EP1609164A4 - Resistive cantileverfeder für sondenmikroskopie - Google Patents

Resistive cantileverfeder für sondenmikroskopie

Info

Publication number
EP1609164A4
EP1609164A4 EP20030708379 EP03708379A EP1609164A4 EP 1609164 A4 EP1609164 A4 EP 1609164A4 EP 20030708379 EP20030708379 EP 20030708379 EP 03708379 A EP03708379 A EP 03708379A EP 1609164 A4 EP1609164 A4 EP 1609164A4
Authority
EP
European Patent Office
Prior art keywords
cantilever spring
probe microscopy
resistive cantilever
resistive
microscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20030708379
Other languages
English (en)
French (fr)
Other versions
EP1609164A1 (de
Inventor
Jacob Nissim Israelachvili
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0302523A external-priority patent/GB2398633B/en
Application filed by Individual filed Critical Individual
Publication of EP1609164A1 publication Critical patent/EP1609164A1/de
Publication of EP1609164A4 publication Critical patent/EP1609164A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/26—Friction force microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
EP20030708379 2003-02-04 2003-03-13 Resistive cantileverfeder für sondenmikroskopie Withdrawn EP1609164A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0302523A GB2398633B (en) 2003-02-04 2003-02-04 Resistive cantilever spring for probe microscopy
EP03250876 2003-02-13
PCT/IB2003/000913 WO2004070765A1 (en) 2003-02-04 2003-03-13 Resistive cantilever spring for probe microscopy

Publications (2)

Publication Number Publication Date
EP1609164A1 EP1609164A1 (de) 2005-12-28
EP1609164A4 true EP1609164A4 (de) 2010-11-03

Family

ID=32852246

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20030708379 Withdrawn EP1609164A4 (de) 2003-02-04 2003-03-13 Resistive cantileverfeder für sondenmikroskopie

Country Status (3)

Country Link
EP (1) EP1609164A4 (de)
AU (1) AU2003212557A1 (de)
WO (1) WO2004070765A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103852600B (zh) * 2014-03-27 2016-04-13 上海华力微电子有限公司 原子力显微镜探针装置
GB2623943A (en) * 2022-10-26 2024-05-08 Nano Analytik Gmbh Micromechanical beam

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0869329A2 (de) * 1997-04-01 1998-10-07 Canon Kabushiki Kaisha Torsionstyp-Probe und Rastermikroskop-Probe deren Nutzung
US5959200A (en) * 1997-08-27 1999-09-28 The Board Of Trustees Of The Leland Stanford Junior University Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beams
US20010028033A1 (en) * 2000-02-17 2001-10-11 Nobuhiro Shimizu Microprobe and sample surface measuring apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5444244A (en) * 1993-06-03 1995-08-22 Park Scientific Instruments Corporation Piezoresistive cantilever with integral tip for scanning probe microscope
US5705814A (en) * 1995-08-30 1998-01-06 Digital Instruments, Inc. Scanning probe microscope having automatic probe exchange and alignment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0869329A2 (de) * 1997-04-01 1998-10-07 Canon Kabushiki Kaisha Torsionstyp-Probe und Rastermikroskop-Probe deren Nutzung
US5959200A (en) * 1997-08-27 1999-09-28 The Board Of Trustees Of The Leland Stanford Junior University Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beams
US20010028033A1 (en) * 2000-02-17 2001-10-11 Nobuhiro Shimizu Microprobe and sample surface measuring apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004070765A1 *

Also Published As

Publication number Publication date
AU2003212557A1 (en) 2004-08-30
EP1609164A1 (de) 2005-12-28
WO2004070765A1 (en) 2004-08-19

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Legal Events

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