EP1588191A1 - Optoelektronisches sensormodul - Google Patents
Optoelektronisches sensormodulInfo
- Publication number
- EP1588191A1 EP1588191A1 EP03799452A EP03799452A EP1588191A1 EP 1588191 A1 EP1588191 A1 EP 1588191A1 EP 03799452 A EP03799452 A EP 03799452A EP 03799452 A EP03799452 A EP 03799452A EP 1588191 A1 EP1588191 A1 EP 1588191A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- sensor module
- radiation
- moving object
- emitting laser
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000005693 optoelectronics Effects 0.000 title claims abstract description 31
- 230000005855 radiation Effects 0.000 claims abstract description 86
- 230000033001 locomotion Effects 0.000 claims abstract description 52
- 238000011156 evaluation Methods 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000004382 potting Methods 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005057 finger movement Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920001690 polydopamine Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/042—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
- G06F3/0421—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means by interrupting or reflecting a light beam, e.g. optical touch-screen
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/02—Indicating direction only, e.g. by weather vane
- G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
- G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/50—Systems of measurement based on relative movement of target
- G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
Definitions
- the surface-emitting laser is arranged outside the optical axis of the lens or the diffractive optical element.
- the moving object moves in a plane perpendicular to the radiation direction of the surface-emitting laser, since the deflected beam path of the laser radiation in the lens or the diffractive optical element gives the moving object a velocity component in the beam direction.
- the sensor module expediently has a beam splitter element which supplies part of the radiation reflected by the moving object to the detector element.
- the beam splitter element can be formed, for example, by the lens mentioned above, which is arranged between the surface-emitting laser and the moving object, or by a diffractive optical element.
- the beam splitter element can be formed by a housing component, in particular by a potting material or a housing part such as a housing cover. It is sufficient if a small part of the laser radiation is coupled out of the main beam path as a back reflection and fed to the detector element.
- the detector element is formed by a photodiode.
- the evaluation unit advantageously includes an integrated circuit for signal processing of the information signals supplied by the detector element about the radiation received.
- the evaluation unit can contain electrical components that amplify and filter photocurrents supplied by the detector element.
- the evaluation unit advantageously determines the relative movement of the object and the sensor module from the modulation of the radiation received and generates movement information from the modulations in digital form, for example in the form of quadrature signals. The The direction of movement can be determined from the form of the modulation.
- the detector element and the evaluation unit can also be designed to be integrated, for example in an opto-IC.
- the surface emitting laser can be mounted on the detector element or an integrated evaluation unit. Such a chip-on-chip design results in a compact structure and a small deflection angle of the back-reflected radiation.
- the evaluation unit is designed and set up to determine both the speed and the direction of the relative movement of the object and the sensor module.
- an optoelectronic sensor module for measuring the two-dimensional movement of an object moved relative to the sensor module contains two sensor modules of the type described above, each of which measures the movement of the object in a spatial direction.
- the two sensor modules are advantageously arranged at an angle of 90 ° to one another, so that in the case of an object moved in the xy plane, the first module detects the movement of the object in the x direction and the second module detects the movement of the object in the y direction detected .
- an optoelectronic sensor module for measuring the two-dimensional movement of an object moved relative to the sensor module contains two radiation sources for illuminating the moving object, each of which is formed by a surface-emitting laser with a perpendicular resonator, a common lens or a common diffractive optical element for collimating or focusing the radiation of the surface-emitting lasers onto the moving object,
- the radiation sources are advantageously arranged at two different angular positions outside the optical axis of the lens or the diffractive optical element, so that an object that moves in a plane perpendicular to the direction of radiation of the surface-emitting laser in the general direction by the deflection of a speed component in Beam direction of each laser. It is understood that the speed component in a beam direction can also disappear if the object moves in the plane parallel to this beam direction. Due to the arrangement of the radiation sources at different angular positions, however, it is then ensured that the movement is detected by the other radiation source.
- the detector device can comprise two photodiodes, each associated with one of the radiation sources and receiving part of the radiation reflected by the moving object from the assigned radiation source.
- the detector device can have a common photodiode for both radiation sources, which, preferably by means of a multiplexing method, has a part of that moved Object reflects reflected radiation from both radiation sources. This enables a particularly compact design, since in spite of the movement measurement in two dimensions, only a photodiode and a lens or a diffractive optical element are required.
- the solution according to the invention requires only a small number of components and a small chip area, enables a very compact structure, has a simple optical system and makes only small demands on the adjustment.
- the sensor module according to the invention is also suitable for measuring movements in the z-direction, the radiation of the surface-emitting laser occurring essentially perpendicular to the moving object.
- a measurement is used, for example, in scanning instruments or profilometers, in presence detectors such as a baby guard or in vibration detectors such as alarm or motion detectors.
- presence detectors such as a baby guard or with vibration detectors or presence detectors, it is sufficient if a qualitative check is carried out to determine whether the radiation absorbed is modulated; a quantitative measurement is not necessary.
- Figure 3 is a plan view of an optoelectronic sensor module for detecting two-dimensional object movements according to an embodiment of the invention
- FIG. 4 shows a schematic sectional view of an optoelectronic sensor module for detecting two-dimensional object movements according to a further exemplary embodiment of the invention
- FIGS. 6 and 7 show two application examples of the optoelectronic sensor module from FIGS. 4 and 5.
- the moving object 30 has a speed component in the beam direction.
- the scattered radiation is then Doppler-shifted with respect to the emitted radiation, so that the superimposition of the Doppler-shifted radiation with the radiation of the laser cavity of the VCSEL 12 leads to sawtooth-like modulations in the laser power.
- the modulated radiation is picked up by the monitor diode 18 and converted into an electrical photocurrent.
- the photocurrent is amplified by the amplifier 20 and fed to the signal processing 22, which determines digital movement information, for example quadrature signals 24, from the modulations, from which the direction and speed of the movement of the object 30 are determined.
- the modulation The frequency is proportional to the relative speed of the object and the sensor module.
- the time interval of a modulation period corresponds to the wavelength of the VCSEL.
- the direction of movement can also be determined from the signal shape: the AC signal of the monitor diode 18 shows a sawtooth-shaped course, in which the rising flank of the sawtooth is steep when the object moves away from the laser, and flat when the object moves towards the laser appears.
- FIG. 2 A schematic sectional view of an optoelectronic sensor module 40 according to another exemplary embodiment of the invention will now be described with reference to FIG. 2.
- the functioning of the sensor module 40 largely corresponds to that of the sensor module 10, so that only differences are discussed in more detail below.
- the sensor module 40 contains a VCSEL 42, a monitor diode 46 and an integrated circuit 48, which are mounted on a common carrier 50 and enclosed in a housing 52.
- the housing cover has a lens 44, which focuses the laser radiation on the moving object 30.
- the light backscattered by the object 30 is coupled into the VCSEL 42 via the lens 44, where it is 1 leads to sawtooth-shaped power modulations.
- a scattered portion of the backscattered light passes from the lens 44 to the monitor diode 46, from where the determination of the movement data proceeds as in the exemplary embodiment described above.
- FIG. 3 shows a plan view of an optoelectronic sensor module 60 for detecting two-dimensional object movements according to an exemplary embodiment of the invention.
- the object 30 to be measured can move in any direction 32 in the x-y plane.
- the sensor module 60 comprises two sub-modules 62x and 62y, each of which corresponds in structure to the sensor module 40 described above.
- each sensor module contains a VCSEL 64x or 64y, a monitor diode 66x or 66y, a lens 68x or 68y in the housing cover, and an integrated circuit 70x or 70y for evaluating the movement data.
- FIG. 4 An integrated optoelectronic sensor module 80 for detecting two-dimensional object movements is shown in FIG. 4 in a sectional view and in FIG. 5 in a top view.
- the sensor module 80 contains two VCSELs 82 and 84, which are mounted on the carrier substrate 94 at two different angular positions (at 0 ° and at 90 ° in the quadrant end illustration of FIG. 5) outside the optical axis of the common lens 92.
- This arrangement gives the laser beam of the VCSEL 84 a component after deflection by the lens 92.
- the laser beam of the VCSEL 82 is a component in the y direction.
- the radiation backscattered by the object 30 is coupled through the lens 92 into the VCSEL 82 and 84 on the one hand and, on the other hand, reaches the monitor diodes 86 and 88 as a scattering reflection, which absorb the power modulation of the radiation from the VCSEL 82 and 84.
- a common IC 90 takes over the evaluation of the received signals and determines the movement information for the object 30 therefrom.
- FIG. 7 Another application example is shown in FIG. 7.
- the optoelectronic sensor module 80 of FIGS. 4 and 5 is integrated in an optical mouse 110 there.
- the housing 112 has an opening through which the scanning laser beam falls on the base 30.
- a movement of the mouse 110 over the base is recognized by the sensor module 80 as a relative movement of the base 30 and module 80.
- the movement data can be used for cursor control in a known manner.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Power Engineering (AREA)
- Human Computer Interaction (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
Description
Claims
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10303938 | 2003-01-31 | ||
DE10303938 | 2003-01-31 | ||
DE10319977 | 2003-05-05 | ||
DE10319977A DE10319977A1 (de) | 2003-01-31 | 2003-05-05 | Optoelektronisches Sensormodul |
PCT/DE2003/004281 WO2004068166A1 (de) | 2003-01-31 | 2003-12-23 | Optoelektronisches sensormodul |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1588191A1 true EP1588191A1 (de) | 2005-10-26 |
Family
ID=32826189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03799452A Withdrawn EP1588191A1 (de) | 2003-01-31 | 2003-12-23 | Optoelektronisches sensormodul |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1588191A1 (de) |
WO (1) | WO2004068166A1 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004047679B4 (de) * | 2004-09-30 | 2017-05-04 | Osram Opto Semiconductors Gmbh | Optisches Sensormodul |
DE102007011804A1 (de) | 2007-01-25 | 2008-07-31 | Osram Opto Semiconductors Gmbh | Messanordnung und Messsystem |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2753539A1 (fr) * | 1996-09-18 | 1998-03-20 | Commissariat Energie Atomique | Reseau de diffraction focalisant de tres grande efficacite et procede de fabrication de ce reseau |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL130985A0 (en) * | 1999-07-19 | 2001-01-28 | Otm Technologies Ltd | Laser intruder detector |
JP4087247B2 (ja) * | 2000-11-06 | 2008-05-21 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 入力デバイスの移動の測定方法 |
-
2003
- 2003-12-23 EP EP03799452A patent/EP1588191A1/de not_active Withdrawn
- 2003-12-23 WO PCT/DE2003/004281 patent/WO2004068166A1/de not_active Application Discontinuation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2753539A1 (fr) * | 1996-09-18 | 1998-03-20 | Commissariat Energie Atomique | Reseau de diffraction focalisant de tres grande efficacite et procede de fabrication de ce reseau |
Non-Patent Citations (1)
Title |
---|
See also references of WO2004068166A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2004068166A1 (de) | 2004-08-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20050707 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: MORGOTT, STEFAN Inventor name: FRIEPES, KLAUS Inventor name: STEEGMUELLER, ULRICH |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: OSRAM OPTO SEMICONDUCTORS GMBH |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: OSRAM OPTO SEMICONDUCTORS GMBH |
|
17Q | First examination report despatched |
Effective date: 20090924 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Effective date: 20131114 |