EP1307600A4 - PROCESS FOR REDUCING OXYGEN AND COBALT OXIDE CONTENT TO PRODUCE COBALT TARGETS FOR CATHODIC SPRAY - Google Patents

PROCESS FOR REDUCING OXYGEN AND COBALT OXIDE CONTENT TO PRODUCE COBALT TARGETS FOR CATHODIC SPRAY

Info

Publication number
EP1307600A4
EP1307600A4 EP01963786A EP01963786A EP1307600A4 EP 1307600 A4 EP1307600 A4 EP 1307600A4 EP 01963786 A EP01963786 A EP 01963786A EP 01963786 A EP01963786 A EP 01963786A EP 1307600 A4 EP1307600 A4 EP 1307600A4
Authority
EP
European Patent Office
Prior art keywords
cobalt
procuce
oxygen
reducing
oxide content
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01963786A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1307600A1 (en
Inventor
Hao Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh SMD Inc
Original Assignee
Tosoh SMD Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh SMD Inc filed Critical Tosoh SMD Inc
Publication of EP1307600A1 publication Critical patent/EP1307600A1/en
Publication of EP1307600A4 publication Critical patent/EP1307600A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/03—Alloys based on nickel or cobalt based on nickel
    • C22C19/05—Alloys based on nickel or cobalt based on nickel with chromium
    • C22C19/051—Alloys based on nickel or cobalt based on nickel with chromium and Mo or W
    • C22C19/055—Alloys based on nickel or cobalt based on nickel with chromium and Mo or W with the maximum Cr content being at least 20% but less than 30%
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B23/00—Obtaining nickel or cobalt
    • C22B23/06—Refining
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/02—Making non-ferrous alloys by melting
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/03—Alloys based on nickel or cobalt based on nickel
    • C22C19/05—Alloys based on nickel or cobalt based on nickel with chromium
    • C22C19/051—Alloys based on nickel or cobalt based on nickel with chromium and Mo or W
    • C22C19/053—Alloys based on nickel or cobalt based on nickel with chromium and Mo or W with the maximum Cr content being at least 30% but less than 40%
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/03—Alloys based on nickel or cobalt based on nickel
    • C22C19/05—Alloys based on nickel or cobalt based on nickel with chromium
    • C22C19/051—Alloys based on nickel or cobalt based on nickel with chromium and Mo or W
    • C22C19/056—Alloys based on nickel or cobalt based on nickel with chromium and Mo or W with the maximum Cr content being at least 10% but less than 20%
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/03—Alloys based on nickel or cobalt based on nickel
    • C22C19/05—Alloys based on nickel or cobalt based on nickel with chromium
    • C22C19/058—Alloys based on nickel or cobalt based on nickel with chromium without Mo and W
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
EP01963786A 2000-08-03 2001-08-03 PROCESS FOR REDUCING OXYGEN AND COBALT OXIDE CONTENT TO PRODUCE COBALT TARGETS FOR CATHODIC SPRAY Withdrawn EP1307600A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22279500P 2000-08-03 2000-08-03
US222795P 2000-08-03
PCT/US2001/024396 WO2002012577A1 (en) 2000-08-03 2001-08-03 Method for reducing the oxygen and oxide content in cobalt to procuce cobalt sputtering targets

Publications (2)

Publication Number Publication Date
EP1307600A1 EP1307600A1 (en) 2003-05-07
EP1307600A4 true EP1307600A4 (en) 2007-01-24

Family

ID=22833707

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01963786A Withdrawn EP1307600A4 (en) 2000-08-03 2001-08-03 PROCESS FOR REDUCING OXYGEN AND COBALT OXIDE CONTENT TO PRODUCE COBALT TARGETS FOR CATHODIC SPRAY

Country Status (3)

Country Link
EP (1) EP1307600A4 (ko)
KR (1) KR20030019645A (ko)
WO (1) WO2002012577A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030023640A (ko) 2000-06-30 2003-03-19 허니웰 인터내셔널 인코포레이티드 금속처리방법, 그 방법에 사용되는 장치 및 그로부터제조된 금속

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1288189A (ko) * 1971-03-29 1972-09-06
JPH07252565A (ja) * 1994-03-14 1995-10-03 Mitsubishi Steel Mfg Co Ltd 磁気記録媒体用コバルト基合金およびその製造方法
WO1999010548A1 (en) * 1997-08-26 1999-03-04 The Alta Group, Inc. High purity cobalt sputter target and process of manufacturing the same
JP2000129399A (ja) * 1998-10-22 2000-05-09 Nisshin Steel Co Ltd シャドウマスク用Ｆｅ−Ｎｉ合金及びその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69215021T2 (de) * 1991-02-15 1997-04-03 Sumitomo Electric Industries Diamantsyntheseverfahren
DE19609439A1 (de) * 1995-03-14 1996-09-19 Japan Energy Corp Verfahren zum Erzeugen von hochreinem Kobalt und Sputtering-Targets aus hochreinem Kobalt
US6123783A (en) * 1997-02-06 2000-09-26 Heraeus, Inc. Magnetic data-storage targets and methods for preparation
US6251337B1 (en) * 1999-09-13 2001-06-26 Acton Materials, Inc. Apparatus and method for treating a particulate material within a rotating retort

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1288189A (ko) * 1971-03-29 1972-09-06
JPH07252565A (ja) * 1994-03-14 1995-10-03 Mitsubishi Steel Mfg Co Ltd 磁気記録媒体用コバルト基合金およびその製造方法
WO1999010548A1 (en) * 1997-08-26 1999-03-04 The Alta Group, Inc. High purity cobalt sputter target and process of manufacturing the same
JP2000129399A (ja) * 1998-10-22 2000-05-09 Nisshin Steel Co Ltd シャドウマスク用Ｆｅ−Ｎｉ合金及びその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO0212577A1 *

Also Published As

Publication number Publication date
KR20030019645A (ko) 2003-03-06
EP1307600A1 (en) 2003-05-07
WO2002012577A1 (en) 2002-02-14

Similar Documents

Publication Publication Date Title
AU2001288680A1 (en) System and method for performing market research studies on online content
AU2001277130A1 (en) Method and system for turbo encoding in adsl
GB0031676D0 (en) Improvements in or relating to connectors and valves
AU2002229616A1 (en) Improvements in and relating to the distribution of content
AU2961602A (en) Improvements in and relating to the distribution of content
AU2001237566A1 (en) Improvements in and relating to investigating corrosion
AU2002236626A1 (en) Compositions and methods for treating hyperpigmentation
AU2001244892A1 (en) Improvements in and relating to honey based products
AU2001271483A1 (en) Method for imaging inclusions and/or alpha case in articles
GB0123953D0 (en) Improvements in and relating to karabiners
EP1307600A4 (en) PROCESS FOR REDUCING OXYGEN AND COBALT OXIDE CONTENT TO PRODUCE COBALT TARGETS FOR CATHODIC SPRAY
AU4696500A (en) Process and composition for reducing chill haze in beverages
AU2002347455A1 (en) Improvements in and relating to content delivery
GB0020379D0 (en) Enzyme composition in tablet form
AU2001234685A1 (en) Methods and compositions for enhancing formyltetrahydropteroylpolyglutamate in plants
AU2002238794A1 (en) Methods and compositions involved in groucho-mediated differentiation
GB0012964D0 (en) Improvements in and relating to audio systems
AU2001251325A1 (en) Improvements in and relating to taps
AU2001280747A1 (en) Methods, systems and email content enabling email recipients to win prizes
GB0021754D0 (en) Improvements in and relating to magnetron sputtering
GB0018391D0 (en) Improvements in and relating to magnetron sputtering
AU7430800A (en) Improvements in and relating to multi-media broadcasting
AU2933600A (en) Improvements in and relating to complexants
GB9915057D0 (en) Improvement in extractive metallurgy and process
AU4860901A (en) Improvements in and relating to particulates in exhaust streams

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20030207

AK Designated contracting states

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

RBV Designated contracting states (corrected)

Designated state(s): AT BE CH CY DE FR GB IE IT LI

A4 Supplementary search report drawn up and despatched

Effective date: 20061227

RIC1 Information provided on ipc code assigned before grant

Ipc: C22C 1/06 20060101ALI20061219BHEP

Ipc: C22B 23/06 20060101AFI20061219BHEP

Ipc: C22C 19/07 20060101ALI20061219BHEP

17Q First examination report despatched

Effective date: 20070510

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20080920