EP1588202A4 - Systemes de micromiroirs - Google Patents

Systemes de micromiroirs

Info

Publication number
EP1588202A4
EP1588202A4 EP03774800A EP03774800A EP1588202A4 EP 1588202 A4 EP1588202 A4 EP 1588202A4 EP 03774800 A EP03774800 A EP 03774800A EP 03774800 A EP03774800 A EP 03774800A EP 1588202 A4 EP1588202 A4 EP 1588202A4
Authority
EP
European Patent Office
Prior art keywords
micromirror systems
micromirror
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03774800A
Other languages
German (de)
English (en)
Other versions
EP1588202A2 (fr
Inventor
Christopher M Aubuchon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Exajoule LLC
Original Assignee
Exajoule LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/269,763 external-priority patent/US6825968B2/en
Priority claimed from US10/269,796 external-priority patent/US6870659B2/en
Priority claimed from US10/269,478 external-priority patent/US6798560B2/en
Application filed by Exajoule LLC filed Critical Exajoule LLC
Publication of EP1588202A2 publication Critical patent/EP1588202A2/fr
Publication of EP1588202A4 publication Critical patent/EP1588202A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
EP03774800A 2002-10-11 2003-10-10 Systemes de micromiroirs Withdrawn EP1588202A4 (fr)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US269478 1981-06-02
US269796 1994-06-30
US10/269,763 US6825968B2 (en) 2002-10-11 2002-10-11 Micromirror systems with electrodes configured for sequential mirror attraction
US10/269,796 US6870659B2 (en) 2002-10-11 2002-10-11 Micromirror systems with side-supported mirrors and concealed flexure members
US10/269,478 US6798560B2 (en) 2002-10-11 2002-10-11 Micromirror systems with open support structures
US269763 2002-10-11
PCT/US2003/032348 WO2004034103A2 (fr) 2002-10-11 2003-10-10 Systemes de micromiroirs

Publications (2)

Publication Number Publication Date
EP1588202A2 EP1588202A2 (fr) 2005-10-26
EP1588202A4 true EP1588202A4 (fr) 2007-10-10

Family

ID=32096819

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03774800A Withdrawn EP1588202A4 (fr) 2002-10-11 2003-10-10 Systemes de micromiroirs

Country Status (5)

Country Link
EP (1) EP1588202A4 (fr)
JP (1) JP2006502449A (fr)
AU (1) AU2003282611A1 (fr)
CA (1) CA2502298A1 (fr)
WO (1) WO2004034103A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4492952B2 (ja) * 2004-12-03 2010-06-30 株式会社リコー 光偏向装置、光偏向アレー、光学システム、画像投影表示装置および画像形成装置
US7391554B2 (en) 2006-08-25 2008-06-24 Spatial Photonics, Inc. High fill-ratio mirror-based spatial light modulator
EP2140300A1 (fr) * 2007-04-12 2010-01-06 Thomson Licensing Imageur à micromiroirs de sélection de couleur à miroirs biaxiaux
JP6519284B2 (ja) * 2015-04-01 2019-05-29 セイコーエプソン株式会社 電気光学装置、電気光学装置の製造方法、および電子機器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19712201A1 (de) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Mikromechanische Spiegel-Anordnung
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
US20020071171A1 (en) * 2000-12-13 2002-06-13 Greywall Dennis S. Article comprising wedge-shaped electrodes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784196A (ja) * 1993-09-13 1995-03-31 Canon Inc 光偏向器およびそれを用いた表示装置
JP2001311900A (ja) * 2000-04-27 2001-11-09 Ricoh Co Ltd 光走査装置
US6633426B2 (en) * 2001-05-10 2003-10-14 Analog Devices, Inc. Optical-electrical MEMS devices and method
US6666561B1 (en) * 2002-10-28 2003-12-23 Hewlett-Packard Development Company, L.P. Continuously variable analog micro-mirror device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
DE19712201A1 (de) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Mikromechanische Spiegel-Anordnung
US20020071171A1 (en) * 2000-12-13 2002-06-13 Greywall Dennis S. Article comprising wedge-shaped electrodes

Also Published As

Publication number Publication date
WO2004034103A3 (fr) 2005-08-11
JP2006502449A (ja) 2006-01-19
CA2502298A1 (fr) 2004-04-22
AU2003282611A1 (en) 2004-05-04
EP1588202A2 (fr) 2005-10-26
WO2004034103A2 (fr) 2004-04-22

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