EP1372183A3 - High-temperature oven for solid samples evaporation in an electron-cyclotron-resonance ion source - Google Patents

High-temperature oven for solid samples evaporation in an electron-cyclotron-resonance ion source Download PDF

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Publication number
EP1372183A3
EP1372183A3 EP03011507A EP03011507A EP1372183A3 EP 1372183 A3 EP1372183 A3 EP 1372183A3 EP 03011507 A EP03011507 A EP 03011507A EP 03011507 A EP03011507 A EP 03011507A EP 1372183 A3 EP1372183 A3 EP 1372183A3
Authority
EP
European Patent Office
Prior art keywords
furnace
cup
stem
push rod
coaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03011507A
Other languages
German (de)
French (fr)
Other versions
EP1372183A2 (en
Inventor
Ralf Dipl.-Ing. Lang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GSI Helmholtzzentrum fuer Schwerionenforschung GmbH
Original Assignee
GSI Gesellschaft fuer Schwerionenforschung mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GSI Gesellschaft fuer Schwerionenforschung mbH filed Critical GSI Gesellschaft fuer Schwerionenforschung mbH
Publication of EP1372183A2 publication Critical patent/EP1372183A2/en
Publication of EP1372183A3 publication Critical patent/EP1372183A3/en
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/36—Radio frequency spectrometers, e.g. Bennett-type spectrometers, Redhead-type spectrometers
    • H01J49/38—Omegatrons ; using ion cyclotron resonance

Abstract

Es wird ein Hochtemperaturofen zur Festkörperverdampfung in Elektron-Zyklotron-Resonanz-Ionenquellen vorgeschlagen, der am Ende einer Schubstangenanordnung sitzt. Der Ofen besteht aus einem zylindrischen Becher mit einem Stiel am Außenboden und ist aus einer thermisch bis über 2000°C belastbaren Wolframlegierung. Der Stiel ist bis nahe zum Becherboden koaxial mit einen Außenleiter aus ebenfalls thermisch hochbelastbarem Material umgeben. Der Becher selber ist koaxial mit einer Heizwendel umgeben, die einerseits mit ihrer einen Stirn den Becherrand und andrerseits mit der anderen Stirn den Außenleiter kontaktiert.A high-temperature solid-state evaporation furnace in electron cyclotron resonance ion sources is proposed which sits at the end of a push rod assembly. The furnace consists of a cylindrical cup with a stem on the outer bottom and is made of a tungsten alloy which can be thermally stressed up to 2000 ° C. The stem is surrounded to near the cup bottom coaxial with an outer conductor also made of high thermal loadable material. The cup itself is coaxially surrounded by a heating coil which contacts the outside of the cup on one side with its one end and on the other side with the other end.

An den Stiel und den Außenleiter schließt sich die koaxial aufgebaute Stromzuführung an, die neben dem zentralen Leiter noch aus einem koaxialen Rohrsystem aus drei Rohren besteht, das neben der Stromrückführung noch einen Strömungskanal für Kühlmittel bildet.To the stem and the outer conductor, the coaxial power supply connects, which consists of a coaxial pipe system of three tubes in addition to the central conductor, which still forms a flow channel for coolant in addition to the current return.

Die Stromzuführung bildet gleichzeitig eine Schubstangeneinrichtung zur Positionierung bzw. zur Herausnahme des Hochtemperaturofens aus seiner Betriebsposition. Der gesamte Aufbau aus Ofen und Schubstange kann elektrisch isoliert bewegt werden.The power supply simultaneously forms a push rod device for positioning or for removing the high-temperature furnace from its operating position. The entire structure of furnace and push rod can be moved electrically isolated.

EP03011507A 2002-06-11 2003-05-21 High-temperature oven for solid samples evaporation in an electron-cyclotron-resonance ion source Withdrawn EP1372183A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10225965 2002-06-11
DE2002125965 DE10225965B4 (en) 2002-06-11 2002-06-11 High-temperature furnace for solid-state evaporation in electron cyclotron resonance ion sources

Publications (2)

Publication Number Publication Date
EP1372183A2 EP1372183A2 (en) 2003-12-17
EP1372183A3 true EP1372183A3 (en) 2006-02-01

Family

ID=29557767

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03011507A Withdrawn EP1372183A3 (en) 2002-06-11 2003-05-21 High-temperature oven for solid samples evaporation in an electron-cyclotron-resonance ion source

Country Status (2)

Country Link
EP (1) EP1372183A3 (en)
DE (1) DE10225965B4 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4562355A (en) * 1981-12-18 1985-12-31 Gesellschaft Fur Schwerionenforschung Mbh Darmstadt High current ion source
DE19605171A1 (en) * 1996-02-13 1997-08-14 Schwerionenforsch Gmbh High temperature oven for metal vaporisation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2842506A1 (en) * 1978-09-29 1980-04-10 Schwerionenforsch Gmbh DEVICE FOR GENERATING PRIME ELECTRONES FROM A CATHODE

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4562355A (en) * 1981-12-18 1985-12-31 Gesellschaft Fur Schwerionenforschung Mbh Darmstadt High current ion source
DE19605171A1 (en) * 1996-02-13 1997-08-14 Schwerionenforsch Gmbh High temperature oven for metal vaporisation

Also Published As

Publication number Publication date
DE10225965A1 (en) 2004-01-08
EP1372183A2 (en) 2003-12-17
DE10225965B4 (en) 2004-07-15

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