EP1218947A2 - Dispositifs capteurs de force dotes de canaux multiples remplis et/ou vides et d'autres attributs - Google Patents

Dispositifs capteurs de force dotes de canaux multiples remplis et/ou vides et d'autres attributs

Info

Publication number
EP1218947A2
EP1218947A2 EP00991370A EP00991370A EP1218947A2 EP 1218947 A2 EP1218947 A2 EP 1218947A2 EP 00991370 A EP00991370 A EP 00991370A EP 00991370 A EP00991370 A EP 00991370A EP 1218947 A2 EP1218947 A2 EP 1218947A2
Authority
EP
European Patent Office
Prior art keywords
micro
channel
tip
materials
force sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00991370A
Other languages
German (de)
English (en)
Other versions
EP1218947A4 (fr
Inventor
Aaron Lewis
Galina Fish
Rima Glazer Dekhter
Sophia Kokotov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanoptics Ltd
Original Assignee
Nanoptics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanoptics Ltd filed Critical Nanoptics Ltd
Publication of EP1218947A2 publication Critical patent/EP1218947A2/fr
Publication of EP1218947A4 publication Critical patent/EP1218947A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/56—Labware specially adapted for transferring fluids
    • B01L3/561—Tubes; Conduits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/028—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples using microstructures, e.g. made of silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0832—Geometry, shape and general structure cylindrical, tube shaped
    • B01L2300/0838—Capillaries

Definitions

  • This invention is a general method for forming force sensing devices with multiple isolated channels in which two or more materials (solid, liquid or gas) can be isolated one from another. These devices have various attributes that result from this technology that can produce such devices that are either straight or cantilevered.
  • the resulting structures, either cantilevered or uncantilevered, can be tapered to a small tip and should allow for the ability to sense surface forces while using one or multiple channels of the structure for another function.
  • probes that could have multiple attributes such as chemical sensors in one channel with gas in another channel, micro vacuum devices with single channels that could suck up materials and air in a second channel to release such materials, unique nanometric thermocouples, micro voltage, micro capacitance, micro inductive, micromagnetic devices depending on electrical isolation or contact at the tip of electrically conducting materials, microlight detectors if the conductors in the channels are covered with photodetecting materials, microlight sources if the channels of conducting material are coated with electroluminescent materials, multiple channel fountain pens, multiple channel tips for multiple electrochemical and/or optical measurements, micro heating elements, stable micro devices for annealing, soldering, cutting, etc., Peltier microcooling devices, microdynamic cavitation bubble forming devices, generating devices with two isolated electrodes with appropriate electrical inputs, etc.
  • the invention is a method to produce a type of probe based on multiple channels of isolated materials that can, if so desired, be cantilevered.
  • the structures and the variety of applications that they provide are a result of the ability of these devices to sense surface forces and thus permit the control of these probes at or above specified surfaces in order to accomplish specific applications.
  • Figure 1 illustrates an example of a multiple channel tapered structure that is part of this invention
  • Figure 2 illustrates a structure similar to Figure 1 which is cantilevered
  • Figure 3 illustrates another example of a multichannel structure as described herein:
  • Figure 4 illustrates an example of a structure produced by the glass forming technology approach described herein.
  • the invention is a general method and the resulting devices in which multiple channels (1.1 and 1.2) in Figure 1 can be formed into a tapered (illustrated at 1.3) or untapered structure (1.4) such that two or more materials (solid, liquid or gas) of either the same or different chemical composition are isolated from one another by a solid material, or till, (1.5) in the tip of the structure. At this tip the two materials can either be connected or left unconnected, depending on the application that is desired.
  • Such structures can have force constants both as straight or cantilevered devices (see Figure 2 with channels 2.1 and 2.2 in a cantilevered, tapered structure 2.3) that allow for force sensing applications.
  • multiple channels can also be produced that mix many of the attributes that are described above.
  • An example of such a tapered structure (3.0) is shown in Figure 3, where three multiple channels are illustrated at 3.1, 3.2 and 3.3 in a straight (non-cantilevered) emulation. Nonetheless, this does not limit these structures to three channels and such structures can be made with more than three channels.
  • the three channel structures and structures with additional channels can be cantilevered as shown in Figure 2.
  • a two-wire cantilevered structure that can be used for thermal resistance when the two isolated materials are metal and of the same composition, and can be used as a thermocouple or a Peltier cooler when the two materials are of different metallic composition.
  • the two channels together with two metal wires in the channels produce a structure that has two tapered wires isolated by glass that can be either left straight or can be cantilevered.
  • MEMs micro electro mechanical
  • these structures could act as probes that could have multiple attributes such as chemical sensors in one channel with gas in another channel, can be micro vacuum devices with a single channel that could suck up materials and air and a second channel to release such materials, can be unique nanometric thermocouples, thermoresistors, micro voltage, micro capacitance, micro inductive, and micromagnetic devices, depending on electrical isolation or contact at the tip of electrically conducting materials, can be microlight detectors if the conductors in the channels are covered with photodetecting materials, microlight sources if the channels of conducting material are coated with electroluminescent materials, multiple channel fountain pens, multiple channel tips for multiple electrochemical and/or optical measurements, micro heating elements, can be stable micro devices for annealing, soldering, cutting, etc., or can be Peltier microcooling devices, microdynamic cavitation bubble forming devices, micro plasma generating devices with two isolated electrodes with appropriate electrical inputs, etc. In the past, some of these applications were attempted with single

Landscapes

  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Dispositif capteur de force à l'échelle nanométrique, qui comporte une sonde pourvue d'une pointe ayant de multiples canaux isolés qui peuvent recevoir différentes matières. Ledit dispositif peut être soit droit, soit en porte-à-faux, et peut être monté pour permettre la détection de forces de surface, tout en assurant parallèlement d'autres fonctions.
EP00991370A 1999-09-23 2000-09-21 Dispositifs capteurs de force dotes de canaux multiples remplis et/ou vides et d'autres attributs Withdrawn EP1218947A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL13202199 1999-09-23
IL13202199 1999-09-23
PCT/US2000/021978 WO2001027581A2 (fr) 1999-09-23 2000-09-21 Dispositifs capteurs de force dotes de canaux multiples remplis et/ou vides et d'autres attributs

Publications (2)

Publication Number Publication Date
EP1218947A2 true EP1218947A2 (fr) 2002-07-03
EP1218947A4 EP1218947A4 (fr) 2007-05-30

Family

ID=11073270

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00991370A Withdrawn EP1218947A4 (fr) 1999-09-23 2000-09-21 Dispositifs capteurs de force dotes de canaux multiples remplis et/ou vides et d'autres attributs

Country Status (3)

Country Link
EP (1) EP1218947A4 (fr)
JP (1) JP2003511690A (fr)
WO (1) WO2001027581A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6680617B2 (en) * 2000-09-20 2004-01-20 Neocera, Inc. Apertured probes for localized measurements of a material's complex permittivity and fabrication method
WO2006106818A1 (fr) * 2005-03-31 2006-10-12 Japan Science And Technology Agency Support en console pour microscope a sonde de balayage et microscope a sonde de balayage equipe de celui-ci
JP6359331B2 (ja) * 2014-05-02 2018-07-18 株式会社中原光電子研究所 プローブ、光モジュール及びプローブの製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2608722A (en) * 1950-09-06 1952-09-02 Otmar M Stuetzer Process for making microspacers
EP0185782A1 (fr) * 1984-12-28 1986-07-02 International Business Machines Corporation Guide d'ondes pour un microscope optique de champ proche
US5185922A (en) * 1990-08-17 1993-02-16 Cornell Research Foundation, Inc. Method of making submicrometer microelectrodes
US5264698A (en) * 1988-07-17 1993-11-23 Raoul Kopelman Nanometer dimension optical device with microimaging and nanoillumination capabilities
WO1996035225A1 (fr) * 1995-04-30 1996-11-07 Aaron Lewis Structure conique concue pour des micro-electrodes de microthermocouples, des pointes a emission de champ et des capteurs micromagnetiques pouvant detecter une force

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986261A (en) * 1996-04-29 1999-11-16 Nanoptics, Inc. Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2608722A (en) * 1950-09-06 1952-09-02 Otmar M Stuetzer Process for making microspacers
EP0185782A1 (fr) * 1984-12-28 1986-07-02 International Business Machines Corporation Guide d'ondes pour un microscope optique de champ proche
US5264698A (en) * 1988-07-17 1993-11-23 Raoul Kopelman Nanometer dimension optical device with microimaging and nanoillumination capabilities
US5185922A (en) * 1990-08-17 1993-02-16 Cornell Research Foundation, Inc. Method of making submicrometer microelectrodes
WO1996035225A1 (fr) * 1995-04-30 1996-11-07 Aaron Lewis Structure conique concue pour des micro-electrodes de microthermocouples, des pointes a emission de champ et des capteurs micromagnetiques pouvant detecter une force

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
"Collins English Dictionary - 21st Century Edition" 2000, HARPERCOLLINS PUBLISHERS , XP002429605 ISBN: 0-00-472532-8 Entries "till", end of left-side column * page 1601 * *
FISH G ET AL: "ULTRAFAST RESPONSE MICROPIPETTE-BASED SUBMICROMETER THERMOCOUPLE" REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 66, no. 5, 1 May 1995 (1995-05-01), pages 3300-3306, XP000507819 ISSN: 0034-6748 *
HANSMA P K ET AL: "THE SCANNING ION-CONDUCTANCE MICROSCOPE" SCIENCE, AMERICAN ASSOCIATION FOR THE ADVANCEMENT OF SCIENCE,, US, 1989, pages 641-643, XP000914510 ISSN: 0036-8075 *
LIEBERMAN K ET AL: "Multifunctional, micropipette based force cantilevers for scanned probe microscopy" APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 65, no. 5, 1 August 1994 (1994-08-01), pages 648-650, XP002329223 ISSN: 0003-6951 *
See also references of WO0127581A2 *
SHMUEL SHALOM ET AL: "A MICROPIPETTE FORCE PROBE SUITABLE FOR NEAR-FIELD SCANNING OPTICAL MICROSCOPY" REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 63, no. 9, 1 September 1992 (1992-09-01), pages 4061-4065, XP000311659 ISSN: 0034-6748 *

Also Published As

Publication number Publication date
WO2001027581A9 (fr) 2002-09-12
JP2003511690A (ja) 2003-03-25
WO2001027581A3 (fr) 2001-11-22
EP1218947A4 (fr) 2007-05-30
WO2001027581A2 (fr) 2001-04-19

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