EP1343600B1 - Method for making thin films in metal/ceramic composite - Google Patents

Method for making thin films in metal/ceramic composite Download PDF

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Publication number
EP1343600B1
EP1343600B1 EP01999450A EP01999450A EP1343600B1 EP 1343600 B1 EP1343600 B1 EP 1343600B1 EP 01999450 A EP01999450 A EP 01999450A EP 01999450 A EP01999450 A EP 01999450A EP 1343600 B1 EP1343600 B1 EP 1343600B1
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Prior art keywords
suspension
ceramic
metal
film
binder
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German (de)
French (fr)
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EP1343600A1 (en
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Jean-François SILVAIN
Thierry Chartier
Pierre-Marie Geffroy
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Centre National de la Recherche Scientifique CNRS
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/22Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/006Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of flat products, e.g. sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10Processes characterised by the sequence of their steps

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
  • Powder Metallurgy (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

Process for manufacturing composite metal/ceramic thin films, consisting of: a) preparing a suspension (S) in an organic solvent starting from a substantially homogenous mixture of ceramic reinforcements, metallic particles, a binder, a plasticizer and a dispersant, the metallic particles constituting at least 5% by weight of the suspension; b) tape casting the suspension to form a thin film, and then de-binding said thin film; c) densifying the de-binded thin film in a furnace.

Description

Domaine de l'inventionField of the invention

L'invention concerne un procédé de fabrication de films minces en composite métal/céramique, dans lequel les renforts céramiques sont répartis de façon homogène dans la matrice métallique.The invention relates to a method for manufacturing thin metal / ceramic composite films, in which the ceramic reinforcements are homogeneously distributed in the metal matrix.

L'invention trouve des applications dans tous les domaines utilisant des substrats ou des films en composite métal/céramique et, en particulier, dans le domaine de la fabrication des composants électroniques destinés, par exemple, au domaine de l'automobile ou de l'aéronautique.The invention finds applications in all fields using metal / ceramic composite substrates or films and, in particular, in the field of the manufacture of electronic components intended, for example, in the field of automotive or automotive aeronautics.

Etat de la techniqueState of the art

Classiquement, les films métalliques sont réalisés par un procédé de laminage. Cependant, ce procédé de laminage ne permet pas d'obtenir une répartition homogène des renforts céramiques dans la matrice métallique ; il n'est donc pas adapté à la fabrication de films en composite métal/céramique. De plus, au-delà d'une certaine concentration de poudre céramique, les contraintes résiduelles, provoquées par le laminage, entraînent la fissuration du film.Conventionally, the metal films are made by a rolling process. However, this rolling method does not make it possible to obtain a homogeneous distribution of the ceramic reinforcements in the metal matrix; it is therefore not suitable for the manufacture of metal / ceramic composite films. In addition, beyond a certain concentration of ceramic powder, the residual stresses, caused by rolling, lead to cracking of the film.

D'autres procédés, utilisés pour la fabrication de films en composite métal/céramique, sont les procédés de pressage, d'injection et d'extrusion. Or, aucun de ces procédés ne permet d'obtenir des films avec un excellent état de surface. En outre, ces procédés deviennent coûteux, dès lors que l'épaisseur du film doit être inférieure au millimètre.Other processes used for the manufacture of metal / ceramic composite films are the pressing, injection and extrusion processes. However, none of these processes makes it possible to obtain films with an excellent surface state. In addition, these methods become expensive, since the thickness of the film must be less than one millimeter.

Par ailleurs, il existe des procédés de coulage en bande qui permettent de réaliser des films minces. De tels procédés sont décrits dans les articles suivants : ALCOCK J., DESCRIBE S., Tape casting, a flexible approach to surface engineering, Materials world, 13-14, February (2000) ; BÖHNLEIN-MAUß J., SIGMUND W., WEGNER G., MEYER W. H., HEßEL F., SEITZ K, ROOSEN A., The fonction in the tape casting of alumina, Advanced Materials, vol. 4, n° 2, 73-81 (1992) ; MORENO R., The role of slip additives in tape casting technology : part I-Solvents and dispersants, American Ceramic Society Bulletin, vol. 71, n° 10, 1 521 - 1 531 (1992) ; MORENO R., The role of slip additives in tape casting technology : part II-Blinders and Plasticizers, American Ceramic Society Bulletin, vol. 71, n° 11, 1 647-1 657 (1992) et dans les brevets US-5 002 710 et US-5 473 008.In addition, there are tape casting methods that make it possible to produce thin films. Such methods are described in the following articles: ALCOCK J., DESCRIBE S., Tape casting, a flexible approach to surface engineering, Materials world, 13-14, February (2000); BÖHNLEIN-MAUß J., SIGMUND W., WEGNER G., MEYER W.H., HEßEL F., SEITZ K, ROOSEN A., The function in the casting of alumina, Advanced Materials, vol. 4, No. 2, 73-81 (1992); MORENO R., The role of slip additives in tape casting technology: I-Solvents and dispersants, American Ceramic Society Bulletin, vol. 71, No. 10, 1,521-1,531 (1992); MORENO R., The role of slip additives in tape casting technology: Part II-Blinders and Plasticizers, American Ceramic Society Bulletin, vol. 71, No. 11, 1647-1657 (1992) and in US-5,002,710 and US-5,473,008.

Cependant, il n'est pas possible de trouver, dans l'ensemble de ces travaux liés au coulage en bande, un dispositif (banc + suspension) permettant le coulage de bandes en matériau composite métal/céramique.However, it is not possible to find, in all of these works related to casting tape, a device (bench + suspension) for casting strips of metal / ceramic composite material.

Exposé de l'inventionPresentation of the invention

L'invention a justement pour but de remédier aux procédés de fabrication de films minces décrits précédemment. A cette fin, elle propose un procédé de fabrication de films minces en composite métal/céramique utilisant une méthode de coulage en bande.The purpose of the invention is precisely to remedy the thin film manufacturing processes described above. To this end, it proposes a method for manufacturing thin metal / ceramic composite films using a strip casting method.

De façon plus précise, l'invention concerne un procédé de fabrication de films minces en composite métal/céramique consistant à :

  1. a) préparer une suspension (S) dans un solvant organique à partir d'un mélange sensiblement homogène de renforts céramiques, de particules métalliques, d'un liant, d'un plastifiant, et d'un dispersant, les particules métalliques constituant au moins 5 %, en masse, de la suspension ;
  2. b) effectuer un coulage en bande de la suspension pour former un film mince, puis effectuer un déliantage de ce film mince ;
  3. c) réaliser la densification du film mince délianté, dans un four.
More specifically, the invention relates to a method for manufacturing thin metal / ceramic composite films comprising:
  1. a) preparing a suspension (S) in an organic solvent from a substantially homogeneous mixture of ceramic reinforcements, metal particles, a binder, a plasticizer, and a dispersant, the metal particles constituting at least 5%, by weight, of the suspension;
  2. b) casting a slurry of the slurry to form a thin film, then debinding this thin film;
  3. c) densification of the delaminated thin film in an oven.

La technique du coulage en bande permet d'orienter et de contrôler la répartition des renforts céramiques.The band casting technique is used to orient and control the distribution of ceramic reinforcements.

Autrement dit, le procédé décrit selon l'invention permet de fabriquer des films composites métal/céramique avec une orientation des particules céramiques dans le plan du film, en particulier pour les particules très anisotropes, comme les fibres et les plaquettes. Ceci permet d'améliorer certaines propriétés du composite dans le plan du film, comme diminuer le coefficient thermique d'expansion et augmenter la conductivité thermique.In other words, the process described according to the invention makes it possible to manufacture metal / ceramic composite films with an orientation of the ceramic particles in the plane of the film, in particular for highly anisotropic particles, such as fibers and platelets. This improves some properties of the composite in the plane of the film, such as decreasing the thermal coefficient of expansion and increasing the thermal conductivity.

Avantageusement, la suspension a une viscosité comprise entre 0,5 et 3 Pa.s.Advantageously, the suspension has a viscosity of between 0.5 and 3 Pa.s.

De préférence, la suspension est réalisée en mélangeant :

  • au moins une poudre métallique et au moins un renfort céramique constituant environ 30 à 60 % du volume total de la suspension ;
  • un solvant organique constituant environ 15 à 45 % du volume de la suspension ;
  • un liant et un plastifiant constituant environ 30 à 70 % du volume de la suspension ;
  • un dispersant représentant environ 0,1 à 2 % de la masse des poudres céramique et métallique ; et
  • des additifs représentant environ 0,01 à 2 % de la masse des poudres métallique et céramique.
Preferably, the suspension is produced by mixing:
  • at least one metal powder and at least one ceramic reinforcement constituting approximately 30 to 60% of the total volume of the suspension;
  • an organic solvent constituting approximately 15 to 45% of the volume of the suspension;
  • a binder and a plasticizer constituting about 30 to 70% of the volume of the suspension;
  • a dispersant representing about 0.1 to 2% of the mass of ceramic and metallic powders; and
  • additives representing about 0.01 to 2% of the mass of metal and ceramic powders.

Selon un mode de réalisation de l'invention, le dispersant est un ester phosphorique, un polyacrylate, un sulfonate, un perfluorate ou encore un acide à chaîne carbonée de 2 à 30 atomes de carbone.According to one embodiment of the invention, the dispersant is a phosphoric ester, a polyacrylate, a sulfonate, a perfluorate or a carbon chain acid of 2 to 30 carbon atoms.

Selon l'invention, la poudre métallique peut être une poudre de cuivre, d'aluminium, d'argent, d'or, de nickel, de titane, de chrome, de zinc ou d'un alliage de deux ou plusieurs de ces matériaux. Le renfort céramique peut être une poudre et/ou une fibre courte (c'est-à-dire une fibre dont la longueur varie entre 1 et 500 µm) de graphite, de carbures, de nitrures ou d'oxydes.According to the invention, the metal powder may be a powder of copper, aluminum, silver, gold, nickel, titanium, chromium, zinc or an alloy of two or more of these materials . The ceramic reinforcement may be a powder and / or a short fiber (that is to say a fiber whose length varies between 1 and 500 μm) of graphite, carbides, nitrides or oxides.

Selon une variante de l'invention, la densification du film consiste en un frittage du film dans un four.According to a variant of the invention, the densification of the film consists of sintering the film in an oven.

Selon une autre variante de l'invention, la densification du film consiste en un laminage à chaud et un recuit du film.According to another variant of the invention, the densification of the film consists of hot rolling and annealing of the film.

De préférence, la préparation de la suspension consiste :

  • à broyer en jarre ou par attrition les poudres métalliques et les renforts céramiques avec le solvant et le dispersant ; et
  • à ajouter et à mélanger à cette substance un liant et un plastifiant.
    L'invention a trait en outre à un procédé de préparation de pièces en composite à structure stratifiée dans lequel on forme plusieurs films minces (films « en cru ») par les étapes a) et b) décrites plus haut, puis on empile lesdits films minces et on soumet l'empilement à une thermocompression.
    De préférence, les films minces empilés ont des compositions différentes.
Preferably, the preparation of the suspension consists of:
  • grinding jars or attrition metal powders and ceramic reinforcements with the solvent and the dispersant; and
  • to add and mix with this substance a binder and a plasticizer.
    The invention furthermore relates to a process for the preparation of laminated structure composite parts in which several thin films ("green" films) are formed by steps a) and b) described above, and then said films are stacked thin and the stack is subjected to thermocompression.
    Preferably, the stacked thin films have different compositions.

Brève description des figuresBrief description of the figures

  • La figure 1 représente schématiquement l'étape de préparation de la suspension à partir de particules métalliques et de renforts céramiques ;Figure 1 shows schematically the step of preparing the suspension from metal particles and ceramic reinforcements;
  • la figure 2 représente schématiquement l'étape de coulage en bande de la suspension pour former un film mince ; etFigure 2 schematically shows the strip casting step of the slurry to form a thin film; and
  • les figures 3A et 3B représentent deux modes de réalisation de l'étape de densification du film dans un four.Figures 3A and 3B show two embodiments of the densification step of the film in a furnace.
Description détaillée de modes de réalisationDetailed description of embodiments

L'invention concerne un procédé de fabrication de films minces en composite métal/céramique.The invention relates to a method for manufacturing thin metal / ceramic composite films.

Ce procédé consiste à préparer une suspension, appelée aussi « barbotine », comportant un mélange sensiblement homogène de renforts céramiques et de particules métalliques.This process consists in preparing a suspension, also called "slip", comprising a substantially homogeneous mixture of ceramic reinforcements and metal particles.

Ces particules métalliques et renforts céramiques sont choisies, respectivement, sous forme d'une ou plusieurs poudre(s) métallique(s) et d'un ou plusieurs renfort(s) céramique(s). Ces poudres et fibres courtes sont mélangées à un solvant organique, un dispersant, un liant et un plastifiant.These metal particles and ceramic reinforcements are chosen, respectively, in the form of one or more metal powder (s) and one or more ceramic reinforcement (s). These powders and short fibers are mixed with an organic solvent, a dispersant, a binder and a plasticizer.

La proportion de ces différents éléments est la suivante :

  • les poudres métalliques et les renforts céramiques représentent 30 à 60 % du volume total de matière sèche de la suspension (c'est-à-dire de l'ensemble du volume occupé par le liant, le plastifiant, le dispersant et les poudres métallique et céramique) ;
  • le solvant représente 15 à 45 % du volume total de matière sèche ;
  • le liant et le plastifiant représentent 30 à 70 % du volume de matière sèche ;
  • le dispersant représente entre 0, 01 et 2 % de la masse des poudres métallique et des renforts céramiques ;
  • d'autres additifs sont ajoutés, tels que des agents de décollement et/ou des agents mouillants, qui représentent entre 0,01 et 2 % de la masse des poudres métallique et céramique.
The proportion of these different elements is as follows:
  • the metal powders and the ceramic reinforcements represent 30 to 60% of the total volume of dry matter of the suspension (that is to say of the whole volume occupied by the binder, the plasticizer, the dispersant and the metal powders and ceramic);
  • the solvent represents 15 to 45% of the total volume of dry matter;
  • the binder and the plasticizer represent 30 to 70% of the volume of dry matter;
  • the dispersant represents between 0.01 and 2% of the mass of metal powders and ceramic reinforcements;
  • other additives are added, such as release agents and / or wetting agents, which represent between 0.01 and 2% of the mass of metallic and ceramic powders.

Sur la figure 1, on a représenté cette première étape du procédé de l'invention, à savoir l'étape de préparation de la suspension.In Figure 1, there is shown this first step of the method of the invention, namely the step of preparing the suspension.

Cette étape de préparation de la suspension S consiste, tout d'abord, en un broyage en jarre, ou par attrition, des poudres métallique et céramique avec le solvant et le dispersant. Cette étape de broyage est réalisée au moyen d'un broyeur attriteur (représenté par la référence 1 sur la figure 1) ou par un broyeur en jarre.This step of preparation of the suspension S consists, first of all, in a grinding jar, or attrition, metal and ceramic powders with the solvent and the dispersant. This grinding step is carried out by means of an attritor mill (represented by reference 1 in FIG. 1) or by a jar crusher.

L'ensemble ainsi obtenu est ensuite mélangé à des liants et plastifiants, grâce à un mélangeur, référencé 2.The assembly thus obtained is then mixed with binders and plasticizers, using a mixer, referenced 2.

La (ou les) poudre (s) métallique(s), destinée(s) à former la matrice métallique de la suspension, peu(ven)t être, par exemple, une poudre de cuivre, d'aluminium, d'argent, d'or, de nickel, de titane, de chrome, de zinc ou encore d'un alliage de deux ou plusieurs de ces métaux.The metal powder (s) intended to form the metal matrix of the suspension may be, for example, a powder of copper, aluminum or silver. gold, nickel, titanium, chromium, zinc or an alloy of two or more of these metals.

Le (ou les) renfort (s) céramique (s) destiné(s) à former les renforts céramiques de cette suspension peu(ven)t être, par exemple, une poudre ou une fibre courte de graphite ou bien une poudre ou une fibre courte à base de carbures, comme le carbure de silicium, de nitrures, comme le nitrure d'aluminium, ou encore d'oxydes, comme la silice ou le tungstate de zirconium.The ceramic reinforcement (s) intended to form the ceramic reinforcements of this suspension may be, for example, a powder or a short graphite fiber, or a powder or a short fiber based on carbides, such as silicon carbide, nitrides, such as aluminum nitride, or oxides, such as silica or zirconium tungstate.

Les renforts céramiques peuvent se présenter sous la forme de fibres ou bien de plaquettes ou encore de grains sensiblement sphériques, de diamètre compris entre environ 0,1 µm et 100 µm.The ceramic reinforcements may be in the form of fibers or platelets or substantially spherical grains, with a diameter of between about 0.1 microns and 100 microns.

Les fibres sont généralement des fibres courtes d'un diamètre de 10 nm à 10 µm, et d'une longueur de 100 nm à 10 mm.The fibers are generally short fibers with a diameter of 10 nm to 10 μm, and a length of 100 nm to 10 mm.

Ces renforts de céramique peuvent être enrobés d'une couche de matériau métallique, tel que du cobalt, du nickel, de l'argent ou de l'or. Dans ce cas, l'épaisseur de l'enrobage métallique est d'au moins 0,01 µm. Cet enrobage peut être réalisé par immersion des renforts céramiques dans un bain électrolytique. Cet enrobage a l'avantage d'améliorer la densification du matériau pendant l'étape de densification du film, et, en particulier, lorsque cette densification consiste en un frittage, car il permet d'augmenter l'interface métal/céramique.These ceramic reinforcements may be coated with a layer of metallic material, such as cobalt, nickel, silver or gold. In this case, the thickness of the metal coating is at least 0.01 μm. This coating can be achieved by immersing the ceramic reinforcements in an electrolytic bath. This coating has the advantage of improving the densification of the material during the densification step of the film, and in particular when this densification consists of sintering because it makes it possible to increase the metal / ceramic interface.

La suspension mise en oeuvre selon l'invention est une suspension ou système organique.The suspension used according to the invention is a suspension or organic system.

Ainsi, le solvant utilisé pour réaliser cette suspension S est un solvant organique, choisi généralement parmi les cétones, les alcools et leurs mélanges.Thus, the solvent used to make this suspension S is an organic solvent, generally chosen from ketones, alcohols and mixtures thereof.

Le dispersant utilisé pour réaliser cette suspension a pour rôle d'assurer l'homogénéité et la stabilité de la suspension en développant des forces de répulsion entre les renforts céramiques et les particules métalliques.The dispersant used to produce this suspension serves to ensure the homogeneity and stability of the suspension by developing repulsion between ceramic reinforcements and metal particles.

En d'autres termes, le dispersant assure une bonne stabilité et une bonne dispersion des particules entre elles. Le dispersant permet d'obtenir, après séchage, une bande homogène et compacte.In other words, the dispersant ensures good stability and good dispersion of the particles together. The dispersant makes it possible, after drying, to obtain a homogeneous and compact strip.

Ce dispersant est choisi parmi les tensioactifs, les macromolécules, comme l'huile de poisson, les esters phosphoriques, les polyacrylates, les sulfonates, les perfluorates et les acides à chaîne carbonée ayant de 2 à 30 atomes de carbone, comme par exemple l'acide oxalique et l'acide stéarique.This dispersant is chosen from surfactants, macromolecules, such as fish oil, phosphoric esters, polyacrylates, sulphonates, perfluorates and carbon chain acids having from 2 to 30 carbon atoms, for example oxalic acid and stearic acid.

Le liant utilisé pour réaliser cette suspension a pour rôle d'assurer la cohésion de la bande (ou film), après évaporation du solvant. Ce liant est généralement un composé non-soluble dans l'eau choisi parmi les polyalcools, les composés vinyliques, tels que le polyvinyl-butyral et les composés acryliques et leurs mélanges.The binder used to make this suspension has the role of ensuring the cohesion of the strip (or film), after evaporation of the solvent. This binder is generally a non-water-soluble compound chosen from polyalcohols, vinyl compounds, such as polyvinyl butyral and acrylic compounds and mixtures thereof.

Le plastifiant utilisé dans cette suspension a pour rôle d'assurer une grande souplesse, une grande fluidité, à la bande ; cette souplesse est nécessaire lors du coulage en bande de la suspension et, ultérieurement, lors de la manipulation de la bande. Ce plastifiant peut être, par exemple, un polyéthylène glycol ou bien du dibutylphtalate.The plasticizer used in this suspension has the role of ensuring a great flexibility, a great fluidity, to the band; this flexibility is necessary during the casting strip of the suspension and, later, during the handling of the band. This plasticizer may be, for example, a polyethylene glycol or dibutyl phthalate.

En d'autres termes, la suspension contient également un plastifiant qui permet d'obtenir une bande, ou film mince, en cru souple et suffisamment solide pour être manipulable. En effet, le rapport liant/plastifiant permet d'ajuster la cohésion mécanique de la bande et sa souplesse. Ces bandes peuvent donc être empilées et thermocompressées de façon à réaliser des empilements de bandes de compositions différentes. Cette solution n'est pas envisageable avec les procédés de l'art antérieur.In other words, the suspension also contains a plasticizer which makes it possible to obtain a strip, or thin film, in flexible raw material and sufficiently strong to be handled. Indeed, the report binder / plasticizer makes it possible to adjust the mechanical cohesion of the strip and its flexibility. These strips can therefore be stacked and thermocompressed so as to produce stacks of bands of different compositions. This solution is not possible with the methods of the prior art.

Notons, en outre, que le système, la suspension mise en oeuvre selon l'invention, ne nécessite pas de lubrifiant.Note, moreover, that the system, the suspension implemented according to the invention, does not require lubricant.

La figure 2 représente schématiquement la deuxième étape du procédé de l'invention, c'est-à-dire l'étape de coulage en bande de la suspension. En effet, la suspension S réalisée lors de la première étape est coulée sur un banc de coulage 3 de façon à former une bande B, appelée aussi film mince. Le coulage en bandes consiste à couler la suspension S sur un support qui peut être, par exemple, une bande d'acier 8 ou un fil polymère, référencé 5 sur la figure 2. Pour permettre un coulage aisé de la suspension, celle-ci doit avoir une viscosité de l'ordre de 0,5 à 3 Pa.s.Figure 2 shows schematically the second step of the method of the invention, that is to say the strip casting step of the suspension. Indeed, the suspension S made during the first step is cast on a casting bench 3 so as to form a band B, also called thin film. The strip casting consists of casting the suspension S on a support which may be, for example, a steel strip 8 or a polymer wire, referenced 5 in FIG. 2. In order to allow easy casting of the suspension, this suspension must have a viscosity of the order of 0.5 to 3 Pa.s.

Le coulage de la suspension est obtenu par le mouvement relatif entre un sabot 6 du banc de coulage et le support 5. Le sabot 6 comporte des couteaux 7, dont la hauteur est réglable. Ainsi, l'épaisseur du film peut être modifiée en changeant la hauteur entre ces couteaux 7 et le support 5. On peut ainsi obtenir, grâce à ce coulage en bande, une épaisseur de film très régulière.The casting of the suspension is obtained by the relative movement between a shoe 6 of the casting bench and the support 5. The shoe 6 comprises knives 7, whose height is adjustable. Thus, the thickness of the film can be modified by changing the height between these knives 7 and the support 5. It is thus possible, thanks to this band casting, a very regular film thickness.

Lorsque la suspension S a été coulée sous forme de bande B, celle-ci défile à l'intérieur d'un séchoir 4, sous atmosphère contrôlée, afin d'en éliminer les composés organiques. Cette étape est appelée déliantage. Plus précisément, le déliantage thermique consiste à chauffer lentement la bande de matériau sous atmosphère contrôlée, dans un four ou séchoir 4 afin d'en éliminer les composés organiques contenus principalement le liant et le plastifiant. Par exemple, la vitesse de chauffe, dans le séchoir, est de l'ordre de 0,2 à 2°C/minute entre 100°C et 500°C.When the suspension S has been cast in the form of a strip B, it travels inside a dryer 4, under a controlled atmosphere, in order to eliminate organic compounds. This step is called debinding. More specifically, thermal debinding consists in slowly heating the strip of material in a controlled atmosphere, in an oven or dryer 4 in order to remove the organic compounds contained mainly binder and plasticizer. For example, the heating rate in the dryer is of the order of 0.2 to 2 ° C / min between 100 ° C and 500 ° C.

Les figures, 3A et 3B représentent deux modes de réalisation différents de la troisième étape du procédé de l'invention, c'est-à-dire l'étape de densification du film.Figures 3A and 3B show two different embodiments of the third step of the method of the invention, that is to say the densification step of the film.

Cette étape de densification consiste à évaporer le solvant et à sécher le film mince obtenu après déliantage.This densification step consists of evaporating the solvent and drying the thin film obtained after debinding.

Cette étape de densification du film a pour rôle d'évaporer le solvant. Elle peut être réalisée, par exemple, de deux façons différentes : le film peut être densifié par frittage dans un four à passage ou dans un four discontinu, ou bien par un laminage à chaud, à l'aide d'un laminoir et d'un four de recuit.This step of densification of the film has the role of evaporating the solvent. It can be carried out, for example, in two different ways: the film can be densified by sintering in a passage furnace or in a batch oven, or by hot rolling, using a rolling mill and an annealing furnace.

La première variante, représentée sur la figure 3A, montre que le film B, obtenu après déliantage, est découpé en plaques P1 à Pn. Ces plaques sont introduites dans un four, référencé 9, sous une atmosphère contrôlée. Ce four peut être un four à passage ou bien un four discontinu. La densification par frittage est réalisée sous atmosphère contrôlé, ou sous atmosphère réductrice, comme par exemple l'hydrogène, l'azote hydrogéné, l'argon ou bien l'argon hydrogéné, de façon à éviter l'oxydation du matériau.The first variant, shown in FIG. 3A, shows that the film B, obtained after debinding, is cut into plates P1 to Pn. These plates are introduced into an oven, referenced 9, under a controlled atmosphere. This oven can be a furnace or a batch oven. Densification by sintering is carried out under a controlled atmosphere, or under a reducing atmosphere, for example hydrogen, hydrogenated nitrogen, argon or hydrogenated argon, so as to avoid the oxidation of the material.

La température de frittage dépend de la granulométrie et de la nature des poudres métalliques et des renforts céramiques. Par exemple, pour une poudre métallique en cuivre, la température est comprise entre 700°C et 1 080°C ; pour l'aluminium, la température est comprise entre 450°C et 650°C.The sintering temperature depends on the particle size and the nature of the metal powders and ceramic reinforcements. For example, for a copper metal powder, the temperature is between 700 ° C and 1080 ° C; for aluminum, the temperature is between 450 ° C and 650 ° C.

La seconde variante de l'étape de densification est représentée sur la figure 3B. Dans cette variante, le film B est introduit dans un laminoir 10, placé au sein d'un four de recuit 11. Le film B est alors laminé à chaud, dans le four 11, sous atmosphère contrôlée. La découpe du film B en plaques P1, P2,... est s'effectuée en sortie du four de recuit 11.The second variant of the densification step is shown in FIG. 3B. In this variant, the film B is introduced into a rolling mill 10, placed in an annealing furnace 11. The film B is then hot rolled in the furnace 11 under a controlled atmosphere. The cutting of the film B in plates P1, P2,... Is carried out at the outlet of the annealing furnace 11.

Ce mode de densification par laminage à chaud et recuit du film permet d'améliorer la densification du matériau sous l'action de la pression et de la température. Cette variante est donc particulièrement bien adaptée aux composites métal/céramique qui se densifient mal par un frittage naturel et aux composites constitués de métaux ductiles, comme le cuivre, l'aluminium ou l'or.This mode of densification by hot rolling and annealing of the film makes it possible to improve the densification of the material under the action of pressure and temperature. This variant is therefore particularly well suited to metal / ceramic composites which are poorly densified by natural sintering and composites made of ductile metals, such as copper, aluminum or gold.

Claims (13)

  1. Method of manufacturing thin metal/ceramic composite films, characterised in that it involves:
    a) preparing a suspension (S) in an organic solvent using a substantially homogenous mix of ceramic reinforcements for metal particles, a binder, a plasticizer and a dispersing agent, the metal particles making up at least 5% of the mass of the suspension;
    b) pouring the suspension (6) in a strip so as to form a thin film (B), then debinding this thin film;
    c) densifying the debinded thin film in a furnace.
  2. Method according to claim 1, characterised in that the suspension (S) has a viscosity of between 0.5 and 3 Pa.S.
  3. Method according to claim 1 or 2, characterised in that the suspension (S) is made by mixing:
    - at least one type of metal powder and at least one ceramic reinforcement, together making up around 30% - 60% of the total volume of the suspension;
    - an organic solvent making up around 15% - 45% of the volume of the suspension;
    - a binder and a plasticizer making up around 30% - 70% of the volume of the suspension;
    - a dispersing agent equal to around 0.1% - 2% of the mass of the ceramic reinforcements and metal powders; and
    - additives equal to around 0.01% - 2% of the mass of the ceramic reinforcements and metal powders.
  4. Method according to any one of the claims from 1 to 3, wherein the binder is a non-water-soluble compound chosen from among polyalcohols, vinyl compounds, acrylic compounds and their mixes.
  5. Method according to any one of the claims from 1 to 4, wherein the organic solvent is chosen from among ketones, alcohols and their mixes.
  6. Method according to any one of the claims from 1 to 5, wherein the dispersing agent is chosen from among surface active agents, macromolecules such as fish oil, phosphoric esters, polyacrylates, sulphonates, perfluorates and carbon chain acids of 2 to 30 carbon atoms.
  7. Method according to any one of the claims from 3 to 6, characterised in that the metal powder consists of powder of copper, aluminium, silver, gold, nickel, titanium, chromium, zinc or an alloy of two or more of these materials.
  8. Method according to any one of the claims from 3 to 7, characterised in that the ceramic reinforcement consists of powder and/or short fibres of graphite, carbide, nitride or oxide.
  9. Method according to any one of the claims from 1 to 8, characterised in that the densification of the film involves fritting the film in a furnace.
  10. Method according to any one of the claims from 1 to 8, characterised in that the densification of the film involves hot rolling and annealing the film.
  11. Method according to any one of the claims from 3 to 10, characterised in that the preparation of the suspension involves:
    - grinding the metal and ceramic powders in a jar or by attrition together with the solvent and the dispersing agent; then
    - adding a binder and a plasticizer to the substance and mixing them in.
  12. Method for preparing a composite piece with a laminated structure wherein several thin films are formed according to steps a) and b) of claim 1, said thin films are stacked, and the stack is subjected to thermocompression.
  13. Method according to claim 12, wherein the thin films have different compositions.
EP01999450A 2000-12-08 2001-12-06 Method for making thin films in metal/ceramic composite Expired - Lifetime EP1343600B1 (en)

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FR0015984 2000-12-08
FR0015984A FR2818015B1 (en) 2000-12-08 2000-12-08 METHOD FOR MANUFACTURING METAL / CERAMIC COMPOSITE THIN FILMS
PCT/FR2001/003855 WO2002045888A1 (en) 2000-12-08 2001-12-06 Method for making thin films in metal/ceramic composite

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US20090208645A1 (en) 2009-08-20
AU2002216188A1 (en) 2002-06-18
FR2818015A1 (en) 2002-06-14
JP4146228B2 (en) 2008-09-10
KR20030069179A (en) 2003-08-25
WO2002045888A1 (en) 2002-06-13
US7871562B2 (en) 2011-01-18
US20040013556A1 (en) 2004-01-22
DE60128133D1 (en) 2007-06-06
JP2004515648A (en) 2004-05-27
ATE360493T1 (en) 2007-05-15
KR100847129B1 (en) 2008-07-18
EP1343600A1 (en) 2003-09-17
CN1247352C (en) 2006-03-29
DE60128133T2 (en) 2007-12-27

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