EP1315294A3 - Procédé d'ajustement et de stabilisation de la fréquence d'un résonateur acoustique - Google Patents

Procédé d'ajustement et de stabilisation de la fréquence d'un résonateur acoustique Download PDF

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Publication number
EP1315294A3
EP1315294A3 EP02020669A EP02020669A EP1315294A3 EP 1315294 A3 EP1315294 A3 EP 1315294A3 EP 02020669 A EP02020669 A EP 02020669A EP 02020669 A EP02020669 A EP 02020669A EP 1315294 A3 EP1315294 A3 EP 1315294A3
Authority
EP
European Patent Office
Prior art keywords
stabilizing
adjusting
layer
frequency
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02020669A
Other languages
German (de)
English (en)
Other versions
EP1315294A2 (fr
EP1315294B1 (fr
Inventor
Richard C. Ruby
Joe Quingzhe Wen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of EP1315294A2 publication Critical patent/EP1315294A2/fr
Publication of EP1315294A3 publication Critical patent/EP1315294A3/fr
Application granted granted Critical
Publication of EP1315294B1 publication Critical patent/EP1315294B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
EP02020669A 2001-11-27 2002-09-13 Procédé d'ajustement et de stabilisation de la fréquence d'un résonateur acoustique Expired - Lifetime EP1315294B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US996951 2001-11-27
US09/996,951 US6710508B2 (en) 2001-11-27 2001-11-27 Method for adjusting and stabilizing the frequency of an acoustic resonator

Publications (3)

Publication Number Publication Date
EP1315294A2 EP1315294A2 (fr) 2003-05-28
EP1315294A3 true EP1315294A3 (fr) 2004-06-16
EP1315294B1 EP1315294B1 (fr) 2009-02-18

Family

ID=25543465

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02020669A Expired - Lifetime EP1315294B1 (fr) 2001-11-27 2002-09-13 Procédé d'ajustement et de stabilisation de la fréquence d'un résonateur acoustique

Country Status (4)

Country Link
US (1) US6710508B2 (fr)
EP (1) EP1315294B1 (fr)
JP (1) JP4010545B2 (fr)
DE (1) DE60231181D1 (fr)

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US7425787B2 (en) * 2005-10-18 2008-09-16 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator
US7675390B2 (en) * 2005-10-18 2010-03-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
US7525398B2 (en) * 2005-10-18 2009-04-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically communicating data signals across an electrical isolation barrier
US7423503B2 (en) * 2005-10-18 2008-09-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating film acoustically-coupled transformer
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US7463499B2 (en) * 2005-10-31 2008-12-09 Avago Technologies General Ip (Singapore) Pte Ltd. AC-DC power converter
US7561009B2 (en) * 2005-11-30 2009-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with temperature compensation
US7612636B2 (en) * 2006-01-30 2009-11-03 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Impedance transforming bulk acoustic wave baluns
US7746677B2 (en) * 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
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US7479685B2 (en) * 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
US7872945B2 (en) * 2006-04-11 2011-01-18 Xact Downhole Telemetry, Inc. Dynamic efficiency optimization of piezoelectric actuator
US7508286B2 (en) * 2006-09-28 2009-03-24 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. HBAR oscillator and method of manufacture
US20080202239A1 (en) * 2007-02-28 2008-08-28 Fazzio R Shane Piezoelectric acceleration sensor
US7791435B2 (en) * 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
US7855618B2 (en) * 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7732977B2 (en) * 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
US9735338B2 (en) 2009-01-26 2017-08-15 Cymatics Laboratories Corp. Protected resonator
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US8291559B2 (en) * 2009-02-24 2012-10-23 Epcos Ag Process for adapting resonance frequency of a BAW resonator
US8902023B2 (en) * 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) * 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US8193877B2 (en) * 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
JP5617523B2 (ja) * 2009-12-08 2014-11-05 株式会社村田製作所 積層型圧電薄膜フィルタの製造方法
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
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US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
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US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
US8923794B2 (en) * 2011-11-02 2014-12-30 Triquint Semiconductor, Inc. Temperature compensation of acoustic resonators in the electrical domain
US9236997B2 (en) * 2013-09-23 2016-01-12 Broadcom Corporation Wireless transceiver with circulator-based quadrature duplexer and methods for use therewith
WO2018235339A1 (fr) * 2017-06-20 2018-12-27 株式会社村田製作所 Résonateur et dispositif de résonance
CN111355459B (zh) * 2020-03-26 2023-06-20 中国科学院半导体研究所 基于电化学腐蚀的mems谐振器频率修调方法
TWI721934B (zh) * 2020-10-22 2021-03-11 台灣奈米碳素股份有限公司 製造具特定共振頻率之薄膜體聲波共振裝置的方法

Citations (3)

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US4320365A (en) * 1980-11-03 1982-03-16 United Technologies Corporation Fundamental, longitudinal, thickness mode bulk wave resonator
US4638536A (en) * 1986-01-17 1987-01-27 The United States Of America As Represented By The Secretary Of The Army Method of making a resonator having a desired frequency from a quartz crystal resonator plate

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US4130771A (en) * 1976-02-17 1978-12-19 Tyco Crystal Products, Inc. Method of adjusting the frequency of a crystal resonator and reducing ageing effects
US4320365A (en) * 1980-11-03 1982-03-16 United Technologies Corporation Fundamental, longitudinal, thickness mode bulk wave resonator
US4638536A (en) * 1986-01-17 1987-01-27 The United States Of America As Represented By The Secretary Of The Army Method of making a resonator having a desired frequency from a quartz crystal resonator plate

Also Published As

Publication number Publication date
US6710508B2 (en) 2004-03-23
DE60231181D1 (de) 2009-04-02
JP4010545B2 (ja) 2007-11-21
EP1315294A2 (fr) 2003-05-28
JP2003209451A (ja) 2003-07-25
EP1315294B1 (fr) 2009-02-18
US20030098631A1 (en) 2003-05-29

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