EP1364130B1 - Vacuum unit - Google Patents

Vacuum unit Download PDF

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Publication number
EP1364130B1
EP1364130B1 EP02719969A EP02719969A EP1364130B1 EP 1364130 B1 EP1364130 B1 EP 1364130B1 EP 02719969 A EP02719969 A EP 02719969A EP 02719969 A EP02719969 A EP 02719969A EP 1364130 B1 EP1364130 B1 EP 1364130B1
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EP
European Patent Office
Prior art keywords
housing
vacuum unit
push rod
vacuum
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02719969A
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German (de)
French (fr)
Other versions
EP1364130A1 (en
Inventor
Thomas Jessberger
Heinz Dobusch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mann and Hummel GmbH
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Mann and Hummel GmbH
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Publication date
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Publication of EP1364130A1 publication Critical patent/EP1364130A1/en
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Publication of EP1364130B1 publication Critical patent/EP1364130B1/en
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Expired - Lifetime legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08Characterised by the construction of the motor unit
    • F15B15/10Characterised by the construction of the motor unit the motor being of diaphragm type

Definitions

  • the invention relates to a vacuum unit according to the preamble of independent claim 1.
  • a vacuum box in the form of a pneumatic switching element is known. This is connected to a vacuum source and has a pressure chamber in which a against the force of a spring element displaceable by a negative pressure actuator is arranged. This actuator is connected to a led out of the pressure chamber actuator.
  • the spring element is arranged outside the pressure chamber and engages on the actuating device or may be attached to a hinge arranged outside. A leadership of the push rod on the spring can not be realized with this structure.
  • the membrane can be damaged. In this case, the membrane can be rubbed through, which can lead to failure of the vacuum unit. This leads to inaccuracies in the transmission of the negative pressure to an element to be actuated.
  • the invention has for its object to avoid these disadvantages and to create a vacuum box or a pneumatic switching element with a precise guidance and thus an exact transmission of the negative pressure in a linear or rotary motion. This object is solved by the features of independent claim 1.
  • the main advantage of the invention is that the push rod is centered on the membrane and is mounted on the housing of the vacuum unit via a longitudinal guide. This makes canting impossible.
  • the longitudinal guide can be designed in such a way that low frictional forces act and thus do not distort the transmission of the movement.
  • the invention provides to provide the longitudinal guide with a bearing pin in the lid of the vacuum unit. This bearing pin engages through the compression spring into a bore of the push rod or the push rod is guided by this bearing pin.
  • This bearing pin engages through the compression spring into a bore of the push rod or the push rod is guided by this bearing pin.
  • Another advantage of the invention is that the compression spring can be designed more unstable, since buckling is prevented by the guide. Furthermore, this type of longitudinal guide is to be integrated into small spaces, since no additional space and no additional components are required. The storage of the bearing pin in the push rod can also be done with a larger game, in particular of several millimeters. As a result, the use of joints, which serve to compensate for rotational movements of a crank, is not required.
  • the push rod can be provided in a further embodiment of the invention with an expansion element, so that a vacuum box is provided which makes an adjustment due to the temperature in addition to the adjustment due to the negative pressure.
  • a vacuum box is provided which makes an adjustment due to the temperature in addition to the adjustment due to the negative pressure.
  • Another embodiment of the invention lies in the supplement of the push rod by a hinge.
  • a hinge which preferably consists of plastic.
  • This housing is constructed in two parts. The two parts can be coupled to one another via snap connections or via a welded joint, embedded in the parting plane of the two parts.
  • Figure 1 shows a vacuum box 10 consisting of a lid 11, a housing 12 disposed therein a membrane 13, a compression spring 14 and a push rod 15.
  • the compression spring 14 directs a force on the push rod 15. If a negative pressure in the vacuum chamber 16 is applied, the Push rod pulled inwards. When reducing the negative pressure, the push rod slides outward and can thus adjust a not shown here element in the form of a flap, shaft or the like.
  • the push rod is enclosed by the membrane.
  • the connection between the diaphragm and push rod is chosen so that it simultaneously forms a seal of the vacuum chamber 16. It can be seen that with a laterally acting force on the push rod, this tends to dodge, that is, due to the instability of the spring difficulties in terms of leadership on. This can cause the push rod rubs on the housing or tilting occurs which leads to inaccuracies and misalignments.
  • FIG. 2 shows a vacuum box 10 with a longitudinal guide. Identical parts are provided with the same reference numerals.
  • the push rod 15 is connected to a push rod head 17th Mistake. At this the membrane is sealingly 13.
  • a longitudinal guide in the form of a sliding bearing 18 is provided.
  • This plain bearing has a seal 19, which ensures that the vacuum chamber 16 is reliably sealed.
  • the vacuum chamber is connected via a line 20 with a negative pressure generator, not shown here.
  • the plain bearing has a plain bearing sleeve 21 which is matched with respect to the material on the material of the push rod and has a low coefficient of friction.
  • the sliding bearing is further provided with a bearing cap 22, which also serves as a stop for the push rod head 17 at a maximum negative pressure.
  • a joint 23 is provided with this system, a crank can be driven. It is also possible to perform a pivoting movement, so that an additional joint in the push rod is not necessary.
  • FIG. 3 shows a vacuum box with an additional expansion element 24.
  • expansion elements are also known by the name of the growth cytostat and, when the temperature changes, execute an axially directed movement.
  • the expansion element itself is axially movable, stored in the housing 12 of the vacuum unit in such a way that a plastic carrier 25 which is connected to the membrane 13, this element moves due to the applied negative pressure. If in addition a temperature change occurs, the expansion element 24 will exert an axial movement against the force of the compression spring 26, since the plunger 27 of the expansion element on the plastic support 25 is supported.
  • Figure 4 shows a variant in which the lid 28 is provided with an inwardly directed bearing pin 29.
  • This bearing pin 29 engages in a bore 30 of the push rod 31 and thus causes a guide this push rod, this means that a guide on the housing 32 in the region of the passage of the push rod is not required by the same.
  • the guide on the plunger 29 may be both a slide bearing guide and a ball bearing bushing guide.
  • the advantage of this guide is that the housing can be designed relatively simple and contamination of the guide is effectively prevented by the inner plunger.
  • Another advantage is the fact that the push rod is not applied to the housing wall and the membrane so that it can not be chafed through.
  • the vacuum unit shown in Figure 4 can also drive a crank, as is customary for vacuum drives of rotary valves, for example on intake systems of internal combustion engines, without the need for an additional joint in the push rod is necessary. It is advantageous that the leadership remotely Point of the crank mechanism is mounted, thereby the angular deflection of the push rod is minimized.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Actuator (AREA)
  • Reciprocating Pumps (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)

Abstract

A vacuum unit for producing a stroke movement due to an applied vacuum. The vacuum unit includes a housing, a spring disposed in the housing, a diaphragm and a drive rod arranged on the diaphragm. The drive rod is positioned centrally on the diaphragm and is mounted in a longitudinal guide in the housing.

Description

Stand der TechnikState of the art

Die Erfindung betrifft eine Unterdruckdose nach dem Oberbegriff des unabhängigen Anspruchs 1.The invention relates to a vacuum unit according to the preamble of independent claim 1.

Aus der DE 196 23 961 A1 ist eine Unterdruckdose in Form eines pneumatischen Schaltelements bekannt. Diese ist mit einer Unterdruckquelle verbunden und weist einen Druckraum auf in dem ein gegen die Kraft eines Federelements durch einen Unterdruck verlagerbares Stellglied angeordnet ist. Dieses Stellglied ist mit einer aus dem Druckraum herausgeführten Betätigungseinrichtung verbunden. Das Federelement ist außerhalb des Druckraumes angeordnet und greift an der Betätigungseinrichtung an oder kann an einem außerhalb angeordneten Gelenk befestigt sein. Eine Führung der Schubstange über die Feder kann mit diesem Aufbau nicht realisiert werden. Außerdem besteht die Gefahr, dass die Schubstange verkantet und damit die Membran der Unterdruckdose am Gehäuse reibt oder zum Anliegen kommt, wobei die Membran beschädigt werden kann. Hierbei kann die Membran durchgerieben werden, was zum Versagen der Unterdruckdose führen kann. Dies führt zu Ungenauigkeiten bei der Übertragung des Unterdrucks auf ein zu betätigendes Element.From DE 196 23 961 A1 a vacuum box in the form of a pneumatic switching element is known. This is connected to a vacuum source and has a pressure chamber in which a against the force of a spring element displaceable by a negative pressure actuator is arranged. This actuator is connected to a led out of the pressure chamber actuator. The spring element is arranged outside the pressure chamber and engages on the actuating device or may be attached to a hinge arranged outside. A leadership of the push rod on the spring can not be realized with this structure. In addition, there is a risk that the push rod tilted and thus rubs the membrane of the vacuum unit on the housing or comes to rest, the membrane can be damaged. In this case, the membrane can be rubbed through, which can lead to failure of the vacuum unit. This leads to inaccuracies in the transmission of the negative pressure to an element to be actuated.

Der Erfindung liegt die Aufgabe zugrunde diese genannten Nachteile zu vermeiden und eine Unterdruckdose bzw. ein pneumatisches Schaltelement zu schaffen mit einer präzisen Führung und damit einer exakten Übertragung des Unterdrucks in eine lineare oder drehende Bewegung. Diese Aufgabe wird durch die Merkmale des unabhängigen Anspruchs 1 gelöst.The invention has for its object to avoid these disadvantages and to create a vacuum box or a pneumatic switching element with a precise guidance and thus an exact transmission of the negative pressure in a linear or rotary motion. This object is solved by the features of independent claim 1.

Vorteile der ErfindungAdvantages of the invention

Der wesentliche Vorteil der Erfindung liegt darin, dass die Schubstange an der Membran zentriert ist und an dem Gehäuse der Unterdruckdose über eine Längsführung gelagert ist. Damit wird ein Verkanten unmöglich. Die Längsführung kann derart gestaltet sein, dass geringe Reibkräfte einwirken und damit die Übertragung der Bewegung nicht verfälschen.The main advantage of the invention is that the push rod is centered on the membrane and is mounted on the housing of the vacuum unit via a longitudinal guide. This makes canting impossible. The longitudinal guide can be designed in such a way that low frictional forces act and thus do not distort the transmission of the movement.

Die Erfindung sieht vor, die Längsführung mit einem Lagerstift im Deckel der Unterdruckdose zu versehen. Dieser Lagerstift greift durch die Druckfeder hindurch in eine Bohrung der Schubstange ein bzw. die Schubstange wird durch diesen Lagerstift geführt. Der Vorteil dieser Art Längsführung liegt darin, dass das Zusammenwirken der beiden Elemente, welche im Reinluftteil angeordnet sind, nicht durch Umwelteinflüsse beeinträchtigt wird.The invention provides to provide the longitudinal guide with a bearing pin in the lid of the vacuum unit. This bearing pin engages through the compression spring into a bore of the push rod or the push rod is guided by this bearing pin. The advantage of this type longitudinal guide is that the interaction of the two elements, which are arranged in the clean air part, is not affected by environmental influences.

Ein weiterer Vorteil der Erfindung besteht darin, dass die Druckfeder labiler ausgelegt werden kann, da durch die Führung ein Ausknicken verhindert ist. Weiterhin ist diese Art der Längsführung auch in kleine Bauräume zu integrieren, da kein zusätzlicher Bauraum und keine zusätzliche Bauteile erforderlich sind. Die Lagerung des Lagerstiftes in der Schubstange kann auch mit größerem Spiel, insbesondere von mehreren Millimetern erfolgen. Dadurch ist der Einsatz von Gelenken , welche zur Kompensation von Drehbewegungen einer Kurbel dienen, nicht erforderlich.Another advantage of the invention is that the compression spring can be designed more unstable, since buckling is prevented by the guide. Furthermore, this type of longitudinal guide is to be integrated into small spaces, since no additional space and no additional components are required. The storage of the bearing pin in the push rod can also be done with a larger game, in particular of several millimeters. As a result, the use of joints, which serve to compensate for rotational movements of a crank, is not required.

Die Schubstange kann in einer weiteren Ausgestaltung der Erfindung mit einem Dehnstoffelement versehen werden, damit wird eine Unterdruckdose geschaffen die zusätzlich zu der Verstellung aufgrund des Unterdrucks eine Verstellung aufgrund von Temperatureinflüssen vornimmt. Solche Systeme finden Anwendung im Automobilbau, insbesondere bei der Kalt-Warmluftregelung von Brennkraftmaschinen.The push rod can be provided in a further embodiment of the invention with an expansion element, so that a vacuum box is provided which makes an adjustment due to the temperature in addition to the adjustment due to the negative pressure. Such systems are used in the automotive industry, especially in the cold-hot air control of internal combustion engines.

Eine weitere Ausgestaltung der Erfindung liegt in der Ergänzung der Schubstange durch ein Gelenk. Selbstverständlich besteht auch die Möglichkeit ein zwei- oder mehrteiliges Gelenk vorzusehen, so dass auch komplizierte Bewegungsabläufe mit der Unterdruckdose realisierbar sind. Das gesamte System wird von einem Gehäuse umschlossen, welches bevorzugt aus Kunststoff besteht. Dieses Gehäuse ist zweiteilig aufgebaut. Die beiden Teile können über Schnappverbindungen oder über eine Schweißverbindung miteinander gekoppelt, in der Trennebene der beiden Teile eingebettet sein.Another embodiment of the invention lies in the supplement of the push rod by a hinge. Of course, it is also possible to provide a two- or multi-part joint, so that even complicated movements with the vacuum unit can be realized. The entire system is enclosed by a housing, which preferably consists of plastic. This housing is constructed in two parts. The two parts can be coupled to one another via snap connections or via a welded joint, embedded in the parting plane of the two parts.

Diese und weitere Merkmale von bevorzugten Weiterbildungen der Erfindung gehen aus den Ansprüchen hervor.These and other features of preferred embodiments of the invention will become apparent from the claims.

Zeichnungdrawing

Die Erfindung wird nachfolgend anhand vom Ausführungsbeispiel gemäß Figur 4 erläutert. Es zeigt

Figur 1
eine Unterdruckdose nach dem Stand der Technik,
Figur 2
eine Unterdruckdose, die nicht Bestandteil der Erfindung ist, mit einer Längsführung und einem Gelenk,
Figur 3
eine Unterdruckdose, die nicht Bestandteil der Erfindung ist, mit einem Dehnstoffelement .
Figur 4
eine erfindungungemäße Unterdruckdose mit einem Lagerstift.
The invention will be explained below with reference to the embodiment of FIG. It shows
FIG. 1
a vacuum box according to the prior art,
FIG. 2
a vacuum box, which is not part of the invention, with a longitudinal guide and a joint,
FIG. 3
a vacuum box, which is not part of the invention, with an expansion element.
FIG. 4
a erfindungungemäße vacuum box with a bearing pin.

Beschreibung der AusführungsbeispieleDescription of the embodiments

Figur 1 zeigt eine Unterdruckdose 10 bestehend aus einem Deckel 11, einem Gehäuse 12 einer darin angeordneten Membran 13, einer Druckfeder 14 und einer Schubstange 15. Die Druckfeder 14 richtet eine Kraft auf die Schubstange 15. Sofern ein Unterdruck im Unterdruckraum 16 anliegt, wird die Schubstange nach innen gezogen. Bei einem Reduzieren des Unterdrucks gleitet die Schubstange nach außen und kann damit ein hier nicht dargestelltes Element in Form einer Klappe, Welle oder Ähnlichem verstellen. Die Schubstange ist von der Membran umschlossen. Die Verbindung zwischen Membran und Schubstange ist so gewählt, dass diese gleichzeitig eine Abdichtung des Unterdruckraums 16 bildet. Es ist ersichtlich, dass bei einer seitlich wirkenden Kraft auf die Schubstange diese dazu neigt auszuweichen, dass heißt durch die Instabilität der Feder treten Schwierigkeiten hinsichtlich der Führung auf. Dieses kann dazu führen, dass die Schubstange am Gehäuse reibt oder eine Verkantung eintritt was zu Ungenauigkeiten und auch zu Fehlstellungen führt.Figure 1 shows a vacuum box 10 consisting of a lid 11, a housing 12 disposed therein a membrane 13, a compression spring 14 and a push rod 15. The compression spring 14 directs a force on the push rod 15. If a negative pressure in the vacuum chamber 16 is applied, the Push rod pulled inwards. When reducing the negative pressure, the push rod slides outward and can thus adjust a not shown here element in the form of a flap, shaft or the like. The push rod is enclosed by the membrane. The connection between the diaphragm and push rod is chosen so that it simultaneously forms a seal of the vacuum chamber 16. It can be seen that with a laterally acting force on the push rod, this tends to dodge, that is, due to the instability of the spring difficulties in terms of leadership on. This can cause the push rod rubs on the housing or tilting occurs which leads to inaccuracies and misalignments.

Figur 2 zeigt eine Unterdruckdose 10 mit einer Längsführung. Gleiche Teile sind mit gleichen Bezugszeichen versehen. Die Schubstange 15 ist mit einem Schubstangenkopf 17 versehen. An diesem liegt die Membran 13 dichtend an. Am Durchgang der Schubstange 15 durch das Gehäuse 12 ist eine Längsführung in Form eines Gleitlagers 18 vorgesehen. Dieses Gleitlager weist eine Dichtung 19 auf, welche dafür sorgt, dass der Unterdruckraum 16 zuverlässig abgedichtet ist. Der Unterdruckraum ist über eine Leitung 20 mit einem hier nicht dargestellten Unterdruckgeber verbunden. Das Gleitlager besitzt eine Gleitlagerhülse 21 die hinsichtlich des Materials auf das Material der Schubstange abgestimmt ist und einen geringen Reibkoeffizienten aufweist. Das Gleitlager ist ferner mit einem Lagerdeckel 22 versehen, welcher gleichzeitig als Anschlag für den Schubstangenkopf 17 bei einem maximalen Unterdruck dient. An der Schubstange ist ein Gelenkt 23 vorgesehen, mit diesem System kann eine Kurbel angetrieben werden. Es besteht auch die Möglichkeit eine Schwenkbewegung auszuführen, so dass ein zusätzliches Gelenk in der Schubstange nicht notwendig ist.FIG. 2 shows a vacuum box 10 with a longitudinal guide. Identical parts are provided with the same reference numerals. The push rod 15 is connected to a push rod head 17th Mistake. At this the membrane is sealingly 13. At the passage of the push rod 15 through the housing 12, a longitudinal guide in the form of a sliding bearing 18 is provided. This plain bearing has a seal 19, which ensures that the vacuum chamber 16 is reliably sealed. The vacuum chamber is connected via a line 20 with a negative pressure generator, not shown here. The plain bearing has a plain bearing sleeve 21 which is matched with respect to the material on the material of the push rod and has a low coefficient of friction. The sliding bearing is further provided with a bearing cap 22, which also serves as a stop for the push rod head 17 at a maximum negative pressure. On the push rod a joint 23 is provided with this system, a crank can be driven. It is also possible to perform a pivoting movement, so that an additional joint in the push rod is not necessary.

Figur 3 zeigt eine Unterdruckdose mit einem zusätzlichen Dehnstoffelement 24. Solche Dehnstoffelemente sind auch unter dem Namen Wachstermostat bekannt und führen bei Temperaturänderungen eine axial gerichtete Bewegung aus. Das Dehnstoffelement selbst ist axial beweglich, in dem Gehäuse 12 der Unterdruckdose gelagert und zwar derart, dass ein Kunststoffträger 25, welcher mit der Membran 13 verbunden ist, dieses Element aufgrund des anliegenden Unterdrucks bewegt. Sofern zusätzlich eine Temperaturänderung auftritt, wird das Dehnstoffelement 24 eine Axialbewegung entgegen der Kraft der Druckfeder 26 ausüben, da sich der Stößel 27 des Dehnstoffelements an dem Kunststoffträger 25 abstützt.FIG. 3 shows a vacuum box with an additional expansion element 24. Such expansion elements are also known by the name of the growth cytostat and, when the temperature changes, execute an axially directed movement. The expansion element itself is axially movable, stored in the housing 12 of the vacuum unit in such a way that a plastic carrier 25 which is connected to the membrane 13, this element moves due to the applied negative pressure. If in addition a temperature change occurs, the expansion element 24 will exert an axial movement against the force of the compression spring 26, since the plunger 27 of the expansion element on the plastic support 25 is supported.

Figur 4 zeigt eine Variante bei welcher der Deckel 28 mit einem nach innen gerichteten Lagerstift 29 versehen ist. Dieser Lagerstift 29 greift in eine Bohrung 30 der Schubstange 31 ein und bewirkt damit eine Führung dieser Schubstange, dies bedeutet, dass eine Führung über das Gehäuse 32 im Bereich des Durchtritts der Schubstange durch dasselbe nicht erforderlich ist. Selbstverständlich kann auch die Führung über den Stößel 29 sowohl eine Gleitlagerführung als auch eine Kugellagerbuchsenführung sein. Der Vorteil dieser Führung liegt darin, dass das Gehäuse relativ einfach gestaltet sein kann und eine Verschmutzung der Führung durch den innenliegenden Stößel wirksam verhindert wird. Ein weiterer Vorteil ist darin zu sehen, dass die Schubstange nicht an der Gehäusewand anliegt und die Membran damit nicht durchgescheuert werden kann. Durch genügend Spiel in der Führung kann die in Figur 4 dargestellte Unterdruckdose auch eine Kurbel antreiben, wie es für Unterdruckantriebe von Drehschiebern, beispielsweise an Ansaugsystemen von Brennkraftmaschinen üblich ist, ohne dass dazu ein zusätzliches Gelenk in der Schubstange notwendig ist. Dabei ist von Vorteil, dass die Führung am entferntesten Punkt vom Kurbeltrieb angebracht ist, dadurch wird die Winkelauslenkung der Schubstange minimiert.Figure 4 shows a variant in which the lid 28 is provided with an inwardly directed bearing pin 29. This bearing pin 29 engages in a bore 30 of the push rod 31 and thus causes a guide this push rod, this means that a guide on the housing 32 in the region of the passage of the push rod is not required by the same. Of course, the guide on the plunger 29 may be both a slide bearing guide and a ball bearing bushing guide. The advantage of this guide is that the housing can be designed relatively simple and contamination of the guide is effectively prevented by the inner plunger. Another advantage is the fact that the push rod is not applied to the housing wall and the membrane so that it can not be chafed through. By sufficient play in the guide, the vacuum unit shown in Figure 4 can also drive a crank, as is customary for vacuum drives of rotary valves, for example on intake systems of internal combustion engines, without the need for an additional joint in the push rod is necessary. It is advantageous that the leadership remotely Point of the crank mechanism is mounted, thereby the angular deflection of the push rod is minimized.

Claims (4)

  1. Vacuum unit for creating a stroke movement due to an applied vacuum, said vacuum unit having a housing (12), a spring (14) that is disposed in the said housing, a diaphragm (13) and a driving rod (15) that is disposed on the diaphragm, characterised in that the driving rod (15) is centred on the diaphragm (13) and is mounted on the housing of the vacuum unit via a longitudinal guiding means (18) and in that the housing (12, 32) includes a bearing pin (29) and this bearing pin (29) engages in a bore (30) of the driving rod (15, 31) and forms the longitudinal guiding means.
  2. Vacuum unit according to one of the preceding claims, characterised in that the driving rod is formed by a thermally expandable element.
  3. Vacuum unit according to one of the preceding claims, characterised in that a hinged joint is disposed on the drive rod to drive a crank or to accomplish a pivotal movement.
  4. Vacuum unit according to one of the preceding claims, characterised in that the housing is produced from plastics material and is in two parts, wherein the two parts are welded together and the diaphragm is embedded into the connecting region.
EP02719969A 2001-03-02 2002-02-28 Vacuum unit Expired - Lifetime EP1364130B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10110237 2001-03-02
DE10110237 2001-03-02
PCT/EP2002/002176 WO2002070903A1 (en) 2001-03-02 2002-02-28 Vacuum unit

Publications (2)

Publication Number Publication Date
EP1364130A1 EP1364130A1 (en) 2003-11-26
EP1364130B1 true EP1364130B1 (en) 2006-04-19

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US (1) US7011011B2 (en)
EP (1) EP1364130B1 (en)
JP (1) JP4290991B2 (en)
AT (1) ATE323838T1 (en)
DE (1) DE50206467D1 (en)
WO (1) WO2002070903A1 (en)

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US7011011B2 (en) 2006-03-14
US20040206232A1 (en) 2004-10-21
ATE323838T1 (en) 2006-05-15
EP1364130A1 (en) 2003-11-26
WO2002070903A9 (en) 2003-01-23
DE50206467D1 (en) 2006-05-24
JP2004522082A (en) 2004-07-22
WO2002070903A1 (en) 2002-09-12
JP4290991B2 (en) 2009-07-08

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