EP0703364A1 - Method and device for driving a micropump - Google Patents

Method and device for driving a micropump Download PDF

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Publication number
EP0703364A1
EP0703364A1 EP19950112161 EP95112161A EP0703364A1 EP 0703364 A1 EP0703364 A1 EP 0703364A1 EP 19950112161 EP19950112161 EP 19950112161 EP 95112161 A EP95112161 A EP 95112161A EP 0703364 A1 EP0703364 A1 EP 0703364A1
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Prior art keywords
valve structure
micro
micropump
pump
resonance
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EP19950112161
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German (de)
French (fr)
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EP0703364B1 (en )
Inventor
Roland Zengerle
Axel Richter
Stefan Kluge
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006Micropumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00Motor parameters
    • F04B2203/04Motor parameters of linear electric motors
    • F04B2203/0404Frequency of the electric current

Abstract

The control system is used for a micro-membrane pump(100) which has a feed direction defined by its valve structure(118,120), with selective reversal of the feed direction when a driver signal with a given energising frequency is supplied to the pump. The energising frequency is in a frequency range above the resonance frequency of the resonating system provided by the moving parts (106,118,120) of the pump and the pumped fluid, with a phase difference of between 90 and 180 degrees between the driver signal and the deflection of the valve structure.

Description

  • Die vorliegende Erfindung bezieht sich auf ein Verfahren und eine Vorrichtung zur Ansteuerung einer Mikropumpe mittels eines Treibersignals, derart daß sich eine durch eine Ventilstruktur definierte Förderrichtung umkehrt. The present invention relates to a method and an apparatus for driving a micropump by means of a drive signal, such that a plane defined by a valve structure reverses the conveying direction.
  • Mikro-Membranpumpen sind beispielsweise aus der WO-93/05295 bekannt. Micro-diaphragm pumps are known for example from WO-93 / 05,295th Eine der dort beschriebenen Pumpen ist in Fig. 1 dargestellt. One of the pump described therein is shown in FIG. 1.
  • Diese Mikro-Membranpumpe 100 umfaßt eine aus zwei Teilen bestehende Verdrängereinheit 102 und eine ebenfalls aus zwei Teilen bestehende Ventileinheit 104. Bei dieser Mikro-Membranpumpe umfassen die zwei Teile der Verdrängereinheit 102 eine flexible Pumpmembran 106 und eine starre Gegenelektrode 108. Zwischen der Pumpmembran 106 und der Gegenelektrode 108 ist eine sogenannte Antriebskammer 110 gebildet. This micro-diaphragm pump 100 comprises a two-part displacement unit 102 and a likewise two-part valve unit 104. In this micro diaphragm pump, the two parts of the displacer unit 102 comprise a flexible pump membrane 106 and a rigid counter electrode 108. Between the pump diaphragm 106 and the counter electrode 108 is a so-called driving chamber 110 are formed. Beim Anlegen einer Betriebsspannung wird die Pumpmembran 106 von der Gegenelektrode 108 angezogen. Upon application of an operating voltage, the pumping membrane 106 is attracted from the counter electrode 108th Das Volumen der Pumpkammer 112 vergrößert sich und ein zu pumpendes Fluid wird über einen Einlaß angesaugt. The volume of the pumping chamber 112 increases, and a fluid to be pumped is sucked through an inlet. Beim Abschalten der Betriebsspannung relaxiert die Pumpmembran 106 in ihren Ausgangsbereich und verdrängt das zu pumpende Fluid in den Auslaß 116. Durch zwei passive Rückschlagventile 118, 120, die für die Fluidströmung eine Vorzugsrichtung definieren, ergibt sich bei einer periodischen Ansteuerung der Verdrängereinheit 102 eine gerichtete Pumpwirkung vom Einlaß 114 zum Auslaß 116 der Pumpe. When switching off the operating voltage, the pump diaphragm relaxes 106 in its exit region, and displaces the fluid to be pumped into the outlet 116. By means of two passive check valves 118, 120 that define a preferred direction for the fluid flow, the displacer unit 102 obtained when a periodic drive a directional pumping action from the inlet 114 to the outlet 116 of the pump. Bei Betriebsfrequenzen, die weit unterhalb der Eigenfrequenz der beweglichen Ventilteile liegen, ist das Verhalten der Ventile 118, 120 quasi statisch, dh die Stellung des beweglichen Ventilteils ergibt sich zu jedem Zeitpunkt aus der über das Ventil anliegenden hydrostatischen Druckdifferenz. At operating frequencies that are far below the natural frequency of the movable valve parts, the behavior of the valves 118, 120 is quasi-static, that is, the position of the movable valve member is obtained at any time from the applied via the valve hydrostatic pressure difference.
  • Bekannte Verfahren zur Ansteuerung einer solchen Mikro-Membranpumpe ermöglichen das Pumpen eines Fluids in die durch die Ventile 118, 120 definierte Vorzugsrichtung. Known methods for controlling such a micro-diaphragm pump enable the pumping of a fluid in the plane defined by the valves 118, 120 preferential direction.
  • Bei technischen Anwendungen der Mikromembranpumpe tritt oft die Situation ein, in der Fluide beispielsweise sowohl zu einem Sensorelement hintransportiert als auch wieder abtransportiert werden müssen. For technical applications of micro diaphragm pump often the situation occurs, transport thereto in the fluids, for example, both a sensor element and must be removed again. Dies tritt beispielsweise bei der chemischen Analytik auf, bei der Flüssigkeiten sowohl zu einem Sensorelement hintransportiert als auch wieder abtransportiert werden müssen. This occurs for example in the chemical analysis on transport thereto in liquids both a sensor element and must be removed again. Sowohl für den Hintransport als auch für den Abtransport muß bislang jeweils eine Mikro-Membranpumpe eingesetzt werden, wobei diese Mikro-Membranpumpen entgegengesetzt angeordnet sind. For both the Transport to destination as well as for the removal of a micro-diaphragm pump has to be used so far, respectively, said micro-diaphragm pump are disposed opposite. Die Notwendigkeit der zwei Mikro-Membranpumpen erhöht die Komplexität solcher analytischer Systeme und deren Herstellungskosten und erschwert beim Betrieb dieser Systeme deren Befüllung mit einem Fluid erheblich. The necessity of the two micro-diaphragm pump increases the complexity of such analytical systems and their production cost and complicates the operation of these systems, their filling with a fluid substantially.
  • Ausgehend von diesem Stand der Technik liegt der vorliegenden Erfindung die Aufgabe zugrunde, ein Verfahren und eine Vorrichtung zur Ansteuerung einer Mikropumpe zu schaffen, die eine Umkehr der durch eine Ventilstruktur definierten Förderrichtung ermöglichen. Starting from this prior art, the present invention has for its object to provide a method and an apparatus for driving a micropump that allow a reversal of the delivery direction defined by a valve structure.
  • Diese Aufgabe wird durch ein Verfahren und eine Vorrichtung zur Ansteuerung einer Mikropumpe nach Anspruch 1 und nach Anspruch 6 gelöst. This object is achieved by a method and an apparatus for driving a micropump according to claim 1 and claim. 6
  • Die vorliegende Erfindung schafft ein Verfahren zur Ansteuerung einer Mikro-Membranpumpe mittels eines Treibersignals, wobei die Mikro-Membranpumpe eine durch eine Ventilstruktur definierte Förderrichtung hat, mit dem Verfahrensschritt des Anlegens des Treibersignals mit einer Erregerfrequenz an die Mikro-Membranpumpe, wobei die Erregerfrequenz im Bereich oberhalb einer Resonanz eines aus den beweglichen Teilen der Mikro-Membranpumpe und dem zu pumpenden Fluid gebildeten Systems liegt, wodurch sich die durch eine Ventilstruktur definierte Förderrichtung umkehrt. The present invention provides a method of driving a micro-diaphragm pump by means of a drive signal, wherein the micro-diaphragm pump has a shape defined by a valve structure conveying direction, with the step of applying said driving signal with an excitation frequency to the micro-diaphragm pump, wherein the excitation frequency in the range a is above a resonance of the movable parts of the micro-membrane pump and the system formed fluid to be pumped, whereby the conveying direction defined by a valve structure reverses.
  • Die vorliegende Erfindung schafft eine Vorrichtung zum Ansteuern einer Mikro-Membranpumpe mittels eines Treibersignals, wobei die Mikro-Membranpumpe eine durch eine Ventilstruktur definierte Förderrichtung hat, mit einer Einrichtung zum Erzeugen des Treibersignals mit einer Erregerfrequenz, die im Bereich oberhalb einer Resonanz eines aus den beweglichen Teilen der Mikro-Membranpumpe und dem zu pumpenden Fluid gebildeten Systems liegt, wodurch sich die durch eine Ventilstruktur definierte Förderrichtung umkehrt. The present invention provides an apparatus for driving a micro-diaphragm pump by means of a drive signal, wherein the micro-diaphragm pump has a shape defined by a valve structure conveying direction, having a device for generating the driving signal with an excitation frequency which is in the range above a resonance of a of the movable parts of the micro-membrane pump and the system formed to be pumped fluid is present, resulting in the delivery direction defined by a valve structure reverses.
  • Ein Vorteil der vorliegenden Erfindung besteht darin, daß für praktische Anwendungen, bei denen sowohl ein Hintransport als auch ein Abtransport von Fluiden zu einem Element erforderlich ist, lediglich eine Mikro-Membranpumpe eingesetzt werden muß, wodurch sich der erforderliche Platzaufwand erniedrigt. An advantage of the present invention is that, only a micro-diaphragm pump has to be used for practical applications in which both a Transport to destination as well as a removal of fluids is needed to an element, whereby the required amount of space is lowered.
  • Ein weiterer Vorteil besteht darin, daß die Befüllung solcher Systeme mit einem Fluid erleichtert wird. A further advantage is that the filling of such systems is made easier with a fluid.
  • Wiederum ein weiterer Vorteil besteht darin, daß die Herstellungskosten solcher Systeme erheblich gesenkt werden können. Yet another advantage is that the cost of such systems can be significantly reduced.
  • Bevorzugte Weiterbildungen der vorliegenden Erfindung sind in den Unteransprüchen definiert. Preferred embodiments of the present invention are defined in the dependent claims.
  • Anhand der beiliegenden Zeichnungen wird nachfolgend ein bevorzugtes Ausführungsbeispiel der vorliegenden Erfindung naher beschrieben. a preferred embodiment of the present invention will be described in more detail with reference to the accompanying drawings. Es zeigen: Show it:
  • Fig. 1 Fig. 1
    eine Querschnittsdarstellung einer Mikro-Membranpumpe; a cross-sectional view of a micro-diaphragm pump;
    Fig. 2 Fig. 2
    eine maximale Auslenkung und eine Phasenverschiebung eines beweglichen Ventilteils bei verschiedenen Dämpfungen bzw. Gütefaktoren; a maximum deflection and a phase shift of a movable valve member at different attenuations or quality factors;
    Fig. 3 Fig. 3
    einen zeitabhängigen Durchfluß durch ein Ventil abhängig von einer Betriebsfrequenz, einer Amplitude der Druckoszillationen und unterschiedlichen Phasenverschiebungen; a time-dependent flow rate through a valve depending on an operating frequency, an amplitude of the pressure oscillations and different phase shifts;
    Fig. 4 Fig. 4
    eine graphische Darstellung der Pumprate einer Mikro-Membranpumpe, die gemäß der vorliegenden Erfindung angesteuert ist; a graphical representation of the pumping rate of a micro-diaphragm pump, which is driven in accordance with the present invention; und and
    Fig. 5 Fig. 5
    ein Blockdiagramm, das die Anordnung der erfindungsgemäßen Vorrichtung zur Ansteuerung einer Mikro-Membranpumpe darstellt. a block diagram illustrating the arrangement of the inventive device for controlling a micro-diaphragm pump.
  • Das erfindungsgemäße Verfahren und die erfindungsgemäße Vorrichtung ermöglichen es, die Pumprichtung bei Mikro-Membranpumpen (siehe Fig. 1) mit sogenannten passiven Rückschlagventilen 118, 120 umzukehren. The inventive method and the inventive device allow the pumping direction in micro-diaphragm pumps (see FIG. 1) with the so-called passive check valves 118, reverse 120th Hierzu wird die Verdrängereinheit 102 mit einem Treibersignal beaufschlagt, das eine Betriebsfrequenz im Bereich einer Resonanz, die im wesentlichen durch die beweglichen Ventilteile definiert ist, aufweist, die oberhalb dieser Resonanz liegt. For this, the displacer unit 102 is applied with a driving signal having an operating frequency in the region of resonance, which is essentially defined by the movable valve part, which lies above the resonance.
  • Es ist offensichtlich, daß es sich bei dieser Resonanz um eine Resonanz eines Systems handelt, das aus den beweglichen Teilen der Mikro-Membranpumpe (106, 118, 120) und aus dem zu pumpenden Fluid gebildet ist. It is obvious that it is at this resonance is a resonance of a system which is of the movable parts of the micro-diaphragm pump (106, 118, 120) and formed from the fluid to be pumped.
  • Durch die Ansteuerung entstehen in der Pumpkammer 112 Druckoszillationen, die von der äußeren Erregerfrequenz abhängen. By controlling the pressure oscillations 112 that depend from the outer excitation frequency created in the pumping chamber. Durch das Fluidsystem werden diese Druckschwingungen auf die beweglichen Ventilteile übertragen, wodurch sich das betreffende Ventil öffnet bzw. schließt. Through the fluid system, this pressure vibration is transmitted to the movable valve parts, whereby the valve in question opens or closes.
  • Im Bereich der Resonanz ergibt sich jedoch eine Phasendifferenz zwischen der durch das Fluid übertragenen Kraft auf die beweglichen Ventilteile und der aktuellen Auslenkung des beweglichen Ventilteils. In the area of ​​resonance, however, a phase difference between the transmitted through the fluid force on the movable valve parts and the current deflection of the movable valve member is obtained.
  • Dieses Verhalten entspricht dem eines schwingungsfähigen, mechanischen Systems, welches durch eine externe Kraft zu einer erzwungenen Schwingung angeregt wird. This behavior corresponds to that of a vibratory, mechanical system, which is excited by an external force to a forced oscillation. Wie es in Fig. 2a dargestellt ist, weist die Amplitude der Schwingung das bekannte Resonanzverhalten auf. As shown in Fig. 2A, the amplitude of the vibration to the known resonance behavior. Ferner ergibt sich eine Phasenverschiebung zwischen der erregenden Kraft und der Auslenkung des Schwingers, wie es in Fig. 2b dargestellt ist. Furthermore, there is a phase shift between the exciting force and the deflection of the vibrator, as shown in Fig. 2b.
  • Die in Fig. 2 dargestellten Kurven 200 und 202 stellen den Verlauf der Auslenkung und der Phasenverschiebung bei verschiedenen Dämpfungen bzw. Gütefaktoren dar. Hierbei ist dem Verlauf der Kurve 200 ein Gütefaktor von 3 zugeordnet und dem Verlauf der Kurve 202 ist ein Gütefaktor von 1 zugeordnet. The curves 200 and 202 shown in Fig. 2 show the course of the displacement and of the phase shift at various attenuation or quality factors. Here, the shape of the curve 200 is associated with a quality factor of 3 and the shape of the curve 202 is associated with a quality factor of 1 ,
  • Die in Fig. 2 dargestellte Auslenkung und Phasenverschiebung eines beweglichen Ventilteils gilt für eine Resonanz dieses Teils von 3000 Hz. The deflection and phase shift of a movable valve part shown in FIG. 2 is for a resonance of this part of 3000 Hz.
  • In Fig. 3 geben die Verläufe in der ersten Zeile den sogenannten erregenden Druck an, die Signalverläufe in der mittleren Zeile geben den Öffnungszustand des beweglichen Ventils an und die Signalverläufe in der unteren Reihe zeigen den zeitabhängigen Durchfluß, wobei die jeweiligen y-Skalen in beliebigen Einheiten dargestellt sind. In Fig. 3 provide the waveforms in the first line, the so-called excitatory pressure at the waveforms in the middle row indicate the opening condition of the movable valve and the waveforms in the bottom row show the time-dependent flow rate, wherein the respective y-scales in any units are shown.
  • Die Umkehrung der Pumprichtung wird durch das Zusammenwirken zweier Effekte ermöglicht. The reversal of the pumping direction is made possible by the interaction of two effects.
  • Einerseits hinkt der Öffnungszustand des Ventils der durch die Flüssigkeit übertragene Kraft um die Phase Θ hinterher, wie es in Fig. 3 deutlich zu erkennen ist. On one hand, the opening state of the valve the force transmitted through the liquid to the phase Θ is lagging behind, as can be clearly seen in Fig. 3.
  • Hieraus resultiert eine Verzögerung des Öffnungs- und Schließvorgangs des Ventils gegenüber der Fluidbewegung. This results in a delay of the opening and closing operation of the valve to fluid movement.
  • Der zweite Effekt besteht darin, daß eine Öffnung des Ventils lediglich in positiver Richtung möglich ist (siehe zweite Zeile der Fig. 3), dh während einer halben Periodendauer ist das Ventil vollständig geschlossen. The second effect is that an opening of the valve only in the positive direction is possible (see second row of Fig. 3), that is, during half a period the valve is fully closed.
  • Wie aus Fig. 3 zu sehen ist, fließt mit zunehmender Phasendifferenz ein immer größerer Anteil des Fluids innerhalb eines Pumpzykluses in die Sperrichtung durch das Ventil. As can be seen from Fig. 3, flows with increasing phase difference, a greater proportion of the fluid inside of a pumping cycle in the reverse direction through the valve. Dies bedeutet eine Umkehr der Förderrichtung (Φ<0). This means a reversal of the direction of conveyance (Φ <0). Bei einer Phase von -180 Grad wird eine vollständige Umkehr der Förderrichtung erreicht, wie es in der fünften Spalte in Fig. 3 dargestellt ist. At a phase of -180 degrees a complete reversal of the conveying direction is achieved, as shown in the fifth column in Fig. 3.
  • In Fig. 4 ist die Frequenzabhängigkeit der Pumprate bei einer elektrostatisch angetriebenen Mikro-Membranpumpe unter Verwendung von sogenannten Klappenventilen in einem halblogarithmischen Maßstab dargestellt. In FIG. 4, the frequency dependence of the pumping rate is shown in an electrostatically driven micro-diaphragm pump using so-called flapper valves in a semilogarithmic scale.
  • Im Frequenzbereich von 1 Hz bis 1 kHz befindet sich die Mikro-Membranpumpe in ihrem sogenannten Standard-Betriebsbereich, der durch den Pfeil 400 dargestellt ist. In the frequency range from 1 Hz to 1 kHz, the micro-diaphragm pump is in its so-called standard operating range, which is shown by the arrow 400th In diesem Standard-Betriebsbereich 400 weist die Mikro-Membranpumpe eine positive Pumprate (Φ>0) auf, was einer vorwärtsgerichteten Pumpwirkung entspricht. This standard operating range 400, the micro-diaphragm pump in a positive pumping rate (Φ> 0), which corresponds to a forward pumping action.
  • Im Frequenzbereich von 2 kHz bis 6 kHz, der durch den Pfeil 410 dargestellt ist, weist die Mikro-Membranpumpe eine negative Pumprate (Φ<0) auf, was einer rückwärts gerichteten Pumpwirkung entspricht. In the frequency range from 2 kHz to 6 kHz, which is represented by the arrow 410, the micro-diaphragm pump to a negative pumping rate (Φ <0), which corresponds to a pumping action backward.
  • Es wird darauf hingewiesen, daß nicht nur die Phase, sondern auch die maximale Öffnung des beweglichen Ventilteils sowie die Amplitude der erregenden Druckoszillationen von der anliegenden Erregerfrequenz abhängen. It should be noted that not only the phase but also the maximum opening of the movable valve part and the amplitude of the exciting pressure oscillations of the applied excitation frequency dependent. Neben dem Effekt der Phasenverschiebung zwischen dem Öffnungszustand des beweglichen Ventils und der erregenden Druckoszillation besteht auch eine Auswirkung der Frequenzabhängigkeit der maximalen Amplitude des beweglichen Ventils und die Frequenzabhängigkeit der Amplitude der erregenden Druckoszillationen. In addition to the effect of the phase shift between the open state of the movable valve and the exciting pressure oscillation, there is also an effect of the frequency dependency of the maximum amplitude of the movable valve and the frequency dependence of the amplitude of the exciting pressure oscillations.
  • Durch eine geeignete Veränderung der Form der verwendeten Ventile kann die Resonanzfrequenz der in einer Mikro- Membranpumpe verwendeten, beweglichen Ventilteile variiert werden. By suitable alteration of the shape of the valves used, the resonant frequency of the valve components used in a micro membrane pump, moving can be varied. Hierdurch ist es möglich, den Frequenzbereich 410 zu beeinflussen, in dem die negative Pumprate auftritt. This makes it possible to influence the frequency domain 410, where the negative pumping rate occurs.
  • Neben der oben beschriebenen sogenannten ersten Resonanz der beweglichen Ventilteile treten auch Resonanzen höherer Ordnung auf. In addition to the above-described so-called first resonance of the movable valve components of a higher order resonances will occur. Mit jeder neuen Resonanz läßt sich die Förderrichtung erneut umkehren. With each new resonance to the conveying direction can be reversed again.
  • Es wird darauf hingewiesen, daß sich der Frequenzbereich 410, bei dem eine negative Pumprate auftritt, derjenige Frequenzbereich ist, bei dem eine Phasendifferenz von etwa 90 Grad bis etwa 180 Grad zwischen dem Treibersignal und der Auslenkung der Ventile auftritt. It should be noted that the frequency range 410 in which a negative pumping rate occurs, one frequency range in which a phase difference of about 90 degrees to about 180 degrees occurs between the drive signal and the displacement of the valves. Der Frequenzbereich, bei dem eine positive Pumprate auftritt, ist derjenige Frequenzbereich, bei dem eine Phasendifferenz von etwa 0 Grad bis 90 Grad zwischen dem Treibersignal und der Auslenkung der Ventilstruktur auftritt. The frequency range in which a positive pumping rate occurs, is that frequency range in which a phase difference of about 0 degrees to 90 degrees occurs between the drive signal and the displacement of the valve structure.
  • In Fig. 5 ist ein Blockdiagramm der Anordnung einer Vorrichtung zur Erzeugung eines Treibersignals und einer Mikro-Membranpumpe dargestellt. In Fig. 5 is a block diagram showing the arrangement of an apparatus for generating a drive signal and a micro-diaphragm pump is illustrated. Die erfindungsgemäße Vorrichtung zum Ansteuern einer Mikro-Membranpumpe 510 mittels eines Treibersignals umfaßt eine Einrichtung 500 zum Erzeugen des Treibersignals mit einer Erregerfrequenz, die im Bereich oberhalb einer Resonanz der aus den beweglichen Teilen der Mikro-Membranpumpe 510 und dem zu pumpenden Fluid gebildeten Systems liegt. The inventive device for controlling a micro-diaphragm pump 510 by means of a driver signal includes a means 500 for generating the driving signal with an excitation frequency which lies in the range above a resonance of the movable parts of the micro-diaphragm pump 510 and the system formed fluid to be pumped. Das Treibersignal wird über eine oder mehrere Signalleitungen 520 an die Mikro-Membranpumpe 510 angelegt. The drive signal is applied via one or more signal lines 520 to the micro-diaphragm pump 510th
  • Ferner erzeugt die Treibersignalerzeugungseinrichtung ein zweites Treibersignal mit einer zweiten Erregerfrequenz, die in einem Bereich liegt, bei dem eine Phasendifferenz von etwa 0 Grad bis 90 Grad zwischen dem Treibersignal und der Auslenkung der Ventilstruktur auftritt, um das zu pumpende Fluid in die durch die Ventilstruktur definierte Förderrichtung zu pumpen. Further, the drive signal generating means generates a second drive signal having a second excitation frequency lying in a range in which a phase difference of from about 0 degrees to 90 degrees between the driving signal and the displacement of the valve structure occurs to defined the fluid to be pumped in through the valve structure to pump conveying direction.
  • Das erfindungsgemäße Verfahren und die erfindungsgemäße Vorrichtung sind nicht auf Mikro-Membranpumpen beschränkt, die Rückschlagventile verwenden. The inventive method and the inventive apparatus are not limited to micro membrane pumps which use check valves. Die Anwendung der Erfindung auf Mikro-Membranpumpen, die anders ausgebildete passive Ventile verwenden, ist ohne weiteres möglich. The application of the invention to micro membrane pumps using differently configured passive valves, is readily possible.
  • Weiterhin beschränkt sich die Anwendung der vorliegenden Erfindung nicht auf eine Mikro-Membranpumpe, die zwei Ventile verwendet. Furthermore, the application of the present invention is not limited to a micro-diaphragm pump, which uses two valves. Die Verwendung von Mikro-Membranpumpen, die ein Ventil oder mehr als zwei Ventile verwenden, ist ohne weiteres möglich. The use of micro-diaphragm pumps which employ a valve or more than two valves, is readily possible.
  • Neben der oben beschriebenen elektrostatischen Erregung der Pumpmembran der Mikro-Membranpumpe sind auch piezoelektrische und pneumatische bzw. thermopneumatische Antriebsmechanismen für die Mikro-Membranpumpe möglich. In addition to the above-described electrostatic excitation of the pump membrane of the micro-diaphragm pump also piezo-electric and pneumatic or thermo-pneumatic drive mechanisms for the micro-diaphragm pump are possible.
  • In Betracht kommt auch ein thermischer Zweiphasenantrieb, bei dem eine Flüssigkeit in einer Antriebskammer erhitzt wird, wodurch sich eine Dampfblase bildet, durch die eine Pumpmembran durch Verdrängung betätigt wird. Also contemplated are a thermal two-phase drive, in which a liquid is heated in a drive chamber, thereby forming a vapor bubble comes, is actuated by a pump membrane by displacement. Der thermische Zweiphasenantrieb ermöglicht gegenüber einem rein thermopneumatischen Antrieb die Erzeugung höherer Drücke. The thermal two-phase drive allows comparison with a purely thermoplastic pneumatic drive the generation of higher pressures.
  • In Abweichung von den gezeigten Ausführungsformen der Antriebe kommt neben einem Membranverdränger auch ein Kolbenverdränger in Betracht. In deviation from the embodiments shown, the drives also a Kolbenverdränger comes next to a Membranverdränger into consideration.

Claims (9)

  1. Verfahren zur Ansteuerung einer Mikropumpe (100) mittels eines Treibersignals, wobei die Mikropumpe (100) eine durch eine Ventilstruktur (118, 120) definierte Förderrichtung hat, Method for driving a micropump (100) by means of a driving signal, the micropump (100) has a through a valve structure defined (118, 120) conveying direction,
    gekennzeichnet durch folgenden Verfahrensschritt: characterized by the following step:
    Anlegen des Treibersignals mit einer Erregerfrequenz an die Mikropumpe (100), wobei die Erregerfrequenz im Bereich oberhalb einer Resonanz eines aus den beweglichen Teilen (106, 118, 120) der Mikropumpe (100) und dem zu pumpenden Fluid gebildeten Systems liegt, wodurch sich die durch die Ventilstruktur (118, 120) definierte Förderrichtung umkehrt. Applying said driving signal with an excitation frequency to the micropump (100), wherein the excitation frequency is in the range above a resonance of a of the movable parts (106, 118, 120) of micropump (100) and the system formed fluid to be pumped, thereby extending by the valve structure (118, 120) defined conveying direction is reversed.
  2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, A method according to claim 1, characterized in that
    daß die Mikropumpe als eine Mikro-Membranpumpe (100) ausgebildet ist. that the micro-pump is designed as a micro-diaphragm pump (100).
  3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, A method according to claim 1 or 2, characterized in that
    daß der Bereich, in dem die Erregerfrequenz liegt, derjenige Frequenzbereich ist, bei dem eine Phasendifferenz von etwa 90 Grad bis etwa 180 Grad zwischen dem Treibersignal und der Auslenkung der Ventilstruktur (118, 120) auftritt. that the area in which the excitation frequency, one frequency range in which a phase difference of about 90 degrees to about 180 degrees between the driving signal and the displacement of the valve structure (118, 120) occurs.
  4. Verfahren nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, A method according to any one of claims 1 to 3, characterized in that
    daß die Resonanz im wesentlichen durch die Ventilstruktur (118, 120) bestimmt ist. that the resonance substantially by the valve structure (118, 120) is determined.
  5. Verfahren nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, A method according to any one of claims 1 to 4, characterized in that
    daß die Resonanz eine Resonanz erster Ordnung oder eine Resonanz höherer Ordnung ist. that the resonance is a resonance of the first order or higher order resonance.
  6. Verfahren nach einem der Ansprüche 1 bis 5, ferner gekennzeichnet durch folgenden Verfahrensschritt: Method according to one of claims 1 to 5, further characterized by the following step:
    Anlegen eines zweiten Treibersignals mit einer zweiten Erregerfrequenz an die Mikropumpe (100), wobei die zweite Erregerfrequenz in einem Bereich liegt, bei dem eine Phasendifferenz von etwa 0 Grad bis 90 Grad zwischen dem Treibersignal und der Auslenkung der Ventilstruktur (118, 120) auftritt, um das zu pumpende Fluid in die durch die Ventilstruktur (118, 120) definierte Förderrichtung zu pumpen. Applying a second drive signal having a second excitation frequency to the micropump (100), wherein the second excitation frequency is in a range in which a phase difference of from about 0 degrees to 90 degrees between the driving signal and the displacement of the valve structure (118, 120) occurs, to the fluid to be pumped in by the valve structure (118, 120) to pump defined conveying direction.
  7. Vorrichtung zum Ansteuern einer Mikropumpe (510) mittels eines Treibersignals, wobei die Mikropumpe (100) eine durch eine Ventilstruktur (118, 120) definierte Förderrichtung hat, An apparatus for driving a micropump (510) by means of a driving signal, the micropump (100) has a through a valve structure defined (118, 120) conveying direction,
    gekennzeichnet durch marked by
    eine Einrichtung (500) zum Erzeugen des Treibersignals mit einer Erregerfrequenz, die im Bereich oberhalb einer Resonanz eines aus den beweglichen Teilen der Mikropumpe und dem zu pumpenden Fluid gebildeten Systems liegt, wodurch sich die durch die Ventilstruktur (118, 120) definierte Förderrichtung umkehrt. means (500) for generating the driving signal with an excitation frequency which is one of the movable parts of the micropump and the system formed fluid to be pumped in the range above a resonance, whereby caused by the valve structure (118, 120) defined conveying direction is reversed.
  8. Vorrichtung nach Anspruch 7, dadurch gekennzeichnet, Device according to claim 7, characterized in that
    daß die Mikropumpe als eine Mikro-Membranpumpe (100) ausgebildet ist. that the micro-pump is designed as a micro-diaphragm pump (100).
  9. Vorrichtung nach Anspruch 7 oder 8, dadurch gekennzeichnet, Device according to claim 7 or 8, characterized in that
    daß die Treibersignalerzeugungseinrichtung (500) ferner ein zweites Treibersignal mit einer zweiten Erregerfrequenz erzeugt, die in einem Bereich liegt, bei dem eine Phasendifferenz von etwa 0 Grad bis 90 Grad zwischen dem Treibersignal und der Auslenkung der Ventilstruktur auftritt, um das zu pumpende Fluid in die durch die Ventilstruktur definierte Förderrichtung zu pumpen. that the drive signal generating means (500) further generates a second drive signal having a second excitation frequency lying in a range in which a phase difference of from about 0 degrees to 90 degrees between the driving signal and the displacement of the valve structure occurs to the fluid to be pumped into the through the valve structure defined conveying direction pumping.
EP19950112161 1994-09-22 1995-08-02 Method and device for driving a micropump Expired - Lifetime EP0703364B1 (en)

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DE19944433894 DE4433894A1 (en) 1994-09-22 1994-09-22 Method and device for driving a micropump
DE4433894 1994-09-22

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EP0703364A1 true true EP0703364A1 (en) 1996-03-27
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