EP1141611A1 - System for conveying liquids without pulsing - Google Patents

System for conveying liquids without pulsing

Info

Publication number
EP1141611A1
EP1141611A1 EP99957334A EP99957334A EP1141611A1 EP 1141611 A1 EP1141611 A1 EP 1141611A1 EP 99957334 A EP99957334 A EP 99957334A EP 99957334 A EP99957334 A EP 99957334A EP 1141611 A1 EP1141611 A1 EP 1141611A1
Authority
EP
European Patent Office
Prior art keywords
pressure
small
container
parallel
storage container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99957334A
Other languages
German (de)
French (fr)
Other versions
EP1141611B1 (en
Inventor
Claus Dusemund
Klaus Freissler
Wilfried Jammer
Michael Poth
Alberto Dix
Eberhard Tempel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BASF SE
Original Assignee
Merck Patent GmbH
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Filing date
Publication date
Application filed by Merck Patent GmbH filed Critical Merck Patent GmbH
Publication of EP1141611A1 publication Critical patent/EP1141611A1/en
Application granted granted Critical
Publication of EP1141611B1 publication Critical patent/EP1141611B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/12—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air
    • F04B9/129—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2278—Pressure modulating relays or followers
    • Y10T137/2365—Plural series units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4673—Plural tanks or compartments with parallel flow

Definitions

  • the present invention relates to a system for the pulsation-free conveyance of liquids, which can be used for high-purity, liquid chemicals in the semiconductor industry.
  • High-purity chemicals are usually used in production processes in the semiconductor industry, which have very high requirements with regard to the absence of particles. Since the chemicals used are often highly caustic or oxidizing substances, high demands are made on the purity or resistance of the materials that come into contact with the chemicals. In this context, areas where the chemicals come into contact with moving parts in the system are particularly critical with regard to particle release. The requirements for particle freedom are constantly growing and previously known devices cannot meet these new requirements in a satisfactory manner.
  • the object of the present invention was therefore to provide a system which has as few moving parts as possible, such as, for. B. has pumps.
  • a liquid delivery system for pulsation-free delivery which delivers liquids in a recirculation circuit and has at least one intermediate container.
  • At least two small pressure vessels connected in parallel are integrated, which convey the liquid chemicals and replace a pump by means of a pressure difference from the storage vessel.
  • the object is also achieved in that one of the small containers (D1 or D2) connected in parallel has a pressure in the filled state which results from a height difference of at least 0.5 m between the storage tank (B1) and the height of the results in small containers that are at a lower level than the storage tank. Accordingly, the object is achieved in that in each case one of the small pressure containers is filled from the storage container connected to it due to a pressure difference which results from a height difference of at least 0.5 m between the storage container and the parallel connected pressure containers located at a lower level than the storage tank, while the other small pressure vessel is pressurized and the liquid is conveyed from it in the circuit, the regulation of the liquid flow being carried out by electronically controllable valves.
  • one of the small containers connected in parallel is subjected to a pressure which results from a height difference of 1 m between the storage tank and the two containers connected in parallel.
  • the pressure containers can be filled from the storage container by conveying the liquid into the pressure container by means of a slight overpressure through communicating pipelines.
  • This pressure reduction can be done by a valve, an orifice or a pipe constriction.
  • the object on which this invention is based can be achieved in particular by a conveyor system whose storage container has an overpressure greater than or equal to 0.05 bar, the small pressure containers being designed as containers for high pressure.
  • the pressure drops depending on the flow rate.
  • the residual pressure can be reduced to the internal pressure of the storage or storage container by means of a valve, an orifice or a pipe constriction.
  • the liquid delivery system according to the invention enables the delivery of liquids in a recirculation circuit. Only a larger storage container or storage container (day tank) is required.
  • a particular advantage of this conveyor system is that a pump can be replaced by two small pressure vessels connected in parallel. These pressure vessels can in particular have a volume of 1-200 l. While one pressure tank is filled by the pressure difference, which results from the static height difference (> 0.5 m) of the storage or storage tank (B1) to the pressure tanks (D1, D2), or by a pump, the other pumps through Applying a higher pressure (2 -6 bar) to the storage tank the liquid in the circuit. This can be accomplished by appropriately switching electronically controllable valves. At the end of the recirculation cycle, the pressure on the internal pressure of the storage container B1 is reduced by means of a valve, an orifice or a pipe constriction.
  • the storage tank can be filled from the outside by pumps (semi-pump system) or by pressure (pressure system).
  • the pressure tanks D1 and D2 can be filled from the storage tank B1 by applying a slight overpressure in B1 (> 0.05 bar) (see above). In this case, however, B1 must comply with the Pressure Vessel Ordinance.
  • the construction of the conveyor system according to the invention described here results in the following advantages over conventional systems:
  • the system combines the advantages of pumping systems, which can save a larger pressure vessel, with those of the pressure systems.
  • the latter are characterized by a continuous flow and the absence of moving wear parts.
  • This system is advantageous for use as a supply system for electronic chemicals, since significant improvements compared to pump systems have been found, particularly in particle reduction.
  • Another major advantage over known supply systems is the low-pulsation driving style of the entire system.
  • this system is considerably less expensive than other conventional printing systems in which, for. B. with two larger storage tanks (pressure tanks,> 3 bar), since only one unpressurized storage tank and two small pressure tanks (> 2 bar) are required.
  • the conveyor system has no moving parts apart from the valves. Pumps can be dispensed with within the recirculation circuit. In this way, the system is significantly safer in terms of susceptibility to failure. Less service is required and there is less downtime during which wear parts such as Pump parts must be replaced
  • the semi-pump system according to the invention has significantly fewer wear parts and the maintenance effort is correspondingly lower.
  • the system according to the invention has the following advantages:
  • B1 represents a storage container or mixing container which can be filled by pumping or pressure.
  • B1 and the pressure vessel D1 and D2 are located at different levels, so that the container B1 results in that between the filling level of D1 ma x (D2) max and min a minimal static height difference which is sufficient for the pressure vessel to loading fill.
  • Fig. 2 shows a pump unit with which the conveyor system according to the invention can be provided. It is a section of FIG. 1.
  • D1 pressure vessel 5 to 200 I, up to 6 bar
  • V5 valve to control the flow rate or flow

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Pipeline Systems (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

A system tot the pulsation-free delivery of liquids, which system may be used for high-purity, liquid chemicals in the semiconductor industry.

Description

System zur pulsationsfreien Förderung von Flüssigkeiten System for the pulsation-free delivery of liquids
Die vorliegende Erfindung betrifft ein System zur pulsationsfreien Förderung von Flüssigkeiten, das für hochreine, flüssige Chemikalien in der Halbleiterindustrie eingesetzt werden kann.The present invention relates to a system for the pulsation-free conveyance of liquids, which can be used for high-purity, liquid chemicals in the semiconductor industry.
in Produktionsverfahren der Halbleiterindustrie werden üblicherweise hochreine Chemikalien eingesetzt, an die sehr hohe Anforderungen bezüglich der Partikelfreiheit gestellt werden. Da es sich bei den verwendeten Chemikalien häufig um stark ätzende oder oxidierende Substanzen handelt werden entsprechend hohe Ansprüche an die Reinheit bzw. Resistenz der mit den Chemikalien in Berührung kommenden Materialien gestellt. Besonders kritisch bezüglich der Partikelfreisetzung sind in diesem Zusammenhang Stellen, an denen die Chemikalien mit beweglichen Tei- len im System in Berührung kommen. Die Anforderungen an die Partikelfreiheit wachsen ständig und bisher bekannte Vorrichtungen können diese neuen Anforderungen nicht in zufriedenstellender Weise erfüllen.High-purity chemicals are usually used in production processes in the semiconductor industry, which have very high requirements with regard to the absence of particles. Since the chemicals used are often highly caustic or oxidizing substances, high demands are made on the purity or resistance of the materials that come into contact with the chemicals. In this context, areas where the chemicals come into contact with moving parts in the system are particularly critical with regard to particle release. The requirements for particle freedom are constantly growing and previously known devices cannot meet these new requirements in a satisfactory manner.
Aufgabe der vorliegenden Erfindung war es daher, ein System zur Verfügung zu stellen, welches möglichst wenige bewegliche Teile, wie z. B. Pumpen aufweist.The object of the present invention was therefore to provide a system which has as few moving parts as possible, such as, for. B. has pumps.
Die Lösung der Aufgabe erfolgt durch ein Flüssigkeitsfördersystem zur pulsationsfreien Förderung, welches Flüssigkeiten in einem Rezirkulati- onskreislauf fördert und mindestens einen Zwischenbehälter aufweist.The problem is solved by a liquid delivery system for pulsation-free delivery, which delivers liquids in a recirculation circuit and has at least one intermediate container.
In diesem erfindungsgemäßen System sind mindestens zwei parallel geschaltete kleine Druckbehälter eingebunden, welche mittels einer Druckdifferenz zum Speicherbehälter die flüssigen Chemikalien fördern und eine Pumpe ersetzen.In this system according to the invention, at least two small pressure vessels connected in parallel are integrated, which convey the liquid chemicals and replace a pump by means of a pressure difference from the storage vessel.
Von diesen zwei parallel geschalteten kleinen Druckbehältern (D1 , D2) wird der eine mittels einer Pumpe befüllt, während der andere mit einem Überdruck im Vergleich zum Lagerbehälter (B1 ) beaufschlagt wird und die Flüssigkeit von ihm ausgehend im Kreislauf fördert, wobei die Regelung des Flüssigkeitsstroms durch elektrisch steuerbare Ventile erfolgt. Charakteristisch ist für dieses Fördersystem, daß der kleine Behälter (D1 oder D2), welcher den höheren Druck aufweist, einen Überdruck von 2 bis 6 bar besitzt, und daß die beiden kleinen Behälter der Anlage im Betrieb abwechselnd mit Druck beaufschlagt werden, wodurch ein kontinuierlicher Flüssigkeitsstrom erzeugt wird..Of these two small pressure vessels (D1, D2) connected in parallel, one is filled by means of a pump, while the other is pressurized compared to the storage vessel (B1) and conveys the liquid from it in the circuit, regulating the liquid flow done by electrically controllable valves. It is characteristic of this conveyor system that the small container (D1 or D2), which has the higher pressure, has an overpressure of 2 to 6 bar, and that the two small containers of the system are alternately pressurized during operation, whereby a continuous Liquid flow is generated ..
Erfindungsgemäß erfolgt die Lösung der Aufgabe auch dadurch, daß der eine der parallel geschalteten kleinen Behälter (D1 oder D2) im befüllten Zustand einen Druck aufweist, welcher sich aus einer Höhendifferenz von mindestens 0,5 m zwischen dem Lagertank (B1 ) und der Höhe der kleinen Behälter ergibt, die sich auf einer tieferen Ebene befinden als der Lagertank. Demgemäß erfolgt die Lösung der Aufgabe dadurch, daß jeweils einer der kleinen Druckbehälter aus dem mit ihm verbundenen Lagerbehälter befüllt wird aufgrund einer Druckdifferenz, die sich aus einer Hö- hendifferenz von mindestens 0,5 m zwischen dem Lagerbehälter und den parallel geschalteten Druckbehältern, welche sich auf einer tieferen Ebene befinden als der Lagertank, ergibt, während der andere kleine Druckbehälter mit einem Überdruck beaufschlagt wird und die Flüssigkeit von ihm ausgehend im Kreislauf gefördert wird, wobei die Regelung des Flüs- sigkeitsstroms durch elektronisch steuerbare Ventile erfolgt.According to the invention, the object is also achieved in that one of the small containers (D1 or D2) connected in parallel has a pressure in the filled state which results from a height difference of at least 0.5 m between the storage tank (B1) and the height of the results in small containers that are at a lower level than the storage tank. Accordingly, the object is achieved in that in each case one of the small pressure containers is filled from the storage container connected to it due to a pressure difference which results from a height difference of at least 0.5 m between the storage container and the parallel connected pressure containers located at a lower level than the storage tank, while the other small pressure vessel is pressurized and the liquid is conveyed from it in the circuit, the regulation of the liquid flow being carried out by electronically controllable valves.
In einer besonderen Ausführungsform ist der eine der parallel geschalteten kleinen Behälter mit einem Druck beaufschlagt, der sich aus einer Höhendifferenz von 1 m zwischen dem Lagertank und den beiden parallel geschalteten Behältern ergibt.In a special embodiment, one of the small containers connected in parallel is subjected to a pressure which results from a height difference of 1 m between the storage tank and the two containers connected in parallel.
Erfindungsgemäß kann die Befüllung der Druckbehälter aus dem Lagerbehälter erfolgen, indem die Flüssigkeit mittels leichtem Überdruck durch kommunizierende Rohrleitungen in die Druckbehälter gefördert wird.According to the invention, the pressure containers can be filled from the storage container by conveying the liquid into the pressure container by means of a slight overpressure through communicating pipelines.
Am Ende des Rezirkulationskreislaufs (RK) des Fördersystems wird der Druck auf den Innendruck des Lagerbehälter (B1 ) reduziert wird.At the end of the recirculation circuit (RK) of the conveyor system, the pressure is reduced to the internal pressure of the storage container (B1).
Diese Druckreduzierung kann durch ein Ventil, eine Blende oder eine Rohrverengung erfolgen. Die Lösung der dieser Erfindung zugrunde liegenden Aufgabe kann insbesondere durch ein Fördersystem erfolgen, dessen Lagerbehälter einen Überdruck von größer gleich 0,05 bar aufweist, wobei die kleinen Druckbehälter als Behälter für hohen Druck ausgelegt sind.This pressure reduction can be done by a valve, an orifice or a pipe constriction. The object on which this invention is based can be achieved in particular by a conveyor system whose storage container has an overpressure greater than or equal to 0.05 bar, the small pressure containers being designed as containers for high pressure.
Im gesamten Rezirkulationskreislauf fällt der Druck in Abhängigkeit von dem Förderstrom ab. Der Restdruck kann, wie oben gesagt, durch ein Ventil, eine Blende oder eine Rohrverengung auf den Innendruck des Speicher- oder Lagerbehälters reduziert werden.In the entire recirculation circuit, the pressure drops depending on the flow rate. As stated above, the residual pressure can be reduced to the internal pressure of the storage or storage container by means of a valve, an orifice or a pipe constriction.
Das erfindungsgemäße Flüssigkeitsfördersystem ermöglicht die Förderung von Flüssigkeiten in einem Rezirkulationskreislauf. wobei nur ein größerer Speicherbehälter oder Lagerbehälter (Day-Tank) benötigt wird.The liquid delivery system according to the invention enables the delivery of liquids in a recirculation circuit. only a larger storage container or storage container (day tank) is required.
Ein besonderer Vorteil dieses Fördersystems ist, daß eine Pumpe durch zwei parallel geschaltete, kleine Druckbehälter ersetzt werden kann. Diese Druckbehälter können insbesondere ein Volumen von 1-200 I besitzen. Während der eine Druckbehälter durch die Druckdifferenz, die sich aus der statische Höhendifferenz (> 0,5 m) des Speicher- oder Lagerbehälters (B1 ) zu den Druckbehältern (D1 , D2) ergibt, oder mittels einer Pumpe befüllt wird, fördert der andere durch Anlegen eines höheren Überdrucks (2 -6 bar) zum Speicherbehälter die Flüssigkeit im Kreislauf. Dies läßt sich durch entsprechendes Schalten von elektronisch steuerbaren Ventilen bewerkstelligen. Am Ende des Rezirkulationskreislaufes wird der Druck auf den Innendruck des Lagerbehälter B1 mittels eines Ventils, einer Blende oder Rohrverengung vermindert. Die Befüllung des Lagertanks von außen kann mittels Pumpen (Semi-Pumpsystem) oder auch durch Druck (Drucksystem erfolgen).A particular advantage of this conveyor system is that a pump can be replaced by two small pressure vessels connected in parallel. These pressure vessels can in particular have a volume of 1-200 l. While one pressure tank is filled by the pressure difference, which results from the static height difference (> 0.5 m) of the storage or storage tank (B1) to the pressure tanks (D1, D2), or by a pump, the other pumps through Applying a higher pressure (2 -6 bar) to the storage tank the liquid in the circuit. This can be accomplished by appropriately switching electronically controllable valves. At the end of the recirculation cycle, the pressure on the internal pressure of the storage container B1 is reduced by means of a valve, an orifice or a pipe constriction. The storage tank can be filled from the outside by pumps (semi-pump system) or by pressure (pressure system).
Die Befüllung der Druckbehälter D1 bzw. D2 aus dem Speicherbehälter B1 läßt sich auch durch einen leichten Überdruck in B1 (>0.05 bar) bewerkstelligen (s.o.). In diesem Fall muß aber B1 der Druckbehälterverordnung genügen.The pressure tanks D1 and D2 can be filled from the storage tank B1 by applying a slight overpressure in B1 (> 0.05 bar) (see above). In this case, however, B1 must comply with the Pressure Vessel Ordinance.
Durch den hier beschriebenen Aufbau des erfindungsgemäßen Fördersy- stems ergeben sich folgende Vorteile gegenüber herkömmlichen Systemen: Das System kombiniert die Vorteile von Pumpsystemen, durch die ein größerer Druckbehälter eingespart werden kann, mit denen der Drucksysteme. Letztere zeichnen sich durch einen kontinuierlichen Fluß und durch das Fehlen von beweglichen Verschleißteilen aus. Dieses System ist vorteilhaft im Einsatz als Versorgungssystem von Elektronikchemikalien, da besonders bei der Partikelreduktion deutliche Verbesserungen gegenüber Pumpsystemen gefunden wurden. Ein anderer wesentlicher Vorteil gegenüber bekannten Versorgungssystemen ist die pulsationsar- me Fahrweise des gesamten Systems.The construction of the conveyor system according to the invention described here results in the following advantages over conventional systems: The system combines the advantages of pumping systems, which can save a larger pressure vessel, with those of the pressure systems. The latter are characterized by a continuous flow and the absence of moving wear parts. This system is advantageous for use as a supply system for electronic chemicals, since significant improvements compared to pump systems have been found, particularly in particle reduction. Another major advantage over known supply systems is the low-pulsation driving style of the entire system.
Weiterhin ist dieses System erheblich preisgünstiger als andere übliche Drucksysteme, bei denen z. B. mit zwei größeren Lagerbehältern (Druckbehältern, > 3 bar) gearbeitet wird, da hier nur ein druckloser Lagerbehälter und zwei kleine Druckbehälter ( >2 bar) benötigt werden.Furthermore, this system is considerably less expensive than other conventional printing systems in which, for. B. with two larger storage tanks (pressure tanks,> 3 bar), since only one unpressurized storage tank and two small pressure tanks (> 2 bar) are required.
Der durch das System erzeugte kontinuierliche, gleichmäßige Flüssigkeitsfluß ist mit einer Partikelreduktion verbunden. Dadurch arbeiten in den Kreislauf eingebaute Filter effektiver, weil dieses System im Gegensatz zu mit Membran- oder Faltenbalgpumpen aufgebauten System pulsationsfrei läuft. Es unterliegt auch der Druck an den Entnahmestellen (POU) keiner Pulsation und läßt sich sehr stabil halten.The continuous, even flow of liquid generated by the system is associated with particle reduction. As a result, filters installed in the circuit work more effectively because, in contrast to the system built up with diaphragm or bellows pumps, this system runs without pulsation. The pressure at the tapping points (POU) is not subject to any pulsation and can be kept very stable.
Ein ganz besonderer Vorteil des erfindungsgemäßen Systems besteht in der Reduktion mechanisch beweglicher Teile:A very special advantage of the system according to the invention is the reduction of mechanically moving parts:
- Das Fördersystem besitzt außer den Ventilen keine beweglichen Teile. Auf Pumpen kann innerhalb des Rezirkulationskreislaufes verzichtet werden. Auf diese Weise ist das System im Betrieb deutlich sicherer in Bezug auf Störungsanfälligkeit. Es ist weniger Service notwendig und es ergeben sich geringere Standzeiten, in denen Verschleißteile wie z.B. Pumpenteile ausgetauscht werden müssen- The conveyor system has no moving parts apart from the valves. Pumps can be dispensed with within the recirculation circuit. In this way, the system is significantly safer in terms of susceptibility to failure. Less service is required and there is less downtime during which wear parts such as Pump parts must be replaced
- Da die Flüssigkeit nicht durch die mechanisch beweglichen Teile der Pumpe gefördert wird , wie z.B. beim Faltenbalg-, beziehungsweise bei Membran- oder Kreiselpumpen, werden weniger Partikel in die Flüssigkeit abgegeben, was bei der Förderung von Elektronikchemikalien von besonderem Vorteil ist. Vergleicht man das erfindungsgemäße System mit herkömmlichen Pumpsystemen, ergeben sich demnach folgende Vorteile:- Since the liquid is not conveyed by the mechanically moving parts of the pump, such as bellows, diaphragm or centrifugal pumps, fewer particles are released into the liquid, which is of particular advantage when pumping electronic chemicals. If one compares the system according to the invention with conventional pump systems, the following advantages result:
Bei Einsatz von Pumpsystemen mit Rezirkulationskreislauf sind die Pum- pen in der Halbleiterindustrie rund um die Uhr im betrieb (typischer Wert:When using pump systems with a recirculation circuit, the pumps in the semiconductor industry are in operation around the clock (typical value:
99,9 % up-time im Jahr). Durch diesen Dauereinsatz, oft noch dazu in Gegenwart sehr aggressiver Chemikalien bedürfen die pumpen ständiger Wartung. Um Unterbrechungen bei der Chemikalienförderung zu vermeiden, müssen die Pumpen immer redundant ausgelegt sein, d. h. es müs- sen im Störfall parallel Pumpen vorhanden sein, die automatisch ersatzweise eingeschaltet werden.99.9% up-time a year). Due to this continuous use, often in the presence of very aggressive chemicals, the pumps require constant maintenance. In order to avoid interruptions in the conveyance of chemicals, the pumps must always be designed redundantly. H. In the event of a fault, pumps must be available in parallel, which are automatically switched on as replacements.
Im Vergleich dazu weist das erfindungsgemäße Semipumpsystem wesentlich weniger Verschleißteile auf und der Wartungsaufwand ist entsprechend geringer.In comparison, the semi-pump system according to the invention has significantly fewer wear parts and the maintenance effort is correspondingly lower.
Desweiteren werden von der Halbleiterindustrie fast nur noch Druckluftpumpen, d. h. Membran- und Faltenbalgpumpen, aus Kunststoff (meist PTFE) eingesetzt. Diese Pumpen verursachen mehr oder weniger starke Pulsationen in der zu fördernden Flüssigkeit (Druckschwankungen), was die Filtrationsleistung von Membranfiltern deutlich mindert. Außerdem geben, wie oben schon erwähnt, mechanisch bewegliche Teile der Pumpen (Ventile, Membran, Faltenbalg) unerwünschte Partikel in das zu fördernde Medium ab.Furthermore, the semiconductor industry almost only uses compressed air pumps, i.e. H. Diaphragm and bellows pumps made of plastic (mostly PTFE) are used. These pumps cause more or less strong pulsations in the liquid to be pumped (pressure fluctuations), which significantly reduces the filtration performance of membrane filters. In addition, as already mentioned above, mechanically moving parts of the pumps (valves, diaphragm, bellows) release unwanted particles into the medium to be pumped.
Im Vergleich zu Vakuum-Druck-Systemen weist das erfindungsgemäße System folgende Vorteile auf:In comparison to vacuum pressure systems, the system according to the invention has the following advantages:
Zum Befüllen der Druckbehälter in Vakuum-Druck-Systemen ist das Anlegen eines Vakuums notwendig, wodurch die flüssige Chemikalie von einem Speicherbehälter in die Druck- bzw. Vakuumbehälter befördert wird. Dieses Prinzip ist begrenzt durch die Förderleistung der Vakuumpumpenleistung. Auch kann bei Verwendung von gesättigten Lösungen von Gasen ( z. B. NH4OH 28 %, HCI 36 % usw.) nur ein sehr schwacher Unterdruck angelegt werden, da die sonst ein Ausgasen verursacht wird, was mit einer Konzentrationsänderung verbunden wäre. Zum besseren Verständnis und zur Verdeutlichung wird im folgenden beispielhaft ein Fließschema eines solchen Fördersystems gegeben, das im Rahmen des Schutzbereichs der vorliegenden Erfindung liegt, nicht jedoch geeignet ist, die Erfindung auf dieses Beispiel zu beschränken.In order to fill the pressure vessels in vacuum pressure systems, a vacuum is necessary, as a result of which the liquid chemical is conveyed from a storage vessel into the pressure or vacuum vessels. This principle is limited by the delivery rate of the vacuum pump output. Also, when using saturated solutions of gases (e.g. NH 4 OH 28%, HCI 36% etc.), only a very weak negative pressure can be applied, since this would otherwise cause outgassing, which would be associated with a change in concentration. For better understanding and clarification, a flow diagram of such a conveyor system is given below as an example, which is within the scope of the present invention, but is not suitable for restricting the invention to this example.
Fig. 1 zeigt eine Skizze eines Chemikalienförder- bzw. Chemikalienversorgungssystems mit Chemikalienrezirkulationseinheit, worin B1 einen Speicherbehälter oder Mischbehälter darstellt, der durch Pumpen oder Druck befüllt werden kann. B1 und die Druckbehälter D1 und D2 befinden sich auf verschiedenen Ebenen, so daß sich zwischen dem Füllstandsniveau von D1 max (D2)max und dem des Behälters B1min eine minimale statische Höhendifferenz ergibt, die ausreicht um den Druckbehälter zu be- füllen.1 shows a sketch of a chemical delivery or chemical supply system with a chemical recirculation unit, in which B1 represents a storage container or mixing container which can be filled by pumping or pressure. B1 and the pressure vessel D1 and D2 are located at different levels, so that the container B1 results in that between the filling level of D1 ma x (D2) max and min a minimal static height difference which is sufficient for the pressure vessel to loading fill.
Fig. 2 zeigt eine Pumpeneinheit, mit der das erfindungsgemäße Fördersystem versehen sein kann. Es handelt sich um einen Ausschnitt der Fig 1.Fig. 2 shows a pump unit with which the conveyor system according to the invention can be provided. It is a section of FIG. 1.
C1 Chemikalienzuleitung (aus Misch- und Transportbehälter) RK RezirkulationskreislaufC1 Chemical supply line (from mixing and transport container) RK recirculation circuit
B1 Lagerbehälter (Day-Tank)B1 storage tank (day tank)
D1 , D2 Druckbehälter (5 bis 200 I, bis 6 bar)D1, D2 pressure vessel (5 to 200 I, up to 6 bar)
V1.1 , V1.2 BefüllungsventileV1.1, V1.2 filling valves
V2.1 , V2.2 Ventile auf Druckseite V3.1. V3.2 N2-EinlaßventileV2.1, V2.2 valves on pressure side V3.1. V3.2 N 2 intake valves
V4.1 , V4.2 N2-EntiüftungsventileV4.1, V4.2 N 2 breather valves
V5 Ventil zum Steuern der Durchflußmenge oder des DurchflussesV5 valve to control the flow rate or flow
V6 Ventil zum POU POU Chemikalienabnahmestelle (point of use)V6 valve to POU POU chemical take-off point (point of use)
F FiltrationselementeF filtration elements
S Füllstandssensor (optional) S level sensor (optional)

Claims

P A T E N T A N S P R Ü C H E PATENT CLAIMS
1. Flüssigkeitsfördersystem zur pulsationsfreien Förderung, dadurch gekennzeichnet, daß es Flüssigkeiten in einem Rezirkulationskreislauf fördert und nur einen Speicherbehälter (B1 ) aufweist.1. Liquid delivery system for pulsation-free delivery, characterized in that it delivers liquids in a recirculation circuit and has only one storage container (B1).
2. Fördersystem gemäß Anspruch 1 , dadurch gekennzeichnet, daß es mindestens zwei parallel geschaltete kleine Druckbehälter aufweist, welche durch Bildung von Druckdifferenzen eine Pumpe ersetzen.2. Conveying system according to claim 1, characterized in that it has at least two small pressure vessels connected in parallel, which replace a pump by forming pressure differences.
3. Fördersystem gemäß Anspruch 1 , dadurch gekennzeichnet, daß es mindestens zwei parallel geschaltete kleine Druckbehälter (D1 , D2) aufweist, wovon der eine mittels einer Pumpe befüllt wird, während der andere mit einem Überdruck im Vergleich zum Lagerbehälter (B1 ) be- aufschlagt wird und die Flüssigkeit im Kreislauf fördert, wobei die Regelung des Flüssigkeitsstroms durch elektrisch steuerbare Ventile erfolgt.3. Conveying system according to claim 1, characterized in that it has at least two small pressure containers (D1, D2) connected in parallel, one of which is filled by means of a pump, while the other is pressurized in comparison to the storage container (B1) is and promotes the liquid in the circuit, the regulation of the liquid flow is carried out by electrically controllable valves.
4. Fördersystem gemäß Anspruch 3, dadurch gekennzeichnet, daß die kleinen Druckbehälter (D1 und D2) abwechselnd mit Druck beaufschlagt werden, wodurch ein kontinuierlicher Flüssigkeitstrom erzeugt wird.4. Conveying system according to claim 3, characterized in that the small pressure vessels (D1 and D2) are alternately pressurized, whereby a continuous liquid flow is generated.
5. Fördersystem gemäß der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die kleinen Behälter (D1 und D2) abwechselnd mit einem Überdruck von 2 bis 6 bar beaufschlagt werden.5. Conveyor system according to claims 1 to 4, characterized in that the small containers (D1 and D2) are alternately acted upon with an excess pressure of 2 to 6 bar.
6. Fördersystem gemäß der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß der eine der parallel geschalteten kleinen Behälter (D1 oder D2) einen Druck aufweist, der sich aus einer Höhendifferenz zwischen dem Lagertank und der Höhe der kleinen Behälter ergibt, welche sich auf einer tieferen Ebene befinden als der Lagertank.6. Conveying system according to claims 1 to 4, characterized in that the one of the small containers connected in parallel (D1 or D2) has a pressure which results from a height difference between the storage tank and the height of the small containers, which results in a lower level than the storage tank.
7. Fördersystem gemäß Anspruch 6, dadurch gekennzeichnet, daß der eine der parallel geschalteten kleinen Behälter (D1 oder D2) einen Druck aufweist, der sich aus einer Höhendifferenz von mindestens 0,5 m ergibt.7. Conveyor system according to claim 6, characterized in that one of the small containers (D1 or D2) connected in parallel one Has pressure resulting from a height difference of at least 0.5 m.
8. Fördersystem gemäß Anspruch 6, dadurch gekennzeichnet, daß der eine der parallel geschalteten kleinen Behältern (D1 oder D2) einen8. Conveyor system according to claim 6, characterized in that one of the small containers connected in parallel (D1 or D2) one
Druck aufweist, der sich aus einer Höhendifferenz von bis zu 1 m ergibt.Has pressure resulting from a height difference of up to 1 m.
9. Fördersystem gemäß der Ansprüche 1 bis 8, dadurch gekennzeich- net, daß die Befüllung der Druckbehälter (D1 , D2) aus dem Lagerbehälter (B1 ) erfolgt, indem die Flüssigkeit mittels leichtem Überdruck durch kommunizierende Rohrleitungen in die Druckbehälter gefördert wird.9. Conveying system according to claims 1 to 8, characterized in that the filling of the pressure container (D1, D2) from the storage container (B1) takes place by the liquid is conveyed by means of a slight overpressure through communicating pipes into the pressure container.
10. Fördersystem gemäß der Ansprüche 1 bis 9, dadurch gekennzeichnet daß am Ende des Rezirkulationskreislaufs (RK) der Druck auf den Innendruck des Lagerbehälter (B1 ) reduziert wird.10. Conveyor system according to claims 1 to 9, characterized in that at the end of the recirculation circuit (RK) the pressure on the internal pressure of the storage container (B1) is reduced.
11. Fördersystem gemäß der Ansprüche 1 bis 9, dadurch gekennzeichnet daß der Druck durch ein Ventil, eine Blende oder eine Rohrverengung reduziert wird.11. Conveyor system according to claims 1 to 9, characterized in that the pressure is reduced by a valve, an orifice or a pipe constriction.
12. Fördersystem gemäß Anspruch, dadurch gekennzeichnet, daß der Lagerbehälter (B1 ) einen Überdruck von größer gleich 0,1 bar auf- weist und die kleinen Druckbehälter (D1 und D2) als Behälter für hohen Druck ausgelegt ist. 12. Conveying system according to claim, characterized in that the storage container (B1) has an overpressure greater than or equal to 0.1 bar and the small pressure container (D1 and D2) is designed as a container for high pressure.
EP99957334A 1998-12-14 1999-12-02 System for conveying liquids without pulsing Expired - Lifetime EP1141611B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19857593 1998-12-14
DE19857593A DE19857593A1 (en) 1998-12-14 1998-12-14 System for the pulsation-free delivery of liquids
PCT/EP1999/009408 WO2000036329A1 (en) 1998-12-14 1999-12-02 System for conveying liquids without pulsing

Publications (2)

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EP1141611A1 true EP1141611A1 (en) 2001-10-10
EP1141611B1 EP1141611B1 (en) 2003-11-05

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US (1) US6623248B1 (en)
EP (1) EP1141611B1 (en)
JP (1) JP2002532656A (en)
AT (1) ATE253709T1 (en)
DE (2) DE19857593A1 (en)
TW (1) TW469323B (en)
WO (1) WO2000036329A1 (en)

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Publication number Publication date
DE19857593A1 (en) 2000-06-15
TW469323B (en) 2001-12-21
ATE253709T1 (en) 2003-11-15
WO2000036329A1 (en) 2000-06-22
EP1141611B1 (en) 2003-11-05
DE59907661D1 (en) 2003-12-11
US6623248B1 (en) 2003-09-23
JP2002532656A (en) 2002-10-02

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