EP1195523A3 - Microfabricated elastomeric valve and pump systems - Google Patents
Microfabricated elastomeric valve and pump systems Download PDFInfo
- Publication number
- EP1195523A3 EP1195523A3 EP01128819A EP01128819A EP1195523A3 EP 1195523 A3 EP1195523 A3 EP 1195523A3 EP 01128819 A EP01128819 A EP 01128819A EP 01128819 A EP01128819 A EP 01128819A EP 1195523 A3 EP1195523 A3 EP 1195523A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- elastomeric layer
- elastomeric
- pump systems
- elastomeric valve
- micromachined mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
- F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Micromachines (AREA)
- Reciprocating Pumps (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10180441.7A EP2309130B1 (en) | 1999-06-28 | 2000-06-27 | Microfabricated elastomeric valve and pump systems |
EP05075473.8A EP1557565B1 (en) | 1999-06-28 | 2000-06-27 | Microfabricated elastomeric valve and pump systems |
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14150399P | 1999-06-28 | 1999-06-28 | |
US141503P | 1999-06-28 | ||
US14719999P | 1999-08-03 | 1999-08-03 | |
US147199P | 1999-08-03 | ||
US18685600P | 2000-03-03 | 2000-03-03 | |
US186856P | 2000-03-03 | ||
EP20000305389 EP1065378B1 (en) | 1999-06-28 | 2000-06-27 | Microfabricated elastomeric valve and pump systems |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20000305389 Division EP1065378B1 (en) | 1999-06-28 | 2000-06-27 | Microfabricated elastomeric valve and pump systems |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10180441.7A Division EP2309130B1 (en) | 1999-06-28 | 2000-06-27 | Microfabricated elastomeric valve and pump systems |
EP05075473.8A Division EP1557565B1 (en) | 1999-06-28 | 2000-06-27 | Microfabricated elastomeric valve and pump systems |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1195523A2 EP1195523A2 (en) | 2002-04-10 |
EP1195523A3 true EP1195523A3 (en) | 2003-01-08 |
EP1195523B1 EP1195523B1 (en) | 2005-03-02 |
Family
ID=27440044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01128819A Expired - Lifetime EP1195523B1 (en) | 1999-06-28 | 2000-06-27 | Microfabricated elastomeric valve and pump systems |
Country Status (1)
Country | Link |
---|---|
EP (1) | EP1195523B1 (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7411331B2 (en) | 2002-05-10 | 2008-08-12 | Massachusetts Institute Of Technology | Dielectric elastomer actuated systems and methods |
US7362889B2 (en) | 2002-05-10 | 2008-04-22 | Massachusetts Institute Of Technology | Elastomeric actuator devices for magnetic resonance imaging |
US7621317B2 (en) | 2006-05-11 | 2009-11-24 | Modine Manufacturing Company | Self-breaking radiator side plates |
US20090279158A1 (en) * | 2008-05-08 | 2009-11-12 | Palo Alto Research Center Incorporated | Fluid Actuator For Digitally Controllable Microfluidic Display |
AU2015224385B2 (en) * | 2009-09-21 | 2016-12-01 | Alcon Inc. | Glaucoma drainage device with pump |
US8419673B2 (en) * | 2009-09-21 | 2013-04-16 | Alcon Research, Ltd. | Glaucoma drainage device with pump |
US8257295B2 (en) | 2009-09-21 | 2012-09-04 | Alcon Research, Ltd. | Intraocular pressure sensor with external pressure compensation |
WO2013090231A1 (en) | 2011-12-13 | 2013-06-20 | Alcon Research, Ltd. | Active drainage systems with dual-input pressure-driven valves |
US9339187B2 (en) | 2011-12-15 | 2016-05-17 | Alcon Research, Ltd. | External pressure measurement system and method for an intraocular implant |
US9295389B2 (en) | 2012-12-17 | 2016-03-29 | Novartis Ag | Systems and methods for priming an intraocular pressure sensor in an intraocular implant |
US9528633B2 (en) | 2012-12-17 | 2016-12-27 | Novartis Ag | MEMS check valve |
US9572712B2 (en) | 2012-12-17 | 2017-02-21 | Novartis Ag | Osmotically actuated fluidic valve |
US9039993B2 (en) | 2013-03-14 | 2015-05-26 | Formulatrix, Inc. | Microfluidic device |
US9163277B2 (en) | 2013-03-14 | 2015-10-20 | Formulatrix, Inc. | Microfluidic device |
US9226851B2 (en) | 2013-08-24 | 2016-01-05 | Novartis Ag | MEMS check valve chip and methods |
KR101850307B1 (en) | 2016-03-03 | 2018-04-20 | 한국과학기술연구원 | Apparatus and method for manufacturing channel-bonding type scaffold |
US11154864B2 (en) | 2018-01-17 | 2021-10-26 | Qiagen Sciences, Llc | Microfluidic device with vented microchambers |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5088515A (en) * | 1989-05-01 | 1992-02-18 | Kamen Dean L | Valve system with removable fluid interface |
US5346372A (en) * | 1991-07-18 | 1994-09-13 | Aisin Seiki Kabushiki Kaisha | Fluid flow regulating device |
EP0703364A1 (en) * | 1994-09-22 | 1996-03-27 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Method and device for driving a micropump |
EP0779436A2 (en) * | 1995-12-13 | 1997-06-18 | Frank T. Hartley | Micromachined peristaltic pump |
US5660370A (en) * | 1996-03-07 | 1997-08-26 | Integrated Fludics, Inc. | Valve with flexible sheet member and two port non-flexing backer member |
US5836750A (en) * | 1997-10-09 | 1998-11-17 | Honeywell Inc. | Electrostatically actuated mesopump having a plurality of elementary cells |
EP0999055A2 (en) * | 1998-11-03 | 2000-05-10 | Samsung Electronics Co., Ltd. | Micro injecting device and method of manufacturing the same |
-
2000
- 2000-06-27 EP EP01128819A patent/EP1195523B1/en not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5088515A (en) * | 1989-05-01 | 1992-02-18 | Kamen Dean L | Valve system with removable fluid interface |
US5346372A (en) * | 1991-07-18 | 1994-09-13 | Aisin Seiki Kabushiki Kaisha | Fluid flow regulating device |
EP0703364A1 (en) * | 1994-09-22 | 1996-03-27 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Method and device for driving a micropump |
EP0779436A2 (en) * | 1995-12-13 | 1997-06-18 | Frank T. Hartley | Micromachined peristaltic pump |
US5660370A (en) * | 1996-03-07 | 1997-08-26 | Integrated Fludics, Inc. | Valve with flexible sheet member and two port non-flexing backer member |
US5836750A (en) * | 1997-10-09 | 1998-11-17 | Honeywell Inc. | Electrostatically actuated mesopump having a plurality of elementary cells |
EP0999055A2 (en) * | 1998-11-03 | 2000-05-10 | Samsung Electronics Co., Ltd. | Micro injecting device and method of manufacturing the same |
Non-Patent Citations (7)
Title |
---|
BRYZEK J ET AL: "MICROMACHINES ON THE MARCH", IEEE SPECTRUM,US,IEEE INC. NEW YORK, vol. 31, no. 5, 1 May 1994 (1994-05-01), pages 20 - 31, XP000456261, ISSN: 0018-9235 * |
DUFFY D C ET AL: "PATTERNING ELECTROLUMINESCENT MATERIALS WITH FEATURE SIZES AS SMALL AS 5 MUM USING ELASTOMERIC MEMBRANES AS MASKS FOR DRY LIFT-OFF", ADVANCED MATERIALS,DE,VCH VERLAGSGESELLSCHAFT, WEINHEIM, vol. 11, no. 7, 7 May 1999 (1999-05-07), pages 546 - 552, XP000849014, ISSN: 0935-9648 * |
DUFFY, D. C. ET AL.: "Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)", ANAL. CHEM., vol. 70, 1998, pages 4974 - 4984, XP002149044 * |
POL VAN DE F C M ET AL: "A THERMO-PNEUMATIC ACTUATION PRINCIPLE FOR A MICROMINIATURE PUMP AND OTHER MICROMECHANICAL DEVICES", SENSORS AND ACTUATORS, ELSEVIER SEQUOIA S.A. LAUSANNE, CH, vol. 17, no. 1/2, 3 May 1989 (1989-05-03), pages 139 - 143, XP000038020 * |
QIN D ET AL: "ELASTOMERIC LIGHT VALVES", ADVANCED MATERIALS,DE,VCH VERLAGSGESELLSCHAFT, WEINHEIM, vol. 9, no. 5, 1 April 1997 (1997-04-01), pages 407 - 410, XP000683891, ISSN: 0935-9648 * |
RAPP R ET AL: "LIGA MICROPUMP FOR GASES AND LIQUIDS", SENSORS AND ACTUATORS A,CH,ELSEVIER SEQUOIA S.A., LAUSANNE, vol. A40, no. 1, 1994, pages 57 - 61, XP000434539, ISSN: 0924-4247 * |
XIA, Y., WHITESIDES, G. M.: "Soft Lithography", ANGEW. CHEM. INT. ED., vol. 37, 1998, pages 550 - 575, XP002149045 * |
Also Published As
Publication number | Publication date |
---|---|
EP1195523B1 (en) | 2005-03-02 |
EP1195523A2 (en) | 2002-04-10 |
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