EP1193776A2 - Deformierbarer Mikroaktuator - Google Patents

Deformierbarer Mikroaktuator Download PDF

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Publication number
EP1193776A2
EP1193776A2 EP01203553A EP01203553A EP1193776A2 EP 1193776 A2 EP1193776 A2 EP 1193776A2 EP 01203553 A EP01203553 A EP 01203553A EP 01203553 A EP01203553 A EP 01203553A EP 1193776 A2 EP1193776 A2 EP 1193776A2
Authority
EP
European Patent Office
Prior art keywords
actuator
micro
elastomer material
metallic layers
set forth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01203553A
Other languages
English (en)
French (fr)
Other versions
EP1193776A3 (de
Inventor
Ravi c/o Eastman Kodak Company Sharma
Edward P. C/O Eastman Kodak Company Furlani
Milton S. c/o Eastman Kodak Company Sales
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Publication of EP1193776A2 publication Critical patent/EP1193776A2/de
Publication of EP1193776A3 publication Critical patent/EP1193776A3/de
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

Definitions

  • This invention relates to micro-actuators usable to produce controlled movements.
  • U.S. Patent No. 2,896,507 describes an imaging member which includes an elastically deformable layer sandwiched between a pair of electrode plates. In operation, an electrical field is established across the deformable layer, thus causing this layer to deform. The deformation produces relative movement between the electrode plates.
  • U.S. Patent No. 3,716,359 discloses improved thin flexible metallic layer electrode plates comprising a plurality of different metals such as, for example, gold, indium, aluminum, silver, magnesium, copper, cobalt, iron, chromium, nickel, gallium, cadmium, mercury, and lead. Various techniques for forming the metallic layers on the elastomer layer are described including, for example, by vacuum evaporation.
  • U.S. Patent No. 4,163,667 describes the use of a composition of titanium and silver for use as the flexible conductive metallic layer electrode plates in imaging members.
  • a micro-actuator has a pair of conductive metallic layers connectable to an electrical potential source so as to induce a force between the metallic layers upon application of an electrical field.
  • a layer of dense elastomer material is sandwiched between the pair of conductive metallic layers such that there will be a change in the volume of the elastomer material in response to relative movement between the conductive metallic layers.
  • the elastomer material has at least one void within the elastomer material, whereby the micro-actuator exhibits void-enhanced growth and reduction in size in response to the effected force induced by the applied electrical field.
  • At least one of the metallic layers is a flexible electrode plate.
  • the other metallic layer may be rigid and essentially non-deformable.
  • the elastomer material has substantial plurality of voids.
  • FIG. 2 is a perspective view of the micro-actuator of FIG. 1 with portions of the figure cut away for clarity.
  • Micro-actuator 10 includes an optional support substrate 12, a thin, flexible conductive layer first electrode plate 14, and an optional layer of insulating material 16. Insulating material 16, in turn, carries a deformable elastomer layer 18.
  • Overlying elastomer layer 18 is a rigid, essentially non-deformable conductive metallic second electrode plate 20.
  • First and second electrode plates 14 and 20, respectively, are connected to an electrical potential source 22 by leads 24.
  • Potential source 22 may be A.C., D.C., or a combination thereof.
  • the potential source may also include suitable switching apparatus, not shown.
  • Conductive layer first electrode plate 14 may be formed as a rigid, essentially non-deformable conductive metallic plate, eliminating the need for support substrate 12.
  • second electrode plate 20 may be formed as a thin, flexible conductive layer on a support substrate, not shown.
  • a micro-actuator 10' incorporates insulating material in a deformable elastomer layer 18'.
  • an electric field is established across deformable elastomer layer 18 (FIGS. 1 and 2) or 18' (FIG. 3) in a direction normal the planes of first and second electrode plates 14 and 20 by applying a potential from source 22 to the electrode plates.
  • the mechanical force of attraction between first and second electrode plates 14 and 20 due to the electric field causes deformable elastomer layer to compress.
  • first and second electrode plates 14 and 20 will repulse and cause the elastomer layer to deform in expansion if like electrical poles are applied to electrode plates 14 and 20.
  • Deformable elastomer layer 18 may comprise any suitable elastomer material, such as for example natural rubber or synthetic polymers with rubber-like characteristics (silicone rubber, styrenebutadiene, polybutadiene, neoprene, butyl, polyisoprene, nitrile, urethane, and ethylene rubbers). Elastomers having relatively high dielectric strength will allow the devices to be operated at higher voltage levels, which in many instances may be preferred.
  • Suitable selection of a particular elastomer material which exhibits an elastic modulus appropriate for a predetermined intended use is within ordinary skill given the description herein. For example, a relatively more stiff elastomer will typically recover more rapidly when an electric field is removed. On the other hand, an elastomer material having a relatively low elastic modulus is typically capable of greater deformations for a given value of electric field.
  • the voids give rise to effective values for the Young's modulus E eff and permittivity ⁇ eff of deformable elastomer layer 18 or 18'. To first order, these effective values are obtained via a simple volumetric weighting of the respective values of the void and the portion of fully dense solid elastomer.
  • E and ⁇ are the Young's modulus and the permittivity of the solid elastomer, respectively
  • ⁇ ⁇ V void V tot
  • ⁇ V void is the volume occupied by the voids
  • V tot is the total volume occupied by deformable elastomer layer 18 or 18' in its undeformed state.
  • ⁇ V void is limited to approximately 25% of the total volume. Therefore, 0 ⁇ ⁇ ⁇ 0.25.
  • the strain is negative indicating a compressive deformation.
  • the first term in equation (5) is the strain due to a fully dense solid elastomer (without voids).
  • the thickness t 0 of deformable elastomer layer 18 or 18' should be much smaller that either of the side dimensions of the area A of electrode plate 14.
  • the thickness t 0 should be less than 10 ⁇ m.
  • the thickness of deformable elastomer layer 18 or 18' may be in the range of from about 0.5 microns to about 200 microns, depending upon the dielectric properties of the elastomer.
  • Electrode plate 20 should have good lateral conductivity, excellent stability, and little internal stress; as well as being highly adherent to deformable elastomer layer 18 or 18'. Suitable materials for electrode plate 20 include gold, silver, chromium, nickel, aluminum, conducting polymer, etc. Electrode plate 20 may be formed such as by chemical reaction, precipitation from a solution, electrophoresis, electrolysis, electroless plating, vapor deposition and others. The thickness of electrode plate 20 may, for example, be in the range of from about 200 angstroms to about 5,000 angstroms depending upon any desired flexibility, and the requisite strength and conductivity.
  • the number of voids, the size of the individual voids, and the total volume of the voids relative to the volume of elastically deformable elastomer layer 18 are variables selectable during the design of a particular system.

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  • Micromachines (AREA)
  • Laminated Bodies (AREA)
EP01203553A 2000-09-27 2001-09-19 Deformierbarer Mikroaktuator Withdrawn EP1193776A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US671438 2000-09-27
US09/671,438 US6477029B1 (en) 2000-09-27 2000-09-27 Deformable micro-actuator

Publications (2)

Publication Number Publication Date
EP1193776A2 true EP1193776A2 (de) 2002-04-03
EP1193776A3 EP1193776A3 (de) 2005-05-18

Family

ID=24694505

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01203553A Withdrawn EP1193776A3 (de) 2000-09-27 2001-09-19 Deformierbarer Mikroaktuator

Country Status (2)

Country Link
US (1) US6477029B1 (de)
EP (1) EP1193776A3 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2003681C2 (en) * 2009-10-21 2011-04-26 Stichting Materials Innovation Inst M2I Micro electromechanical switch and method of manufacturing such a micro electromechanical switch.

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100425776B1 (ko) * 2002-04-23 2004-04-01 전자부품연구원 마이크로 엑츄에이터
US8704423B2 (en) * 2008-08-22 2014-04-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Asymmetric dielectric elastomer composite material
JP5558876B2 (ja) * 2009-09-18 2014-07-23 東海ゴム工業株式会社 誘電膜、およびその製造方法、並びにそれを用いたトランスデューサ
EP2400573A1 (de) * 2010-06-23 2011-12-28 Bayer MaterialScience AG Elektromechanischer Wandler, Verfahren zu dessen Herstellung und Verwendung desselben
US10859101B2 (en) * 2018-12-10 2020-12-08 Toyota Motor Engineering & Manufacturing North America, Inc. Soft-bodied actuator with pinched configuration

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2896507A (en) 1952-04-16 1959-07-28 Foerderung Forschung Gmbh Arrangement for amplifying the light intensity of an optically projected image
US3716359A (en) 1970-12-28 1973-02-13 Xerox Corp Cyclic recording system by the use of an elastomer in an electric field
US4163667A (en) 1973-10-11 1979-08-07 Xerox Corporation Deformable imaging member used in electro-optic imaging system
US4065308A (en) 1975-04-24 1977-12-27 Xerox Corporation Deformation imaging element
CA1277415C (en) * 1986-04-11 1990-12-04 Lorne A. Whitehead Elastomer membrane enhanced electrostatic transducer
US5082242A (en) * 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
JPH0770469B2 (ja) 1991-10-30 1995-07-31 フラウンホファー・ゲゼルシャフト・ツール・フォルデルング・デル・アンゲバンテン・フォルシュング・アインゲトラーゲネル・フェライン 照明装置
US5682075A (en) * 1993-07-14 1997-10-28 The University Of British Columbia Porous gas reservoir electrostatic transducer
CH688960A5 (de) 1994-11-24 1998-06-30 Pelikan Produktions Ag Tropfenerzeuger fuer Mikrotropfen, insbesondere fuer einen Ink-Jet-Printer.
US5867301A (en) 1996-04-22 1999-02-02 Engle; Craig D. Phase modulating device
WO1998035529A2 (en) * 1997-02-07 1998-08-13 Sri International Elastomeric dielectric polymer film sonic actuator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2003681C2 (en) * 2009-10-21 2011-04-26 Stichting Materials Innovation Inst M2I Micro electromechanical switch and method of manufacturing such a micro electromechanical switch.

Also Published As

Publication number Publication date
US6477029B1 (en) 2002-11-05
EP1193776A3 (de) 2005-05-18

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