EP1426992A3 - Interrupteur électrostatique et microeléctromécanique - Google Patents
Interrupteur électrostatique et microeléctromécanique Download PDFInfo
- Publication number
- EP1426992A3 EP1426992A3 EP03104514A EP03104514A EP1426992A3 EP 1426992 A3 EP1426992 A3 EP 1426992A3 EP 03104514 A EP03104514 A EP 03104514A EP 03104514 A EP03104514 A EP 03104514A EP 1426992 A3 EP1426992 A3 EP 1426992A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- fixed contacts
- mems switch
- signal lines
- fixed
- movable contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
- H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
- H01P1/127—Strip line switches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0054—Rocking contacts or actuating members
Landscapes
- Contacts (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002354041 | 2002-12-05 | ||
JP2002354041 | 2002-12-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1426992A2 EP1426992A2 (fr) | 2004-06-09 |
EP1426992A3 true EP1426992A3 (fr) | 2005-11-30 |
Family
ID=32310743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03104514A Withdrawn EP1426992A3 (fr) | 2002-12-05 | 2003-12-03 | Interrupteur électrostatique et microeléctromécanique |
Country Status (1)
Country | Link |
---|---|
EP (1) | EP1426992A3 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007007206A2 (fr) * | 2005-03-18 | 2007-01-18 | Simpler Networks, Inc. | Actionneurs et commutateurs mems |
JP4506529B2 (ja) * | 2005-03-18 | 2010-07-21 | オムロン株式会社 | 静電マイクロスイッチおよびその製造方法、ならびに静電マイクロスイッチを備えた装置 |
DE102006001321B3 (de) * | 2006-01-09 | 2007-07-26 | Protron Mikrotechnik Gmbh | Mikromechanischer Hochfrequenz-Schalter für koplanare Wellenleiter |
DE102007035633B4 (de) | 2007-07-28 | 2012-10-04 | Protron Mikrotechnik Gmbh | Verfahren zur Herstellung mikromechanischer Strukturen sowie mikromechanische Struktur |
US8610519B2 (en) * | 2007-12-20 | 2013-12-17 | General Electric Company | MEMS microswitch having a dual actuator and shared gate |
CN106415772B (zh) * | 2014-06-25 | 2019-08-13 | 通用电气公司 | 集成微机电开关及其相关方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000044012A1 (fr) * | 1999-01-25 | 2000-07-27 | GFD-Gesellschaft für Diamantprodukte mbH | Microcontact de commutation |
WO2002079076A1 (fr) * | 2001-03-30 | 2002-10-10 | Jds Uniphase Corporation | Elements de dispositifs de systemes mecaniques microelectriques possedant des parties en contact avec un substrat et procedes de fonctionnement associes |
US20020163408A1 (en) * | 2000-04-21 | 2002-11-07 | Mitsuru Fujii | Static relay and communication device using static relay |
-
2003
- 2003-12-03 EP EP03104514A patent/EP1426992A3/fr not_active Withdrawn
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000044012A1 (fr) * | 1999-01-25 | 2000-07-27 | GFD-Gesellschaft für Diamantprodukte mbH | Microcontact de commutation |
US20020163408A1 (en) * | 2000-04-21 | 2002-11-07 | Mitsuru Fujii | Static relay and communication device using static relay |
WO2002079076A1 (fr) * | 2001-03-30 | 2002-10-10 | Jds Uniphase Corporation | Elements de dispositifs de systemes mecaniques microelectriques possedant des parties en contact avec un substrat et procedes de fonctionnement associes |
Non-Patent Citations (1)
Title |
---|
PARK J Y ET AL: "Fully integrated micromachined capacitive switches for RF applications", MICROWAVE SYMPOSIUM DIGEST. 2000 IEEE MTT-S INTERNATIONAL BOSTON, MA, USA 11-16 JUNE 2000, PISCATAWAY, NJ, USA,IEEE, US, vol. 1, 11 June 2000 (2000-06-11), pages 283 - 286, XP010505974, ISBN: 0-7803-5687-X * |
Also Published As
Publication number | Publication date |
---|---|
EP1426992A2 (fr) | 2004-06-09 |
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Legal Events
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17P | Request for examination filed |
Effective date: 20060411 |
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AKX | Designation fees paid |
Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
17Q | First examination report despatched |
Effective date: 20091117 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20160202 |