EP1422766A3 - Method of fabrication of electronic devices using microfluidic channels - Google Patents

Method of fabrication of electronic devices using microfluidic channels Download PDF

Info

Publication number
EP1422766A3
EP1422766A3 EP03026733A EP03026733A EP1422766A3 EP 1422766 A3 EP1422766 A3 EP 1422766A3 EP 03026733 A EP03026733 A EP 03026733A EP 03026733 A EP03026733 A EP 03026733A EP 1422766 A3 EP1422766 A3 EP 1422766A3
Authority
EP
European Patent Office
Prior art keywords
microfluidic channels
fabrication
electronic devices
devices
tft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03026733A
Other languages
German (de)
French (fr)
Other versions
EP1422766A2 (en
EP1422766B1 (en
Inventor
Michael L. Chabinyc
William S. Wong
Robert A. Street
Kateri E. Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of EP1422766A2 publication Critical patent/EP1422766A2/en
Publication of EP1422766A3 publication Critical patent/EP1422766A3/en
Application granted granted Critical
Publication of EP1422766B1 publication Critical patent/EP1422766B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K19/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic element specially adapted for rectifying, amplifying, oscillating or switching, covered by group H10K10/00
    • H10K19/10—Integrated devices, or assemblies of multiple devices, comprising at least one organic element specially adapted for rectifying, amplifying, oscillating or switching, covered by group H10K10/00 comprising field-effect transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60—Forming conductive regions or layers, e.g. electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Film Transistor (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Bipolar Transistors (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been found to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.
EP03026733A 2002-11-22 2003-11-21 Method of fabrication of electronic devices using microfluidic channels Expired - Lifetime EP1422766B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/303,551 US6872588B2 (en) 2002-11-22 2002-11-22 Method of fabrication of electronic devices using microfluidic channels
US303551 2002-11-22

Publications (3)

Publication Number Publication Date
EP1422766A2 EP1422766A2 (en) 2004-05-26
EP1422766A3 true EP1422766A3 (en) 2007-06-06
EP1422766B1 EP1422766B1 (en) 2011-01-19

Family

ID=32229935

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03026733A Expired - Lifetime EP1422766B1 (en) 2002-11-22 2003-11-21 Method of fabrication of electronic devices using microfluidic channels

Country Status (6)

Country Link
US (1) US6872588B2 (en)
EP (1) EP1422766B1 (en)
JP (1) JP4699687B2 (en)
BR (1) BR0305303A (en)
CA (1) CA2449632C (en)
DE (1) DE60335772D1 (en)

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TWI254027B (en) * 2004-12-07 2006-05-01 Ind Tech Res Inst Micro device and manufacturing method thereof
JP4602920B2 (en) * 2005-03-19 2010-12-22 三星モバイルディスプレイ株式會社 ORGANIC THIN FILM TRANSISTOR, FLAT DISPLAY DEVICE PROVIDED WITH SAME, AND METHOD FOR MANUFACTURING ORGANIC THIN FILM TRANSISTOR
EP2264803B1 (en) * 2005-05-09 2019-01-30 Pragmatic Printing Ltd Organic rectifier circuit
GB0509410D0 (en) * 2005-05-09 2005-06-15 Univ Manchester Low-mobility electronics devices
KR20070009013A (en) * 2005-07-14 2007-01-18 삼성전자주식회사 Flat panel display and method of making flat panel display
US7365022B2 (en) * 2006-01-20 2008-04-29 Palo Alto Research Center Incorporated Additive printed mask process and structures produced thereby
US7498119B2 (en) * 2006-01-20 2009-03-03 Palo Alto Research Center Incorporated Process for forming a feature by undercutting a printed mask
US7384568B2 (en) * 2006-03-31 2008-06-10 Palo Alto Research Center Incorporated Method of forming a darkfield etch mask
US8821799B2 (en) 2007-01-26 2014-09-02 Palo Alto Research Center Incorporated Method and system implementing spatially modulated excitation or emission for particle characterization with enhanced sensitivity
US9164037B2 (en) * 2007-01-26 2015-10-20 Palo Alto Research Center Incorporated Method and system for evaluation of signals received from spatially modulated excitation and emission to accurately determine particle positions and distances
MY158347A (en) * 2007-02-15 2016-09-30 Massachusetts Inst Technology Solar cells with textured surfaces
WO2008119066A1 (en) * 2007-03-28 2008-10-02 The Regents Of The University Of California Single-sided lateral-field and phototransistor-based optoelectronic tweezers
US8551556B2 (en) * 2007-11-20 2013-10-08 Palo Alto Research Center Incorporated Method for obtaining controlled sidewall profile in print-patterned structures
EP2215453A1 (en) * 2007-11-22 2010-08-11 Koninklijke Philips Electronics N.V. Combined optical and electrical sensor cartridges
SG153674A1 (en) * 2007-12-11 2009-07-29 Nanyang Polytechnic A method of doping and apparatus for doping
US8629981B2 (en) 2008-02-01 2014-01-14 Palo Alto Research Center Incorporated Analyzers with time variation based on color-coded spatial modulation
US8373860B2 (en) 2008-02-01 2013-02-12 Palo Alto Research Center Incorporated Transmitting/reflecting emanating light with time variation
EP2279526A4 (en) * 2008-04-18 2015-11-04 1366 Tech Inc Methods to pattern diffusion layers in solar cells and solar cells made by such methods
GB0818531D0 (en) * 2008-10-09 2008-11-19 Eastman Kodak Co Interconnection of adjacent devices
US8136922B2 (en) * 2009-09-01 2012-03-20 Xerox Corporation Self-assembly monolayer modified printhead
US8679984B2 (en) 2011-06-30 2014-03-25 Samsung Electronics Co., Ltd. Method of manufacturing electric device, array of electric devices, and manufacturing method therefor
US8723140B2 (en) 2011-08-09 2014-05-13 Palo Alto Research Center Incorporated Particle analyzer with spatial modulation and long lifetime bioprobes
US9029800B2 (en) 2011-08-09 2015-05-12 Palo Alto Research Center Incorporated Compact analyzer with spatial modulation and multiple intensity modulated excitation sources
JP2013098487A (en) * 2011-11-04 2013-05-20 Sony Corp Manufacturing method of organic semiconductor device, organic semiconductor device and electronic apparatus
CN105116038B (en) * 2015-07-20 2018-06-29 深圳大学 One kind is based on organic semi-conductor immune detection integrated chip and preparation method thereof
CN107046097B (en) * 2017-05-11 2019-05-14 京东方科技集团股份有限公司 Display panel manufacturing method, the manufacturing equipment of display panel and display panel
DE112017008144T5 (en) * 2017-09-29 2020-07-16 Intel Corporation SELF-ALIGNED CONTACTS FOR THIN FILM TRANSISTORS
CN112255666B (en) * 2020-10-23 2022-11-18 中国工程物理研究院激光聚变研究中心 Neutron sensitive microchannel plate

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US6136212A (en) * 1996-08-12 2000-10-24 The Regents Of The University Of Michigan Polymer-based micromachining for microfluidic devices
US6300988B1 (en) * 1999-03-16 2001-10-09 Hitachi, Ltd. Liquid crystal display apparatus having patterned insulating layer formed over a substrate except for a region on the gate electrode
WO2001095384A1 (en) * 2000-06-03 2001-12-13 The University Of Liverpool A method of electronic component fabrication and an electronic component
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WO2002082560A1 (en) * 2001-04-04 2002-10-17 Infineon Technologies Ag Self-aligned contact doping for organic field effect transistors
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Patent Citations (6)

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Publication number Priority date Publication date Assignee Title
US6136212A (en) * 1996-08-12 2000-10-24 The Regents Of The University Of Michigan Polymer-based micromachining for microfluidic devices
US6300988B1 (en) * 1999-03-16 2001-10-09 Hitachi, Ltd. Liquid crystal display apparatus having patterned insulating layer formed over a substrate except for a region on the gate electrode
WO2001095384A1 (en) * 2000-06-03 2001-12-13 The University Of Liverpool A method of electronic component fabrication and an electronic component
US6452207B1 (en) * 2001-03-30 2002-09-17 Lucent Technologies Inc. Organic semiconductor devices
WO2002082560A1 (en) * 2001-04-04 2002-10-17 Infineon Technologies Ag Self-aligned contact doping for organic field effect transistors
EP1263062A2 (en) * 2001-06-01 2002-12-04 Sel Semiconductor Energy Laboratory Co., Ltd. Organic semiconductor device and process of manufacturing the same

Also Published As

Publication number Publication date
DE60335772D1 (en) 2011-03-03
JP4699687B2 (en) 2011-06-15
CA2449632A1 (en) 2004-05-22
US6872588B2 (en) 2005-03-29
JP2004179655A (en) 2004-06-24
CA2449632C (en) 2009-07-07
BR0305303A (en) 2004-08-31
EP1422766A2 (en) 2004-05-26
US20040101987A1 (en) 2004-05-27
EP1422766B1 (en) 2011-01-19

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