EP1470621A1 - Method and device for measuring distance - Google Patents
Method and device for measuring distanceInfo
- Publication number
- EP1470621A1 EP1470621A1 EP03729412A EP03729412A EP1470621A1 EP 1470621 A1 EP1470621 A1 EP 1470621A1 EP 03729412 A EP03729412 A EP 03729412A EP 03729412 A EP03729412 A EP 03729412A EP 1470621 A1 EP1470621 A1 EP 1470621A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- frequency
- shifted feedback
- radiation source
- radiation
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10084—Frequency control by seeding
- H01S3/10092—Coherent seed, e.g. injection locking
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/4911—Transmitters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06791—Fibre ring lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/083—Ring lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
Definitions
- the present invention relates to the preamble and thus deals with frequency-shifted feedback radiation sources and their use in the measurement of distances.
- a light beam is split into a reference light beam and an object light beam.
- the object light beam is irradiated onto an object and received back by it.
- the reference and object light beams are then superimposed on a light receiver and it is then concluded from the superimposition signal how far the object is.
- this procedure allows highly precise measurements; however, depth measurement is difficult for extended objects at various points.
- FSF lasers frequency shifted feedback lasers
- Examples of the FSF laser can be found in the essays by FV Kowalski, PD Haie and SJ Shattil “Broadband continuous-wave lasers", Opt. Lett. 13, 622 (1988) and PD Haie and FV Kowalski "Output characteristics of a frequency shifted feedback laser: theory and experiment” IEE J. Quantum Electron. 26, 1845 (1990) and by K. NAKAMURA, T. MIYAHARA, M. YOSHIDA, T. HARA and H.
- FSF laser which contains an acousto-optical modulator in its resonator in addition to the amplification medium: Light waves entering the gain medium are amplified only for those frequencies at which the gain is greater than 1. At all other frequencies, the light is attenuated as usual. Like an oscillating string, the optical resonator now has preferred frequencies, so-called resonator modes. Each resonator mode has a certain frequency, which means that it corresponds to light of a precisely defined wavelength. Those resonator modes in which the amplification of the amplifying medium is greater than 1 are now preferably emitted.
- this is the behavior of a laser without an acousto-optic modulator. If the acousto-optic modulator is now excited, the material vibration creates a moving grid of different densities; the light circulating in the resonator is diffracted at this density grating, an interaction of the light photons with the phonons characterizing the density oscillation of the acousto-optic modulator, which shifts the frequency of the diffracted light by the excitation frequency of the acousto-optic modulator.
- the laser modes shift slightly in frequency with time, that is, the frequency of a mode changes with time; if there is more than one mode, this applies to all modes that vibrate in the resonator.
- the object of this invention is to provide something new for commercial use.
- the present invention thus proposes a frequency-shifted feedback Radiation source in front of which a means for increasing the emission frequency component beat intensity is provided.
- the means for increasing the emission frequency component beat intensity are designed as means for increasing the non-stochastic emission frequency component beat intensity; you will therefore see an increase in intensity above that things that are caused by spontaneous emission especially in the gain medium.
- an injection light source which injects light into the radiation source, that is to say provides a seed radiation field there.
- an injection light source is particularly advantageous because it represents a structurally simple possibility by means of which a large number of advantageous designs can be implemented.
- the injection light source is an injection laser. Its radiation can be guided into the resonator, in particular and / or onto the gain medium of the frequency-shifted feedback radiation source.
- the injection light source emits light at a wavelength which is close to that at which the gain of the gain medium of the frequency-shifted feedback radiation source is 1; it can optionally be radiated near the upper and / or lower threshold wavelength.
- the frequency of the injected light radiation will typically be within the range in which the gain G is greater than 1 and not outside. With seed injected very close to the threshold Radiation and in particular modulation of the same can, however, temporarily exceed this threshold. However, it would always be preferred to choose the irradiation frequency so that reinforcement takes place after a few resonator cycles.
- the injection light source emits radiation in a narrow band, narrow band being related to the amplification bandwidth of the amplification medium of the frequency-shifted feedback radiation source.
- a narrow band cannot be greater than 5%, preferably not more than 1%, of the gain bandwidth.
- a single-mode injection laser with an exactly defined, modulable frequency and / or amplitude is used for the injection.
- the injection light radiation is preferably varied with regard to the intensity and / or the phase.
- This variation can take place, for example, by means of regular modulation, that is to say modulation of intensity and / or phase that obeys prescribed laws or is subject to restrictions, although this does not necessarily have to be even.
- the modulation is not constant, but if the intensity and / or the phase of the modulation of the injection light radiation varies with time, which takes place particularly periodically. It is particularly preferred if the frequency of the intensity modulation is changed linearly within certain intervals because a linear variation of the modulation frequency of the injection light radiation provides an evaluation of The beat signals significantly simplified, in particular for distance determination.
- the frequency of this modulation is close to that which results from the so-called chirp rate and the distance which is currently with the radiation source is determined.
- the chirp rate is given from the frequency of the acousto-optical or other modulator within the frequency-shifted feedback radiation source, based on the radiation's orbital period in the resonator of this source.
- the radiation source will typically be a frequency-shifted feedback laser. This can work in particular in infrared, especially in eye-safe areas.
- the wavelength ranges which can be used particularly inexpensively for telecommunication devices and are well developed in terms of technology can also be used for the purposes of the present invention, which opens up the possibility of using inexpensive elements in the construction of arrangements and devices.
- Radiation source can be used in a distance measuring arrangement.
- a beam expansion optic can be provided which expands the radiation from the frequency-shifted feedback radiation source to such an extent that a surface to be examined is illuminated or illuminated widely and a means is then to be provided to directly use the back spectrum of the surface from the beat spectrum To gain height profile information.
- FIG. 1 shows a schematic structure of a frequency-shifted feedback radiation source according to the invention
- Fig. 4 shows the frequency spectrum of an FSF laser for a given
- FIG. 5 shows a schematic structure for a distance measurement with an arrangement according to the present invention
- FIG. 6 shows a gray-scale representation of a beat frequency spectrum, as can be obtained from the prior art, with position-independent artifact structures and a weak measurement signal structure which can be recognized as strips running obliquely through the image;
- a frequency-shifted feedback radiation source 1 generally designated 1, comprises a means 2 for increasing the emission frequency component beat intensity.
- the frequency-shifted feedback radiation source 1 is a ring laser with frequency-shifted feedback in the present example.
- the ring resonator of the ring laser 1 is formed by two highly reflecting mirrors la, lb and an acousto-optical modulator lc, to which a piezo element lcl is assigned as an actuator and input and output prisms lc2, lc3 and which is arranged in the resonator ring in such a way that the zeroth diffraction order , shown as beam 3, while the first diffraction order guides the light circulating in the resonator.
- the acousto-optical modulator lc is selected such that diffraction coefficients of more than 90% result for the first diffraction order, which is frequency-shifted in a known manner by the acousto-optical modulation.
- the geometry is also selected such that the primes lc2, lc3 assigned to the acousto-optical modulator lc are compensated for in terms of their dispersion and a compact structure is nevertheless possible.
- a fiber medium ld is arranged between the two highly reflecting mirrors la and lb, to which fiber coupling and decoupling optics 1dl and ld2 are assigned.
- Energy is radiated into the fiber from a point laser designed here as a diode laser (not shown), so that it can be used as a gain medium.
- the coupling takes place on a fiber switch lcl.
- the fiber shown is a conventional ytterbium fiber with a large one usable gain bandwidth of here, for example, at least 70 nm in the spectral range around 1.2 ⁇ m;
- Such elements are readily available from the field of optical telecommunications, just as other arrangements that can also be used, for example fiber lasers based on YAG at 1.06 ⁇ m with a few nm bandwidth or approximately erbium at 1.5 ⁇ m, could be used.
- a fiber switch 2a is provided, via which injection light, indicated at 2b, can be coupled into the fiber via a coupling optic 2c.
- the injection light 2b comes from an injection laser (not shown), which in turn can be modulated in a time-varying manner with regard to its amplitude and the phase of the optical carrier.
- Passing through the acousto-optical modulator lc also changes the frequency of the light.
- the light that has run at a predetermined frequency at the mirror la in the direction of the acousto-optical modulator will therefore arrive at the other highly reflecting mirror 1b with a shifted frequency or wavelength.
- This, light with a shifted frequency is amplified in the fiber ld, in turn runs over the mirror la with a further frequency shift by the acousto-optical modulator lc on the Mirror lb, etc. This causes the frequency to shift with each pass.
- the speed at which the frequency changes depends on the time it takes for the light to circulate and how strong the frequency shift is in the acousto-optic modulator.
- the shift is carried out in the same way for all components or modes that can be amplified in the resonator, so that the frequency comb, which the modes of the FSF laser represent, are gradually shifted in a synchronous manner.
- the frequency comb which the modes of the FSF laser represent
- FIG. 3 shows the variation of the frequency for a given linear chirp.
- This light is now used for distance measurement. This is only discussed by way of example for an interferometer arrangement, as shown in FIG. 5, in which the light source 1 according to the invention, a beam splitter element 4 in the outcoupling beam 3 of the light source 1, a reference path 6 to a reference surface 6 ⁇ and a measurement path 7 to a measurement object 7 ⁇ are shown, the beams being guided from the reference object 6 and from the measurement object 7 ⁇ to a detector 5.
- the beat frequency spectrum for a laser arrangement is shown as a function of the path difference ⁇ L of the arms 6 and 7 of the measuring arrangement in a gray-scale representation.
- the gray-scale display initially shows position-independent lines, ie lines that do not vary with the path difference ⁇ L and thus run horizontally in the picture, which are caused by a standing wave component in the acousto-optic modulator and differ after the resonator round trip time to repeat.
- the actual measurement signal can be seen with a lot of noise, which runs diagonally through the image as a dark stripe.
- the injection light source is put into operation, namely at a carrier frequency close to the upper region of the amplification curve, that is to say just within the region in which the amplification is greater than 1.
- the optical carrier frequency which is drawn in with a vertical dashed line, is modulated, namely in the present example amplitude-modulated, the modulation itself also not being constant, but varying with a frequency which is approximately determined from the so-called chirp rate, i.e. the frequency shift per resonator revolution divided by the resonator round trip time and further determined by the light travel time along the path difference ⁇ L between the measuring beam path and the reference beam path in the construction of FIG. 5.
- the modulation frequency of the injection light is therefore not kept constant, but is varied by this so-called signature value, that is, by the value that results from the chirp rate and ⁇ L from the formula
- the structure width of the signal structure obtained is determined by the amplification bandwidth, that is to say a high bandwidth of the radiation light source with frequency-shifted feedback, that is to say of the FSF laser, which leads to good spatial resolution. Since the range measurement accuracy is essentially determined by the chirp size, it is desirable to choose a large frequency shift due to the acousto-optical modulator and a small laser resonator length of the FSF laser resonator.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Measurement Of Optical Distance (AREA)
- Lasers (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10204879 | 2002-01-19 | ||
DE10204879 | 2002-01-19 | ||
PCT/DE2003/000106 WO2003061084A1 (en) | 2002-01-19 | 2003-01-16 | Method and device for measuring distance |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1470621A1 true EP1470621A1 (en) | 2004-10-27 |
Family
ID=7713736
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03729412A Withdrawn EP1470621A1 (en) | 2002-01-19 | 2003-01-16 | Method and device for measuring distance |
EP03706242A Withdrawn EP1470434A2 (en) | 2002-01-19 | 2003-01-20 | Imaging device for recording depth |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03706242A Withdrawn EP1470434A2 (en) | 2002-01-19 | 2003-01-20 | Imaging device for recording depth |
Country Status (5)
Country | Link |
---|---|
US (2) | US7684019B2 (en) |
EP (2) | EP1470621A1 (en) |
JP (2) | JP2005515642A (en) |
AU (2) | AU2003235653A1 (en) |
WO (2) | WO2003061084A1 (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2003061084A1 (en) * | 2002-01-19 | 2003-07-24 | Spheron Vr Ag | Method and device for measuring distance |
US7507203B2 (en) * | 2004-09-21 | 2009-03-24 | Digital Signal Corporation | System and method for remotely monitoring physiological functions |
EP1850739B1 (en) * | 2005-02-14 | 2011-10-26 | Digital Signal Corporation | Laser radar system and method for providing chirped electromagnetic radiation |
JP5043038B2 (en) | 2005-12-14 | 2012-10-10 | デジタル シグナル コーポレイション | System and method for tracking eye movement |
US8081670B2 (en) * | 2006-02-14 | 2011-12-20 | Digital Signal Corporation | System and method for providing chirped electromagnetic radiation |
JP6054035B2 (en) | 2009-02-20 | 2016-12-27 | デジタル・シグナル・コーポレーション | 3D image generation system and method using rider and video measurement |
DE112011101915T5 (en) * | 2011-11-11 | 2013-07-11 | Mileseey Technology Inc. | A distance measurement method and system |
US10247538B2 (en) | 2014-10-29 | 2019-04-02 | Bridger Photonics, Inc. | Accurate chirped synthetic wavelength interferometer |
US9706094B2 (en) * | 2014-12-05 | 2017-07-11 | National Security Technologies, Llc | Hyperchromatic lens for recording time-resolved phenomena |
US10677924B2 (en) | 2015-06-23 | 2020-06-09 | Mezmeriz, Inc. | Portable panoramic laser mapping and/or projection system |
US10527412B2 (en) | 2015-10-06 | 2020-01-07 | Bridger Photonics, Inc. | Gas-mapping 3D imager measurement techniques and method of data processing |
WO2018170478A1 (en) * | 2017-03-16 | 2018-09-20 | Bridger Photonics, Inc. | Fmcw lidar methods and apparatuses including examples having feedback loops |
US11422244B2 (en) | 2017-09-25 | 2022-08-23 | Bridger Photonics, Inc. | Digitization systems and techniques and examples of use in FMCW LiDAR methods and apparatuses |
WO2019070751A1 (en) | 2017-10-02 | 2019-04-11 | Bridger Photonics, Inc. | Processing temporal segments of laser chirps and examples of use in fmcw lidar methods and apparatuses |
US11592563B2 (en) | 2017-10-17 | 2023-02-28 | Bridger Photonics, Inc. | Apparatuses and methods for a rotating optical reflector |
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US11428786B2 (en) * | 2017-12-03 | 2022-08-30 | Munro Design & Technologies, Llc | Dual waveforms for three-dimensional imaging systems and methods thereof |
US11803130B2 (en) | 2019-08-09 | 2023-10-31 | Asml Netherlands B.V. | Phase modulators in alignment to decrease mark size |
CN114174890A (en) | 2019-08-09 | 2022-03-11 | Asml荷兰有限公司 | Measuring device and phase modulator equipment thereof |
DE102022116927A1 (en) | 2022-07-07 | 2024-01-18 | Trumpf Laser Gmbh | Laser processing machine with frequency comb-based distance sensor and associated method with frequency comb-based distance measurement |
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2003
- 2003-01-16 WO PCT/DE2003/000106 patent/WO2003061084A1/en active Application Filing
- 2003-01-16 AU AU2003235653A patent/AU2003235653A1/en not_active Abandoned
- 2003-01-16 JP JP2003561059A patent/JP2005515642A/en active Pending
- 2003-01-16 US US10/501,842 patent/US7684019B2/en not_active Expired - Fee Related
- 2003-01-16 EP EP03729412A patent/EP1470621A1/en not_active Withdrawn
- 2003-01-20 US US10/501,843 patent/US7800738B2/en not_active Expired - Fee Related
- 2003-01-20 AU AU2003208268A patent/AU2003208268A1/en not_active Abandoned
- 2003-01-20 EP EP03706242A patent/EP1470434A2/en not_active Withdrawn
- 2003-01-20 WO PCT/DE2003/000154 patent/WO2003060426A2/en active Application Filing
- 2003-01-20 JP JP2003560474A patent/JP2005515416A/en active Pending
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WO2003060426A2 (en) * | 2002-01-19 | 2003-07-24 | Spheron Vr Ag | Imaging device for recording depth |
Also Published As
Publication number | Publication date |
---|---|
US20050117160A1 (en) | 2005-06-02 |
AU2003235653A1 (en) | 2003-07-30 |
AU2003208268A1 (en) | 2003-07-30 |
JP2005515642A (en) | 2005-05-26 |
WO2003060426A2 (en) | 2003-07-24 |
AU2003208268A8 (en) | 2003-07-30 |
US7800738B2 (en) | 2010-09-21 |
US20050078296A1 (en) | 2005-04-14 |
US7684019B2 (en) | 2010-03-23 |
EP1470434A2 (en) | 2004-10-27 |
WO2003061084A1 (en) | 2003-07-24 |
JP2005515416A (en) | 2005-05-26 |
WO2003060426A3 (en) | 2003-09-12 |
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