EP1196820A2 - Method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows - Google Patents

Method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows

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Publication number
EP1196820A2
EP1196820A2 EP00991054A EP00991054A EP1196820A2 EP 1196820 A2 EP1196820 A2 EP 1196820A2 EP 00991054 A EP00991054 A EP 00991054A EP 00991054 A EP00991054 A EP 00991054A EP 1196820 A2 EP1196820 A2 EP 1196820A2
Authority
EP
European Patent Office
Prior art keywords
layer
structured
chemical
hardening
filled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP00991054A
Other languages
German (de)
French (fr)
Inventor
Reiner Götzen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
microTEC Gesellschaft fur Mikrotechnologie mbH
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Individual
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Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP1196820A2 publication Critical patent/EP1196820A2/en
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0023—Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0075—Light guides, optical cables
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/30—Vehicles, e.g. ships or aircraft, or body parts thereof
    • B29L2031/3055—Cars
    • B29L2031/3061—Number plates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0272—Adaptations for fluid transport, e.g. channels, holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/09—Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092—Dispersed materials, e.g. conductive pastes or inks
    • H05K1/095—Dispersed materials, e.g. conductive pastes or inks for polymer thick films, i.e. having a permanent organic polymeric binder
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0562—Details of resist
    • H05K2203/0568—Resist used for applying paste, ink or powder
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/465—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer having channels for the next circuit layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4664—Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4697—Manufacturing multilayer circuits having cavities, e.g. for mounting components

Definitions

  • the present invention relates to a method for producing three-dimensionally arranged conductor and connection structures for volume and energy flows.
  • the volume flows can be gaseous, liquid, solid or a mixture of these physical states.
  • the energy flows can have an acoustic, electrical, magnetic or electromagnetic character.
  • volume and energy flows are usually realized today using many different technologies.
  • conductor tracks and bond wires are the most frequently used transport routes.
  • glass fibers are also used to transport electromagnetic energy.
  • Volume flows are realized through ducts, hoses and pipes. With increasing miniaturization, these guidance and connecting elements are very difficult to combine.
  • the invention solves the problem by using a structured layered structure.
  • Layer construction methods are known from microtechnology.
  • DE-PS 44 20 996 describes a method in which a small amount of the light-curable plastic is held between two mutually parallel plates, at least one of which is permeable to electromagnetic waves, due to the surface tension.
  • the surface of the plastic liquid below the plate permeable to electromagnetic waves cured by means of a laser beam which is guided over the surface in accordance with a 3-layer model of the structure to be generated which is stored in a connected computer.
  • the laser light hardens the plastic liquid according to the 3-D layer model, whereby the distance between the plates is increased by one layer thickness, so that fresh plastic material flows into the gap between the hardened layer and the plate solely due to its surface tension can. In this way, structures in the micrometer range can be produced very precisely.
  • Different light-curing materials are used to create the layers. These materials can have a wide variety of physical, chemical and biological properties, for example: electrically conductive, electrically insulating, different optical calculation indices.
  • the layer segments are also filled with new material, in which no hardening took place during the previous hardening process, so that during the subsequent hardening not only the top layer is connected to the one below, but also material of the top layer with the material of one is connected below the penultimate layer.
  • these are uncured areas that are available as channels after curing and rinsing. These channels can also be used as waveguides for the high frequency if the walls of the channels are produced from material with appropriate properties.
  • Materials with different refractive index can also be used to create light-guiding structures. These light-guiding structures can be used in conjunction with light transistors (Keyword: light switches light) to optical integrated
  • IC integrated circuits

Abstract

The invention relates to a method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows. Various light-setting materials are used for the production of the layers. Upon exchanging the materials, those layer regions in which no setting occurred during the preceding setting process, are also filled with new material, such that, in the subsequent setting process, not only is the upper layer linked to the one lying directly beneath it, but also material of the upper layer is connected to the material of a layer lying below the penultimate layer. It is thus possible, within the layer sequence, to connect a structure with varying properties from layer to layer.

Description

Verfahren zur Herstellung dreidimensional angeordneter Leit- und VerbindungsStrukturen für Volumen- und Energieströme Process for the production of three-dimensionally arranged guidance and connection structures for volume and energy flows
Die vorliegende Erfindung betrifft ein Verfahren zur Herstellung dreidimensional angeordneter Leiter- und VerbindungsStrukturen für Volumen- und Energieströme . Die Volumenströme können gasförmig, flüssig, fest oder aus einem Gemisch dieser Aggregatzustände bestehen. Die Energieströme können akustischen, e- lektrischen, magnetischen, oder elektromagnetischen Charakter haben .The present invention relates to a method for producing three-dimensionally arranged conductor and connection structures for volume and energy flows. The volume flows can be gaseous, liquid, solid or a mixture of these physical states. The energy flows can have an acoustic, electrical, magnetic or electromagnetic character.
Derartige Volumen- und Energieströme werden heute in der Regel durch viele unterschiedliche Technologien realisiert. Für die Mikrosystemtechnik sind Leiterbahnen und Bonddrähte die am häufigsten benutzten Transportwege. Für den Transport elektromagnetischer Energien werden neben Hohlleiter auch Glasfasern eingesetzt. Volumenströme realisiert man durch Kanäle, Schläuche und Rohrleitungen. Bei zunehmender Miniaturisierung lassen sich diese Leit- und Verbindungselemente nur noch sehr schwer zusammenführen .Such volume and energy flows are usually realized today using many different technologies. For microsystem technology, conductor tracks and bond wires are the most frequently used transport routes. In addition to waveguides, glass fibers are also used to transport electromagnetic energy. Volume flows are realized through ducts, hoses and pipes. With increasing miniaturization, these guidance and connecting elements are very difficult to combine.
Die Erfindung löst die Aufgabe durch den Einsatz eines strukturierten schichtweisen Aufbaus . Schichtaufbauverfahren sind aus der Mikrotechnologie bekannt. So beschreibt die DE-PS 44 20 996 ein Verfahren, bei dem zwischen zwei einander parallelen Platten, von denen mindestens eine für elektromagnetische Wellen durchlässig ist, eine geringe Menge des lichtaushärtbaren Kunststoffs aufgrund der Oberflächenspannung gehalten ist. Die Oberfläche der Kunststoffflüssigkeit unterhalb der für elektromagnetische Wellen durchlässigen Platte wird beispielsweise mittels Laserstrahl, der nach Maßgabe eines in einem angeschlossenen Rechner gespeicherten 3-SchichtModells der zu generierenden Struktur über die Oberfläche geführt wird, ausgehärtet. Schicht für Schicht härtet das Laserlicht die Kunststoff- flüssigkeit entsprechend dem 3-D Schicht Modell, wobei der Abstand der Platten jeweils um eine Schichtdicke vergrößert wird, so daß frisches Kunststoffmaterial allein aufgrund seiner Oberflächenspannung in den entstehenden Zwischenraum zwischen der ausgehärteten Schicht und der Platte nachfließen kann. Auf diese Weise können Strukturen im Mikrometerbereich sehr exakt erzeugt werden.The invention solves the problem by using a structured layered structure. Layer construction methods are known from microtechnology. For example, DE-PS 44 20 996 describes a method in which a small amount of the light-curable plastic is held between two mutually parallel plates, at least one of which is permeable to electromagnetic waves, due to the surface tension. For example, the surface of the plastic liquid below the plate permeable to electromagnetic waves cured by means of a laser beam which is guided over the surface in accordance with a 3-layer model of the structure to be generated which is stored in a connected computer. Layer by layer, the laser light hardens the plastic liquid according to the 3-D layer model, whereby the distance between the plates is increased by one layer thickness, so that fresh plastic material flows into the gap between the hardened layer and the plate solely due to its surface tension can. In this way, structures in the micrometer range can be produced very precisely.
Diese Technologie macht sich die Erfindung zu nutze.This technology makes use of the invention.
Dabei werden zur Erzeugung der Schichten unterschiedliche lichtaushärtende Materialien verwendet. Diese Materialien können unterschiedlichste physikalische, chemische und biologische Eigenschaften haben, zum Beispiel: elektrisch leitend, elektrisch isolierend, unterschiedliche optische Berechnungsindices . Beim Austausch der Materialien werden auch die Schichtsegmente mit neuem Material gefüllt, in denen bei dem vorhergehenden Aushartungsprozess keine Aushärtung stattfand, so dass bei der darauffolgenden Aushärtung nicht nur die oberste Schicht mit der darunterliegenden verbunden wird, sondern auch Material der obersten Schicht mit dem Material einer unterhalb der vorletzten Schicht liegenden Schicht verbunden wird. Damit ist es möglich, innerhalb der Schichtenfolge eine Struktur mit anderen Materialeigenschaften von Layer zu Layer miteinander zu verbinden. Für einen Volumentransport sind dies nichtausgehärtete Bereiche, die nach Aushärtung und Spülvorgang als Kanäle zur Verfügung stehen. Ebenso können diese Kanäle als Hohlleiter für die Hochfrequenz benutzt werden, wenn die Wandungen der Kanäle aus Material mit entsprechenden Eigenschaften produziert werden.Different light-curing materials are used to create the layers. These materials can have a wide variety of physical, chemical and biological properties, for example: electrically conductive, electrically insulating, different optical calculation indices. When the materials are exchanged, the layer segments are also filled with new material, in which no hardening took place during the previous hardening process, so that during the subsequent hardening not only the top layer is connected to the one below, but also material of the top layer with the material of one is connected below the penultimate layer. This makes it possible to connect a structure with other material properties from layer to layer within the layer sequence. For volume transport, these are uncured areas that are available as channels after curing and rinsing. These channels can also be used as waveguides for the high frequency if the walls of the channels are produced from material with appropriate properties.
Auch lassen sich durch Materialien mit unterschiedlichem Brechungsindex lichtleitende Strukturen erzeugen. Diese lichtleitenden Strukturen können in Verbindung mit Lichttransistoren (Stichwort: Licht schaltet Licht) zu optischen integriertenMaterials with different refractive index can also be used to create light-guiding structures. These light-guiding structures can be used in conjunction with light transistors (Keyword: light switches light) to optical integrated
Schaltungen benutzt werden.Circuits are used.
Auf diese Weise lassen sich auch herkömmliche integrierte Schaltungen (IC) miteinander verbinden. Denn wurde unter der letzten Oberfläche ein IC in einer Kavität integriert, so kann über den Anschlüssen (Pads) ein Kanal mit leitendem Material erzeugt werden, der dann bis zu einem weiteren IC oder aber auch zu Steckverbindern, die auf diese Weise gefertigt wurden, geführt werden kann. In this way, conventional integrated circuits (IC) can also be connected to one another. If an IC was integrated in a cavity under the last surface, a channel with conductive material can be created over the connections (pads), which can then lead to another IC or to connectors that were manufactured in this way can be.

Claims

Verfahren zur Herstellung dreidimensional angeordneter Leit- und Ver indungsStrukturen für Volumen- und EnergieströmePatentansprüche Process for the production of three-dimensionally arranged guidance and induction structures for volume and energy flows
1. Verfahren zur Herstellung dreidimensional angeordneter Leit- und Verbindungsstrukturen für Volumen- und Energieströme. Dabei werden zur Erzeugung der Schichten unterschiedliche lichtaushärtende Materialien verwendet. Beim Austausch der Materialien werden auch die Schichtenbereiche mit neuem Material gefüllt, in denen bei der vorhergehenden Aushärtung keine Aushärtung stattfand, so dass bei der darauffolgenden Aushärtung nicht nur die oberste Schicht mit der darunterliegenden verbunden wird, sondern auch Material der obersten Schicht mit dem Material einer unterhalb der vorletzten Schicht liegenden Schicht verbunden wird. Damit ist es möglich, innerhalb der Schichtenfolge eine Struktur mit anderen Eigenschaften von Lage zu Lage miteinander zu verbinden.1. Method for producing three-dimensionally arranged guide and connection structures for volume and energy flows. Different light-curing materials are used to create the layers. When replacing the materials, the layer areas are also filled with new material in which no hardening took place during the previous hardening, so that during the subsequent hardening not only the top layer is connected to the one below, but also material of the top layer with the material of a is connected below the penultimate layer. This makes it possible to connect a structure with other properties from layer to layer within the layer sequence.
2. Verfahren nach Anspruch 1 , gekennzeichnet durch folgende Verfahrensschritte2. The method according to claim 1, characterized by the following process steps
a) durch strukturierte Verfestigung eines flüssigen lichtaushärtenden Materials mit ausgewählten physikalischen, chemischen oder biologischen Eigenschaften wird eine strukturierte Schicht generiert;a) a structured layer is generated by structured solidification of a liquid light-curing material with selected physical, chemical or biological properties;
b) Die strukturierte Schicht wird vom nichtausgehärteten Mterial mittels Spülvorgang gereinigt und mit flüssigem lichthärtendem Material mit anderen physikalischen, chemischen oder biologischen Eigenschaften aufgefüllt und mit definierter Schichtdicke nach DE- PS 44 20 996 abgedeckt; c) durch strukturierte Verfestigung werden Bereiche der ersten Schicht und die neue Schicht strukturiert ausgehärtet .b) The structured layer is cleaned from the uncured material by means of a rinsing process and filled with liquid light-curing material with other physical, chemical or biological properties and covered with a defined layer thickness in accordance with DE-PS 44 20 996; c) areas of the first layer and the new layer are hardened in a structured manner by means of structured hardening.
d) die strukturierten Schichten werden vom nichtausge- härteten Material der letzten Strukturierung mittels Spülvorgang gereinigt und mit flüssigem lichthärtendem Material mit anderen physikalischen, chemischen und biologischen Eigenschaften aufgefüllt und mit definierter Schichtdicke nach DE-PS 44 20 996 abgedeckt ;d) the structured layers are cleaned of the uncured material of the last structuring by means of a rinsing process and filled with liquid light-curing material with other physical, chemical and biological properties and covered with a defined layer thickness in accordance with DE-PS 44 20 996;
e) durch strukturierte Verfestigung werden Bereiche der zweiten Schicht und die neue Schicht strukturiert ausgehärtet, womit eine Verbindung von Materialien mit gleichen physikalischen, chemischen oder biologischen Eigenschaften oder eine Isolierung dieser generiert wird;e) areas of the second layer and the new layer are hardened in a structured manner by means of structured hardening, whereby a connection of materials with the same physical, chemical or biological properties or an insulation thereof is generated;
f) die strukturierten Schichten werden vom nichtausge- härteten Material der letzten Strukturierung mittels Spülvorgang gereinigt;f) the structured layers are cleaned of the uncured material of the last structuring by means of a rinsing process;
g) nicht mit Material aufgefüllte Bereiche werden entsprechend dem zu erstellenden System mit elektronischen, mechanischen, optischen oder chemischen Bauteilen bestückt;g) areas not filled with material are equipped with electronic, mechanical, optical or chemical components in accordance with the system to be created;
h) die strukturierten Schichten und die Bauteile werden mit flüssigem lichthärtendem Material mit anderen physikalischen, chemischen und biologischen Eigenschaften aufgefüllt und mit definierter Schichtdicke nach DE-PS 44 20 996 abgedeckt;h) the structured layers and the components are filled with liquid light-curing material with other physical, chemical and biological properties and covered with a defined layer thickness according to DE-PS 44 20 996;
i) durch strukturierte Verfestigung werden Bereiche der vorletzten Schicht und die neue Schicht strukturiert ausgehärtet, womit eine Verbindung von Materialien und Bauteilen mit gleichen physikalischen, chemischen oder biologischen Eigenschaften oder eine Isolierung dieser generiert wird.i) areas of the penultimate layer and the new layer are hardened in a structured manner by means of structured hardening, with which a connection of materials and components with the same physical, chemical or biological properties or an insulation thereof is generated.
3. Verfahren nach Anspruch 2 , dadurch gekennzeichnet, daß mehrere elektronische, mechanische, chemische oder biologischer/elektrischer Bauteile miteinander verbunden werden.3. The method according to claim 2, characterized in that several electronic, mechanical, chemical or biological / electrical components are interconnected.
4. Verfahren nach Anspruch 3 , dadurch gekennzeichnet, daß die Verbindungen zwischen den Bauteilen und der Umwelt des Systems für Volumen- und Energieströme benutzt werden können . 4. The method according to claim 3, characterized in that the connections between the components and the environment of the system can be used for volume and energy flows.
EP00991054A 1999-12-31 2000-12-08 Method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows Ceased EP1196820A2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19964099 1999-12-31
DE19964099A DE19964099B4 (en) 1999-12-31 1999-12-31 Method for producing three-dimensionally arranged guide and connection structures for volume and energy flows
PCT/DE2000/004393 WO2001050198A2 (en) 1999-12-31 2000-12-08 Method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows

Publications (1)

Publication Number Publication Date
EP1196820A2 true EP1196820A2 (en) 2002-04-17

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Country Status (13)

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US (1) US6805829B2 (en)
EP (1) EP1196820A2 (en)
JP (1) JP2003519039A (en)
KR (1) KR100652036B1 (en)
CN (1) CN1211197C (en)
AU (1) AU757191B2 (en)
CA (1) CA2362387C (en)
DE (1) DE19964099B4 (en)
IS (1) IS6064A (en)
NO (1) NO328157B1 (en)
RU (1) RU2242063C2 (en)
TW (1) TWI248555B (en)
WO (1) WO2001050198A2 (en)

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IS6064A (en) 2001-08-28
US6805829B2 (en) 2004-10-19
NO20014209L (en) 2001-10-25
KR20010105354A (en) 2001-11-28
US20020125612A1 (en) 2002-09-12
RU2242063C2 (en) 2004-12-10
CA2362387A1 (en) 2001-07-12
CN1211197C (en) 2005-07-20
AU3150401A (en) 2001-07-16
WO2001050198A3 (en) 2002-01-17
TWI248555B (en) 2006-02-01
NO328157B1 (en) 2009-12-21
KR100652036B1 (en) 2006-11-30
AU757191B2 (en) 2003-02-06
CA2362387C (en) 2007-09-11
DE19964099A1 (en) 2001-09-13
DE19964099B4 (en) 2006-04-06
NO20014209D0 (en) 2001-08-30
JP2003519039A (en) 2003-06-17
WO2001050198A2 (en) 2001-07-12

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