EP1511627A4 - Unterscheibe mit gesteuerter eindringung - Google Patents

Unterscheibe mit gesteuerter eindringung

Info

Publication number
EP1511627A4
EP1511627A4 EP03734462A EP03734462A EP1511627A4 EP 1511627 A4 EP1511627 A4 EP 1511627A4 EP 03734462 A EP03734462 A EP 03734462A EP 03734462 A EP03734462 A EP 03734462A EP 1511627 A4 EP1511627 A4 EP 1511627A4
Authority
EP
European Patent Office
Prior art keywords
subpad
controlled penetration
penetration
controlled
penetration subpad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03734462A
Other languages
English (en)
French (fr)
Other versions
EP1511627A1 (de
Inventor
Joseph Cianciolo
Brian Scott Lombardo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Praxair ST Technology Inc
Praxair Technology Inc
Original Assignee
Praxair ST Technology Inc
Praxair Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair ST Technology Inc, Praxair Technology Inc filed Critical Praxair ST Technology Inc
Priority claimed from PCT/US2003/018002 external-priority patent/WO2003103959A1/en
Priority claimed from US10/457,316 external-priority patent/US8602851B2/en
Publication of EP1511627A1 publication Critical patent/EP1511627A1/de
Publication of EP1511627A4 publication Critical patent/EP1511627A4/de
Withdrawn legal-status Critical Current

Links

EP03734462A 2002-06-07 2003-06-09 Unterscheibe mit gesteuerter eindringung Withdrawn EP1511627A4 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
2000-11-09
US38694302P 2002-06-07 2002-06-07
US386943P 2002-06-07
PCT/US2003/018002 WO2003103959A1 (en) 2002-06-07 2003-06-09 Controlled penetration subpad
US10/457,316 US8602851B2 (en) 2003-06-09 2003-06-09 Controlled penetration subpad

Publications (2)

Publication Number Publication Date
EP1511627A1 EP1511627A1 (de) 2005-03-09
EP1511627A4 true EP1511627A4 (de) 2006-06-21

Family

ID=35798497

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03734462A Withdrawn EP1511627A4 (de) 2002-06-07 2003-06-09 Unterscheibe mit gesteuerter eindringung

Country Status (2)

Country Link
EP (1) EP1511627A4 (de)
JP (1) JP4362443B2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011003006B4 (de) * 2011-01-21 2013-02-07 Siltronic Ag Verfahren zur Bereitstellung jeweils einer ebenen Arbeitsschicht auf jeder der zwei Arbeitsscheiben einer Doppelseiten-Bearbeitungsvorrichtung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5692950A (en) * 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
WO1999006182A1 (en) * 1997-07-30 1999-02-11 Scapa Group Plc Polishing semiconductor wafers
EP1031398A2 (de) * 1999-02-25 2000-08-30 Obsidian, Inc. Poliermittel Stabilisator
US6194317B1 (en) * 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5692950A (en) * 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
WO1999006182A1 (en) * 1997-07-30 1999-02-11 Scapa Group Plc Polishing semiconductor wafers
US6194317B1 (en) * 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer
EP1031398A2 (de) * 1999-02-25 2000-08-30 Obsidian, Inc. Poliermittel Stabilisator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO03103959A1 *

Also Published As

Publication number Publication date
JP4362443B2 (ja) 2009-11-11
EP1511627A1 (de) 2005-03-09
JP2006502013A (ja) 2006-01-19

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Inventor name: LOMBARDO, BRIAN, SCOTT

Inventor name: CIANCIOLO, JOSEPH

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