EP1269265A2 - Exposure device and method for compensating optical defects - Google Patents

Exposure device and method for compensating optical defects

Info

Publication number
EP1269265A2
EP1269265A2 EP01925392A EP01925392A EP1269265A2 EP 1269265 A2 EP1269265 A2 EP 1269265A2 EP 01925392 A EP01925392 A EP 01925392A EP 01925392 A EP01925392 A EP 01925392A EP 1269265 A2 EP1269265 A2 EP 1269265A2
Authority
EP
European Patent Office
Prior art keywords
exposure
light modulator
image processing
printing plate
processing electronics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01925392A
Other languages
German (de)
French (fr)
Inventor
Friedrich LÜLLAU
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Basys Print Systeme fuer die Drueckindustrie GmbH
Original Assignee
Basys Print Systeme fuer die Drueckindustrie GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Basys Print Systeme fuer die Drueckindustrie GmbH filed Critical Basys Print Systeme fuer die Drueckindustrie GmbH
Publication of EP1269265A2 publication Critical patent/EP1269265A2/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Definitions

  • the invention relates to an exposure device for exposing an image of an electronically stored original onto a base, in particular a printing plate, with image processing electronics in which the image data can be stored, with a light modulator, in particular an LCD screen or a micromirror arrangement, which can be controlled electronically by the image processing electronics an illumination device for illuminating the light modulator and with imaging optics for imaging the light modulator on the base.
  • the invention further relates to a method for
  • Such an exposure device which is used for exposing printing plates with ultraviolet light, is known for example from DE 195 45 821 AI.
  • the template to be imaged is broken down into partial images by means of a computer and the partial images are successively brought to an electronically controllable light modulator, for example a irradiated LCD screen or a micromirror arrangement.
  • the exposure device is then gradually moved over the printing plate to be exposed, the light modulator being controlled with the associated partial image.
  • Micromirror arrangements also called digital mirror devices or DMD for short, consist of an arrangement of tiny mirrors with edge lengths of a few micrometers on the surface of an electronic chip, each individual mirror being individually tiltable by electronic control, so that an incident light beam can be guided either into an imaging lens or past it, depending on the tilt angle.
  • the image exposed on the base to be exposed deviates from the electronic original. In particular, there are shadows on the edges and corners of the individual images.
  • the object of the invention is that the image processing electronics have a
  • This electronic compensation device has the advantage that it can be implemented with simple means and inexpensively, essentially on the basis of software, since the image processing electronics, preferably in the form of a computer, are usually already present and therefore do not cause any additional costs.
  • the compensation device it is provided that by means of the compensation device the total amount of light falling on each point of the base to be exposed during the exposure process can be modulated. The effect of the exposure, i.e.
  • the photochemical effect ultimately produced on the substrate to be exposed which corresponds to the brightness of the respective point in a photographic depiction, essentially depends on the total amount of light incident, which in the simplest case of constant light intensity is the product of the intensity with the exposure time. If each point of the substrate to be exposed can now be individually modulated, overall almost complete compensation can be carried out down to all details of the image.
  • a location-dependent intensity modulation of the stored template with an electronically stored gray mask is provided during the exposure process.
  • the gray mask consists of a set of multiplication factors for each individual pixel.
  • the intensity of each individual pixel transmitted by the light modulator is increased or decreased in accordance with the stored multiplication factor, and the differences in brightness, which are inadvertently generated by errors and / or tolerances in the illumination and / or imaging optics, are compensated for.
  • an LCD screen as a light modulator, this can be done in that the angle of rotation of the circular polarized light is changed by appropriate control of the LCD screen.
  • Intensity modulation is not possible because the micromirrors can only be set in two fixed tilt positions, so that the intensity of a single point can only be switched on or off 100%.
  • the total amount of light incident on a single point during the exposure of the base can only be modulated by varying the "switch-on time" of each individual micromirror. Therefore, in a modified embodiment of the invention, the switch-on times of individual pixels of the light modulator are provided for the location-dependent light quantity modulation of the exposure process can be varied in accordance with an electronically stored gray mask.
  • the brightness distribution of the developed test printing plate is fed into the image processing electronics in a simple manner by scanning the printing plate by an electronic camera or an electronic scanner, the data of the thus digitized gray values simply being imported into the image processing electronics and there in a suitable way to the digital values of the Gray mask processed and saved.
  • the gradation of the printing plate can be precisely taken into account in connection with the exposure spectrum used and the developer used in each case, all other influences on the brightness distribution also being able to be "eliminated".
  • Such further factors can, for example, relate to the illuminance, the exposure time, the development time, the composition, the temperature,
  • Brightness distribution in the printing plate exposure can be compensated for by means of the method according to the invention through the electronic gray mask generated in a single calibration run. Exemplary embodiments of the invention are explained in more detail below with reference to the drawing. It shows:
  • FIG. 1 is a schematic representation of an exposure device according to the invention
  • the original to be imaged on a printing plate 1 is stored in an image memory 3 in a computer serving as processing electronics 2.
  • An overlay file which is used to generate an electronic gray mask, is stored in an overlay memory 4.
  • An image from the image memory 3 or a partial image of the overall image is loaded into a compensator 5 and corrected pixel by pixel with the overlay data originating from the overlay memory 4, i.e. the control data provided for controlling the light intensity and / or the duration of the exposure of each individual pixel are modified by multiplication with the correction values of the overlay file in accordance with the desired correction. As a rule, their value is increased or decreased.
  • the corrected image or partial image then arrives via the data line 6 to the light modulator, here an irradiated LCD screen, in the image plane of which the actual image is created.
  • An illumination device for illuminating the light modulator 7 consists of a light source 8 and a condenser 9.
  • the light coming from the light source 8 is concentrated on the light modulator 7 by means of the condenser 9.
  • the modulated light falls on a mirror 10, which directs the beam path downwards into an imaging optics 11.
  • the imaging optics 11 forms the image plane of the light modulator 7 onto the printing plate 1.
  • the mirror 10 can be replaced by a micromirror arrangement which then serves as a light modulator.
  • the LCD screen 7 can be omitted.
  • the errors in the beam path of the exposure device caused by optical errors in the illumination device 8, 9 of the imaging optics 11 or also by other optical elements 7, 10 are compensated for by the electronic gray mask described above, so that a largely error-free and with regard to the Brightness reproduction creates a uniform image of the electronic template.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention relates to an exposure device for exposing an image of an electronically stored document on a support, especially a printing plate (1), comprising an image processing electronics device (2) in which the image data can be stored, a light modulator (7) which can be electronically controlled with the image processing electronics device (2), especially an LCD screen (7) or a micromirror array, an illumination device (8, 9) for illuminating the light modulator (7) and a projection lens (11) for projecting the light modulator (7) onto the support (1). According to the invention, the device is improved by the image processing electronics device (2) comprising a compensation device (4, 5) for compensating optical defects and/or tolerances in the beam path of the exposure device.

Description

Belichtungsvorrichtung und Verfahren zur Kompensation von optischen Fehlern Exposure device and method for compensating optical errors
Die Erfindung betrifft eine Belichtungsvorrichtung zur Belichtung eines Abbilds einer elektronisch gespeicherten Vorlage auf eine Unterlage, insbesondere Druckplatte, mit einer Bildverarbeitungselektronik, in der die Bilddaten speicherbar sind, mit einem durch die Bildverarbeitungselektronik elektronisch ansteuerbaren Lichtmodulator, insbesondere einem LCD-Bildschirm oder einer Mikrospiegelanordnung, mit einer Beleuchtungseinrichtung zur Beleuchtung des Lichtmodulators und mit einer Abbildungsoptik zur Abbildung des Lichtmodulators auf die Unterlage. Die Erfindung betrifft weiterhin ein Verfahren zurThe invention relates to an exposure device for exposing an image of an electronically stored original onto a base, in particular a printing plate, with image processing electronics in which the image data can be stored, with a light modulator, in particular an LCD screen or a micromirror arrangement, which can be controlled electronically by the image processing electronics an illumination device for illuminating the light modulator and with imaging optics for imaging the light modulator on the base. The invention further relates to a method for
Kompensation von optischen Fehler und/oder Toleranzen im Strahlengang einer solchen Belichtungsvorrichtung.Compensation of optical errors and / or tolerances in the beam path of such an exposure device.
Eine derartige Belichtungsvorrichtung, die zur Belichtung von Druckplatten mit ultraviolettem Licht verwendet wird, ist beispielsweise aus der DE 195 45 821 AI bekannt. Dabei wird die abzubildende Vorlage mittels eines Computers in Teilbilder zerlegt und die Teilbilder nacheinander auf einen elektronisch ansteuerbaren Lichtmodulator, beispielsweise einen durchstrahlten LCD- Bildschirm oder eine Mikrospiegelanordnung gebracht. Die Belichtungsvorrichtung wird dann nach und nach über die zu belichtende Druckplatte bewegt, wobei der Lichtmodulator jeweils mit dem zugehörigen Teilbild angesteuert wird. Mikrospiegelanordnungen, auch Digital Mirror Device oder kurz DMD genannt, bestehen aus einer Anordnung von winzigen Spiegeln mit Kantenlängen von wenigen Mikrometern auf der Oberfläche eines Elektronikchips, wobei jeder einzelne Spiegel durch elektronische Ansteuerung einzeln kippbar ist, so dass ein einfallender Lichtstrahl je nach Kippwinkel entweder in ein Abbildungsobjektiv oder an diesem vorbei geleitet werden kann.Such an exposure device, which is used for exposing printing plates with ultraviolet light, is known for example from DE 195 45 821 AI. The template to be imaged is broken down into partial images by means of a computer and the partial images are successively brought to an electronically controllable light modulator, for example a irradiated LCD screen or a micromirror arrangement. The exposure device is then gradually moved over the printing plate to be exposed, the light modulator being controlled with the associated partial image. Micromirror arrangements, also called digital mirror devices or DMD for short, consist of an arrangement of tiny mirrors with edge lengths of a few micrometers on the surface of an electronic chip, each individual mirror being individually tiltable by electronic control, so that an incident light beam can be guided either into an imaging lens or past it, depending on the tilt angle.
Durch optische Fehler und Toleranzen im Strahlengang der Belichtungsvorrichtung weicht das auf die zu belichtende Unterlage, insbesondere Druckplatte, belichtete Abbild von der elektronischen Vorlage ab. Insbesondere kommt es zu Abschattungen an den Rändern und Ecken der Einzelbilder .Due to optical errors and tolerances in the beam path of the exposure device, the image exposed on the base to be exposed, in particular the printing plate, deviates from the electronic original. In particular, there are shadows on the edges and corners of the individual images.
Es ist daher die Aufgabe der vorliegenden Erfindung, eine Belichtungsvorrichtung der eingangs genannten Art bzw. ein Verfahren anzugeben, mit dem die optischen Fehler und/oder Toleranzen im Strahlengang der Belichtungsvorrichtung kompensiert werden können.It is therefore the object of the present invention to provide an exposure device of the type mentioned at the outset or a method with which the optical errors and / or tolerances in the beam path of the exposure device can be compensated.
Die erfindungsgemäße Lösung der Aufgabe besteht bei der genannten Belichtungsvorrichtung darin, dass die Bildverarbeitungselektronik eineIn the case of the exposure device mentioned, the object of the invention is that the image processing electronics have a
Kompensationseinrichtung zur Kompensation von optischen Fehlern und/oder Toleranzen im Strahlengang der Belichtungsvorrichtung umfasst. Diese elektronische Kompensationseinrichtung hat den Vorteil, das sie mit einfachen Mitteln und kostengünstig im wesentlichen auf der Basis von Software realisierbar ist, denn die Bildverarbeitungselektronik, vorzugsweise in Form eines Computers, ist in der Regel bereits vorhanden und verursacht daher keine Zusatzkosten. In einer bevorzugten Ausführungsform der Erfindung ist vorgesehen, dass mittels der Kompensationseinrichtung die während des Belichtungsvorgangs auf jeden Punkt der zu belichtenden Unterlage insgesamt fallende Lichtmenge modulierbar ist. Die Wirkung der Belichtung, d.h. die auf der zu belichtenden Unterlage letztendlich hervorgerufene photochemische Wirkung, die bei einer fotographischen Abbildung der Helligkeit des jeweiligen Punktes entspricht, hängt im wesentlichen von der insgesamt eingefallenen Lichtmenge ab, die sich im einfachsten Fall konstanter Lichtintensität als Produkt der Intensität mit der Einwirkungszeit ergibt. Wenn nun jeder Punkt der zu belichtenden Unterlage einzeln modulierbar ist, kann insgesamt eine nahezu vollständige Kompensation bis in alle Einzelheiten des Abbilds erfolgen.Compensation device for compensating optical errors and / or tolerances in the beam path of the exposure device comprises. This electronic compensation device has the advantage that it can be implemented with simple means and inexpensively, essentially on the basis of software, since the image processing electronics, preferably in the form of a computer, are usually already present and therefore do not cause any additional costs. In a preferred embodiment of the invention it is provided that by means of the compensation device the total amount of light falling on each point of the base to be exposed during the exposure process can be modulated. The effect of the exposure, i.e. the photochemical effect ultimately produced on the substrate to be exposed, which corresponds to the brightness of the respective point in a photographic depiction, essentially depends on the total amount of light incident, which in the simplest case of constant light intensity is the product of the intensity with the exposure time. If each point of the substrate to be exposed can now be individually modulated, overall almost complete compensation can be carried out down to all details of the image.
In Ausgestaltung der Erfindung ist während des Belichtungsvorgangs eine ortsabhängige Intensitätsmodulation der gespeicherten Vorlage mit einer elektronisch gespeicherten Graumaske vorgesehen. Die Graumaske besteht aus einem Satz von Multiplikationsfaktoren für jeden einzelnen Bildpunkt. Während der Belichtung wird nun die vom Lichtmodulator durchgelassene Intensität jedes einzelnen Bildpunkts entsprechend dem gespeicherten Multiplikationsfaktor vergrößert oder verkleinert und damit die durch Fehler und/oder Toleranzen der Beleuchtungs- und/oder Abbildungsoptik unabsichtlich erzeugten Helligkeitsunterschiede ausgeglichen. Dies kann bei Verwendung eines LCD-Bildschirms als Lichtmodulator dadurch geschehen, dass der Drehwinkel des zirkulär polarisierten Lichtes durch entsprechende Ansteuerung des LCD-Bildschirms verändert wird.In an embodiment of the invention, a location-dependent intensity modulation of the stored template with an electronically stored gray mask is provided during the exposure process. The gray mask consists of a set of multiplication factors for each individual pixel. During the exposure, the intensity of each individual pixel transmitted by the light modulator is increased or decreased in accordance with the stored multiplication factor, and the differences in brightness, which are inadvertently generated by errors and / or tolerances in the illumination and / or imaging optics, are compensated for. When using an LCD screen as a light modulator, this can be done in that the angle of rotation of the circular polarized light is changed by appropriate control of the LCD screen.
Bei einer Mikrospiegelanordnung ist eineIn a micromirror arrangement is one
Intensitätsmodulation nicht möglich, da die Mikrospiegel nur in zwei festen Kipppositionen einstellbar sind, so dass die Intensität eines einzelnen Punktes nur zu 100% ein oder ganz ausgeschaltet werden kann. Eine Modulation der insgesamt während der Belichtung der Unterlage auf einen einzelnen Punkt einfallende Lichtmenge kann hier nur durch Variation der „Einschaltzeit" jedes einzelnen Mikrospiegels erfolgen. Deshalb ist in einer abgewandelten Ausführungsform der Erfindung vorgesehen, dass zur ortsabhängigen Lichtmengenmodulation die Einschaltzeiten einzelner Pixel des Lichtmodulators während des Belichtungsvorgangs entsprechend einer elektronisch gespeicherten Graumaske variierbar sind.Intensity modulation is not possible because the micromirrors can only be set in two fixed tilt positions, so that the intensity of a single point can only be switched on or off 100%. The total amount of light incident on a single point during the exposure of the base can only be modulated by varying the "switch-on time" of each individual micromirror. Therefore, in a modified embodiment of the invention, the switch-on times of individual pixels of the light modulator are provided for the location-dependent light quantity modulation of the exposure process can be varied in accordance with an electronically stored gray mask.
Zur einfachen Erzeugung einer geeigneten Graumaske, die nicht nur alle Fehler des Beleuchtungsstrahlengangs, sondern auch den Einfluß der Druckplatte, deren Gamma- Kurve, des verwendeten Entwicklers und ähnlicherFor the simple generation of a suitable gray mask, which not only contains all errors in the illumination beam path, but also the influence of the printing plate, its gamma curve, the developer used and the like
Faktoren, die Einfluß auf die Helligkeitsverteilung nehmen können, kompensiert, wird in Weiterbildung des erfindungsgemäßen Verfahrens vorgeschlagen, dass zur Erzeugung der elektronisch gespeicherten Graumaske eine Testbelichtung einer Druckplatte vorgenommen wird, bei der alle Pixel des Lichtmodulators mit einem mittleren Grauwert angesteuert werden, und dass die sich nach der Entwicklung der Druckplatte ergebende Helligkeitsverteilung auf der Druckplatte in die Bildverarbeitungselektronik eingespeist wird, die daraus die elektronische Graumaske erzeugt, vorzugsweise durch Invertierung der Graustufen der einzelnen Pixel.Compensated for factors that can influence the brightness distribution, it is proposed in a further development of the method according to the invention that to generate the electronically stored gray mask, a test exposure of a printing plate is carried out, in which all pixels of the light modulator are controlled with an average gray value, and that resulting brightness distribution on the printing plate is fed into the image processing electronics resulting from the development of the printing plate generates the electronic gray mask, preferably by inverting the gray levels of the individual pixels.
Die Einspeisung der Helligke tsverteilung der entwickelten Testdruckplatte in die Bildverarbeitungselektromk erfolgt auf einfache Weise mittels Abtastung der Druckplatte durch eine elektronische Kamera oder einen elektronischen Scanner, wobei die Daten der somit digitalisierte Grauwerte einfach in die Bildverarbeitungselektromk eingespielt und dort auf geeignete Weise zu den digitalen Werten der Graumaske verarbeitet und gespeichert werden.The brightness distribution of the developed test printing plate is fed into the image processing electronics in a simple manner by scanning the printing plate by an electronic camera or an electronic scanner, the data of the thus digitized gray values simply being imported into the image processing electronics and there in a suitable way to the digital values of the Gray mask processed and saved.
Bei der Erzeugung der elektronischen GraumasKe kann die Gradation der Druckplatte m Verbindung mit dem jeweils verwendeten Belichtungsspektrum und dem jeweils verwendeten Entwickler exakt berücksichtigt werden, wobei auch alle sonstigen Einflüsse auf die Helligkeitsverteilung "herausgerechnet" werden können. Solche weiteren Faktoren können beispielsweise auf die Beleuchtungsstarke, die Belichtungszeit, die Entwicklungsdauer, die Zusammensetzung, Temperatur,When generating the electronic gray mask, the gradation of the printing plate can be precisely taken into account in connection with the exposure spectrum used and the developer used in each case, all other influences on the brightness distribution also being able to be "eliminated". Such further factors can, for example, relate to the illuminance, the exposure time, the development time, the composition, the temperature,
Konzentration, Erschöpfung (Alter) und Verunreinigungen des Entwicklers oder auf die Temperatur, das Alter, die Zusammensetzung oder eine Vorbehandlung der lichtempfindlichen Beschichtung der Druckplatte zurückgehen. Alle denkbaren Einflüsse auf dieConcentration, exhaustion (age) and contamination of the developer or due to the temperature, age, composition or pretreatment of the photosensitive coating of the printing plate. All conceivable influences on the
Helligkeitsverteilung bei der Druckplattenbelichtung können mittels des erfmdungsgemaßen Verfahrens durch die in einem einzigen Kalibrierungsdurchlauf erzeugte elektronische Graumaske kompensiert werden. Ausführungsbeispiele der Erfindung werden nachfolgend anhand der Zeichnung näher erläutert. Darin zeigt:Brightness distribution in the printing plate exposure can be compensated for by means of the method according to the invention through the electronic gray mask generated in a single calibration run. Exemplary embodiments of the invention are explained in more detail below with reference to the drawing. It shows:
Figur 1: eine schematische Darstellung einer erfindungsgemäßen BelichtungsVorrichtungFigure 1 is a schematic representation of an exposure device according to the invention
Die auf eine Druckplatte 1 abzubildende Vorlage ist in einem als Bearbeitungselektronik 2 dienenden Computer in einem Bildspeicher 3 gespeichert. In einem Overlay- Speicher 4 ist eine Overlay-Datei gespeichert, die zur Erzeugung einer elektronischen Graumaske dient. In einen Kompensator 5 wird ein Bild aus dem Bildspeicher 3 oder ein Teilbild des Gesamtbildes geladen und Pixel für Pixel mit den aus dem Overlay-Speicher 4 stammenden Overlay-Daten korrigiert, d.h. die zur Steuerung der Lichtintensität und/oder der Dauer der Belichtung jedes einzelnen Pixels vorgesehenen Ansteuerungsdaten werden durch Multiplikation mit den Korrekturwerten der Overlay-Datei entsprechend der gewünschten Korrektur modifiziert. In der Regel wird ihr Wert vergrößert oder verkleinert. Danach gelangt das korrigierte Bild bzw. Teilbild über die Datenleitung 6 zum Lichtmodulator, hier ein durchstrahlter LCD-Bildschirm, in dessen Bildebene das eigentliche Bild entsteht.The original to be imaged on a printing plate 1 is stored in an image memory 3 in a computer serving as processing electronics 2. An overlay file, which is used to generate an electronic gray mask, is stored in an overlay memory 4. An image from the image memory 3 or a partial image of the overall image is loaded into a compensator 5 and corrected pixel by pixel with the overlay data originating from the overlay memory 4, i.e. the control data provided for controlling the light intensity and / or the duration of the exposure of each individual pixel are modified by multiplication with the correction values of the overlay file in accordance with the desired correction. As a rule, their value is increased or decreased. The corrected image or partial image then arrives via the data line 6 to the light modulator, here an irradiated LCD screen, in the image plane of which the actual image is created.
Eine Beleuchtungseinrichtung zur Beleuchtung des Lichtmodulators 7 besteht aus einer Lichtquelle 8 und einem Kondensor 9. Das von der Lichtquelle 8 kommende Licht wird mittels des Kondensors 9 auf den Lichtmodulator 7 konzentriert. Nach der Modulation im Lichtmodulator 7 fällt das modulierte Licht auf einen Spiegel 10, der den Strahlengang nach unten in eine Abbildungsoptik 11 lenkt. Die Abbildungsoptik 11 bildet die Bildebene des Lichtmodulators 7 auf die Druckplatte 1 ab.An illumination device for illuminating the light modulator 7 consists of a light source 8 and a condenser 9. The light coming from the light source 8 is concentrated on the light modulator 7 by means of the condenser 9. After the modulation in the light modulator 7, the modulated light falls on a mirror 10, which directs the beam path downwards into an imaging optics 11. The imaging optics 11 forms the image plane of the light modulator 7 onto the printing plate 1.
In einer abgewandelten Ausführungsform kann der Spiegel 10 durch eine Mikrospiegelanordnung ersetzt werden, die dann als Lichtmodulator dient. In diesem Fall kann der LCD-Bildschirm 7 wegfallen.In a modified embodiment, the mirror 10 can be replaced by a micromirror arrangement which then serves as a light modulator. In this case, the LCD screen 7 can be omitted.
Die durch optische Fehler in der Beleuchtungsvorrichtung 8, 9 der Abbildungsoptik 11 oder auch durch andere optische Elemente 7, 10 hervorgerufenen Fehler im Strahlengang der Belichtungsvorrichtung werden durch die weiter oben beschriebene elektronische Graumaske kompensiert, so dass auf der Druckplatte 1 ein weitgehend fehlerfreies und hinsichtlich der Helligkeitswiedergabe gleichmäßiges Abbild der elektronischen Vorlage entsteht. The errors in the beam path of the exposure device caused by optical errors in the illumination device 8, 9 of the imaging optics 11 or also by other optical elements 7, 10 are compensated for by the electronic gray mask described above, so that a largely error-free and with regard to the Brightness reproduction creates a uniform image of the electronic template.
BezugszeichenlisteLIST OF REFERENCE NUMBERS
I Druckplatte 2 BildspeicherI printing plate 2 image memory
3 Bildverarbeitungselektronik3 Image processing electronics
4 Overlay-Speicher4 overlay memory
5 Kompensator5 compensator
6 Datenleitung 7 Lichtmodulator/LCD-Bildschirm6 Data line 7 Light modulator / LCD screen
8 Lichtquelle8 light source
9 Kondensor9 condenser
10 Spiegel10 mirrors
II Abbildungsoptik II imaging optics

Claims

Patentansprüche claims
1. Belichtungsvorrichtung zur Belichtung eines Abbilds einer elektronisch gespeicherten Vorlage auf eine Unterlage, insbesondere Druckplatte (1), mit einer Bildverarbeitungselektronik (2), in der die Bilddaten speicherbar sind, mit einem durch die Bildverarbeitungselektronik (2) elektronisch ansteuerbaren Lichtmodulator (7), insbesondere einem LCD-Bildschirm (7) oder einer Mikrospiegelanordnung, mit einer1. exposure device for exposing an image of an electronically stored original onto a base, in particular printing plate (1), with image processing electronics (2) in which the image data can be stored, with a light modulator (7) which can be electronically controlled by the image processing electronics (2), in particular an LCD screen (7) or a micromirror arrangement, with a
Beleuchtungseinrichtung (8,9) zur Beleuchtung des Lichtmodulators (7) und mit einer Abbildungsoptik zur Abbildung des Lichtmodulators (7) auf dieIllumination device (8, 9) for illuminating the light modulator (7) and with imaging optics for imaging the light modulator (7) on the
Unterlage (1), dadurch gekennzeichnet, dass die Bildverarbeitungselektronik (2) eine Kompensationseinrichtung (4, 5) zur Kompensation von optischen Fehlern und/oder Toleranzen im Strahlengang der Belichtungsvorrichtung umfasst.Document (1), characterized in that the image processing electronics (2) comprise a compensation device (4, 5) for compensating optical errors and / or tolerances in the beam path of the exposure device.
2. Belichtungsvorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass mittels der Kompensationseinrichtung (4, 5) die während des Belichtungsvorgangs auf jeden Punkt der zu belichtenden Unterlage (1) insgesamt fallende2. Exposure device according to claim 1, characterized in that by means of the compensation device (4, 5) the total falling during the exposure process on each point of the substrate (1) to be exposed
Lichtmenge modulierbar ist.Amount of light can be modulated.
3. Belichtungsvorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass während des Belichtungsvorganges eine ortsabhangige Intensitatsmodulation der gespeicherten Vorlage mit einer elektronisch gespeicherten Graumaske vorgesehen ist.3. Exposure device according to one of the preceding claims, characterized in that during the exposure process location-dependent intensity modulation of the stored template with an electronically stored gray mask is provided.
4. Belichtungsvornchtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass zur ortsabhangigen Lichtmodulation die Emschaltzeiten einzelner Pixel des Lichtmodulators (7) wahrend des Belichtungsvorgangs entsprechend einer gespeicherten Graumaske variierbar sind.4. Exposure device according to one of the preceding claims, characterized in that, for location-dependent light modulation, the switching times of individual pixels of the light modulator (7) can be varied during the exposure process in accordance with a stored gray mask.
5. Verfahren zur Kompensation von optischen Fehlern und/oder Toleranzen im Strahlengang einer Belichtungsvorrichtung, bei der ein Abbild einer m einer Bildverarbeitungselektromk (2) gespeicherten Vorlage auf eine Unterlage, insbesondere Druckplatte (1), belichtet wird, wobei ein durch die Bildverarbeitungselektronik (2) angesteuerter Lichtmodulator, insbesondere ein LCD-Bildschirm (7) oder eine Mikrospiegelanordnung, mittels einer5. A method for compensating for optical errors and / or tolerances in the beam path of an exposure device, in which an image of a template stored in an image processing electronics (2) is exposed on a base, in particular a printing plate (1), with an image processing electronics (2 ) controlled light modulator, in particular an LCD screen (7) or a micromirror arrangement, by means of a
Beleuchtungseinrichtung (8, 9) beleuchtet, und mittels einer Abbildungsoptik (11) auf die zu belichtende Unterlage (1) abgebildet wird, dadurch gekennzeichnet, dass die wahrend des Belichtungsvorgangs auf jeden Punkt der UnterlageIlluminating device (8, 9) is illuminated, and is imaged on the base (1) to be exposed by means of imaging optics (11), characterized in that during the exposure process it is on every point of the base
(1) insgesamt fallende Lichtmenge derart moduliert wird, dass die auf optische Fehler und/oder Toleranzen im Strahlengang zurückzuführenden Belichtungsunterschiede auf der zu belichtenden Unterlage ausgeglichen werden. (1) the total amount of light falling is modulated in such a way that the exposure differences due to optical errors and / or tolerances in the beam path are compensated for on the substrate to be exposed.
6. Verfahren nach Anspruch 5, dadurch gekennzeichnet, dass wahrend des Belichtungsvorgangs eine ortsabhangige Intensitatsmodulation der gespeicherten Vorlage mit einer elektronisch gespeicherten Graumaske erfolgt.6. The method according to claim 5, characterized in that during the exposure process, a location-dependent intensity modulation of the stored template is carried out with an electronically stored gray mask.
7. Verfahren nach Anspruch 5 oder 6, dadurch gekennzeichnet, dass zur ortsabhangigen Lichtmengenmodulation die Emschaltzeiten einzelner Pixel des Lichtmodulators wahrend des Belichtungsvorgangs entsprechend einer elektronisch gespeicherten Graumaske variiert werden.7. The method according to claim 5 or 6, characterized in that the switching times of individual pixels of the light modulator are varied during the exposure process according to an electronically stored gray mask for location-dependent light quantity modulation.
8. Verfahren nach einem der Anspruch 5 bis 7, dadurch gekennzeichnet, dass zur Erzeugung der elektronisch gespeicherten Graumaske eine8. The method according to any one of claims 5 to 7, characterized in that for generating the electronically stored gray mask
Testbelichtung einer Druckplatte (1) vorgenommen wird, bei der alle Pixel des Lichtmodulators (7) mit einem mittleren Grauwert angesteuert werden, und dass die sich nach der Entwicklung der Druckplatte (1) ergebende Helligkeitsverteilung auf der Druckplatte (1) m dieTest exposure of a printing plate (1) is carried out, in which all pixels of the light modulator (7) are controlled with an average gray value, and that the brightness distribution on the printing plate (1) resulting after the development of the printing plate (1)
Bildverarbeitungselektromk (2) eingespeist wird, die daraus eine elektronische Graumaske erzeugt, vorzugsweise durch Invertierung der Graustufen der einzelnen Pixel.Image processing electronics (2) is fed in, which generates an electronic gray mask therefrom, preferably by inverting the gray levels of the individual pixels.
9. Verfahren nach Anspruch 8, dadurch gekennzeichnet, dass zur Einspeisung der Helligkeitsverteilung der entwickelten Testdruckplatte (1) eine elektronische Kamera oder ein Scanner verwendet wird. 9. The method according to claim 8, characterized in that an electronic camera or a scanner is used to feed in the brightness distribution of the developed test printing plate (1).
EP01925392A 2000-03-11 2001-03-08 Exposure device and method for compensating optical defects Withdrawn EP1269265A2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10012017 2000-03-11
DE10012017A DE10012017A1 (en) 2000-03-11 2000-03-11 Printing plate exposure device, has optical error and/or tolerance compensation device incorporated in electronic image processing device controlling light modulator
PCT/EP2001/002591 WO2001069320A2 (en) 2000-03-11 2001-03-08 Exposure device and method for compensating optical defects

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US6844920B2 (en) 2005-01-18
WO2001069320A3 (en) 2001-12-06
DE10012017A1 (en) 2001-09-13

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