of this type are significant antennas which can collect undesired charges during the manufacturing process, for example during plasma or implantation processes, and can transmit them to test structures. These charges can damage the gate oxide of transistor or gate oxide test structures.
  • cases have become known in which the unwanted antenna effect of a pad has simulated a charging problem that is not relevant to the product. In order to still be able to use the test structure sensibly, the charge captured by the pad must be reduced.
  • the present invention is based on the object of avoiding the disadvantages of conventional pads and of creating a semiconductor circuit element which reduces undesired charging effects and which, in particular in manufacturing processes, represents a connection element for test structures in which the area which acts as an antenna is reduced.
  • the invention reduces the area of the semiconductor circuit element which acts as an antenna, as a result of which the charging is reduced and the test structure is again relevant to the product, so that it can be used again for the purposes for which it was designed.
  • interconnect structures are etched into the pad. Just these interconnects are connected to the test structure - and not the unstructured rest - which means that depending on the structure of the pad, the antenna ratio decreases by a factor of about 100 and the damaging effect is reduced accordingly.
  • the surface of the semiconductor circuit element has interconnect structures that are electrically insulated from the remaining surface of the semiconductor circuit element, and that only the interconnect structures are connected to downstream semiconductor circuit elements.
  • the permissible area free of interconnect structures can be designed on the surface of the semiconductor circuit element such that it is not larger than the expected minimum contact area of a contact needle when the semiconductor circuit element is contacted.
  • the semiconductor circuit element can be used particularly advantageously as a connection pad for test structures, but it can also be designed as a protective structure for charge-sensitive layers.
  • the surface of the semiconductor circuit element is metallic, it being particularly advantageous if the metallic surface of the semiconductor circuit element is formed by an aluminum layer.
  • the semiconductor circuit element can be produced particularly easily if it is structured by etching, the etching structure of the semiconductor circuit element being formed by trenches whose trench width is a fraction of the width of the interconnect and a single or multiple of a minimum permissible metal-metal distance.
  • the trenches between conductive path structures electrically connected to downstream semiconductor circuit elements and surface areas of the semiconductor circuit element not electrically connected to downstream semiconductor circuit elements are bridged when contacting the surface of the semiconductor circuit element with contact needles.
  • contact needles When the surface of the semiconductor circuit element comes into contact with contact needles, a short circuit between the connected and the non-connected surface areas occurs after the contact pins have been put on, but this is not harmful but is welcome because it reduces the contact resistance.
  • the adjustment effort increases, which can be accepted if the premise is to reduce the antenna ratio.
  • Figure 1 shows a structure according to the invention, highly schematic and enlarged
  • FIG. 2 shows a particularly simple variant of the invention
  • FIG. 3 shows a cross section through a structure according to FIGS
  • Figure 4 shows a cross section through a structure according to the prior art.
  • FIG. 1 A structure shown in a highly schematic and enlarged manner in FIG. 1 represents a semiconductor circuit element in the form of a connection pad 1 for a test structure outer contour line 2 represents the pad outline of a connection pad 1, which also corresponds to the pad outline of a conventional connection pad, which in reality has a size of approx. 50 x 70 ⁇ m 2 , for example.
  • This area of approx. 50 x 70 ⁇ m 2 represents - insofar as it is unstructured according to the prior art - a significant antenna area for a downstream semiconductor circuit if - as is customary in the prior art - it is connected to the downstream semiconductor circuit.
  • connection pad 1 In order to be able to use test structures sensibly, the charge captured by connection pad 1 must be reduced, to which the invention contributes by structuring the surface of the pad.
  • the reference number 3 designates interconnects which are etched into the surface 4. An etching process creates trenches 6 between the interconnects 3 and the unstructured remainder 5 of the surface 4 of the connection pad 1. These trenches 6 electrically separate the interconnects 3 from the metallic residual surface 5 of the connection pad 1.
  • the trenches 6 are illustrated by the lines that run parallel to the outlines of the interconnects 3.
  • the drawing is not to scale in all the figures and is also not proportional to the other figures.
  • Conductors 3 are surrounded all around by an associated trench 6, which completely electrically separates the interconnect 3 from the non-structured residual surface 5.
  • the width of the interconnects 3 is selected such that it corresponds to the usual width of feed lines between a pad 1 and a line to be connected
  • Test structure corresponds, this is for example approx. 1.5 ⁇ m.
  • design rules for the Fixed semiconductor switching elements are specified in so-called design rules for the Fixed semiconductor switching elements, but the invention is not limited to such a structured structuring; accordingly, it can also have other dimensions.
  • the selected width of the trenches 6 is intended to ensure a quick and complete separation of the interconnect 3 from the pad 1 during the etching.
  • the width of the trenches 6 should not be much larger than a few micrometers ( ⁇ m) in order to support short-circuiting by smeared aluminum on the surface 4 or 5 when a contact needle 9 is placed on it, the material of the surface naturally also being different than aluminum can be.
  • connection pad 1 The essence of the invention - as already mentioned several times - is to reduce the active antenna area of a connection pad 1. This is done by structuring the surface of the pad 1 with the aid of the interconnects 3, which are etched from the rest of the surface by trenches 6 Pads are separated. Only these interconnects 3 are electrically connected to the semiconductor circuit elements 8 arranged downstream of them. For this purpose, it must be ensured in the contact plane 7 below the metal level of the pad 1 (see FIG. 3) that only the interconnects 3 are electrically connected to the semiconductor circuit elements 8 arranged downstream. The remaining surface 5 must not be electrically connected to the downstream semiconductor switching elements 8.
  • FIG. 4 which represents the state of the art, shows a likewise highly schematic cross section through a semiconductor component.
  • a certain problem with the pads 1 structured according to the invention is the contacting of the pad 1 with contact needles 9, which serve to electrically connect the pad 1 to the external evaluation circuit.
  • a conventional contact needle 9 has a contact area of approximately 10 ⁇ m in diameter.
  • the contact needle is easily placed anywhere on the surface 5 4 of the pad 1 4 and the electrical contact to the pad 1 4 and the downstream semiconductor circuit element 8.1 is established.
  • the contact needle 9 would accordingly have to be placed exactly on an interconnect 3.
  • the surface 4 of the pad 1 is structured in such a way that no surface area larger than that can form on the structured surface 4 of the pad 1 Diameter of approximately 10 ⁇ m of the contact needle 9.
  • a further advantageous effect with the pad 1 according to the invention is that the regions of the surface 5 of the pad 1 that are not electrically connected to the downstream semiconductor circuit elements 8 can also be used for better contacting.
  • the contact needle 9 placed on the surface 4/5 of the pad 1 short-circuits the hit interconnect 3 and the likewise covered areas of the non-connected surface 5 of the pad 1.
  • the short circuit after the contact needle 9 has been put on reduces the contact resistance, but is not harmful with regard to undesired charging, because the part 5 of the surface of the pad 1 which is not connected is then no longer effective as an antenna.
  • the exemplary embodiment according to FIG. 2 shows that in principle one interconnect 3 is sufficient to implement the invention with advantage. Since, in practice, a contact needle 9 is placed rather centrally, a corresponding interconnect 3 in the center of the surface 4 of the pad 1 can also be contacted with the corresponding adjustment effort. Since the contact is not made punctually, but rather in a sliding manner on a track-like area, non-connected areas in the vicinity of the conductor track 3 are short-circuited when contacting the contact area of the contact needle 9 and contribute to reducing the contact resistance. Although there is a large surface area of the pad 1, the active antenna area of the pad 1 can be considerably reduced with this measure, so that the charge captured by the pad 1 is reduced by a factor of approximately 100.
  • connection pads of test structures but is also suitable as a protective structure for charging-sensitive semiconductor components.
  • the pad structured according to the invention represents a semiconductor circuit element which has a small capacitance until it is actually contacted.
  • Such a semiconductor circuit element can also be structured in the “second” level, i.e. in the downstream semiconductor circuit level according to FIG. 3.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Charge And Discharge Circuits For Batteries Or The Like (AREA)

Abstract

The invention relates to a semiconductor circuit element (1) for reducing undesirable charging effects, in particular a connection element of test structures for semiconductor circuits. The surface (4) of said semiconductor element (1) comprises printed conductors (3) that are electrically insulated from the remainder of the surface (5) of the semiconductor element (1). In said element, only the printed conductors (3) are connected to semiconductor circuit elements (8) that are situated downstream.

Description

Beschreibungdescription
Strukturiertes Halbleiterelement zur Reduzierung von Charg- ingeffektenStructured semiconductor element to reduce batch defects
Die vorliegende Erfindung bezieht sich auf ein Halbleiterschaltungselement zur Reduzierung von unerwünschten Aufladeeffekten, insbesondere ein Anschlusselement von Teststruktu- ren für Halbleiterschaltungen. Teststrukturen sind' für eine technologische Prozess-Steuerung zur Messung und Auswertung von technologischen und elektrischen Parametern zu bestimmten technologischen Zeitpunkten erforderlich.The present invention relates to a semiconductor circuit element for reducing undesired charging effects, in particular a connection element of test structures for semiconductor circuits. Test structures are required for a technological process control for the measurement and evaluation of technological and electrical parameters at certain technological times.
Als Beispiel sei die DD 290 290 A5 aufgeführt. Dort wird beschrieben, wie bei der Herstellung von DRAM-Speicherschaltkreisen die Qualität der Gateoxide auf dem Wege von Messungen der Durchbruchspannungsfestigkeit und die Qualität von Poly- Si- oder AI-Leitbahnen bezüglich der Häufigkeit von Unterbre- chungen oder Kurzschlüssen als Stichprobe im Fertigungspro- zess zu kontrollieren ist. Dort wird auch beschrieben, dass durch Nutzung von speziellen Schablonen im technologischen Abschnitt der Leiterbahnstrukturierung an einem oder mehreren Wafern statt der Schaltkreise Teststrukturen hergestellt wer- den sollen, die in allen Bearbeitungsschritten identische Behandlung erfahren haben und somit keine weiteren Einflussgrößen enthalten.The DD 290 290 A5 is listed as an example. It describes how, in the manufacture of DRAM memory circuits, the quality of the gate oxides by measuring breakdown voltage strength and the quality of poly-Si or AI interconnects with regard to the frequency of interruptions or short-circuits as a random sample in the manufacturing process is to be checked. There it is also described that, by using special templates in the technological section of the conductor pattern structuring on one or more wafers instead of the circuits, test structures are to be produced which have been treated identically in all processing steps and therefore contain no further influencing variables.
Aus der DD 261 672 AI ist eine Teststruktur für integrierte Schaltungen bekannt, die zur Isolationskontrolle in integrierten Schaltungen dient, und bei der elektrisch leitende Verbindungen zwischen Isolationsgebieten und Substratdotierungen sowie die elektrische Isolation zwischen voneinander getrennten Isolationsgebieten während als auch nach Abschluss der Waferbearbeitung ermittelt werden können. Um auf die Teststrukturen zugreifen zu können, müssen sie elektrisch an Auswerteschaltungen angeschlossen werden. Dazu sind Anschlusselemente erforderlich. Derartige Anschlusselemente sind als so genannte Pads bekannt.From DD 261 672 AI a test structure for integrated circuits is known, which is used for insulation control in integrated circuits, and in which electrically conductive connections between isolation areas and substrate doping and the electrical isolation between isolated isolation areas can be determined during and after completion of the wafer processing , In order to be able to access the test structures, they must be electrically connected to evaluation circuits. Connection elements are required for this. Such connection elements are known as so-called pads.
Derartige Pads sind durch ihre physikalisch erforderliche Größe signifikante Antennen, welche unerwünschte Ladungen während des Herstellungsprozesses, beispielsweise während Plasma- oder Implantationsprozessen einsammeln und auf Test- Strukturen übertragen können. Diese Ladungen können zu Schädigungen des Gate Oxides von Transistor- oder Gate Oxid Teststrukturen führen. In der Praxis sind Fälle bekannt geworden, bei denen durch die unerwünschte Antennenwirkung eines Pads ein nicht produktrelevantes Chargingproblem vorgetäuscht wur- de. Um die Teststruktur dennoch sinnvoll nutzen zu können, muss die vom Pad eingefangene Ladung verringert werden.Due to their physically required size, pads of this type are significant antennas which can collect undesired charges during the manufacturing process, for example during plasma or implantation processes, and can transmit them to test structures. These charges can damage the gate oxide of transistor or gate oxide test structures. In practice, cases have become known in which the unwanted antenna effect of a pad has simulated a charging problem that is not relevant to the product. In order to still be able to use the test structure sensibly, the charge captured by the pad must be reduced.
Der vorliegenden Erfindung liegt die Aufgabe zu Grunde, die Nachteile herkömmlicher Pads zu vermeiden und ein Halbleiter- schaltungselement zu schaffen, welches unerwünschte Auflade- effekte verringert und das insbesondere bei Herstellungsprozessen ein Anschlusselement für Teststrukturen darstellt, bei dem die als Antenne wirksame Fläche reduziert ist.The present invention is based on the object of avoiding the disadvantages of conventional pads and of creating a semiconductor circuit element which reduces undesired charging effects and which, in particular in manufacturing processes, represents a connection element for test structures in which the area which acts as an antenna is reduced.
Diese Aufgabe wird durch ein Halbleiterschaltungselement gelöst, welches die Merkmale des Anspruchs 1 aufweist. Durch die Merkmale der abhängigen Ansprüche wird die Erfindung noch weiter ausgestaltet.This object is achieved by a semiconductor circuit element which has the features of claim 1. The features of the dependent claims further develop the invention.
Die Erfindung reduziert die als Antenne wirksame Fläche des Halbleiterschaltungselements, dadurch wird das Charging verringert und die Teststruktur ist wieder produktrelevant, so dass sie wieder für die Zwecke genutzt werden kann, für die sie konzipiert wurde.The invention reduces the area of the semiconductor circuit element which acts as an antenna, as a result of which the charging is reduced and the test structure is again relevant to the product, so that it can be used again for the purposes for which it was designed.
Anstatt herkömmliche Halbleiterschaltungselemente als Pads zu verwenden, werden in das Pad Leitbahnstrukturen geätzt. Nur diese Leitbahnen werden an die Teststruktur angeschlossen - und nicht der unstrukturierte Rest - , wodurch das Antennenratio je nach Strukturierung des Pads um den Faktor von etwa 100 abnimmt und die schädigende Wirkung entsprechend redu- ziert ist .Instead of using conventional semiconductor circuit elements as pads, interconnect structures are etched into the pad. Just these interconnects are connected to the test structure - and not the unstructured rest - which means that depending on the structure of the pad, the antenna ratio decreases by a factor of about 100 and the damaging effect is reduced accordingly.
Die Vorteile des erfindungsgemäßen Halbleiterelements liegen darin, dass die Oberfläche des Halbleiterschaltungselements elektrisch von der Restoberfläche des Halbleiterschaltungs- elements isolierte Leitbahnstrukturen aufweist, und dass ausschließlich die Leitbahnstrukturen an nachgeordnete Halbleiterschaltungselemente angeschlossen sind.The advantages of the semiconductor element according to the invention are that the surface of the semiconductor circuit element has interconnect structures that are electrically insulated from the remaining surface of the semiconductor circuit element, and that only the interconnect structures are connected to downstream semiconductor circuit elements.
Weitere Vorteile sind darin zu sehen, dass auf der Oberfläche des Halbleiterschaltungselements die zulässige, von Leitbahnstrukturen freie Fläche so entworfen werden kann, dass sie nicht größer ist, als die zu erwartende minimale Kontaktfläche einer Kontaktnadel beim Kontaktieren des Halbleiterschaltungselements .Further advantages can be seen in the fact that the permissible area free of interconnect structures can be designed on the surface of the semiconductor circuit element such that it is not larger than the expected minimum contact area of a contact needle when the semiconductor circuit element is contacted.
Besonders vorteilhaft lässt sich das Halbleiterschaltungselement als Anschluss-Pad für Teststrukturen einsetzen, aber auch als Schutzstruktur für ladungsempfindliche Schichten kann es ausgebildet sein.The semiconductor circuit element can be used particularly advantageously as a connection pad for test structures, but it can also be designed as a protective structure for charge-sensitive layers.
Weitere Vorteile ergeben sich, wenn die Oberfläche des Halbleiterschaltungselements metallisch ausgebildet ist, wobei es besonders vorteilhaft ist, wenn die metallische Oberfläche des Halbleiterschaltungselements von einer Aluminiumschicht gebildet wird.Further advantages result if the surface of the semiconductor circuit element is metallic, it being particularly advantageous if the metallic surface of the semiconductor circuit element is formed by an aluminum layer.
Herstellen lässt sich das Halbleiterschaltungselement besonders einfach, wenn es durch Ätzen strukturiert wird, wobei die Ätzstruktur des Halbleiterschaltungselements von Gräben gebildet wird, deren Grabenbreite ein Bruchteil der Breite der Leitbahn und ein Ein- oder Vielfaches eines minimal zulässigen Metall-Metallabstands beträgt. Bei der Anwendung des Halbleiterschaltungselements ist es vorteilhaft, wenn die Gräben zwischen elektrisch an nachgeordneten Halbleiterschaltungselementen angeschlossenen Leit- bahnstrukturen und elektrisch an nachgeordneten Halbleiterschaltungselementen nicht angeschlossenen Oberflächenbereichen des Halbleiterschaltungselements beim Kontaktieren der Oberfläche des Halbleiterschaltungselements mit Kontaktnadeln überbrückt werden. Beim Kontaktieren der Oberfläche des Halb- leiterschaltungselements mit Kontaktnadeln entsteht nach dem Aufsetzten der Kontaktnadeln ein Kurzschluss zwischen den angeschlossenen und den nicht angeschlossenen Oberflächenbereichen, der aber nicht schädlich sondern willkommen ist, weil durch ihn der Kontaktwiderstand reduziert ist.The semiconductor circuit element can be produced particularly easily if it is structured by etching, the etching structure of the semiconductor circuit element being formed by trenches whose trench width is a fraction of the width of the interconnect and a single or multiple of a minimum permissible metal-metal distance. When using the semiconductor circuit element, it is advantageous if the trenches between conductive path structures electrically connected to downstream semiconductor circuit elements and surface areas of the semiconductor circuit element not electrically connected to downstream semiconductor circuit elements are bridged when contacting the surface of the semiconductor circuit element with contact needles. When the surface of the semiconductor circuit element comes into contact with contact needles, a short circuit between the connected and the non-connected surface areas occurs after the contact pins have been put on, but this is not harmful but is welcome because it reduces the contact resistance.
Es ist bei einigen Anwendungsfällen ausreichend, wenn zumindest ein Teilbereich der Oberfläche des Halbleiterschaltungselements mit einer Leitbahnstruktur versehen ist. Allerdings steigt in diesem Fall der Justieraufwand an, was in Kauf ge- nommen werden kann, wenn die Prämisse auf der Reduzierung der Antennenratio liegt.For some applications it is sufficient if at least a partial area of the surface of the semiconductor circuit element is provided with an interconnect structure. In this case, however, the adjustment effort increases, which can be accepted if the premise is to reduce the antenna ratio.
Mit Hilfe von Ausführungsbeispielen wird nachstehend die Erfindung anhand der Zeichnungen noch näher erläutert.With the help of exemplary embodiments, the invention is explained in more detail below with reference to the drawings.
Es zeigtIt shows
Figur 1 eine erfindungsgemäße Struktur, stark schematisiert und vergrößert dargestellt;Figure 1 shows a structure according to the invention, highly schematic and enlarged;
Figur 2 eine besonders einfache Variante der Erfindung; Figur 3 einen unmaßstäblich schematisierten Querschnitt durch eine Struktur gemäß Figur 2 undFigure 2 shows a particularly simple variant of the invention; FIG. 3 shows a cross section through a structure according to FIGS
Figur 4 einen Querschnitt durch eine Struktur nach dem Stand der Technik.Figure 4 shows a cross section through a structure according to the prior art.
Eine in Figur 1 stark schematisiert und vergrößert dargestellte Struktur stellt ein Halbleiterschaltungselement in Form eines Anschluss-Pads 1 für eine Teststruktur dar. Die äußere Umrisslinie 2 stellt den Pad-Umriss eines Anschluss- Pads 1 dar, der auch dem Pad-Umriss eines herkömmlichen An- schluss-Pads entspricht, welcher in der Realität z.B. eine Größe von ca. 50 x 70 μm2 aufweist. Diese Fläche von ca. 50 x 70 μm2 stellt - sofern sie gemäß dem Stand der Technik unstrukturiert ist - eine signifikante Antennenfläche für eine nachgeordnete Halbleiterschaltung dar, wenn sie - wie beim Stand der Technik üblich - an die nachgeordnete Halbleiterschaltung angeschlossen ist. Eine solche Antenne sammelt wäh- rend Plasma- oder Implantationsprozessen Ladung ein und überträgt sie an die angeschlossene Halbleiterschaltung, was zu Schädigungen des Gate Oxides von Transistor- oder Gate Oxide Teststrukturen führen kann. Durch den unerwünschten Ladungseinfall kann ein nicht produktrelevantes Chargingproblem vor- getäuscht werden. Um Teststrukturen dennoch sinnvoll nutzen zu können, muss die vom Anschluss-Pad 1 eingefangene Ladung verringert werden, wozu die Erfindung durch die Strukturierung der Oberfläche des Pads beiträgt.A structure shown in a highly schematic and enlarged manner in FIG. 1 represents a semiconductor circuit element in the form of a connection pad 1 for a test structure outer contour line 2 represents the pad outline of a connection pad 1, which also corresponds to the pad outline of a conventional connection pad, which in reality has a size of approx. 50 x 70 μm 2 , for example. This area of approx. 50 x 70 μm 2 represents - insofar as it is unstructured according to the prior art - a significant antenna area for a downstream semiconductor circuit if - as is customary in the prior art - it is connected to the downstream semiconductor circuit. Such an antenna collects charge during plasma or implantation processes and transfers it to the connected semiconductor circuit, which can lead to damage to the gate oxide of transistor or gate oxide test structures. The undesired charge incidence can simulate a charging problem that is not relevant to the product. In order to be able to use test structures sensibly, the charge captured by connection pad 1 must be reduced, to which the invention contributes by structuring the surface of the pad.
Mit dem Bezugzeichen 3 werden Leitbahnen bezeichnet, die in die Oberfläche 4 geätzt werden. Zwischen den Leitbahnen 3 und dem unstrukturierten Rest 5 der Oberfläche 4 des Anschluss- Pads 1 entstehen durch einen Ätzprozess Gräben 6. Diese Gräben 6 trennen die Leitbahnen 3 elektrisch von der metalli- sehen Rest-Oberfläche 5 des Anschluss-Pads 1.The reference number 3 designates interconnects which are etched into the surface 4. An etching process creates trenches 6 between the interconnects 3 and the unstructured remainder 5 of the surface 4 of the connection pad 1. These trenches 6 electrically separate the interconnects 3 from the metallic residual surface 5 of the connection pad 1.
Die Gräben 6 sind durch die Linien verdeutlicht, die parallel zu den Umrissen der Leitbahnen 3 verlaufen. Die zeichnerische Darstellung ist in allen Figuren nicht maßstäblich und auch nicht proportional den jeweils anderen Figuren. Jede derThe trenches 6 are illustrated by the lines that run parallel to the outlines of the interconnects 3. The drawing is not to scale in all the figures and is also not proportional to the other figures. Each of the
Leitbahnen 3 ist rundum von einem zugehörigen Graben 6 umgeben, der die Leitbahn 3 elektrisch völlig von der nicht strukturierten Rest-Oberfläche 5 trennt. Die Breite der Leitbahnen 3 ist so gewählt, dass sie der üblichen Breite von Zu- leitungen zwischen einem Pad 1 und einer anzuschließendenConductors 3 are surrounded all around by an associated trench 6, which completely electrically separates the interconnect 3 from the non-structured residual surface 5. The width of the interconnects 3 is selected such that it corresponds to the usual width of feed lines between a pad 1 and a line to be connected
Teststruktur entspricht, dies sind z.B. ca. 1,5 μm. Diese Abmessungen sind in so genannten Design-Regeln für die Konzi- pierung von Halbleiterschaltelementen festgelegt, aber die Erfindung ist nicht auf eine derartig bemessene Strukturierung beschränkt; sie kann demgemäß auch andere Abmessungen haben. Ferner ist es sinnvoll und vorteilhaft, aber nicht zwingend, die Breite eines Grabens 6 mit etwa dem 2 bis 3- fachen des minimalen Abstands anzusetzen, der gemäß der vorerwähnten Design-Regeln als minimal erlaubter Abstand zwischen zwei benachbarten Metallflächen angesehen wird.Test structure corresponds, this is for example approx. 1.5 μm. These dimensions are specified in so-called design rules for the Fixed semiconductor switching elements, but the invention is not limited to such a structured structuring; accordingly, it can also have other dimensions. Furthermore, it is useful and advantageous, but not mandatory, to set the width of a trench 6 at about 2 to 3 times the minimum distance, which according to the aforementioned design rules is regarded as the minimum allowed distance between two adjacent metal surfaces.
Die gewählte Breite der Gräben 6 soll ein schnelles und komplettes Trennen der Leitbahn 3 vom Pad 1 während des Ätzens gewährleisten. Die Breite der Graben 6 sollte jedoch andererseits nicht viel größer als wenige Mikrometer (μm) sein, um ein Kurzschließen durch verschmiertes Aluminium der Oberflä- ehe 4 bzw. 5 beim Aufsetzen einer Kontaktnadel 9 zu unterstützen, wobei das Material der Oberfläche selbstverständlich auch ein anderes als Aluminium sein kann.The selected width of the trenches 6 is intended to ensure a quick and complete separation of the interconnect 3 from the pad 1 during the etching. On the other hand, the width of the trenches 6 should not be much larger than a few micrometers (μm) in order to support short-circuiting by smeared aluminum on the surface 4 or 5 when a contact needle 9 is placed on it, the material of the surface naturally also being different than aluminum can be.
Das vorerwähnte Verschmieren der Leitbahnen 3 mit dem Ober- flächenmaterial der Rest-Oberfläche 5 ist keinesfalls schädlich, sondern sogar erwünscht.The aforementioned smearing of the interconnects 3 with the surface material of the remaining surface 5 is in no way harmful, but is even desirable.
Kern der Erfindung ist ja - wie bereits mehrfach erwähnt - die aktive Antennenfläche eines Anschluss-Pads 1 zu reduzie- ren. Dies erfolgt durch die Strukturierung der Oberfläche des Pads 1 mit Hilfe der Leitbahnen 3, die durch geätzte Gräben 6 vom Rest der Oberfläche des Pads getrennt werden. Nur diese Leitbahnen 3 werden elektrisch mit den ihnen nachgeordneten Halbleiterschaltungselementen 8 verbunden. Dazu muss in der unterhalb der Metallebene des Pads 1 liegenden Kontaktebene 7 (siehe Figur 3) dafür gesorgt werden, dass lediglich die Leitbahnen 3 elektrisch mit der nachgeordneten Halbleiterschaltungselementen 8 elektrisch verbunden werden. Die Rest- Oberfläche 5 darf elektrisch mit den nachgeordneten Halblei- terschaltelementen 8 nicht verbunden sein. In der den Stand der Technik darstellenden Figur 4 ist ein ebenfalls stark schematisierter Querschnitt durch ein Halbleiterbauelement gezeigt. Es stellt im Prinzip das gleiche Halbleiterschaltungselement dar, wie gemäß Figur 3, aller- dings ist die Oberfläche des Pads 14 nicht strukturiert, demgemäß unterliegt es den Nachteilen des Standes der Technik. Alle gleichartigen oder gleichwirkenden Elemente weisen in Figur 4 die gleichen Bezugszeichen auf, sind jedoch zur Unterscheidung um die entsprechende Indexziffer „A ergänzt, die auf ihre Verwendung in Figur 4 hinweisen soll. Bei dem Stand der Technik gemäß Figur 4 ist also ein Pad 1 gezeigt, das mit der gesamten Oberfläche eine verhältnismäßig große Antennenfläche erzeugt, was sich hinsichtlich der zu erwartenden Chargingeffekte entsprechend schädlich auswirkt. Un- terhalb der Pad-Oberfläche 5 sind in der Kontaktebene 74 alle Kontakte vorhanden, um das Pad 14 elektrisch gut mit dem nachgeordneten Halbleiterschaltungselement 84 zu verbinden.The essence of the invention - as already mentioned several times - is to reduce the active antenna area of a connection pad 1. This is done by structuring the surface of the pad 1 with the aid of the interconnects 3, which are etched from the rest of the surface by trenches 6 Pads are separated. Only these interconnects 3 are electrically connected to the semiconductor circuit elements 8 arranged downstream of them. For this purpose, it must be ensured in the contact plane 7 below the metal level of the pad 1 (see FIG. 3) that only the interconnects 3 are electrically connected to the semiconductor circuit elements 8 arranged downstream. The remaining surface 5 must not be electrically connected to the downstream semiconductor switching elements 8. FIG. 4, which represents the state of the art, shows a likewise highly schematic cross section through a semiconductor component. It is in principle the same semiconductor circuit element are, as shown in FIG 3, aller- recently is not structured, the surface of the pad 1 to 4, accordingly, it is subject to the disadvantages of the prior art. All elements of the same type or having the same function have the same reference symbols in FIG. 4, but are differentiated by the corresponding index number “A”, which is intended to indicate their use in FIG. 4. In the state of the art according to FIG. 4, a pad 1 is therefore shown which produces a relatively large antenna area with the entire surface, which has a correspondingly harmful effect with regard to the expected charging effects. Below the pad surface 5, all contacts are present in the contact plane 7 4 in order to connect the pad 1 4 electrically well to the semiconductor circuit element 8 4 arranged downstream.
Zum Vergleich ist in Figur 3 deutlich erkennbar, dass dort in der Kontaktebene 7 nur die Leitbahn 3 elektrisch mit dem nachgeordneten Halbleiterschaltungselement 8 verbunden ist, wodurch die effektive Antennenflache des Pads 1 auf die Oberfläche der Leitbahnen 3 reduziert ist.For comparison, it can be clearly seen in FIG. 3 that only the interconnect 3 is electrically connected to the downstream semiconductor circuit element 8 in the contact plane 7, as a result of which the effective antenna area of the pad 1 is reduced to the surface of the interconnects 3.
Ein gewisses Problem stellt bei den erfindungsgemäß strukturierten Pads 1 allerdings die Kontaktierung des Pads 1 mit Kontaktnadeln 9 dar, die dazu dienen, das Pad 1 elektrisch mit der außerhalb liegenden Auswerteschaltung zu verbinden. Hier besteht ein Widerspruch, der durch die erfindungsgemäße Ausgestaltung des Pads 1 jedoch ebenfalls gelöst wird. Eine herkömmliche Kontaktnadel 9 weist eine Kontaktfläche von ca. 10 μm Durchmesser auf. Beim Stand der Technik wird die Kontaktnadel problemlos irgendwo auf die Oberfläche 54 des Pads 14 gesetzt und der elektrische Kontakt zum Pad 14 und dem nachgeordneten Halbleiterschaltungselement 8.1 ist hergestellt. Bei einem Pad 1 gemäß der Erfindung sind jedoch nur die Leitbahnen 3 elektrisch mit dem nachgeordneten Halblei- terschaltungselement 8 verbunden. Um die nachgeordnete Halbleiterschaltungselemente 8 sicher zu kontaktieren, müsste die Kontaktnadel 9 demgemäß exakt auf eine Leitbahn 3 gesetzt werden. Da dies in der Praxis jedoch kaum oder nur mit unver- haltnismaßig hohem Justieraufwand möglich ist, erfolgt die Strukturierung der Oberfläche 4 des Pads 1 so, dass sich auf der strukturierten Oberfläche 4 des Pads 1 kein Flächenbereich bilden kann, der größer ist, als der Durchmesser von ca. lOμm der Kontaktnadel 9. Die elektrisch nicht mit den nachgeordneten Halbleiterschaltungselementen 8 verbundenenA certain problem with the pads 1 structured according to the invention, however, is the contacting of the pad 1 with contact needles 9, which serve to electrically connect the pad 1 to the external evaluation circuit. There is a contradiction here, which, however, is also resolved by the design of the pad 1 according to the invention. A conventional contact needle 9 has a contact area of approximately 10 μm in diameter. In the prior art, the contact needle is easily placed anywhere on the surface 5 4 of the pad 1 4 and the electrical contact to the pad 1 4 and the downstream semiconductor circuit element 8.1 is established. In the case of a pad 1 according to the invention, however, only the interconnects 3 are electrically connected to the semiconductor Circuit element 8 connected. In order to reliably contact the downstream semiconductor circuit elements 8, the contact needle 9 would accordingly have to be placed exactly on an interconnect 3. However, since this is hardly possible in practice, or only with a disproportionately high adjustment effort, the surface 4 of the pad 1 is structured in such a way that no surface area larger than that can form on the structured surface 4 of the pad 1 Diameter of approximately 10 μm of the contact needle 9. The ones not electrically connected to the downstream semiconductor circuit elements 8
Bereiche der so genannten Rest-Oberfläche 5 sollen also nirgends größer sein, als ca. lOμm im Durchmesser. In Figur 1 sind zum besseren Verständnis zwei End-Positionen einer Kontaktbahn von Kontaktnadeln 9 eingezeichnet (auch hier wieder nicht maßstäblich!) und es ist erkennbar, dass auch bei grober Justierung immer mindestens eine Leitbahn 3 von der Kontaktfläche einer Kontaktnadel 9 getroffen wird.Areas of the so-called residual surface 5 should therefore nowhere be larger than approximately 10 μm in diameter. In FIG. 1, two end positions of a contact path of contact needles 9 are drawn in for better understanding (again not to scale!) And it can be seen that even with rough adjustment, at least one interconnect 3 is always hit by the contact surface of a contact needle 9.
Ein weiterer vorteilhafter Effekt bei dem erfindungsgemäßen Pad 1 liegt darin, dass auch die elektrisch nicht an die nachgeordneten Halbleiterschaltungselemente 8 angeschlossenen Bereiche der Oberfläche 5 des Pads 1 zur besseren Kontaktie- rung genutzt werden können. Die auf die Oberfläche 4/5 des Pads 1 aufgesetzte Kontaktnadel 9 schließt die getroffene Leitbahn 3 und die ebenfalls bedeckten Bereiche der nicht angeschlossenen Oberfläche 5 des Pads 1 kurz. Der Kurzschluss nach dem Aufsetzen der Kontaktnadel 9 verringert den Kontaktwiderstand, ist aber in Bezug auf unerwünschtes Charging nicht schädlich, weil der nicht angeschlossenen Teil 5 der Oberfläche des Pads 1 dann nicht mehr als Antenne wirksam ist .A further advantageous effect with the pad 1 according to the invention is that the regions of the surface 5 of the pad 1 that are not electrically connected to the downstream semiconductor circuit elements 8 can also be used for better contacting. The contact needle 9 placed on the surface 4/5 of the pad 1 short-circuits the hit interconnect 3 and the likewise covered areas of the non-connected surface 5 of the pad 1. The short circuit after the contact needle 9 has been put on reduces the contact resistance, but is not harmful with regard to undesired charging, because the part 5 of the surface of the pad 1 which is not connected is then no longer effective as an antenna.
Um eine solche Wirkung zu erzielen, muss in der Kontaktebene 7 sichergestellt sein, dass nur solche Kontakte erhalten bleiben, wie zur elektrischen Verbindung der Leitbahnen 3 zu den nachgeordneten Halbleiterschaltungselementen 8 erforderlich sind. Die Strukturierung der Kontaktebene 7 muss demge- maß im Wesentlichen der Strukturierung der' Oberfläche des Pads 1 entsprechen. Dabei müssen genügend Kontakte 7 erhalten bleiben, um die Teststruktur ohne zusätzlichen Serienwiderstand anzuschließen.In order to achieve such an effect, it must be ensured in the contact plane 7 that only those contacts are maintained which are necessary for the electrical connection of the interconnects 3 to the semiconductor circuit elements 8 arranged downstream. The structuring of the contact level 7 must accordingly essentially correspond to the structuring of the ' surface of the pad 1. Sufficient contacts 7 must be maintained to connect the test structure without additional series resistance.
Im Ausführungsbeispiel gemäß Figur 2 ist dargestellt, dass im Prinzip eine Leitbahn 3 ausreicht, um die Erfindung mit Vorteil zu realisieren. Da in der Praxis das Aufsetzen einer Kontaktnadel 9 eher zentrisch erfolgt, kann bei entsprechen- dem Justieraufwand auch eine einzelne Leitbahn 3 im Zentrum der Oberfläche 4 des Pads 1 kontaktiert werden. Da die Kon- taktierung nicht punktmäßig erfolgt, sondern eher gleitend auf einem bahnartigen Bereich werden nicht angeschlossene Bereiche in der Nachbarschaft der Leitbahn 3 beim Kontaktieren von der Kontaktfläche der Kontaktnadel 9 kurzgeschlossen und tragen zur Verringerung des Kontaktwiderstands bei. Obwohl eine große Oberfläche des Pads 1 vorhanden ist, kann mit dieser Maßnahme die aktive Antennenfläche des Pads 1 erheblich reduziert werden, so dass die vom Pad 1 eingefangene Ladung um einen Faktor von etwa 100 reduziert ist.The exemplary embodiment according to FIG. 2 shows that in principle one interconnect 3 is sufficient to implement the invention with advantage. Since, in practice, a contact needle 9 is placed rather centrally, a corresponding interconnect 3 in the center of the surface 4 of the pad 1 can also be contacted with the corresponding adjustment effort. Since the contact is not made punctually, but rather in a sliding manner on a track-like area, non-connected areas in the vicinity of the conductor track 3 are short-circuited when contacting the contact area of the contact needle 9 and contribute to reducing the contact resistance. Although there is a large surface area of the pad 1, the active antenna area of the pad 1 can be considerably reduced with this measure, so that the charge captured by the pad 1 is reduced by a factor of approximately 100.
Es versteht sich, dass die Erfindung nicht auf Anschluss-Pads von Teststrukturen beschränkt sein soll, sondern auch als Schutzstruktur für charging-empfindliche Halbleiterbauelemen- te geeignet ist.It goes without saying that the invention should not be limited to connection pads of test structures, but is also suitable as a protective structure for charging-sensitive semiconductor components.
Darunter ist z.B. ein Halbleiterschaltungselement zum An- schluss von Mess- oder Einspeispunkten bei kapazitätsempfindlichen Produkten wie einem Schwingkreis zu verstehen. Das er- findungsgemäß strukturierte Pad stellt ein Halbleiterschaltungselement dar, welches eine kleine Kapazität aufweist, bis es tatsächlich kontaktiert ist.Among them is e.g. to understand a semiconductor circuit element for connecting measuring or feed-in points in the case of capacitance-sensitive products such as an oscillating circuit. The pad structured according to the invention represents a semiconductor circuit element which has a small capacitance until it is actually contacted.
Ein derartiges Halbleiterschaltungselement kann auch in der „zweiten" Ebene, d.h. in der nachgeordneten Halbleiterschaltungsebene gemäß Figur 3 strukturiert sein. Such a semiconductor circuit element can also be structured in the “second” level, i.e. in the downstream semiconductor circuit level according to FIG. 3.

Claims

Patentansprüche claims
1. Halbleiterschaltungselement zur Reduzierung von unerwünschten Aufladeeffekten, insbesondere Anschlusselement von Teststrukturen für Halbleiterschaltungen, dadurch gekennzeichnet, dass die Oberfläche (4) des Halbleiterschaltungselements (1) elektrisch von der Rest-Oberfläche des Halbleiterschaltungselements (5) isolierte Leitbahnstrukturen (3) aufweist, und dass ausschließlich die Leitbahnstrukturen (3) an nachgeordnete Halbleiterschaltungselemente (8) angeschlossen sind.1. Semiconductor circuit element for reducing undesired charging effects, in particular connection element of test structures for semiconductor circuits, characterized in that the surface (4) of the semiconductor circuit element (1) has interconnect structures (3) that are electrically insulated from the rest surface of the semiconductor circuit element (5), and that only the interconnect structures (3) are connected to downstream semiconductor circuit elements (8).
2. Halbleiterschaltungselement nach Anspruch 1, dadurch gekennzeichnet, dass auf der Oberfläche (4/5) des Halb- leiterschaltungselements (1) die zulässige, von Leitbahnstrukturen (5) freie Fläche, kleiner ist, als die zu erwartende minimale Kontaktfläche einer Kontaktnadel (9) .2. Semiconductor circuit element according to claim 1, characterized in that on the surface (4/5) of the semiconductor circuit element (1) the permissible area free of interconnect structures (5) is smaller than the expected minimum contact area of a contact needle (9 ).
3. Halbleiterschaltungselement nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, dass das Halbleiterschaltungselement als Anschluss-Pad (1) für Teststrukturen ausgebildet ist .3. Semiconductor circuit element according to one of the preceding claims, characterized in that the semiconductor circuit element is designed as a connection pad (1) for test structures.
4. Halbleiterschaltungselement nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, dass das Halbleiterschaltungselement als Schutzstruktur für ladungsempfindliche Schichten ausgebildet ist.4. Semiconductor circuit element according to one of the preceding claims, characterized in that the semiconductor circuit element is designed as a protective structure for charge-sensitive layers.
5. Halbleiterschaltungselement nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, dass die Oberfläche5. Semiconductor circuit element according to one of the preceding claims, characterized in that the surface
(4, 5) des Halbleiterschaltungselements (1) metallisch ausgebildet ist.(4, 5) of the semiconductor circuit element (1) is metallic.
6. Halbleiterschaltungselement nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, dass die metallische Oberfläche des Halbleiterschaltungselements (1) von einer Aluminiumschicht gebildet wird. 6. Semiconductor circuit element according to one of the preceding claims, characterized in that the metallic surface of the semiconductor circuit element (1) is formed by an aluminum layer.
7. Halbleiterschaltungselement nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, dass das Halbleiterschaltungselement (1) durch Ätzen strukturiert wird.7. Semiconductor circuit element according to one of the preceding claims, characterized in that the semiconductor circuit element (1) is structured by etching.
8. Halbleiterschaltungselement nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, dass die Ätzstruktur des Halbleiterschaltungselements (1) von Gräben (6) gebildet wird, deren Grabenbreite ein Bruchteil der Breite der Leitbahn (3) beträgt.8. Semiconductor circuit element according to one of the preceding claims, characterized in that the etching structure of the semiconductor circuit element (1) is formed by trenches (6) whose trench width is a fraction of the width of the interconnect (3).
9. Halbleiterschaltungselement nach einem der vorstehenden Ansprüche, dadurch ge ennzeichnet, dass die Ätzstruktur des Halbleiterschaltungselements (1) von Gräben (6) ge- bildet wird, deren Grabenbreite ein Ein- oder Vielfaches eines minimal zulässigen Metall-Metallabstands beträgt .9. Semiconductor circuit element according to one of the preceding claims, characterized in that the etching structure of the semiconductor circuit element (1) is formed by trenches (6), the trench width of which is a single or multiple of a minimum permissible metal-metal distance.
10. Halbleiterschaltungselement nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, dass die Gräben (6) zwischen elektrisch an nachgeordneten Halbleiterschaltungselementen (8) angeschlossenen Leitbahnstrukturen (3) und elektrisch an nachgeordneten Halbleiterschaltungselementen (8) nicht angeschlossenen Oberflächenbereichen (5) des Halbleiterschaltungselements (1) durch Kontaktieren der Oberflä- ehe (4, 5) des Halbleiterschaltungselements (1) mit Kontaktnadeln (9) überbrückt werden.10. The semiconductor circuit element according to one of the preceding claims, characterized in that the trenches (6) between interconnect structures (3) electrically connected to downstream semiconductor circuit elements (8) and surface regions (5) of the semiconductor circuit element (1) not electrically connected to downstream semiconductor circuit elements (8). can be bridged by contacting the surface (4, 5) of the semiconductor circuit element (1) with contact needles (9).
11. Halbleiterschaltungselement nach einem der vorstehenden Ansprüche, dadurch gekennzeichnet, dass zumindest ein Teilbereich (4) der Oberfläche des Halbleiterschaltungselements (1) mit einer Leitbahnstruktur (3) versehen ist. 11. Semiconductor circuit element according to one of the preceding claims, characterized in that at least a partial area (4) of the surface of the semiconductor circuit element (1) is provided with an interconnect structure (3).
EP04741625A 2003-06-21 2004-05-21 Structured semiconductor element for reducing charging effects Ceased EP1636844A2 (en)

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US7646104B2 (en) 2010-01-12
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DE10328007A1 (en) 2005-01-13
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